Patent Application
20240085875
The present invention relates to a manufacturing device, a control method in the manufacturing device, and a control program for controlling the manufacturing device.
As a mechanism attenuating or controlling kinetic energy generated when an object comes into contact with an object, various configurations such as an elastic body such as a spring and rubber, a damper (for example, an oil damper), and an air cylinder have been proposed and put into practical use. In addition, there is also a configuration that adopts control using sensing results by various sensors.
In the mechanism using the spring or the rubber, performance of attenuating the kinetic energy is determined depending on a physical characteristic of the incorporated spring or rubber. The performance of the damper to attenuate the kinetic energy depends on a size, an orifice diameter, and the like. The performance of the air cylinder to attenuate the kinetic energy depends on the size, air pressure, and the like. These mechanical configurations have problems that force less than or equal to its own weight cannot be controlled, a design and a mechanism corresponding to a target are required, and position accuracy is low.
In addition, there is also a configuration in which an actuator (for example, a cylinder) driven by air, a motor, or the like is controlled based on a sensing result by a sensor. As such an electrical configuration, The following prior arts exist as such an electrical configuration.
For example, Japanese Patent Laying-Open No. 2006-074987 (PTL 1) discloses a typically linear controllable source of force along a path that actively absorbs or applies energy from a vehicle wheel support assembly moving over rough surfaces to facilitate considerably reducing force transmitted to the vehicle body supported on the wheel support assembly.
Japanese Patent Laying-Open No. 2006-125633 (PTL 2) discloses a method for actively suspending an actual facility in a vehicle. The disclosed method includes modifying a control signal based on a difference between a characteristic of the actual facility as indicated by a response of the actual equipment to the control signal and a characteristic of a reference facility.
Japanese National Patent Publication No. 2013-521443 (PTL 3) discloses an active vibration preventing device configured to control a position of a body with respect to a reference frame.
In the electric actuator as described above, the configuration of control logic and the like may be complicated. For example, the control logic in consideration of the characteristic of the object in mechanical contact with the actuator is required to be configured, and it takes time and effort to tune when many parameters included in the control logic exist.
One object of the present invention is to provide an actuator and a manufacturing device including the actuator capable of easily performing the configuration of the control logic, simulation for facility design, and the like.
A manufacturing device according to an example of the present invention includes a stage mechanism on which a first workpiece is disposed and a controller configured to control the stage mechanism. The stage mechanism includes one or more actuators driven by a motor to generate displacement in a first direction. The controller includes: a first instruction generating unit configured to give a control instruction to the stage mechanism according to a second workpiece to be superimposed on the first workpiece such that the first workpiece and the second workpiece are parallel to each other; a model creation unit configured to create a physical model based on displacement in the actuator caused by the second workpiece coming into contact with the first workpiece; a second instruction generating unit configured to generate a control instruction such that the actuator generates displacement according to the physical model; a determination unit configured to determine a spring constant; and a third instruction generating unit configured to generate a control instruction for generating drive force calculated based on a product of the spring constant and the displacement generated in the actuator.
According to this configuration, an excessive load generated when the first workpiece and the second workpiece come into contact with each other can be relaxed by appropriately receiving a load from the outside, and a predetermined load can be applied between the first workpiece and the second workpiece.
The controller further includes a selecting unit that selects and validates the control instruction from one of the second instruction generating unit and the third instruction generating unit. According to this configuration, a behavior appropriately receiving a load from the outside, and absorbing an excessive load generated when objects come into contact with each other, or preventing generation of a point load and a behavior generating a load according to an ideal spring behavior from an actuator cab be selectively executed.
The selecting unit may validate the control instruction from the third instruction generating unit when a predetermined switching condition is satisfied while the control instruction from the second instruction generating unit is validated. According to this configuration, the operation generating a predetermined load from the actuator can be implemented after the operation absorbing the load applied to the actuator is performed according to the control instruction from the second instruction generating unit.
