The present invention relates to a magneto-optical recording medium which has both functions of ROM (Read Only Memory) by optical phase pits formed on a substrate and RAM (Random Access Memory) by an magneto-optical recording film, and a magneto-optical recording device thereof, and more particularly to a magneto-optical recording medium for regenerating both the ROM and RAM well and a magneto-optical recording device thereof.
As the enlarged view of the user area 73 in
To read the magneto-optical signals, when a weak laser beam is emitted there, the polarization plane of the laser beam changes depending on the magnetization direction of the recording layer by the polar Kerr effect, and the presence of a signal is judged by the intensity of the polarization component of the reflected light at this time. By this, the RAM information can be read.
Research and development to utilize such features of this magneto-optical disk memory have been advancing. For example, in Japanese Patent Application Laid-open No. H6-202820, a concurrent ROM-RAM optical disk which can regenerate ROM and RAM simultaneously was disclosed.
Such a magneto-optical recording medium 74 which can regenerate ROM and RAM simultaneously has a cross-sectional structure in the radius direction shown in
In this magneto-optical recording medium with such a structure, as shown in
In this optical recording medium, many problems exist to simultaneously regenerate ROM information comprised of phase pits PP and RAM information comprised of magneto-optical recording OMM.
First in order to stably regenerate ROM information along with RAM information, the light intensity modulation which occurs when ROM information is read becomes a cause of noise when RAM information is regenerated. For this the present applicant proposed to decrease the light intensity modulation noise by the negative feedback of the light intensity modulation signals, generated when ROM information is read, to the laser for read driving in the international application PCT/JP 02/00159 (international application filing date Jan. 11, 2002). However a noise reduction effect is not sufficient with only this if the light intensity modulation degree of the ROM information is high.
Secondly the feedback control of the laser intensity at high-speed is difficult.
With the foregoing in view, it is an object of the present invention to provide a magneto-optical recording medium for stably regenerating the ROM information comprised of phase pits and the RAM information simultaneously, and to provide a magneto-optical recording device thereof.
It is another object of the present invention to provide a magneto-optical recording medium for suppressing the jitter of the regeneration signals of the ROM information and RAM information within a predetermined range, and a magneto-optical recording device thereof.
It is still another object of the present invention to provide a magneto-optical recording medium for suppressing the jitter of the regeneration signals of the ROM information and RAM information within a predetermined range without generating cracks with a sufficient repeat recording durability.
To achieve these objects, a magneto-optical recording medium and its device of the present invention has a magneto-optical recording medium where a recording film is formed on optical phase pits formed on a substrate so that both the optical phase pit signals and the signals of the recording film can be regenerated by light, that satisfy
344X−8.12≧Y and Y≧286X−10.7
0.080≦X≦0.124 and 16≦Y≦30
where X (λ) is the optical depth of the phase pits formed on the substrate and Y (%) is the modulation degree of the phase pits when irradiated with an optical beam in the polarization direction perpendicular to the tracks of the optical recording medium.
According to the present invention, a magneto-optical recording medium, which can suppress the jitter of MO signal and phase pit signal within less than ten percents without generating cracks with a sufficient repeat recording durability, is obtained.
Also according to the present invention, it is preferable that the magneto-optical recording medium satisfy the following condition.
344X−8.12≧Y and Y≧286X−10.7
0.080≦X≦0.124 and 19≦Y≦26
According to the present invention, it can suppress the jitter of MO signal and phase pit signal within less than eight percents which has more margin.
Also according to the present invention, it is preferable that the magneto-optical recording film has a dielectric thin film and a recording film, and the dielectric thin film comprised of SiN. So, it is realized to obtain the magneto-optical recording medium having improving durability.
Embodiments of the present invention will now be described in the sequence of the magneto-optical recording medium, the magneto-optical recording device and other embodiments.
Magneto-Optical Recording Medium
As
As
To read the recorded information of the magneto-optical recording layers 4C and 4D, a weak laser beam is applied onto the recording layers 4C and 4D so that the polarization plane of the laser beam is changed according to the magnetization direction of the recording layers 4C and 4D by the polar Kerr effect, and the presence of signals is judged by the intensity of the polarization component of the reflected light at this time. By this, the RAM information can be read. In this reading, the reflected light is modulated by the phase pits PP constituting ROM, so the ROM information can be read simultaneously.
In other words, ROM and RAM can be simultaneously regenerated by one optical pickup, and when a magnetic field modulation type magneto-optical recording is used, writing to RAM and regenerating ROM can be executed simultaneously.
