The main pole 20 resides on an underlayer/leading shield 12 and includes sidewalls that form a nonzero angle with the down track direction at the ABS. The side shields 16 are separated from the main pole 20 by a side gap 14. The side shields 16 extend at least from the top of the main pole 20 to the bottom of the main pole 20 in the region near the main pole 16. The side shields 16 also extend a distance back from the ABS. The gap 14 between the side shields 16 and the main pole 20 may have a substantially constant thickness. Thus, the side shields 16 are conformal with the main pole 20.
Although the conventional magnetic recording head 10 functions, the conventional magnetic recording head 10 is desired to be used at higher areal densities. Accordingly, what is needed is a system and method for improving the performance of a magnetic recording head at higher areal densities and, therefore, lower track widths.
The trend in magnetic recording is to higher densities. For such higher recording densities, a full wrap around shield may be used. For example, the trailing shield 18, side shields 16 and a leading shield in the underlayer 12 may be used in the transducer 10 depicted in
Although the low, high and intermediate saturation magnetizations for the leading shield 12, side and trailing shields 16 and 18, and the return pole 22, respectively, may be desirable for some purposes, there may be issues in high density recording. For the configuration described above, it has been determined that the conventional magnetic recording head 10 may suffer from wide area track erasure (WATER) issues. For example, tracks that are tens of tracks away from the track being written may be inadvertently disturbed. It has been determined that this may be due to a mismatch between the saturation magnetizations of the shields 12, 16/18 and the return pole 22. For example, there may be a mismatch in saturation magnetizations between the trailing shield 18 and the return pole 22. Similarly, in regions far from the pole 20, the side shields 16 are removed. Thus, the leading shield 12 shares an interface with the trailing shield 18 in these regions. At these interfaces, the leading shield 12 saturation magnetization does not match that of the trailing shield 18. It has been determined that these mismatches may result in flux leakage at the interfaces. It has been discovered that this flux leakage may result in the above WATER issues. Consequently, it has been determined that there are unaddressed issues in recording at higher areal densities.
The disk drive 100 includes a media 102 and a slider 104 on which the transducer 110 has been fabricated. Although not shown, the slider 104 and thus the transducer 110 are generally attached to a suspension. In general, the slider 104 includes the write transducer 110 and a read transducer (not shown). However, for clarity, only the write transducer 110 is shown.
The transducer 110 includes a main pole 114, a side gap 116 (which also resides below the main pole 114 in the embodiment shown), write gap 118, coil(s) 112, side shields 130, an optional leading shield 120, an optional trailing shield 140, an optional return pole 150 and an optional top shield 160. The coil(s) 112 are used to energize the main pole 114. One turn is depicted in
The main pole 114 is shown as having a top wider than the bottom (which is shown as a point in
The gap layer 116 may include one or more sublayers as well as a seed layer. Further, although depicted as a single gap surrounding the main pole 114, the gap 116 may include separate side gaps (between the mail pole 114 and side shields 130) and bottom gap (between the main pole 114 and leading shield 120). In addition, the write gap 118 and side gap 116 may be a single structure. However, in such embodiments, the write gap 118 generally does not extend further in the cross track direction than the side gap 116. Although depicted as symmetric, the gap 116 may be asymmetric. For example, the gap between a side of the main pole 114 and one side shield 130 may be wider than the gap between the opposite side of the main pole 114 and the other side shield.
The transducer 100 also includes side shields 130. The side shields 130 may be magnetically and, in some embodiments, physically connected with the trailing shield 140 and leading shield 120. In such embodiments, a full wraparound shield is formed. In other embodiments, the side shields 130 may be physically and/or magnetically disconnected from the trailing shield 140 and/or the leading shield 120. The side shields 130 are also depicted as symmetric in the cross track direction. In other embodiments, asymmetries in the cross track direction may be present. In general, the side shields 130 have a high saturation magnetization. For example, in some embodiments, the side shields 130 have a saturation magnetization of at least 2.0 T. In the embodiment shown, the saturation magnetization of the side shields 130 is substantially constant throughout the side shields 130. However, a gradient in the down track direction, cross track direction and/or yoke direction may be possible.
At least one of the leading shield 120, the trailing shield 140 and the return pole 150 has a gradient in saturation magnetization (Bs) in at least a portion of the structure 120, 140 and 150, respectively. This gradient is configured such that the saturation magnetization of at least part of the structure 120, 140 and/or 150 changes in the down track direction so that the mismatch in saturation magnetization at various interfaces with other structures 130, and/or 140 may be reduced or eliminated. In some embodiments, this gradient in saturation magnetization is such that Bs increases in the down track direction toward the main pole 114 and/or side shields 130. In some embodiments, the saturation magnetizations match at the interfaces. For example, the leading shield 120 saturation magnetization may increase toward the side shield 130 such that at the interface shared by the side shields 130 and leading shield 120 the saturation magnetizations match. In some embodiments, the saturation magnetization of the trailing shield increases toward the side shields 130 such that the saturation magnetization of the trailing shield 140 matches that of the side shield 130 at the interface shared by the shields 130 and 140. The saturation magnetization of the trailing shield 140 may also decrease toward the return pole such that the saturation magnetization of the trailing shield 140 matches that of the return pole 150 at the interface shared by the shield 140 and return pole 150. In some embodiments, the saturation magnetization of the return pole 150 increases toward the side shields 130 such that the saturation magnetization of the return pole 150 matches that of the trailing shield 140 at the interface shared by the return pole 150 and trailing shield 140. In other embodiments, the gradient in saturation magnetization of the structure(s) 120, 140 and/or 150 increases such that the mismatch in saturation magnetizations is less at the interfaces without exactly matching. For example, the highest saturation magnetization of the leading shield 120 may occur at the surface closest to/interface with the side shields 130 even though the saturation magnetization of the leading shield 120 may be less than that of the side shield 130 at this surface/interface. Similarly, the highest saturation magnetization of the trailing shield 140 may occur at the surface closest to/interface shared with the side shields 130 even though the saturation magnetization of the trailing shield 140 may be less than that of the side shield 130 at this surface/interface. Finally, the highest saturation magnetization of the return pole 150 may occur at the surface closest to/interface with the trailing shields 140 even though the saturation magnetization of the return pole 150 may be less than that of the trailing shield 140 at this interface/surface. In some embodiments, only one of the leading shield 120, trailing shield 140 and return pole 150 has a gradient in the saturation magnetization. In other embodiments, some combination of the leading shield 120, trailing shield 140 and return pole 150 has a gradient in saturation magnetization. For example, both the leading shield 120 and the trailing shield 140 may have a gradient in saturation magnetization in the down track direction. Alternatively, both the leading shield 120 and the return pole 150 may have a gradient in the saturation magnetization in the down track direction. Further, note that the saturation magnetizations of the structures 120, 130, 140 and 150 are not equal throughout the structures 120, 130, 140 and 150. If the saturation magnetizations of the shields 120, 130 and 140 are all the same, then signal-to-noise-ratio, reverse overwrite and/or other relevant performance measures may suffer. In general, the leading shield 120 is desired to have the lowest saturation magnetization. The trailing shield 130 and/or side shields 130 are generally desired to include the highest saturation magnetization. The return pole 150 is generally desired to have an intermediate saturation magnetization. Thus, although one or more of the structures 120, 130 and 150 have a gradient in saturation magnetization a significant portion of the structures 120, 130 and 150 are desired to have a low saturation magnetization, a high saturation magnetization and an intermediate saturation magnetization, respectively.
In some embodiments, the saturation magnetization(s) decrease monotonically within a portion of the structure 120, 140 and/or 150 as distance from the side shields 130 increases. In other words, the Bs decreases, without any increases, with distance from the side shield(s) 130 in the down track direction. The decrease in saturation magnetization may be linear, step-wise, or described in another manner. In other embodiments, the decrease in saturation magnetization need not be monotonic and/or need not be described by a well-known function. For example,
For example, the side shields 130 may have a saturation magnetization of nominally 2.0 T and that the return pole 150 may have a saturation magnetization of nominally 1.6 T. In some such embodiments, the leading shield 120 saturation magnetization may increase from 1.0 T in a region furthest from the side shields 130 in the down track direction to as much as 2.0 T at the interface with the side shields 130. For example, the leading shield 120 may include, from furthest to closest to the side shields 130, a layer having a 1.0 T Bs, a layer having a 1.6 T Bs, a layer having a 1.8 T Bs, and a layer having a 2.0 T Bs. In some cases, the 2.0 T Bs layer may be omitted or partially/fully removed during processing. Further, the layer having the lowest saturation magnetization may be thickest for the leading shield 120. In some embodiments, the trailing shield 140 may include, from furthest to closest to the side shields 130, a layer having a 1.6 T Bs, a layer having a 1.8 T Bs and a layer having a 2.0 T Bs. The 1.6 T Bs layer for the trailing shield 140 may be omitted or removed during processing. The 2.0 T Bs layer may be desired to be thickest. In other embodiments, both the side shields 130 and the trailing shield 140 may have saturation magnetizations of nominally 2.0 T. In such embodiments, the leading shield 120 may be configured as described above. However, the return pole 150 may include, from furthest to closest to the trailing shield 140/side shields 130, a layer having a 1.6 T Bs, a layer having a 1.8 T Bs and an optional layer having a 2.0 T Bs. The layer having a 1.6 T Bs may be thickest for the return pole 150. Thus, the interfaces between the structures 120 and 130, 130 and 140, and 140 and 150 may have a reduced saturation magnetization mismatch.