The switching condition may be based on an elapsed time after the external load is applied to the actuator. According to this configuration, for example, in the case where a predetermined time has elapsed from the start of the operation of the actuator, control switching the behavior can be implemented.
The switching condition may be based on displacement generated in the actuator. According to this configuration, when the actuator is contracted by a predetermined amount, the control switching the behavior can be implemented.
The second instruction generating unit may output a position instruction designating a target position of the motor as the control instruction, and the third instruction generating unit may output a torque instruction designating torque to be generated by the motor as the control instruction. According to this configuration, the second instruction generating unit controls the position of the actuator, so that ideal spring behavior can be implemented. The third instruction generating unit controls the torque to be generated by the motor, so that the load generated by the actuator can be controlled according to the ideal behavior of the spring.
The model creation unit may create the physical model when a predetermined load is applied to the actuator from the outside. According to this configuration, a behavior as a spring can be started when the predetermined load is applied from the outside while a stationary state is maintained until the predetermined load is applied from the outside.
According to another example of the present invention, a control method for a stage mechanism on which a first workpiece is disposed is provided. The stage mechanism includes one or more actuators each driven by a motor to generate displacement in a first direction. The control method includes: giving a control instruction to a stage mechanism according to a second workpiece to be superimposed on the first workpiece such that the first workpiece and the second workpiece are parallel to each other; creating a physical model based on displacement in the actuator caused by the second workpiece coming into contact with the first workpiece; generating a control instruction such that the actuator generates displacement according to the physical model; determining a spring constant; and generating a control instruction for generating drive force calculated based on a product of the spring constant and the displacement generated in the actuator.
According to still another example of the present invention, a control program for controlling a stage mechanism on which a first workpiece is disposed is provided. The stage mechanism includes one or more actuators each driven by a motor to generate displacement in a first direction. The control program causes a computer to perform: giving a control instruction to a stage mechanism according to a second workpiece to be superimposed on the first workpiece such that the first workpiece and the second workpiece are parallel to each other; configuring a physical model based on displacement caused by the second workpiece coming into contact with the first workpiece in an actuator; generating a control instruction such that the actuator generates displacement according to the physical model; determining a spring constant; and generating a control instruction for generating drive force calculated based on a product of the spring constant and the displacement generated in the actuator.
According to one aspect of the present invention, the actuator and the manufacturing device including the actuator capable of easily performing the creation of the control logic, the simulation for the facility design, and the like can be implemented.
With reference to the drawings, an embodiment of the present invention will be described in detail. The same or equivalent part in the drawings is denoted by the same reference numeral, and the description will not be repeated.
An example of a scene to which the present invention is applied will be described.
Actuator 2 is driven by a motor 18 to generate displacement (in an example of
More specifically, actuator 2 includes a main body 10 including a space inside, a rod 12 that engages with a screw groove formed inside main body 10, a distal end portion 14 provided at a distal end of rod 12, a coupling member 16 that mechanically couples rod 12 and motor 18, and an encoder 20 that detects a rotation speed or a rotation angle of motor 18. Encoder 20 is mechanically connected to motor 18 and detects the displacement in actuator 2.
Drive device 4 includes a driver 42 that supplies power to motor 18 to drive motor 18 and a controller 40 that receives a detection signal from encoder 20 and gives a control instruction to driver 42.
Although
The number of actuators 2 included in drive system 1 is not particularly limited, and an appropriate number may be set according to an application to be applied. For example, when an arbitrary workpiece can be supported by single actuator 2, the number of actuators 2 may be one. For a large workpiece, a member supporting the workpiece may be driven by a plurality of actuators 2.
For convenience of description, controller 40 and driver 42 are illustrated as independent components, but controller 40 and driver 42 may be mounted as independent devices or may be mounted as an integrated device.