First the manufacturing step of the magneto-optical disk with the cross-sectional configuration shown in
In other words, five polycarbonate substrates 4A of which the optical phase pit depth Pd (λ) is 0.070, 0.080, 0.105, 0.124 and 0.136 are prepared. Here the pit depth is changed by the resist coating film thickness in the stamper manufacturing process of the stamper for forming the phase pits on the substrate 4A.
The substrate 4A is entered in the sputtering device 50 including a plural of sputtering room of the reached vacuums of less than 5×e−5 (Pascal). The substrate 4A is transported to the first chamber 50 attached Si target 56, and the chamber 50 is introduced Ar gas and N2 gas and is applied 3 kilo watt DC power to deposit undercoat(UC) silicon nitride (SiN) layer 4B by reactive sputtering.
As
As
Here a plurality of samples (a total of 7 samples, as described later), which has the SiN undercoat layer, were created by changing the gas pressure in the chamber 50 by changing the Ar gas flow rate. The gas flow rate was changed in a 30 sccm (quantity that flows per minute) to a 200 sccm range. The film deposition time was adjusted so that the thickness of the under coat SiN layer 4B becomes 80 nm.
Then the substrate 4A is moved to the another chamber, where the alloy target TbFeCo is discharged while changing the power supply ratio, and the recording layer 4C with a 30 nm thickness made from Tb22 (Fe88Co12) 78 is deposited. Then the Gd19 (Fe88Co20) 81 recording auxiliary layer 4D with a 4 nm film thickness is added to the Tb22 (Fe88Co12) 78 recording layer 4C with a 30 nm film thickness, as shown in
Then the substrate 4A is moved to the first chamber 50, and the over coat SiN layer 4E with a 5 nm thickness and a 50 nm Al layer 4G is deposited as a result. After the Al layer is deposited, the ultraviolet hardening resin is spin-coated thereon to form the protective film, and the magneto-optical recording medium 4 shown in
The modulation degree and the jitter, when the ROM of the 35 samples with this configuration (magneto-optical disks formed on the substrates with five types of optical pit depths using seven different gas pressures) is regenerated, are measured as the evaluation target.
These samples are set in the recording/regeneration device (MO tester: LM 530C made by Shibasoku Ltd.) with a 1.08 μm (1/e 2) beam diameter, a 650 nm wave length and 0.55 NA (Numerical Aperture), and are rotated at a 4.8 m/s line speed
Phase pits (the same pattern as a compact disk) for the EFM modulation of which the shortest mark is 0.832 μm are formed on the ROM section 42 of these samples. The modulation degree is measured as shown in
The regenerated light is at regeneration power Pr=1.5 mW and no regeneration magnetic field, and the polarization direction is in a perpendicular direction with respect to the tracks. ROM regeneration waveforms are measured by an oscilloscope, and on the tracks of the medium shown in
For the jitter, ROM jitter by the phase pits and MO regeneration jitter on the ROM were measured. The jitter shown in
When the Ar pressure is 1.5 Pa or more, there is little change in the modulation degree, and it stabilizes. In this way, by changing the setting of the Ar pressure of the SiN undercoat layer, the modulation degree can be adjusted. This tendency of the change is roughly the same regardless the optical depth of the phase pits of the substrate. Here the optical depth of the phase pits was measured by AFM (Atomic Force Microscope) measurement equipment after the substrate is molded.
The reason why the modulation degree of the phase pits of the magneto-optical disk is changed depending on the Ar pressure of the SiN undercoat layer is that the phase pits of the substrate are processed by Ar sputtering. By changing the setup level of the Ar pressure, the plasma status in the film deposition chamber changes, and by this the processing conditions of the phase pits of the substrate surface change. As a result, the adjustment of the modulation degree becomes possible. In other words, the shapes of the phase pits can be substantially processed in the film deposition steps.
As the modulation degree increases, the MO (RAM) signal jitter on the ROM increases, and as the modulation degree decreases the ROM jitter increases. On the circuit, jitter within the error correction limit is 15% or less, but if the aggravation of jitter by various fluctuation factors, such as disk rotation fluctuation, is considered, then a 10% or less jitter must be implemented.
According to the graph in
As
Then a heat shock test is performed on the sample where each layer, including the SiN undercoat layer, are deposited on the substrate 4A, as shown in
As the results in
For example, in the case of a substrate with a 0.124λ optical pit depth, the Ar pressure is set between 0.7 to 2.0 (Pa). In the case of a 0.080λ optical pit depth, the Ar pressure is set between 0.5 and 1.5 (Pa). And in the case of substrates with a 0.070λ and 0.136λ optical pit depth, the modulation degree cannot be set between 16 and 30% even if the Ar pressure is set between 0.5 and 2.0 (Pa).