Performance of the transducer 110 and disk drive 100 may be improved by the structures 120, 140 and/or 150 having a gradient in the saturation magnetization. As mentioned above, the mismatch in the saturation magnetizations between the structures 120, 130, 140 and/or 150 may be reduced. Stated differently sharp transitions in the magnetic properties of the transducer 110 at the interfaces between the structures 120, 130, 140 and/or 150 may be reduced or eliminated. This may assist in addressing WATER and other issues. If the bulk of the structures 120, 140 and 150 remain with the low, high and intermediate saturation magnetization, other properties of the transducer 110 may be preserved. Thus, performance of the transducer 100 may be improved.
The leading shield 120′ includes an optional constant saturation magnetization region 122 and a changing saturation magnetization region 124. The constant saturation magnetization region 122 may be a layer that has a saturation magnetization that is substantially constant in the down track direction. For example, the constant saturation magnetization region 122 may be a soft magnetic layer having a saturation magnetization of 1.0 T. In some embodiments, the region 122 occupies approximately at least half of the leading shield 120′. For example, if the shield 120′ has a total thickness of 0.65 μm, then the constant saturation magnetization region 122 may be desired to have a thickness of approximately 0.3 μm. In other embodiments, other thicknesses for the region 122 are possible. The final thicknesses of the regions may depend upon the ability to reliably fabricate the layers. The leading shield 120′ also includes a changing saturation magnetization region 124. In this region 124, the saturation magnetization increases toward the interface with the side shield 130. For example, the region 124 may be a multilayer or may have a gradient in concentration such that the saturation magnetization increases in the down track direction, toward the side shields 130. In some embodiments, the saturation magnetization of the region 124 matches that of the side shield 130 at the interface. However, in other embodiments, at the interface with the side shields 130, the saturation magnetization of the region 124 is less than that of the side shields 130 and more than that of the region 122. There is no requirement that the saturation magnetizations of the regions 122 and 124 match at their shared interface. However, such a configuration is possible.
Performance of the transducer 110 and disk drive 100 may be improved by the leading shield 120′. The region 124 of the leading shield 120′ has a higher saturation magnetization that more closely matches the side shield saturation magnetization. The mismatch in magnetic properties between the shields 120′ and 130 may be reduced. The leading shield 120′ also still has a significant portion 122 having a lower saturation magnetization. These features may help address WATER and other issues. Thus, performance of the transducer 110 may be improved.
The leading shield 120″ includes an optional constant saturation magnetization region 122 and a changing saturation magnetization region 124′ that are analogous to the regions 122 and 124, respectively. In some embodiments, the region 122 is the thickest of the regions 122, 125, 126 and 127. In some such embodiments, the region 122 occupies approximately at least half of the leading shield 120″. In other embodiments, other thicknesses for the region 122 are possible. The final thicknesses of the regions may depend upon the ability to reliably fabricate the layers.
The leading shield 120″ also includes a changing saturation magnetization region 124′ that includes three layers 125, 126 and 127. Another number of layers may be possible. The Bs of each of the layers 125, 126 and 127 may be constant or varying in the down track direction. In region 124′, the saturation magnetization increases toward the interface with the side shield 130. The Bs of the first region 125 is lower than the Bs of the second region 126. Similarly, the Bs of the second region 126 is less than the Bs of the third region 127. In the embodiment shown, the regions 122, 125, 126 and 127 have thicknesses tLS-1, tLS-2, tLS-3 and tLS-4, respectively. In the embodiment shown, tLS-1 is the largest. The thicknesses of the regions 125, 126 and 127 may be the same or may differ. In the embodiment shown, the third region 127 is thinnest. This may be because the layer 127 had a smaller thickness as-deposited and/or because part of the layer 127 is removed by a planarization or other fabrication step. In some cases, the layer 127 might be completely removed. In such embodiments, the layers 125 and 126 are present in the final device.
Performance of the transducer 110 and disk drive 100 may be improved by the leading shield 120″. The region 124′ of the leading shield 120″ has a higher saturation magnetization that more closely matches the side shield saturation magnetization. The mismatch in magnetic properties between the shields 120″ and 130 may be reduced. The leading shield 120″ also still has a significant portion 122 having a lower saturation magnetization. These features may help address WATER and other issues. Thus, performance of the transducer 110 may be improved.
The leading shield 120′″ includes a changing saturation magnetization region 124″ that is analogous to the regions 124/124′. In this embodiment, no constant saturation magnetization region 122 is present. The changing saturation magnetization region 124″ that includes four layers 125, 126, 127 and 128. Another number of layers may be possible. The Bs of each of the layers 125, 126, 127 and 128 may be constant or varying in the down track direction. In region 124″, the saturation magnetization increases toward the interface with the side shield 130. The Bs of the first region 125 is lower than the Bs of the second region 126. Similarly, the Bs of the second region 126 is less than the Bs of the third region 127. Further, the Bs of the third region 127 is less than the Bs of the fourth region 128. In the embodiment shown, the regions 125, 126, 127 and 128 have thicknesses tLS-2, tLS-3, tLS-4 and tLS-5, respectively. The thicknesses of the regions 125, 126, 127 and 128 may be the same or may differ. The final thicknesses of the regions may depend upon the ability to reliably fabricate the layers. In a manner analogous to the shield 120″ although the top layer 128 is shown, this layer 128 may be partially or completely removed during fabrication. In such embodiments, the layers 125, 126 and 127 are present in the final device. In other embodiments, all or some of the layer 128 is present in the final device.
Performance of the transducer 110 and disk drive 100 may be improved by the leading shield 120′″. The region 124″ of the leading shield 120′″ has a higher saturation magnetization that more closely matches the side shield saturation magnetization. The mismatch in magnetic properties between the shields 120′″ and 130 may be reduced. This may help address WATER and other issues. Thus, performance of the transducer 110 may be improved.
The trailing shield 140′ includes an optional constant saturation magnetization region 142 and a changing saturation magnetization region 144. The constant saturation magnetization region 142 may be a layer that has a saturation magnetization that is substantially constant in the down track direction. For example, the constant saturation magnetization region 142 may be a soft magnetic layer having a saturation magnetization of 1.6 T. In some embodiments, the region 142 occupies approximately at least half of the trailing shield 140′. For example, for a trailing shield over 1.5 μm thick, the region 142 may be over 1 μm thick. In other embodiments, other thicknesses for the region 142 are possible. The final thicknesses of the regions may depend upon the ability to reliably fabricate the layers. The trailing shield 140′ also includes a changing saturation magnetization region 144. In this region 144, the saturation magnetization increases toward the interface with the side shield 130. For example, the region 144 may be a multilayer or may have a gradient in concentration such that the saturation magnetization increases in the down track direction, toward the side shields 130. In some embodiments, the saturation magnetization of the region 144 matches that of the side shield 130 at the interface. However, in other embodiments, at the interface with the side shields 130, the saturation magnetization of the region 144 is less than that of the side shields 130 and more than that of the region 142. There is no requirement that the saturation magnetizations of the regions 142 and 144 match at their shared interface. However, such a configuration is possible.
Performance of the transducer 110 and disk drive 100 may be improved by the trailing shield 140′. The region 144 of the trailing shield 140′ has a higher saturation magnetization that more closely matches the side shield saturation magnetization. The mismatch in magnetic properties between the shields 140′ and 130 may be reduced. The trailing shield 140′ also still has a portion 142 having a lower saturation magnetization that may match that of the return pole 150. These features may help address WATER and other issues. Thus, performance of the transducer 110 may be improved.
The trailing shield 140″ includes an optional constant saturation magnetization region 142 and a changing saturation magnetization region 144′ that are analogous to the regions 142 and 144, respectively. In some embodiments, the region 142 is the thickest of the regions 142, 145 and 146. In some such embodiments, the region 142 occupies approximately at least half of the trailing shield 140″. In other embodiments, other thicknesses for the region 142 are possible. Further, some or all of the region 142 may be removed during processing, for example in a planarization step. Thus, although deposited with a higher thickness, the region 142 may be thinner than the region 145 and/or 146 in the final device. The final thicknesses of the regions may depend upon the ability to reliably fabricate the layers.
The trailing shield 140″ also includes a changing saturation magnetization region 144′ that includes two layers 145 and 146. Another number of layers may be possible. The Bs of each of the layers 155 and 156 may be constant or varying in the down track direction. In region 144′, the saturation magnetization increases toward the interface with the side shield 130. The Bs of the first region 145 is higher than the Bs of the second region 146. In the embodiment shown, the regions 145, 146 and 142 have thicknesses tTS-1, tTS-2 and tTS-3, respectively. In the embodiment shown, tTS-3 is the largest. The thicknesses of the regions 145 and 146 may be the same or may differ.