When the spring is extended to a length X1 (=X0+ΔX1), restoring force F1 is generated in a direction in which the spring returns to original natural length X0. Restoring force F1 is proportional to an elongation amount ΔX1 from original natural length X0. On the other hand, when the spring is contracted to a length X2 (=X0−ΔX2), restoring force F2 is generated in the direction in which the spring returns to original natural length X0. Restoring force F2 is proportional to a contraction amount ΔX2 from original natural length X0.
As described above, in drive system 1 of the embodiment, what is called a physical spring is implemented by the control of motor 18. The implemented spring exhibits a substantially ideal behavior (behavior according to a physical formula), the creation of control logic using a simple physical model, simulation for facility design, and the like can be easily performed.
A more detailed operation example of actuator 2 of the embodiment will be described later.
A hardware configuration example of controller 40 configuring drive system 1 of the embodiment will be described below.
Processor 402 is typically configured of a central processing unit (CPU), a micro-processing unit (MPU), or the like, reads a system program 410 and a control program 412 stored in storage 408, expands the system program and the control program in the main memory 404, and executes the system program and the control program to implement control calculation controlling the behavior of actuator 2 as described later.
Input and output unit 406 is in charge of transmission and reception of a signal between controller 40 and an external device. In the example of
Storage 408 is typically configured of a solid state disk (SSD) or a fresh memory, and stores system program 410 implementing basic processing and control program 412.
Although the configuration example in which required processing is provided by processor 402 executing the program has been described in
An impact absorbing operation of actuator 2 of the embodiment will be described below. In the impact absorbing operation, actuator 2 operates passively according to the applied load.
In workpiece conveyance system 100 as illustrated in
Even when stage mechanism 110 moves along workpiece W, when a contact area between workpiece W and plate 114 is small, the large load is applied to a contact member of workpiece W. Such a phenomenon is also referred to as point load or load concentration.
As illustrated in
In the impact absorbing operation, the spring contracts or expands to the position (that is, the balance position) corresponding to the behavior of the spring when an external force is received, namely, the displacement at which restoring force corresponding to the external force is generated. Such the contraction or expansion behavior follows the physical model that is the substantially ideal physical behavior.
In the embodiment, the behavior as the spring is calculated based on the balanced position. For example, when a load F is applied to actuator 2, an equilibrium state is established at the position (the position at the time of the generation of load F) shortened by predetermined length ΔX from the balanced position (load equilibrium state 54). At this point, it is assumed that the length of actuator 2 is X.
The behavior as the spring is determined according to collapse from balanced state 52. At this point, for convenience of description, a single vibration model is assumed as the simplest physical model. Considering the behavior as the spring with the balanced position as a reference, when the spring constant of actuator 2 is set to K (which can be arbitrarily set in advance), period T of the single vibration of the spring=2π√(M1/K). In addition, the angular frequency ω=2π/T=√(K/M1).
That is, when any load F is applied to actuator 2, actuator 2 starts the single vibration with an amplitude A1 corresponding to the magnitude of applied load F. Each value related to the single vibration by actuator 2 is as follows.
Displacement ΔX=A1×sin(ωt)
Speed V=A1×ω×cos(ωt)
Acceleration a=A1×ω2×sin(ωt)=−ω2ΔX
As will be described later, the physical model or the like is determined based on displacement ΔX with respect to the state (balance state 52) in which the object is attached to actuator 2.
In drive system 1 of the embodiment, the behavior of the spring is reproduced by actuator 2 using the physical model indicating the behavior of the spring. The physical model may be the single vibration model as described above, a model including an element of the mass indicating mass M1 of plate 114, or a model including an element of damping. These physical models may be determined according to an equation of motion (such as F=K×X+M×V) for the spring.
Physical model 420 is a model implementing the behavior as a spring.