In the case of the substrate with a 0.105λ optical pit depth, the modulation degree becomes a range from 16 to 30% with any of 0.5 to 2.0 (Pa) Ar pressure. Conditions with which the jitter of both ROM signals and RAM signals become the optimum is the modulation degree 23%, and with this substrate, an even higher level quality can be implemented by setting the Ar pressure between 0.6 and 1.0 Pa.
Whereas when the optical pit depth is a deeper 0.124λ, the modulation degree in a range of 16 to 30% can be implemented by setting the Ar pressure when the under coat SiN film is deposited at a range of 0.9 to 2.0 (Pa). It is preferable that the modulation degree is adjusted to roughly 26% by setting the Ar pressure to 2.0 (Pa).
When the phase pit depth is at mid-level 0.105λ, a 16 to 30% demodulation degree can be implemented in an Ar pressure range of 0.5 to 2.0 (Pa). It is preferable that a 19-26% modulation degree is implemented by adjusting the Ar pressure in a range of 0.65 to 1.5 (Pa).
When the depth of the optical phase pits becomes shallow, to 0.080λ or less, the adjustable range of the modulation degree becomes narrow, and a 19 to 26% modulation degree cannot be implemented. For phase pits with a 0.124λ or deeper as well, the modulation degree adjustable range becomes narrow, and a 19 to 26% modulation degree cannot be implemented.
In
Line 1: Y=344×−8.12
Line 2: Y=286×−10.7
In the present embodiment, the sputtering film deposition steps using SiN was described as an example, but other materials can be used only if it is a material of which the modulation degree can be adjusted. SiO2, AlN, SiA10, SI10N and TaO, for example, can be used.
In this recording medium with this configuration as well, the modulation degree of the phase pits can be adjusted by the sputtering film deposition step. The conditions described in
As above described, in a magneto-optical recording medium where a recording film is formed on optical phase pits formed on a substrate so that both the optical phase pit signals and the signals of the recording film can be regenerated by light, following condition is satisfied.
344X−8.12≧Y and Y≧286X−10.7
0.080≦X≦0.124 and 16≦Y≦30
where X (λ) is the optical depth of the phase pits formed on the substrate and Y (%) is the modulation degree of the phase pits when irradiated with an optical beam in the polarization direction perpendicular to the tracks of the optical recording medium.
According to the above condition, a magneto-optical recording medium, which can suppress the jitter of MO signal and phase pit signal within less than ten percents without generating cracks with a sufficient repeat recording durability, is obtained.
Also, it is preferable that the magneto-optical recording medium satisfies the following condition.
344X−8.12≧Y and Y≧286X−10.7
0.080≦X≦0.124 and 19≦Y≦26
According to the above condition, it can suppress the jitter of MO signal and phase pit signal within less than eight percents which has more margin.
Furthermore, it is preferable that above recording film comprises of a dielectric film and a recording film. Furthermore, it is preferable that the dielectric film comprises of SiN, so high durable magneto-optical medium is realized.
Also, it is preferable that the recording layer comprised of a film of which a main component is TeFeCo, and it is further preferable that the recording layer comprises of at least two layers having a layer of which the main component is TeFeCo and another layer of which the main component is GdFeCo and GdFeCo layer is a transition metals rich at room temperature and comprises a vertical magnetic film.
Magneto-Optical Recording Device
Now the magneto-optical recording device (disk drive) according to the present invention will be described.
As
The optical pickup 5 can be moved by the track actuator 6, such as a ball screw feed mechanism, so as to access an arbitrary position on the optical information recording medium 4 in the radius direction. The magneto-optical recording device also has an LD driver 31 for driving the laser diode ID of the optical head 7 and the magnetic head driver 34 for driving the magnetic head 35 of the optical pickup 5. The servo controller for access 15-2 servo-controls the track actuator 6, motor 18 and focus actuator 19 of the optical head 7 according to the output from the optical head 7. The controller 15-1 operates the LD driver 31, magnetic head driver 34 and servo controller for access 15-2 to record/regenerate information.
Details of the optical head 7 will be described with reference to
A part of the lights that enters the beam splitter 11 is reflected by the beam splitter 11 and is condensed to the APC (Auto Power Control) detector 13 via the condensing lens 12.
The lights reflected by the optical information recording medium 4 are reflected by the mirror 40 via the objective lens 16 again, become converging lights by the collimator lens 39 and enter the beam splitter 11 again. A part of the lights which reentered the beam splitter 11 return to the laser diode LD side, and the rest of the lights are reflected by the beam splitter 11, and are condensed on the reflected light detector 25 via the three-beam Wollaston prism 26 and cylindrical face lens 21.