Performance of the transducer 110 and disk drive 100 may be improved by the trailing shield 140″. The region 144′ of the trailing shield 140″ has a higher saturation magnetization that more closely matches the side shield saturation magnetization. The mismatch in magnetic properties between the shields 140″ and 130 may be reduced. The trailing shield 140″ may also still have a portion 142 having an intermediate saturation magnetization that matches that of the return pole 150. These features may help address WATER and other issues. Thus, performance of the transducer 110 may be improved.
The trailing shield 140′″ includes a changing saturation magnetization region 144″ that is analogous to the regions 144/144′. In this embodiment, no constant saturation magnetization region 142 is present. The changing saturation magnetization region 144″ that includes three layers 145, 146 and 147. Another number of layers may be possible. The Bs of each of the layers 145, 146 and 147 may be constant or varying in the down track direction. In region 144″, the saturation magnetization increases toward the interface with the side shield 130. The Bs of the first region 145 is higher than the Bs of the second region 146. Similarly, the Bs of the second region 146 is greater than the Bs of the third region 147. In the embodiment shown, the regions 145, 146 and 147 have thicknesses tTS-1, tTS-2 and tTS-4, respectively. The thicknesses of the regions 145, 146 and 147 may be the same or may differ. The final thicknesses of the regions may depend upon the ability to reliably fabricate the layers. In a manner analogous to the shield 140″ although the top layer 147 is shown, this layer 147 may be partially or completely removed during fabrication. In such embodiments, the layers 145 and 146 are present in the final device. In other embodiments, all or some of the layer 147 is present in the final device.
Performance of the transducer 110 and disk drive 100 may be improved by the trailing shield 140′″. The region 144″ of the trailing shield 140′″ has a higher saturation magnetization that more closely matches the side shield saturation magnetization. The mismatch in magnetic properties between the shields 140′″ and 130 may be reduced. This may help address WATER and other issues. Thus, performance of the transducer 110 may be improved.
The return pole 150′ includes an optional constant saturation magnetization region 152 and a changing saturation magnetization region 154. The constant saturation magnetization region 152 may be a layer that has a saturation magnetization that is substantially constant in the down track direction. For example, the constant saturation magnetization region 152 may be a soft magnetic layer having a saturation magnetization of 1.6 T. In some embodiments, the region 152 occupies approximately at least half of the return pole 150′. In other embodiments, other thicknesses for the region 152 are possible. The final thicknesses of the regions may depend upon the ability to reliably fabricate the layers. The return pole 150′ also includes a changing saturation magnetization region 154. In this region 154, the saturation magnetization increases toward the interface with the trailing shield 140. For example, the region 154 may be a multilayer or may have a gradient in concentration such that the saturation magnetization increases in the down track direction, toward the trailing shield 140. In some embodiments, the saturation magnetization of the region 154 matches that of the trailing shield 140 at the interface. However, in other embodiments, at the interface with the trailing shield 140, the saturation magnetization of the region 154 is less than that of the trailing shield 140 and more than that of the region 152. There is no requirement that the saturation magnetizations of the regions 152 and 154 match at their shared interface. However, such a configuration is possible.
Performance of the transducer 110 and disk drive 100 may be improved by the return pole 150′. The region 154 of the return pole 150′ has a higher saturation magnetization that more closely matches the trailing shield saturation magnetization. The mismatch in magnetic properties between the return pole 150′ and the trailing shield 140 may be reduced. The return pole 150′ also still has a portion 152 having a lower/intermediate saturation magnetization that may be desired for other reasons. These features may help address WATER and other issues. Thus, performance of the transducer 110 may be improved.
The return pole 150″ includes an optional constant saturation magnetization region 152 and a changing saturation magnetization region 154′ that are analogous to the regions 152 and 154, respectively. In some embodiments, the region 152 is the thickest of the regions 152, 155 and 156. In some such embodiments, the region 152 occupies approximately at least half of the return pole 150″. In other embodiments, other thicknesses for the region 152 are possible. Further, some or all of the region 152 may be removed during processing, for example in a planarization step. Thus, although deposited with a higher thickness, the region 152 may be thinner than the region 155 and/or 156 in the final device.
The return pole 150″ also includes a changing saturation magnetization region 154′ that includes two layers 155 and 156. Another number of layers may be possible. The Bs of each of the layers 155 and 156 may be constant or varying in the down track direction. In region 154′, the saturation magnetization increases toward the interface with the trailing shield 140. The Bs of the first region 155 is higher than the Bs of the second region 156. In the embodiment shown, the regions 1545, 156 and 152 have thicknesses tRP-1, tRP-2 and tRP-3, respectively. In the embodiment shown, tRP-3 is the largest. The thicknesses of the regions 155 and 156 may be the same or may differ. The final thicknesses of the regions may depend upon the ability to reliably fabricate the layers.
Performance of the transducer 110 and disk drive 100 may be improved by the return pole 150″. The region 154′ of the return pole 150″ has a higher saturation magnetization that more closely matches the side shield saturation magnetization. The mismatch in magnetic properties between the shield 140 and return pole 150″ may be reduced. The return pole 150″ may also still have a portion 152 having an intermediate saturation magnetization that may be desired for the return pole 150 for other reasons. These features may help address WATER and other issues. Thus, performance of the transducer 110 may be improved.
The return pole 150′″ includes a changing saturation magnetization region 154″ that is analogous to the regions 154/154′. In this embodiment, no constant saturation magnetization region 152 is present. The changing saturation magnetization region 154″ that includes three layers 155, 156 and 157. Another number of layers may be possible. The Bs of each of the layers 155, 156 and 157 may be constant or varying in the down track direction. In region 154″, the saturation magnetization increases toward the interface with the trailing shield. The Bs of the first region 155 is higher than the Bs of the second region 156. Similarly, the Bs of the second region 156 is greater than the Bs of the third region 157. In the embodiment shown, the regions 155, 156 and 157 have thicknesses tRP-1, tRP-2 and tRP-4, respectively. The thicknesses of the regions 155, 156 and 157 may be the same or may differ. The final thicknesses of the regions may depend upon the ability to reliably fabricate the layers. In a manner analogous to the return pole 150″ although the top layer 157 is shown, this layer 157 may be partially or completely removed during fabrication. In such embodiments, the layers 155 and 156 are present in the final device. In other embodiments, all or some of the layer 157 is present in the final device.
Performance of the transducer 110 and disk drive 100 may be improved by the return pole 150′″. The region 154″ of the return pole 150′″ has a higher saturation magnetization that more closely matches the side shield saturation magnetization. The mismatch in magnetic properties between the return pole 150′″ and trailing shield 140 may be reduced. This may help address WATER and other issues. Thus, performance of the transducer 110 may be improved.
The main pole 114 is formed, via step 202. In some embodiments, step 202 includes forming a trench in one or more nonmagnetic layers. For example, one or more reactive ion etches (RIEs) may form the trench. The trench has a shape and location that corresponds to the pole. In other embodiments the trench may be provided in the side shields. Magnetic material(s) for the pole are deposited. The transducer may then be planarized. A trailing edge bevel may optionally be formed on the trailing surface (top) of the main pole.
The side gap 116 is provided, via step 204. Step 204 may include depositing a Ru layer, for example via chemical vapor deposition, sputtering or another method. Additional layer(s) may also be provided. In some embodiments, step 204 is performed before step 202. Thus, the main pole 110 is provided on the side gap 116 in such embodiments.
The side shields 130 are provided, via step 206. Step 206 may include depositing a high saturation magnetization layer, For example, the side shields 130 may be plated.
The coil(s) 112 for the main pole are provided, via step 208. Step 208 may be interleaved with other steps of the method 200. For example, portions of the coil(s) 112 may be formed before the main pole 114 and side shields 130. The coil(s) formed may be helical coil(s) or spiral coils.
At least one of the leading shield 120/120′/120″/120′″, the trailing shield 140/140′/140″/140′″ and/or the return pole 150/150′/150″/150′″ are provided, via step 208. Step 208 includes forming portions of the leading shield, trailing shield, and/or return pole such that the saturation magnetization increases toward the side shields 130 and the saturation magnetization mismatch at the interface(s) is reduced or eliminated. For example, a gradient in saturation magnetization maybe provided for the leading shield 120/120′/120″/120′″ only, the trailing shield 140/140′/140″/140′″ only, the return pole 150/150′/150″/150′″ only, the leading shield 120/120′/120″/120′″ and the trailing shield 140/140′/140″/140′″, or the leading shield 120/120′/120″/120′″ and the return pole 150/150′/150″/150′″.
Using the method 200, a magnetic transducer having improved performance may be fabricated. Because of the gradient in the saturation magnetization in one or more of the leading shield 120/120′/120″/120′″, the trailing shield 140/140′/140″/140′″ and the return pole 150/150′/150″/150′″, WATER issues may be reduced or eliminated.
A leading shield 120 that may have a gradient in saturation magnetization is provided, via step 222. In some embodiments, the leading shield fabricated in step 222 may have a gradient in the saturation magnetization such that Bs increases in the down track direction, toward the side shields. In other embodiments, the saturation magnetization for the leading shield 120 may be substantially constant. Step 222 may form any of the leading shields 120, 120′, 120″, 120′″ and/or an analogous leading shield.
