BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a partial sectional side view showing an exemplary embodiment of a magnetostrictive torque sensor according to the invention,
FIG. 2 is a side view conceptually showing a basic structure of the magnetostrictive torque sensor according to the exemplary embodiment,
FIG. 3 is a partial side view showing a characteristic shape of a rotating shaft of the magnetostrictive torque sensor according to the exemplary embodiment,
FIG. 4 is a longitudinal sectional view showing a main part of a specific structure in which the magnetostrictive torque sensor according to the exemplary embodiment is incorporated as a steering torque detecting portion in a steering shaft of an electric power steering apparatus,
FIG. 5 is a graph showing a magnetostrictive characteristic curve related to each detecting coil in the magnetostrictive torque sensor according to the exemplary embodiment and a sensor detecting characteristic,
FIG. 6 is a diagram showing a method of manufacturing the magnetostrictive torque sensor according to the exemplary embodiment of the invention, illustrating steps of a process for manufacturing a rotating shaft,
FIG. 7 is a flowchart showing a magnetic anisotropy adding step,
FIG. 8 is a longitudinal sectional view showing a positional relationship based on respective shapes of the rotating shaft and an induction heating coil at the magnetic anisotropy adding step,
FIG. 9 is a view showing a temperature distribution (1) and a distortion distribution (2) in a radial direction in the rotating shaft at respective steps (a) to (d) of the magnetic anisotropy adding step,
FIG. 10 is a chart showing an impedance characteristic of the magnetostrictive torque sensor immediately after a magnetostrictive material plated portion is formed and an impedance characteristic of the magnetostrictive torque sensor using a magnetostrictive film after adding a magnetic anisotropy in the magnetostrictive torque sensor according to the exemplary embodiment,
FIG. 11 is a graph showing a comparison between the impedance characteristic of the magnetostrictive torque sensor according to the exemplary embodiment and a conventional one,
FIG. 12 is a longitudinal sectional view for explaining a problem in respect of a relationship between the rotating shaft and the induction heating coil at the magnetic anisotropy adding step, in a related art,
FIG. 13 is a graph showing a temperature distribution in heating of the magnetostrictive film in order to explain the problem, and
FIG. 14 is a graph showing a sensitivity characteristic of the magnetostrictive torque sensor for a heating temperature of the magnetostrictive film in order to explain the problem.