Now the shape and the arrangement of the reflected light detector 25 will be described. Since three-beams of lights are entered, the reflected light detector 25 has the four-division detector 22-1, MO signal detectors 20 disposed at the top and bottom thereof, and detectors for track error detection 22-2 and 22-3 which are disposed at the left and right thereof, as shown in
The regeneration signals will now be described with reference to
At the same time, using the arithmetic expression in
TES=(E−F)/(E+F)
The focus error signals (FES) and the track error signals (TES) determined by these calculations are input to the main controller 15 (servo controller for access 15-2 in the case of
In the recording information detection system, on the other hand, the polarization characteristics of the reflected laser light, which change depending on the magnetization direction of the magneto-optical recording on the optical information recording medium 4, are converted into light intensity. In other words, in the three-beam Wollaston prism 26, the polarization direction is separated into two beams which are perpendicular to each other by polarization detection, the two beams enter the two-division photo-detector 20 through the cylindrical face lens 21, and are photo-electric converted respectively.
The two electric signals G and H, after photo-electric conversion by the two-division photo-detector 20, are added by the addition amplifier 29 according to the arithmetic expression in
In
Also as described above, the first ROM signal (ROM 1), which is the output of the addition amplifier 29, the RAM signal (RAM 1), which is the output of the differential amplifier 30, the focus error signal (FES) from the FES generation circuit 23, and the track error signal (TES) from the TES generation circuit 24 are input to the main controller 15.
Also the recording data and the reading data are input/output to the main controller 15 via the interface circuit 33 with the data source 32.
The first ROM signal (ROM 1=G+H), the second ROM signal (ROM 2=I) and the RAM signal (RAM=G−H) to be input to the main controller 15 are detected and used according to each mode, that is, ROM and RAM simultaneous regeneration, ROM regeneration, and magnetic field modulation and light modulation RAM recording (WRITE).
At magneto-optical (RAM) recording, data from the data source 32 is input to the main controller 15 via the interface 33 (see
If the light modulation recording system is used, this input data is sent to the LD driver 31 and drives the laser diode LD for light modulation. At this time in the main controller 15, a signal to indicate recording is sent to the LD driver 31, and the LD driver 31 performs the negative-feedback control for the emission of the semiconductor laser diode LD so as to be the optimum laser power for recording according to the second ROM signal (ROM 2=I).
In the above example, the focusing error signal is detected by the astigmatism method, the tracking error signal is detected by the three-beam method, and the MO signal is detected by the differential detection signal of the polarization component, but the abovementioned optical system is only used for the present embodiment, and the knife edge method of the spot size position detection method, for example, can be used for the focusing error detection method without any problems. For the tracking error detection method, such a method as the push-pull method and the phase different method can be used without any problems.
The main controller 15 (servo controller 15-2 in the case of
In this case, the signals G+H of the detector 25 or I of the detector 13 is used for laser power adjustment. When a ROM signal and RAM signal are simultaneously regenerated, as shown in
If the abovementioned magneto-optical recording medium 4 is used, noise caused by the phase pit modulation signals can be decreased, so negative-feedback control is unnecessary. Therefore the phase delay of negative-feedback control can be prevented, and therefore this magneto-optical recording medium 4 is particularly suitable for high-speed disk rotation and high density recording.
Other Embodiments
The present invention was described above using embodiments, but the present invention can be modified in various ways within the scope of the essential character of the present invention, and these shall not be excluded from the technical scope of the present invention. For example, the size of the phase pits is not limited to the above numeric values but can be other values. Also for the magneto-optical recording film, other magneto-optical recording material can be used. Also the magneto-optical recording medium is not limited to a disk type but may be a card type or have other shapes.
In a magneto-optical recording medium where a recording film is formed on optical phase pits formed on a substrate so that both the optical phase pit signals and the signals of the recording film can be regenerated by light, following condition is satisfied.
344X−8.12≧Y and Y≧286X−10.7
0.080≦X≦0.124 and 16≦Y≦30
where X (λ) is the optical depth of the phase pits formed on the substrate and Y (%) is the modulation degree of the phase pits when irradiated with an optical beam in the polarization direction perpendicular to the tracks of the optical recording medium.
According to the above condition, a magneto-optical recording medium, which can suppress the jitter of MO signal and phase pit signal within less than ten percents without generating cracks with a sufficient repeat recording durability, is obtained.
Furthermore, it is realized by the construction of medium, so it is realized easily and stably.
This application is a continuation of international application PCT/JP2003/002888, filed on Mar. 12, 2003.
Number | Date | Country | |
---|---|---|---|
Parent | PCT/JP03/02888 | Mar 2003 | US |
Child | 11123951 | May 2005 | US |