A side gap 116 is provided, via step 224. Step 224 may include depositing an intermediate layer on the leading shield 120, forming a trench in the desired location of the pole and having the desired profile, then depositing the side gap material(s) in at least trench. In some embodiments, the side gap 116 include multiple sublayers. The main pole 114 is provided, via step 226. The magnetic material(s) for the pole may be plated and a planarization performed in step 226. Leading and/or trailing bevels in the main pole 114 may also be provided as part of step 226. A top, or write gap layer 118 may also be provided.
The side shields 130 are provided, via step 228. Step 228 may include removing portions of the intermediate layer, depositing seed layer(s) and plating the soft magnetic and/or other material(s) for the side shields 130. Step 228 may be performed before steps 224 and 226 in some embodiments, but after steps 224 and 226 in other embodiments. Alternatively, portions of the steps 224, 226 and 228 may be interleaved.
The trailing shield 140 may be formed, via step 230. In some embodiments, the trailing shield fabricated in step 230 may have a gradient in the saturation magnetization such that Bs increases in the down track direction toward the side shields 130. In other embodiments, the saturation magnetization for the trailing shield 140 may be substantially constant. Step 230 may form any of the trailing shields 140, 140′, 140″, 140′″ and/or an analogous trailing shield.
The return pole 150 may be formed, via step 232. In some embodiments, the return pole 150 fabricated in step 232 may have a gradient in the saturation magnetization such that Bs increases in the down track direction toward the side shields 130. In other embodiments, the saturation magnetization for the return pole 150 may be substantially constant. Step 232 may form any of the return poles 150, 150′, 150″, 150′″ and/or an analogous return pole.
The top shield 150 and coils 112 are provided, via steps 234 and 236, respectively. Portions of step 236 may be interleaved with portions of other steps in the method 220.
Using the method 220, a magnetic transducer having improved performance may be fabricated. Because of the gradient in the saturation magnetization in one or more of the leading shield 120/120′/120″/120′″, the trailing shield 140/140′/140″/140′″ and the return pole 150/150′/150″/150′″, WATER issues may be reduced or eliminated.
A current that is stable and provides the material having the desired saturation magnetization, BS1, is set, via step 252. For the leading shield 120″, the plating bath and/or current set in step 252 are configured to have a lowest saturation magnetization. For example, a saturation magnetization of approximately 1.0 T may be desired for the layer being fabricated. However, for the trailing shield 140′ and/or the return pole 150′, the plating bath, current set in step 252 and other parameters may be set for the highest saturation magnetization for the structure being fabricated. In some embodiments, setting the current in step 252 may include determining a desired variation in current for the layer being fabricated and setting the system such that the current is varied as desired. Thus, the deposition/plating system may be configured for a constant saturation magnetization layer or a layer in which the saturation magnetization varies.
The first layer 122 of the shield 120″ is plated using the current set in step 252, via step 254. Thus, the region 122 for the shield 120″ may be formed. In other embodiments, the layer 125, 145, or 155 may be plated in step 254.
A current that is stable and provides the material having the desired saturation magnetization, BS2, for the next layer is set, via step 256. For the leading shield 120″, the plating bath and/or current set in step 256 are configured to have the next lowest saturation magnetization. For example, a saturation magnetization of approximately 1.6 T may be desired for the 125 layer being fabricated. However, for the trailing shield 140′ and/or the return pole 150′150′, the plating bath, current set in step 256 and other parameters may be set for the second highest saturation magnetization for the structure being fabricated. In some embodiments, setting the current in step 256 may include determining a desired variation in current for the layer being fabricated and setting the system such that the current is varied as desired. Thus, the deposition/plating system may be configured for a constant saturation magnetization layer or a layer in which the saturation magnetization varies.
The second layer 125 of the shield 120″ is plated using the current set in step 256, via step 258. Thus, the region 125 for the shield 120″ may be formed. In other embodiments, the layer 146 or 156 may be plated in step 258.
The steps of setting the desired current and plating at the set current may be repeated a desired number of times, via step 260. The current and other parameters set in step 260 are such that the desired saturation magnetization for the next layer(s) 126, 146 and/or 156 are provided. These iterations continue until the structure has been completed with the desired gradient in saturation magnetization. Thus, the leading shield 120/120′/120″/120′″, the trailing shield 140/140′/140″/140′″ and/or the return pole 150/150′/150″/150′″ may have a desired saturation magnetization gradient.
Using the method 250, a magnetic transducer having improved performance may be fabricated. Because of the gradient in the saturation magnetization in one or more of the leading shield 120/120′/120″/120′″, the trailing shield 140/140′/140″/140′″ and the return pole 150/150′/150″/150′″ formed using the method 250, WATER issues may be reduced or eliminated.
Number | Name | Date | Kind |
---|---|---|---|
6016290 | Chen et al. | Jan 2000 | A |
6018441 | Wu et al. | Jan 2000 | A |
6025978 | Hoshi | Feb 2000 | A |
6025988 | Yan | Feb 2000 | A |
6032353 | Hiner et al. | Mar 2000 | A |
6033532 | Minami | Mar 2000 | A |
6034851 | Zarouri et al. | Mar 2000 | A |
6043959 | Crue et al. | Mar 2000 | A |
6046885 | Aimonetti et al. | Apr 2000 | A |
6049650 | Jerman et al. | Apr 2000 | A |
6055138 | Shi | Apr 2000 | A |
6058094 | Davis et al. | May 2000 | A |
6073338 | Liu et al. | Jun 2000 | A |
6078479 | Nepela et al. | Jun 2000 | A |
6081499 | Berger et al. | Jun 2000 | A |