Characteristic estimating unit 422 corresponds to the model creation unit creating physical model 420 based on the displacement caused by the application of the external load to actuator 2. More specifically, characteristic estimating unit 422 estimates a parameter (in the example illustrated in
For example, when physical model 420 is the single vibration model, amplitude A1 of physical model 420 can be calculated based on a position change (speed) immediately after arbitrary load F is applied to actuator 2.
As described above, characteristic estimating unit 422 estimates the parameter of physical model 420 based on the temporal change in the displacement of actuator 2 (speed, acceleration, jerk, or the like). The estimated parameter is appropriately determined according to physical model 420. For example, a spring constant or a damping constant may be determined. As described above, because the parameter of the physical model is estimated when significant displacement is generated in actuator 2, physical model 420 has the characteristic corresponding to a predetermined load to actuator 2 from the outside.
Angular frequency setting unit 424 sets angular frequency co of physical model 420 based on mass M1 of the object (in the example of
Position instruction generating unit 426 generates the control instruction such that actuator 2 is displaced in accordance with physical model 420. More specifically, position instruction generating unit 426 generates the control instruction (position instruction or displacement instruction) in each control period based on displacement ΔX calculated according to physical model 420, and outputs the control instruction to driver 42. That is, position instruction generating unit 426 may output the position instruction that designates the target position of motor 18 as the control instruction.
The parameters defining physical model 420 is estimated by the above processing procedure. Then, the behavior of actuator 2 is determined according to physical model 420 including the estimated parameter.
The single vibration of actuator 2 causes actuator 2 to generate a load Fa=K×X+M1×V against load F by workpiece W. That is, load Fa reflects moment generated by the movement of plate 114 (mass M1).
As described above, in the impact absorbing operation of the embodiment, a physical spring (operation as a damper) is implemented by the control of motor 18. The control is performed based on the balanced position, so that the behavior according to the physical formula can be implemented even when the applied load is small. Because the behavior follows the physical formula, preliminary calculation, simulation, and the like in designing the control system are facilitated, and a deviation from the preliminary design is reduced even in the case where the actual device is configured.
In general, in a mechanism including a plurality of components, resistance between the components exists, and magnitude of the existing resistance changes depending on the surrounding environment, use history, and the like, so that it is difficult to perform pre-calculation and the like. On the other hand, in the impact absorbing operation of the embodiment, the behavior according to the physical formula can be implemented without depending on the magnitude of the resistance between the components. Furthermore, actuator 2 of the embodiment is driven by motor 18, so that the spring can be implemented with improved responsiveness and flexibility.
An elastic force generating operation of actuator 2 of the embodiment will be described below. In the elastic force generating operation, the load calculated according to Hooke's law (Fa=spring constant K×displacement ΔX) is generated. In the embodiment, when spring constant K is varied, the target load (elastic force) can be applied to workpiece W or the like.
When spring constant K is constant, load Fa proportional to displacement ΔX (the change from the natural length) is generated, but the magnitude of generated load Fa can be adjusted by temporally changing spring constant K.
For example, as illustrated in
In addition, in the case where the required load Fa is previously set, spring constant K corresponding to displacement ΔX may be calculated in each control period.
Spring constant changing unit 430 corresponds to the determination unit that determines spring constant K. Spring constant changing unit 430 may set spring constant K for each arbitrary section, or may set spring constant K for each control period. As an example, spring constant changing unit 430 sets spring constant K (t) in each control period according to a predetermined pattern.
Spring constant changing unit 430 may have a pattern outputting spring constant K (t) as illustrated in
Displacement calculating unit 432 calculates displacement ΔX generated in actuator 2 based on the detection signal from encoder 20. Displacement ΔX calculated by displacement calculating unit 432 is calculated based on the state where the object (in the example of
Load instruction generating unit 428 generates the control instruction so as to generate the drive force calculated based on a product of spring constant K and displacement ΔX generated in actuator 2. More specifically, load instruction generating unit 428 calculates load Fa (=K(t)×ΔX) to be generated in each control period based on displacement ΔX calculated by displacement calculating unit 432 and spring constant K (t) from spring constant changing unit 430, generates the control instruction (typically, a torque instruction) so as to generate calculated load Fa, and outputs the control instruction to driver 42. That is, load instruction generating unit 428 may output the torque instruction that designates torque to be generated by motor 18 as the control instruction.
