Claims
- 1. In a method of manufacturing a magneto-optical recording medium including at least one protective film and a magnetic film respectively formed on a substrate by depositing said films on said substrate, the improvement wherein said protective film is deposited by simultaneously sputtering onto said substrate a protective film formed from a film forming target including at least one compound selected from the group consisting of strontium titanate (SrTiO.sub.3) or barium titanate (BaTiO.sub.3) and a composition adjusting target constituted with titanium (Ti) or titanium oxide (TiO.sub.y), where y is a positive number.
- 2. The improvement in accordance with claim 1, wherein said sputtering is achieved in a mixed atmosphere including an inert gas and oxygen.
- 3. In a method of manufacturing a magneto-optical recording medium including at least one protective film and a magnetic film formed respectively on a substrate by depositing said films on said substrate, the improvement wherein said protective film is deposited by sputtering onto said substrate a protective film formed from a film forming target including at least one compound selected from the group consisting of strontium titanate (SrTiO.sub.3) or barium titanate (BaTiO.sub.3) in a mixed atmosphere of an inert gas and either oxygen or nitrogen.
- 4. The improvement in accordance with claim 3, wherein said mixed atmosphere includes an inert gas and oxygen.
- 5. The improvement in accordance with claim 3, wherein said mixed atmosphere includes an inert gas and nitrogen.
Priority Claims (2)
Number |
Date |
Country |
Kind |
63-170567 |
Jul 1988 |
JPX |
|
1-50467 |
Mar 1989 |
JPX |
|
Parent Case Info
This is a divisional application of Ser. No. 07/376,591, filed on July 7, 1989, now U.S. Pat. No. 4,950,547.
US Referenced Citations (4)
Divisions (1)
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Number |
Date |
Country |
Parent |
376591 |
Jul 1989 |
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