6094803 | Carlson et al. | Aug 2000 | A |
6099362 | Viches et al. | Aug 2000 | A |
6103073 | Thayamballi | Aug 2000 | A |
6108166 | Lederman | Aug 2000 | A |
6118629 | Huai et al. | Sep 2000 | A |
6118638 | Knapp et al. | Sep 2000 | A |
6125018 | Takagishi et al. | Sep 2000 | A |
6130779 | Carlson et al. | Oct 2000 | A |
6134089 | Barr et al. | Oct 2000 | A |
6136166 | Shen et al. | Oct 2000 | A |
6137661 | Shi et al. | Oct 2000 | A |
6137662 | Huai et al. | Oct 2000 | A |
6160684 | Heist et al. | Dec 2000 | A |
6163426 | Nepela et al. | Dec 2000 | A |
6166891 | Lederman et al. | Dec 2000 | A |
6173486 | Hsiao et al. | Jan 2001 | B1 |
6175476 | Huai et al. | Jan 2001 | B1 |
6178066 | Barr | Jan 2001 | B1 |
6178070 | Hong et al. | Jan 2001 | B1 |
6178150 | Davis | Jan 2001 | B1 |
6181485 | He | Jan 2001 | B1 |
6181525 | Carlson | Jan 2001 | B1 |
6185051 | Chen et al. | Feb 2001 | B1 |
6185077 | Tong et al. | Feb 2001 | B1 |
6185081 | Simion et al. | Feb 2001 | B1 |
6188549 | Wiitala | Feb 2001 | B1 |
6190764 | Shi et al. | Feb 2001 | B1 |
6193584 | Rudy et al. | Feb 2001 | B1 |
6195229 | Shen et al. | Feb 2001 | B1 |
6198608 | Hong et al. | Mar 2001 | B1 |
6198609 | Barr et al. | Mar 2001 | B1 |
6201673 | Rottmayer et al. | Mar 2001 | B1 |
6204998 | Katz | Mar 2001 | B1 |
6204999 | Crue et al. | Mar 2001 | B1 |
6212153 | Chen et al. | Apr 2001 | B1 |
6215625 | Carlson | Apr 2001 | B1 |
6219205 | Yuan et al. | Apr 2001 | B1 |
6221218 | Shi et al. | Apr 2001 | B1 |
6222707 | Huai et al. | Apr 2001 | B1 |
6229782 | Wang et al. | May 2001 | B1 |
6230959 | Heist et al. | May 2001 | B1 |
6233116 | Chen et al. | May 2001 | B1 |
6233125 | Knapp et al. | May 2001 | B1 |
6237215 | Hunsaker et al. | May 2001 | B1 |
6252743 | Bozorgi | Jun 2001 | B1 |
6255721 | Roberts | Jul 2001 | B1 |
6258468 | Mahvan et al. | Jul 2001 | B1 |
6266216 | Hikami et al. | Jul 2001 | B1 |
6271604 | Frank, Jr. et al. | Aug 2001 | B1 |
6275354 | Huai et al. | Aug 2001 | B1 |
6277505 | Shi et al. | Aug 2001 | B1 |
6282056 | Feng et al. | Aug 2001 | B1 |
6296955 | Hossain et al. | Oct 2001 | B1 |
6297955 | Frank, Jr. et al. | Oct 2001 | B1 |
6304414 | Crue, Jr. et al. | Oct 2001 | B1 |
6306311 | Han | Oct 2001 | B1 |
6307715 | Berding et al. | Oct 2001 | B1 |
6310746 | Hawwa et al. | Oct 2001 | B1 |
6310750 | Hawwa et al. | Oct 2001 | B1 |
6317290 | Wang et al. | Nov 2001 | B1 |
6317297 | Tong et al. | Nov 2001 | B1 |
6322911 | Fukagawa et al. | Nov 2001 | B1 |
6330136 | Wang et al. | Dec 2001 | B1 |
6330137 | Knapp et al. | Dec 2001 | B1 |
6333830 | Rose et al. | Dec 2001 | B2 |
6340533 | Ueno et al. | Jan 2002 | B1 |
6349014 | Crue, Jr. et al. | Feb 2002 | B1 |
6351355 | Min et al. | Feb 2002 | B1 |
6353318 | Sin et al. | Mar 2002 | B1 |
6353511 | Shi et al. | Mar 2002 | B1 |
6356412 | Levi et al. | Mar 2002 | B1 |
6359779 | Frank, Jr. et al. | Mar 2002 | B1 |
6369983 | Hong | Apr 2002 | B1 |
6376964 | Young et al. | Apr 2002 | B1 |
6377535 | Chen et al. | Apr 2002 | B1 |
6381095 | Sin et al. | Apr 2002 | B1 |
6381105 | Huai et al. | Apr 2002 | B1 |
6389499 | Frank, Jr. et al. | May 2002 | B1 |
6392850 | Tong et al. | May 2002 | B1 |
6396660 | Jensen et al. | May 2002 | B1 |
6399179 | Hanrahan et al. | Jun 2002 | B1 |
6400526 | Crue, Jr. et al. | Jun 2002 | B2 |
6404600 | Hawwa et al. | Jun 2002 | B1 |
6404601 | Rottmayer et al. | Jun 2002 | B1 |
6404706 | Stovall et al. | Jun 2002 | B1 |
6410170 | Chen et al. | Jun 2002 | B1 |
6411522 | Frank, Jr. et al. | Jun 2002 | B1 |
6417998 | Crue, Jr. et al. | Jul 2002 | B1 |
6417999 | Knapp et al. | Jul 2002 | B1 |
6418000 | Gibbons et al. | Jul 2002 | B1 |
6418048 | Sin et al. | Jul 2002 | B1 |
6421211 | Hawwa et al. | Jul 2002 | B1 |
6421212 | Gibbons et al. | Jul 2002 | B1 |
6424505 | Lam et al. | Jul 2002 | B1 |
6424507 | Lederman et al. | Jul 2002 | B1 |
6430009 | Komaki et al. | Aug 2002 | B1 |
6430806 | Chen et al. | Aug 2002 | B1 |
6433965 | Gopinathan et al. | Aug 2002 | B1 |
6433968 | Shi et al. | Aug 2002 | B1 |
6433970 | Knapp et al. | Aug 2002 | B1 |
6437945 | Hawwa et al. | Aug 2002 | B1 |
6445536 | Rudy et al. | Sep 2002 | B1 |
6445542 | Levi et al. | Sep 2002 | B1 |
6445553 | Barr et al. | Sep 2002 | B2 |
6445554 | Dong et al. | Sep 2002 | B1 |
6447935 | Zhang et al. | Sep 2002 | B1 |
6448765 | Chen et al. | Sep 2002 | B1 |
6451514 | Iitsuka | Sep 2002 | B1 |
6452742 | Crue et al. | Sep 2002 | B1 |
6452765 | Mahvan et al. | Sep 2002 | B1 |
6456465 | Louis et al. | Sep 2002 | B1 |
6459552 | Liu et al. | Oct 2002 | B1 |
6462920 | Karimi | Oct 2002 | B1 |
6466401 | Hong et al. | Oct 2002 | B1 |
6466402 | Crue, Jr. et al. | Oct 2002 | B1 |
6466404 | Crue, Jr. et al. | Oct 2002 | B1 |
6468436 | Shi et al. | Oct 2002 | B1 |
6469877 | Knapp et al. | Oct 2002 | B1 |
6477019 | Matono et al. | Nov 2002 | B2 |
6479096 | Shi et al. | Nov 2002 | B1 |
6483662 | Thomas et al. | Nov 2002 | B1 |
6487040 | Hsiao et al. | Nov 2002 | B1 |
6487056 | Gibbons et al. | Nov 2002 | B1 |
6490125 | Barr | Dec 2002 | B1 |
6496330 | Crue, Jr. et al. | Dec 2002 | B1 |
6496334 | Pang et al. | Dec 2002 | B1 |
6504676 | Hiner et al. | Jan 2003 | B1 |
6512657 | Heist et al. | Jan 2003 | B2 |
6512659 | Hawwa et al. | Jan 2003 | B1 |
6512661 | Louis | Jan 2003 | B1 |
6512690 | Qi et al. | Jan 2003 | B1 |
6515573 | Dong et al. | Feb 2003 | B1 |
6515791 | Hawwa et al. | Feb 2003 | B1 |
6532823 | Knapp et al. | Mar 2003 | B1 |
6535363 | Hosomi et al. | Mar 2003 | B1 |
6552874 | Chen et al. | Apr 2003 | B1 |
6552928 | Qi et al. | Apr 2003 | B1 |
6577470 | Rumpler | Jun 2003 | B1 |
6583961 | Levi et al. | Jun 2003 | B2 |
6583966 | Han | Jun 2003 | B2 |
6583968 | Scura et al. | Jun 2003 | B1 |
6597548 | Yamanaka et al. | Jul 2003 | B1 |
6611398 | Rumpler et al. | Aug 2003 | B1 |
6618223 | Chen et al. | Sep 2003 | B1 |
6629357 | Akoh | Oct 2003 | B1 |
6633464 | Lai et al. | Oct 2003 | B2 |
6636394 | Fukagawa et al. | Oct 2003 | B1 |
6639291 | Sin et al. | Oct 2003 | B1 |
6650503 | Chen et al. | Nov 2003 | B1 |
6650506 | Risse | Nov 2003 | B1 |
6654195 | Frank, Jr. et al. | Nov 2003 | B1 |
6657816 | Barr et al. | Dec 2003 | B1 |
6661621 | Iitsuka | Dec 2003 | B1 |
6661625 | Sin et al. | Dec 2003 | B1 |
6674610 | Thomas et al. | Jan 2004 | B1 |
6680863 | Shi et al. | Jan 2004 | B1 |
6683763 | Hiner et al. | Jan 2004 | B1 |
6687098 | Huai | Feb 2004 | B1 |
6687178 | Qi et al. | Feb 2004 | B1 |