By the above processing procedure, load Fa corresponding to displacement ΔX and spring constant K can be generated from actuator 2. Actually, because the moment generated by the movement of plate 114 (mass M1) is reflected, actuator 2 generates load Fa=K×X+M1×V.
When the physical model including the element of the damping is adopted, the damping constant may be temporally changed in addition to or instead of spring constant K.
As described above, in the elastic force generating operation of the embodiment, the physical spring (operation as the damper) is implemented by the control of motor 18. Because the behavior follows the physical formula, preliminary calculation, simulation, and the like in designing the control system are facilitated, and a deviation from the preliminary design is reduced even in the case where the actual device is configured.
In addition, in the elastic force generating operation of the embodiment, because the load is generated in proportion to the displacement generated in the actuator, a sensor or the like that measures the external force (load from the outside) becomes unnecessary. Accordingly, even in a manufacturing device having high rigidity or a manufacturing device having a non-negligible internal resistance, the generated load can be precisely controlled.
In addition, the spring constant can be changed in the elastic force generating operation of the embodiment, so that the target load according to the application can be generated while following the physical formula of generating the load in proportion to the displacement generated in the actuator.
The generation of the large load (impact force) can be prevented when workpiece W comes into contact with workpiece W or the like by switching between the impact absorbing operation and the elastic force generating operation.
In the impact absorbing operation, actuator 2 is not displaced at all unless the external force (external load) is applied. When the external force is applied, the parameter corresponding to the applied external force is calculated, and the displacement of actuator 2 is controlled by the physical model having the calculated parameter.
The switching condition switching between the impact absorbing operation and the elastic force generating operation may be based on the elapsed time after the load is applied to actuator 2 from the outside, the displacement (current position) generated in actuator 2, a trigger from the external device, or the like.
The functional configuration in
Selecting unit 434 has a switching condition 436, and selects and outputs one of the control instruction output from position instruction generating unit 426 and the control instruction output from load instruction generating unit 428 based on whether switching condition 436 is satisfied. Typically, selecting unit 434 validates the control instruction from load instruction generating unit 428 when switching condition 436 is satisfied while the control instruction from position instruction generating unit 426 is validated.
In the processing of
That is, controller 40 first performs the processing related to the impact absorbing operation. More specifically, controller 40 determines whether the load exceeding a predetermined value is applied to actuator 2 based on the detection signal from encoder 20 (step S2). When the load exceeding the predetermined value is not applied to actuator 2 (NO in step S2), the pieces of processing from step S2 are repeated.
When the load exceeding the predetermined value is applied to actuator 2 (YES in step S2), controller 40 calculates the speed of actuator 2 based on the detection signal by encoder 20 (step S4), and estimates the parameter of the physical model based on the calculated speed (step S6). Then, controller 40 creates the physical model including the estimated parameter (step S8). In this manner, controller 40 creates the physical model based on the displacement caused by the application of the load from the outside to actuator 2.
Controller 40 inputs the elapsed time after the load exceeding the predetermined value is applied to actuator 2 to the physical model, calculates the control instruction (the position instruction or the displacement instruction) in the current control period (step S10), and outputs the calculated control instruction to driver 42 (step S12). That is, controller 40 controls motor 18 such that actuator 2 generates the displacement according to the physical model.
Then, controller 40 determines whether the condition switching to the elastic force generating operation (switching condition 436) is satisfied (step S14). When the condition switching to the elastic force generating operation is not satisfied (NO in step S14), the pieces of processing from step S10 are repeated.
