Mainframe of dual-robot substrate processing system

Information

  • Patent Grant
  • D1029066
  • Patent Number
    D1,029,066
  • Date Filed
    Friday, March 11, 2022
    2 years ago
  • Date Issued
    Tuesday, May 28, 2024
    a month ago
  • US Classifications
    Field of Search
    • US
    • D13 118
    • D13 158
    • D13 162
    • D13 184
    • D15 141
    • D15 143
    • D15 148
    • D15 149
    • D15 199
    • CPC
    • H01L21/61709
    • H01L21/68707
  • International Classifications
    • 1509
    • Term of Grant
      15Years
Abstract
Description


FIG. 1 is a front, top perspective view of a mainframe for a dual-robot substrate processing system in accordance with the present design.



FIG. 2 is a left side elevational view of the present design.



FIG. 3 is a right side elevational view of the present design.



FIG. 4 is a front elevational view of the present design.



FIG. 5 is a rear elevational view of the present design.



FIG. 6 is a top plan view of the present design.



FIG. 7 is a bottom plan view of the second embodiment of the present design; and,



FIG. 8 is a front, top perspective view of the present design, showing unclaimed components attached thereto.


The broken lines shown in the figures are directed to unclaimed portions of the mainframe and/or unclaimed components attached to the mainframe that are for illustrative purposes only and form no part of the claimed design.


Claims
  • The ornamental design for a mainframe for a dual-robot substrate processing system, as shown and described.
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