6687977 | Knapp et al. | Feb 2004 | B2 |
6691226 | Frank, Jr. et al. | Feb 2004 | B1 |
6697294 | Qi et al. | Feb 2004 | B1 |
6700738 | Sin et al. | Mar 2004 | B1 |
6700759 | Knapp et al. | Mar 2004 | B1 |
6704158 | Hawwa et al. | Mar 2004 | B2 |
6707083 | Hiner et al. | Mar 2004 | B1 |
6713801 | Sin et al. | Mar 2004 | B1 |
6721138 | Chen et al. | Apr 2004 | B1 |
6721149 | Shi et al. | Apr 2004 | B1 |
6721203 | Qi et al. | Apr 2004 | B1 |
6724569 | Chen et al. | Apr 2004 | B1 |
6724572 | Stoev et al. | Apr 2004 | B1 |
6729015 | Matono et al. | May 2004 | B2 |
6735850 | Gibbons et al. | May 2004 | B1 |
6737281 | Dang et al. | May 2004 | B1 |
6744608 | Sin et al. | Jun 2004 | B1 |
6747301 | Hiner et al. | Jun 2004 | B1 |
6751055 | Alfoqaha et al. | Jun 2004 | B1 |
6754049 | Seagle et al. | Jun 2004 | B1 |
6756071 | Shi et al. | Jun 2004 | B1 |
6757140 | Hawwa | Jun 2004 | B1 |
6760196 | Niu et al. | Jul 2004 | B1 |
6762910 | Knapp et al. | Jul 2004 | B1 |
6765756 | Hong et al. | Jul 2004 | B1 |
6775902 | Huai et al. | Aug 2004 | B1 |
6778358 | Jiang et al. | Aug 2004 | B1 |
6781927 | Heanuc et al. | Aug 2004 | B1 |
6785955 | Chen et al. | Sep 2004 | B1 |
6791793 | Chen et al. | Sep 2004 | B1 |
6791807 | Hikami et al. | Sep 2004 | B1 |
6798616 | Seagle et al. | Sep 2004 | B1 |
6798625 | Ueno et al. | Sep 2004 | B1 |
6801408 | Chen et al. | Oct 2004 | B1 |
6801411 | Lederman et al. | Oct 2004 | B1 |
6803615 | Sin et al. | Oct 2004 | B1 |
6806035 | Atireklapvarodom et al. | Oct 2004 | B1 |
6807030 | Hawwa et al. | Oct 2004 | B1 |
6807332 | Hawwa | Oct 2004 | B1 |
6809899 | Chen et al. | Oct 2004 | B1 |
6816345 | Knapp et al. | Nov 2004 | B1 |
6828897 | Nepela | Dec 2004 | B1 |
6829160 | Qi et al. | Dec 2004 | B1 |
6829819 | Crue, Jr. et al. | Dec 2004 | B1 |
6833979 | Knapp et al. | Dec 2004 | B1 |
6834010 | Qi et al. | Dec 2004 | B1 |
6859343 | Alfoqaha et al. | Feb 2005 | B1 |
6859997 | Tong et al. | Mar 2005 | B1 |
6861937 | Feng et al. | Mar 2005 | B1 |
6870712 | Chen et al. | Mar 2005 | B2 |
6873494 | Chen et al. | Mar 2005 | B2 |
6873547 | Shi et al. | Mar 2005 | B1 |
6879464 | Sun et al. | Apr 2005 | B2 |
6888184 | Shi et al. | May 2005 | B1 |
6888704 | Diao et al. | May 2005 | B1 |
6891702 | Tang | May 2005 | B1 |
6894871 | Alfoqaha et al. | May 2005 | B2 |
6894877 | Crue, Jr. et al. | May 2005 | B1 |
6906894 | Chen et al. | Jun 2005 | B2 |
6909578 | Missell et al. | Jun 2005 | B1 |
6912106 | Chen et al. | Jun 2005 | B1 |
6934113 | Chen | Aug 2005 | B1 |
6934129 | Zhang et al. | Aug 2005 | B1 |
6940688 | Jiang et al. | Sep 2005 | B2 |
6942824 | Li | Sep 2005 | B1 |
6943993 | Chang et al. | Sep 2005 | B2 |
6944938 | Crue, Jr. et al. | Sep 2005 | B1 |
6947258 | Li | Sep 2005 | B1 |
6950266 | McCaslin et al. | Sep 2005 | B1 |
6954332 | Hong et al. | Oct 2005 | B1 |
6958885 | Chen et al. | Oct 2005 | B1 |
6961221 | Niu et al. | Nov 2005 | B1 |
6969989 | Mei | Nov 2005 | B1 |
6975486 | Chen et al. | Dec 2005 | B2 |
6987643 | Seagle | Jan 2006 | B1 |
6989962 | Dong et al. | Jan 2006 | B1 |
6989972 | Stoev et al. | Jan 2006 | B1 |
7006327 | Krounbi et al. | Feb 2006 | B2 |
7007372 | Chen et al. | Mar 2006 | B1 |
7012832 | Sin et al. | Mar 2006 | B1 |
7023658 | Knapp et al. | Apr 2006 | B1 |
7026063 | Ueno et al. | Apr 2006 | B2 |
7027268 | Zhu et al. | Apr 2006 | B1 |
7027274 | Sin et al. | Apr 2006 | B1 |
7035046 | Young et al. | Apr 2006 | B1 |
7041985 | Wang et al. | May 2006 | B1 |
7046490 | Ueno et al. | May 2006 | B1 |
7054113 | Seagle et al. | May 2006 | B1 |
7057857 | Niu et al. | Jun 2006 | B1 |
7059868 | Yan | Jun 2006 | B1 |
7092195 | Liu et al. | Aug 2006 | B1 |
7110289 | Sin et al. | Sep 2006 | B1 |
7111382 | Knapp et al. | Sep 2006 | B1 |
7113366 | Wang et al. | Sep 2006 | B1 |
7114241 | Kubota et al. | Oct 2006 | B2 |
7116517 | He et al. | Oct 2006 | B1 |
7124654 | Davies et al. | Oct 2006 | B1 |
7126788 | Liu et al. | Oct 2006 | B1 |
7126790 | Liu et al. | Oct 2006 | B1 |
7131346 | Buttar et al. | Nov 2006 | B1 |
7133253 | Seagle et al. | Nov 2006 | B1 |
7134185 | Knapp et al. | Nov 2006 | B1 |
7154715 | Yamanaka et al. | Dec 2006 | B2 |
7170725 | Zhou et al. | Jan 2007 | B1 |
7177117 | Jiang et al. | Feb 2007 | B1 |
7193815 | Stoev et al. | Mar 2007 | B1 |
7196880 | Anderson et al. | Mar 2007 | B1 |
7199974 | Alfoqaha | Apr 2007 | B1 |
7199975 | Pan | Apr 2007 | B1 |
7211339 | Seagle et al. | May 2007 | B1 |
7212384 | Stoev et al. | May 2007 | B1 |
7238292 | He et al. | Jul 2007 | B1 |
7239478 | Sin et al. | Jul 2007 | B1 |
7248431 | Liu et al. | Jul 2007 | B1 |
7248433 | Stoev et al. | Jul 2007 | B1 |
7248449 | Seagle | Jul 2007 | B1 |
7280325 | Pan | Oct 2007 | B1 |
7283327 | Liu et al. | Oct 2007 | B1 |
7284316 | Huai et al. | Oct 2007 | B1 |
7286329 | Chen et al. | Oct 2007 | B1 |
7289303 | Sin et al. | Oct 2007 | B1 |
7292409 | Stoev et al. | Nov 2007 | B1 |
7293344 | Han | Nov 2007 | B2 |
7296339 | Yang et al. | Nov 2007 | B1 |
7307814 | Seagle et al. | Dec 2007 | B1 |
7307818 | Park et al. | Dec 2007 | B1 |
7310204 | Stoev et al. | Dec 2007 | B1 |
7318947 | Park et al. | Jan 2008 | B1 |
7333295 | Medina et al. | Feb 2008 | B1 |
7337530 | Stoev et al. | Mar 2008 | B1 |
7342752 | Zhang et al. | Mar 2008 | B1 |
7349170 | Rudman et al. | Mar 2008 | B1 |
7349179 | He et al. | Mar 2008 | B1 |
7354664 | Jiang et al. | Apr 2008 | B1 |
7363697 | Dunn et al. | Apr 2008 | B1 |
7371152 | Newman | May 2008 | B1 |
7372665 | Stoev et al. | May 2008 | B1 |
7375926 | Stoev et al. | May 2008 | B1 |
7379269 | Krounbi et al. | May 2008 | B1 |
7386933 | Krounbi et al. | Jun 2008 | B1 |
7389577 | Shang et al. | Jun 2008 | B1 |
7417832 | Erickson et al. | Aug 2008 | B1 |
7419891 | Chen et al. | Sep 2008 | B1 |
7428124 | Song et al. | Sep 2008 | B1 |
7430098 | Song et al. | Sep 2008 | B1 |
7436620 | Kang et al. | Oct 2008 | B1 |
7436638 | Pan | Oct 2008 | B1 |
7440220 | Kang et al. | Oct 2008 | B1 |
7443632 | Stoev et al. | Oct 2008 | B1 |
7444740 | Chung et al. | Nov 2008 | B1 |
7493688 | Wang et al. | Feb 2009 | B1 |
7508627 | Zhang et al. | Mar 2009 | B1 |
7522377 | Jiang et al. | Apr 2009 | B1 |
7522379 | Krounbi et al. | Apr 2009 | B1 |
7522382 | Pan | Apr 2009 | B1 |
7538976 | Hsiao et al. | May 2009 | B2 |
7542246 | Song et al. | Jun 2009 | B1 |
7551406 | Thomas et al. | Jun 2009 | B1 |
7552523 | He et al. | Jun 2009 | B1 |
7554767 | Hu et al. | Jun 2009 | B1 |