When the condition switching to the elastic force generating operation is satisfied (YES in step S14), controller 40 performs the processing related to the following elastic force generating operation. More specifically, controller 40 determines spring constant K in the current control period with reference to the previously-set pattern (step S20). In this manner, controller 40 determines spring constant K.
Subsequently, controller 40 acquires the current displacement of actuator 2 (step S22), and calculates the load to be generated by actuator 2 based on spring constant K and the current displacement of actuator 2 (step S24). Then, controller 40 calculates the control instruction (the position instruction or the displacement instruction) corresponding to the load to be generated (step S26), and outputs the calculated control instruction to driver 42 (step S28). In this manner, controller 40 controls motor 18 so as to generate drive force calculated based on the product of spring constant K and displacement ΔX generated in actuator 2.
As described above, when the predetermined switching condition is satisfied while actuator 2 is performing the impact absorbing operation (when the motor is controlled so as to generate the displacement according to physical model), controller 40 switches the control of motor 18 so as to generate the drive force calculated based on the product of spring constant K and displacement ΔX generated in actuator 2.
Then, controller 40 determines whether an end condition of the elastic force generating operation is satisfied (step S30). When the end condition of the elastic force generating operation is not satisfied (NO in step S30), the pieces of processing from step S20 are repeated.
When the end condition of the elastic force generating operation is satisfied (YES in step S30), the processing ends.
Although
For convenience of description, the configuration including single actuator 2 has been exemplified, but a mechanism including the plurality of actuators 2 may be implemented. An example of the drive mechanism including actuator 2 will be described below.
(f1: Stage Mechanism with One Degree of Freedom)
In the stage mechanism of
In the stage mechanism of
Controller 40 includes load instruction generating units 428-1, 428-2, 428-3, spring constant changing units 430-1, 430-2, 430-3, and displacement calculating units 432-1, 432-2, 432-3 in order to control actuators 2-1, 2-2, 2-3.
In order to control the load generated by the entire surface of plate 114, the timing at which each spring constant is changed or updated is controlled among spring constant changing units 430-1, 430-2, 430-3. The spring constants may be gradually changed in synchronization, or the spring constants may be arbitrated so as to correct the variation in the displacement.
The load generated by plate 114 can be controlled on the entire surface by adopting such the control logic.
In the impact absorbing operation, the physical models corresponding to the actuators are synchronized with each other, so that the load generated in plate 114 can be controlled on the entire surface.
(f2: Stage Mechanism with Multiple Degrees of Freedom)
With reference to
The use of stage mechanism 110A in
(f3: Others)
As described above, actuator 2 of the embodiment can be used alone or as the stage incorporating actuator 2. Furthermore, actuator 2 can also be used as a manufacturing device including the stage.
An example of the application using actuator 2 of the embodiment will be described.
With reference to
Stage mechanism 110A includes one or the plurality of actuators 2 that are driven by motor 18 to generate the displacement in a first direction (Z-axis direction). Because the configuration of stage mechanism 110A has been described with reference to
Conveyance mechanism 150 includes a support column 152 and a plate 154. Plate 154 is connected to support column 152 and is movable in the vertical direction of gravity by a drive mechanism (not illustrated).
Adsorption holes are made on the surface of plate 154. Workpiece W2 is conveyed in the state of being adsorbed to the surface of plate 154 by an adsorption mechanism (not illustrated).
With reference to
First, the displacement of actuators 2-1, 2-2, 2-3 of stage mechanism 110A is adjusted such that workpiece W1 and workpiece W2 are parallel to each other ((1) a parallel maintaining operation). That is, controller 40 gives the control instruction to stage mechanism 110A such that workpiece W1 and workpiece W2 are parallel to each other according to workpiece W2 superimposed on workpiece W1.
The parallel maintaining operation may be implemented by feedback control based on a detection signal by a sensor (not illustrated) provided in conveyance mechanism 150. In the parallel maintaining operation, a predetermined distance margin is provided between the workpieces such that workpiece W1 and workpiece W2 do not collide with each other by orientation adjustment.