7583466 | Kermiche et al. | Sep 2009 | B2 |
7595967 | Moon et al. | Sep 2009 | B1 |
7639457 | Chen et al. | Dec 2009 | B1 |
7660080 | Liu et al. | Feb 2010 | B1 |
7672080 | Tang et al. | Mar 2010 | B1 |
7672086 | Jiang | Mar 2010 | B1 |
7684160 | Erickson et al. | Mar 2010 | B1 |
7688546 | Bai et al. | Mar 2010 | B1 |
7691434 | Zhang et al. | Apr 2010 | B1 |
7695761 | Shen et al. | Apr 2010 | B1 |
7715152 | Okada | May 2010 | B2 |
7719795 | Hu et al. | May 2010 | B2 |
7726009 | Liu et al. | Jun 2010 | B1 |
7729086 | Song et al. | Jun 2010 | B1 |
7729087 | Stoev et al. | Jun 2010 | B1 |
7736823 | Wang et al. | Jun 2010 | B1 |
7785666 | Sun et al. | Aug 2010 | B1 |
7796356 | Fowler et al. | Sep 2010 | B1 |
7800858 | Bajikar et al. | Sep 2010 | B1 |
7819979 | Chen et al. | Oct 2010 | B1 |
7829264 | Wang et al. | Nov 2010 | B1 |
7846643 | Sun et al. | Dec 2010 | B1 |
7855854 | Hu et al. | Dec 2010 | B2 |
7869160 | Pan et al. | Jan 2011 | B1 |
7872824 | Macchioni et al. | Jan 2011 | B1 |
7872833 | Hu et al. | Jan 2011 | B2 |
7910267 | Zeng et al. | Mar 2011 | B1 |
7911735 | Sin et al. | Mar 2011 | B1 |
7911737 | Jiang et al. | Mar 2011 | B1 |
7916426 | Hu et al. | Mar 2011 | B2 |
7918013 | Dunn et al. | Apr 2011 | B1 |
7968219 | Jiang et al. | Jun 2011 | B1 |
7982989 | Shi et al. | Jul 2011 | B1 |
8000064 | Kawano et al. | Aug 2011 | B2 |
8008912 | Shang | Aug 2011 | B1 |
8012804 | Wang et al. | Sep 2011 | B1 |
8015692 | Zhang et al. | Sep 2011 | B1 |
8018677 | Chung et al. | Sep 2011 | B1 |
8018678 | Zhang et al. | Sep 2011 | B1 |
8024748 | Moravec et al. | Sep 2011 | B1 |
8068311 | Hsiao et al. | Nov 2011 | B2 |
8072705 | Wang et al. | Dec 2011 | B1 |
8074345 | Anguelouch et al. | Dec 2011 | B1 |
8077418 | Hu et al. | Dec 2011 | B1 |
8077434 | Shen et al. | Dec 2011 | B1 |
8077435 | Liu et al. | Dec 2011 | B1 |
8077557 | Hu et al. | Dec 2011 | B1 |
8079135 | Shen et al. | Dec 2011 | B1 |
8081403 | Chen et al. | Dec 2011 | B1 |
8085498 | Bai et al. | Dec 2011 | B2 |
8091210 | Sasaki et al. | Jan 2012 | B1 |
8097846 | Anguelouch et al. | Jan 2012 | B1 |
8104166 | Zhang et al. | Jan 2012 | B1 |
8116043 | Leng et al. | Feb 2012 | B2 |
8116171 | Lee | Feb 2012 | B1 |
8125856 | Li et al. | Feb 2012 | B1 |
8134794 | Wang | Mar 2012 | B1 |
8136224 | Sun et al. | Mar 2012 | B1 |
8136225 | Zhang et al. | Mar 2012 | B1 |
8136805 | Lee | Mar 2012 | B1 |
8141235 | Zhang | Mar 2012 | B1 |
8146236 | Luo et al. | Apr 2012 | B1 |
8149536 | Yang et al. | Apr 2012 | B1 |
8151441 | Rudy et al. | Apr 2012 | B1 |
8163185 | Sun et al. | Apr 2012 | B1 |
8164760 | Willis | Apr 2012 | B2 |
8164853 | Hirata | Apr 2012 | B2 |
8164855 | Gibbons et al. | Apr 2012 | B1 |
8164864 | Kaiser et al. | Apr 2012 | B2 |
8165709 | Rudy | Apr 2012 | B1 |
8166631 | Tran et al. | May 2012 | B1 |
8166632 | Zhang et al. | May 2012 | B1 |
8169473 | Yu et al. | May 2012 | B1 |
8171618 | Wang et al. | May 2012 | B1 |
8179636 | Bai et al. | May 2012 | B1 |
8184399 | Wu et al. | May 2012 | B2 |
8191237 | Luo et al. | Jun 2012 | B1 |
8194365 | Leng et al. | Jun 2012 | B1 |
8194366 | Li et al. | Jun 2012 | B1 |
8196285 | Zhang et al. | Jun 2012 | B1 |
8200054 | Li et al. | Jun 2012 | B1 |
8203800 | Li et al. | Jun 2012 | B2 |
8208350 | Hu et al. | Jun 2012 | B1 |
8220140 | Wang et al. | Jul 2012 | B1 |
8222599 | Chien | Jul 2012 | B1 |
8225488 | Zhang et al. | Jul 2012 | B1 |
8227023 | Liu et al. | Jul 2012 | B1 |
8228633 | Tran et al. | Jul 2012 | B1 |
8231796 | Li et al. | Jul 2012 | B1 |
8233248 | Li et al. | Jul 2012 | B1 |
8248896 | Yuan et al. | Aug 2012 | B1 |
8254059 | Horide | Aug 2012 | B2 |
8254060 | Shi et al. | Aug 2012 | B1 |
8257597 | Guan et al. | Sep 2012 | B1 |
8259410 | Bai et al. | Sep 2012 | B1 |
8259539 | Hu et al. | Sep 2012 | B1 |
8262918 | Li et al. | Sep 2012 | B1 |
8262919 | Luo et al. | Sep 2012 | B1 |
8264797 | Emley | Sep 2012 | B2 |
8264798 | Guan et al. | Sep 2012 | B1 |
8270126 | Roy et al. | Sep 2012 | B1 |
8276258 | Tran et al. | Oct 2012 | B1 |
8277669 | Chen et al. | Oct 2012 | B1 |
8279719 | Hu et al. | Oct 2012 | B1 |
8284517 | Sun et al. | Oct 2012 | B1 |
8288204 | Wang et al. | Oct 2012 | B1 |
8289821 | Huber | Oct 2012 | B1 |
8291743 | Shi et al. | Oct 2012 | B1 |
8300359 | Hirata et al. | Oct 2012 | B2 |
8307539 | Rudy et al. | Nov 2012 | B1 |
8307540 | Tran et al. | Nov 2012 | B1 |
8308921 | Hiner et al. | Nov 2012 | B1 |
8310785 | Zhang et al. | Nov 2012 | B1 |
8310901 | Batra et al. | Nov 2012 | B1 |
8315019 | Mao et al. | Nov 2012 | B1 |
8316527 | Hong et al. | Nov 2012 | B2 |
8320076 | Shen et al. | Nov 2012 | B1 |
8320077 | Tang et al. | Nov 2012 | B1 |
8320219 | Wolf et al. | Nov 2012 | B1 |
8320220 | Yuan et al. | Nov 2012 | B1 |
8320722 | Yuan et al. | Nov 2012 | B1 |
8322022 | Yi et al. | Dec 2012 | B1 |
8322023 | Zeng et al. | Dec 2012 | B1 |
8325569 | Shi et al. | Dec 2012 | B1 |
8333008 | Sin et al. | Dec 2012 | B1 |
8334093 | Zhang et al. | Dec 2012 | B2 |
8336194 | Yuan et al. | Dec 2012 | B2 |
8339738 | Tran et al. | Dec 2012 | B1 |
8339749 | Mochizuki | Dec 2012 | B2 |
8341826 | Jiang et al. | Jan 2013 | B1 |
8343319 | Li et al. | Jan 2013 | B1 |
8343364 | Gao et al. | Jan 2013 | B1 |
8349195 | Si et al. | Jan 2013 | B1 |
8351307 | Wolf et al. | Jan 2013 | B1 |
8357244 | Zhao et al. | Jan 2013 | B1 |
8373945 | Luo et al. | Feb 2013 | B1 |
8375564 | Luo et al. | Feb 2013 | B1 |
8375565 | Hu et al. | Feb 2013 | B2 |
8381391 | Park et al. | Feb 2013 | B2 |
8385157 | Champion et al. | Feb 2013 | B1 |
8385158 | Hu et al. | Feb 2013 | B1 |
8394280 | Wan et al. | Mar 2013 | B1 |
8400731 | Li et al. | Mar 2013 | B1 |
8404128 | Zhang et al. | Mar 2013 | B1 |
8404129 | Luo et al. | Mar 2013 | B1 |
8405930 | Li et al. | Mar 2013 | B1 |
8409453 | Jiang et al. | Apr 2013 | B1 |
8413317 | Wan et al. | Apr 2013 | B1 |
8416540 | Li et al. | Apr 2013 | B1 |
8419953 | Su et al. | Apr 2013 | B1 |
8419954 | Chen et al. | Apr 2013 | B1 |
8422176 | Leng et al. | Apr 2013 | B1 |
8422342 | Lee | Apr 2013 | B1 |
8422841 | Shi et al. | Apr 2013 | B1 |
8424192 | Yang et al. | Apr 2013 | B1 |
8441756 | Sun et al. | May 2013 | B1 |
8443510 | Shi et al. | May 2013 | B1 |
8444866 | Guan et al. | May 2013 | B1 |
8449948 | Medina et al. | May 2013 | B2 |
8451556 | Wang et al. | May 2013 | B1 |
8451563 | Zhang et al. | May 2013 | B1 |
8454846 | Zhou et al. | Jun 2013 | B1 |
8455119 | Jiang et al. | Jun 2013 | B1 |