After workpiece W1 and workpiece W2 are adjusted to be parallel by the parallel maintaining operation, the control is performed to reduce the distance between workpiece W1 and workpiece W2, namely, to superimpose workpiece W2 on workpiece W1 ((2) a workpiece approaching operation). In the workpiece approaching operation, conveyance mechanism 150 brings workpiece W2 close to workpiece W1 and adjusts the displacement of actuators 2-1, 2-2, 2-3 of stage mechanism 110A to maintain workpiece W1 and workpiece W2 in parallel.
Immediately before workpiece W1 and workpiece W2 come into contact with each other, the impact absorbing operation is started ((3) the impact absorbing operation). That is, controller 40 creates the physical model based on the displacement in actuator 2 caused by workpiece W2 contacting workpiece W1. Then, controller 40 generates the control instruction that causes actuator 2 to be displaced according to the physical model. As described above, when workpiece W2 comes into contact with workpiece W1 to apply the load to actuator 2, actuator 2 operates like the spring according to the physical model as described above. The excessive load and the point load caused by the contact between workpiece W1 and workpiece W2 can be avoided by the impact absorbing operation.
Thereafter, when the predetermined switching condition is satisfied, the elastic force generating operation is started ((4) the elastic force generating operation). That is, the control instruction that generates the drive force calculated based on the product of spring constant K and displacement ΔX generated in actuator 2 is generated. Pressing force is generated between workpiece W1 and workpiece W2 by the elastic force generating operation, and the pasting of workpiece W1 and workpiece W2 is completed.
With reference to
More specifically, controller 40 adjusts the displacement of actuators 2-1, 2-2, 2-3 of stage mechanism 110A such that workpiece W1 and workpiece W2 are parallel to each other based on inclination of workpiece W2 adsorbed by conveyance mechanism 150 (step S106). In this manner, controller 40 gives the control instruction to stage mechanism 110A such that workpiece W1 and workpiece W2 are parallel to each other according to workpiece W2 superimposed on workpiece W1.
Then, controller 40 determines whether the switching condition switching to the workpiece approach operation is satisfied based on a parallelism degree between workpiece W1 and workpiece W2 (step S108). When the switching condition is not satisfied (NO in step S108), the pieces of processing from step S106 are repeated.
When the switching condition is satisfied (YES in step S108), controller 40 adjusts the displacement of actuators 2-1, 2-2, 2-3 of stage mechanism 110A such that workpiece W1 and workpiece W2 are maintained in parallel (step S110). Then, controller 40 determines whether the switching condition switching to the impact absorbing operation is satisfied based on the distance between workpiece W1 and workpiece W2 (step S112). When the switching condition is not satisfied (NO in step S112), the pieces of processing from step S110 are repeated.
When the switching condition is satisfied (YES in step S112), controller 40 starts the impact absorbing operation (step S114). In the impact absorbing operation, the pieces of processing according to steps S2 to S14 in
When the switching condition from the impact absorbing operation to the elastic force generating operation is satisfied, controller 40 starts the elastic force generating operation (step S116). In the elastic force generating operation, the pieces of processing according to steps S20 to S28 in
When the superimposition of workpiece W1 and workpiece W2 is completed, controller 40 outputs the instruction to convey superimposed workpieces W1 and W2 to the next process (step S118). Thus, one processing is completed.
As described above, by the series of control including the impact absorbing operation and the elastic force generating operation of the embodiment, the workpieces can be pressed with the surface pressure between the workpieces uniformed while the impact generated between the workpieces to reduce the damage generated on the workpieces. Thus, the generation of a defective product can be reduced and the workpiece of higher quality can be manufactured.
As described above, the control (impact absorbing operation and/or elastic force generating operation) of actuator 2 of the embodiment can be applied to any application including contact between the objects, such as conveyance, superimposition, bonding, and insertion.