8456961 | Wang et al. | Jun 2013 | B1 |
8456963 | Hu et al. | Jun 2013 | B1 |
8456964 | Yuan et al. | Jun 2013 | B1 |
8456966 | Shi et al. | Jun 2013 | B1 |
8456967 | Mallary | Jun 2013 | B1 |
8458892 | Si et al. | Jun 2013 | B2 |
8462592 | Wolf et al. | Jun 2013 | B1 |
8468682 | Zhang | Jun 2013 | B1 |
8472136 | Batra | Jun 2013 | B2 |
8472139 | Urakami | Jun 2013 | B2 |
8472288 | Wolf et al. | Jun 2013 | B1 |
8480911 | Osugi et al. | Jul 2013 | B1 |
8486285 | Zhou et al. | Jul 2013 | B2 |
8486286 | Gao et al. | Jul 2013 | B1 |
8488272 | Tran et al. | Jul 2013 | B1 |
8491801 | Tanner et al. | Jul 2013 | B1 |
8491802 | Gao et al. | Jul 2013 | B1 |
8493693 | Zheng et al. | Jul 2013 | B1 |
8493695 | Kaiser et al. | Jul 2013 | B1 |
8495813 | Hu et al. | Jul 2013 | B1 |
8498079 | Song et al. | Jul 2013 | B1 |
8498084 | Leng et al. | Jul 2013 | B1 |
8499435 | Sasaki et al. | Aug 2013 | B2 |
8506828 | Osugi et al. | Aug 2013 | B1 |
8514517 | Batra et al. | Aug 2013 | B1 |
8514519 | Gurney | Aug 2013 | B2 |
8518279 | Wang et al. | Aug 2013 | B1 |
8518832 | Yang et al. | Aug 2013 | B1 |
8520336 | Liu et al. | Aug 2013 | B1 |
8520337 | Liu et al. | Aug 2013 | B1 |
8524068 | Medina et al. | Sep 2013 | B2 |
8526275 | Yuan et al. | Sep 2013 | B1 |
8531801 | Xiao et al. | Sep 2013 | B1 |
8532450 | Wang et al. | Sep 2013 | B1 |
8533937 | Wang et al. | Sep 2013 | B1 |
8537494 | Pan et al. | Sep 2013 | B1 |
8537495 | Luo et al. | Sep 2013 | B1 |
8537502 | Park et al. | Sep 2013 | B1 |
8542461 | Bai et al. | Sep 2013 | B2 |
8545999 | Leng et al. | Oct 2013 | B1 |
8547659 | Bai et al. | Oct 2013 | B1 |
8547667 | Roy et al. | Oct 2013 | B1 |
8547730 | Shen et al. | Oct 2013 | B1 |
8555486 | Medina et al. | Oct 2013 | B1 |
8559123 | Hirata et al. | Oct 2013 | B2 |
8559141 | Pakala et al. | Oct 2013 | B1 |
8563146 | Zhang et al. | Oct 2013 | B1 |
8565049 | Tanner et al. | Oct 2013 | B1 |
8576514 | Sasaki et al. | Nov 2013 | B2 |
8576517 | Tran et al. | Nov 2013 | B1 |
8578594 | Jiang et al. | Nov 2013 | B2 |
8582238 | Liu | Nov 2013 | B1 |
8582241 | Yu et al. | Nov 2013 | B1 |
8582253 | Zheng et al. | Nov 2013 | B1 |
8588039 | Shi et al. | Nov 2013 | B1 |
8593761 | Liu et al. | Nov 2013 | B1 |
8593914 | Wang et al. | Nov 2013 | B2 |
8597528 | Roy et al. | Dec 2013 | B1 |
8599520 | Liu et al. | Dec 2013 | B1 |
8599657 | Lee | Dec 2013 | B1 |
8603593 | Roy et al. | Dec 2013 | B1 |
8607438 | Gao et al. | Dec 2013 | B1 |
8607439 | Wang et al. | Dec 2013 | B1 |
8611035 | Bajikar et al. | Dec 2013 | B1 |
8611054 | Shang et al. | Dec 2013 | B1 |
8611055 | Pakala et al. | Dec 2013 | B1 |
8614864 | Hong et al. | Dec 2013 | B1 |
8619389 | Saito et al. | Dec 2013 | B1 |
8619512 | Yuan et al. | Dec 2013 | B1 |
8625233 | Ji et al. | Jan 2014 | B1 |
8625941 | Shi et al. | Jan 2014 | B1 |
8628672 | Si et al. | Jan 2014 | B1 |
8630068 | Mauri et al. | Jan 2014 | B1 |
8634280 | Wang et al. | Jan 2014 | B1 |
8638529 | Leng et al. | Jan 2014 | B1 |
8643980 | Fowler et al. | Feb 2014 | B1 |
8649123 | Zhang et al. | Feb 2014 | B1 |
8665561 | Knutson et al. | Mar 2014 | B1 |
8670211 | Sun et al. | Mar 2014 | B1 |
8670213 | Zeng et al. | Mar 2014 | B1 |
8670214 | Knutson et al. | Mar 2014 | B1 |
8670294 | Shi et al. | Mar 2014 | B1 |
8670295 | Hu et al. | Mar 2014 | B1 |
8675318 | Ho et al. | Mar 2014 | B1 |
8675455 | Krichevsky et al. | Mar 2014 | B1 |
8681594 | Shi et al. | Mar 2014 | B1 |
8689430 | Chen et al. | Apr 2014 | B1 |
8693141 | Elliott et al. | Apr 2014 | B1 |
8703397 | Zeng et al. | Apr 2014 | B1 |
8705205 | Li et al. | Apr 2014 | B1 |
8711518 | Zeng et al. | Apr 2014 | B1 |
8711528 | Xiao et al. | Apr 2014 | B1 |
8717709 | Shi et al. | May 2014 | B1 |
8720044 | Tran et al. | May 2014 | B1 |
8721902 | Wang et al. | May 2014 | B1 |
8724259 | Liu et al. | May 2014 | B1 |
8749790 | Tanner et al. | Jun 2014 | B1 |
8749920 | Knutson et al. | Jun 2014 | B1 |
8753903 | Tanner et al. | Jun 2014 | B1 |
8755149 | Song et al. | Jun 2014 | B2 |
8760807 | Zhang et al. | Jun 2014 | B1 |
8760818 | Diao et al. | Jun 2014 | B1 |
8760819 | Liu et al. | Jun 2014 | B1 |
8760822 | Li et al. | Jun 2014 | B1 |
8760823 | Chen et al. | Jun 2014 | B1 |
8763235 | Wang et al. | Jul 2014 | B1 |
8780498 | Jiang et al. | Jul 2014 | B1 |
8780505 | Xiao | Jul 2014 | B1 |
8786983 | Liu et al. | Jul 2014 | B1 |
8790524 | Luo et al. | Jul 2014 | B1 |
8790527 | Luo et al. | Jul 2014 | B1 |
8792208 | Liu et al. | Jul 2014 | B1 |
8792312 | Wang et al. | Jul 2014 | B1 |
8793866 | Zhang et al. | Aug 2014 | B1 |
8797680 | Luo et al. | Aug 2014 | B1 |
8797684 | Tran et al. | Aug 2014 | B1 |
8797686 | Bai et al. | Aug 2014 | B1 |
8797692 | Guo et al. | Aug 2014 | B1 |
8810964 | Gao | Aug 2014 | B2 |
8813324 | Emley et al. | Aug 2014 | B2 |
8817418 | Matsuo et al. | Aug 2014 | B1 |
8830626 | Heim | Sep 2014 | B2 |
8842389 | Bai | Sep 2014 | B2 |
8842390 | Shen et al. | Sep 2014 | B2 |
8848316 | Kief et al. | Sep 2014 | B2 |
8867168 | Ota et al. | Oct 2014 | B2 |
9123358 | Liu | Sep 2015 | B1 |
9123886 | Zhang | Sep 2015 | B2 |
9196267 | Basu | Nov 2015 | B2 |
9214165 | Liu | Dec 2015 | B1 |
20070035885 | Im et al. | Feb 2007 | A1 |
20070268626 | Taguchi et al. | Nov 2007 | A1 |
20080273276 | Guan | Nov 2008 | A1 |
20090154019 | Hsiao et al. | Jun 2009 | A1 |
20090262464 | Gill et al. | Oct 2009 | A1 |
20100033879 | Ota et al. | Feb 2010 | A1 |
20100290157 | Zhang et al. | Nov 2010 | A1 |
20110086240 | Xiang et al. | Apr 2011 | A1 |
20120111826 | Chen et al. | May 2012 | A1 |
20120216378 | Emley et al. | Aug 2012 | A1 |
20120237878 | Zeng et al. | Sep 2012 | A1 |
20120298621 | Gao | Nov 2012 | A1 |
20130216702 | Kaiser et al. | Aug 2013 | A1 |
20130216863 | Li et al. | Aug 2013 | A1 |
20130242431 | Hosomi et al. | Sep 2013 | A1 |
20130257421 | Shang et al. | Oct 2013 | A1 |
20140063657 | Gao et al. | Mar 2014 | A1 |
20140098441 | Saito et al. | Apr 2014 | A1 |
20140154529 | Yang et al. | Jun 2014 | A1 |
20140175050 | Zhang et al. | Jun 2014 | A1 |
20140307349 | Liu et al. | Oct 2014 | A1 |
Number | Date | Country |
---|---|---|
10162322 | Jun 1998 | JP |
2009259365 | Nov 2009 | JP |
2011014207 | Jan 2011 | JP |
2012123894 | Jun 2012 | JP |
WO 2012036680 | Mar 2012 | WO |
Entry |
---|
Feng Liu, et al., U.S. Appl. No. 14/560,212, filed Dec. 4, 2014, 26 pages. |
Feng Liu, et al., U.S. Appl. No. 14/575,090, filed Dec. 18, 2014, 45 pages. |