In addition, the impact absorbing operation of actuator 2 of the embodiment can also be applied to a spring mechanism such as vibration removal and vibration suppression, a tensioner, and the like alone.
In addition, the elastic force generating operation of actuator 2 of the embodiment can be applied to a mechanism that generates an arbitrary load such as a press device alone.
According to the embodiment, the actuator behaves according to the physical formula, so that the simulation for the creation of the control logic and the facility design can be easily performed. In addition, even in the case where the actual device is configured, the deviation from the previous design is reduced.
Impedance control and admittance control exist as an example of a technique of controlling the load and the position.
The impedance control is a technique of adjusting characteristic (softness) of the actuator so as to remain at the target position when the load is applied to the actuator in the state where the target position and the impedance are previously set. For this reason, the control absorbing the impact force as in the impact absorbing operation of the embodiment is not implemented, but rather, sometimes the larger impact force is generated. In addition, in the impedance control, because the target position is given, the generated load cannot be controlled unlike the elastic force generating operation of the embodiment.
In the admittance control, when the load is applied to the actuator while the impedance is previously set, the operation speed (position in each control period) is controlled based on the impedance. Consequently, only the behavior based on the previously-set impedance can be performed, so that the behavior cannot be changed according to the impact force unlike the impact absorbing operation of the embodiment. In addition, because the admittance control determines the behavior when the load is applied to the actuator, the generated load cannot be controlled unlike the elastic force generating operation of the embodiment.
As described above, the impact absorbing operation and the elastic force generating operation of the embodiment are completely different from the impedance control and the admittance control.
The above embodiment includes the following technical ideas.
[Configuration 1]
A manufacturing device comprising:
[Configuration 2]
The manufacturing device described in configuration 1, wherein the controller further comprises a selecting unit (434) configured to select and validate the control instruction from one of the second instruction generating unit and the third instruction generating unit.
[Configuration 3]
The manufacturing device described in configuration 2, wherein the selecting unit is configured to validate the control instruction from the third instruction generating unit when a predetermined switching condition is satisfied while the control instruction from the second instruction generating unit is validated.
[Configuration 4]
The manufacturing device described in configuration 3, wherein the switching condition is based on an elapsed time after the external load is applied to the actuator.
[Configuration 5]
The manufacturing device described in configuration 3, wherein the switching condition is based on the displacement generated in the actuator.
[Configuration 6]
The manufacturing device described in any one of configurations 1 to 5, wherein the second instruction generating unit is configured to output a position instruction designating a target position of the motor as the control instruction, and the third instruction generating unit is configured to output a torque instruction designating torque to be generated by the motor as the control instruction.
[Configuration 7]
The manufacturing device described in any one of configurations 1 to 6, wherein the model creation unit is configured to create the physical model when a predetermined load is applied to the actuator from an outside.
[Configuration 8]
A control method for a stage mechanism (110A) on which a first workpiece (W1) is disposed, the stage mechanism comprising one or more actuators (2) each driven by a motor (18) to generate displacement in a first direction, the control method comprising:
[Configuration 9]
A control program (412) for controlling a stage mechanism (110A) on which a first workpiece (W1) is disposed, the stage mechanism comprising one or more actuators (2) each driven by a motor (18) to generate displacement in a first direction, the control program causing a computer to perform:
It should be considered that the disclosed embodiment is an example in all respects and not restrictive. The scope of the present invention is defined by the claims rather than the above description, and the present invention is intended to include the claims, equivalents of the claims, and all modifications within the scope.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2021-004650 | Jan 2021 | JP | national |
This application is a National Stage of International Application No. PCT/JP2021/009176 filed Mar. 9, 2021, claiming priority based on Japanese Patent Application No. 2021-004650 filed Jan. 15, 2021.
| Filing Document | Filing Date | Country | Kind |
|---|---|---|---|
| PCT/JP2021/009176 | 3/9/2021 | WO |
