1. Field of the Invention
The present invention relates to a manufacturing method of a hermetic container, and a manufacturing method of an image displaying apparatus. In particular, the present invention relates to a manufacturing method of an image displaying apparatus of which the inside has been vacuumized and which is equipped with an electron-emitting device and a phosphor film.
2. Description of the Related Art
Conventionally, image displaying apparatuses of a flat panel type such as an organic LED display (OLED), a field emission display (FED), a plasma display panel (PDP), and the like have been well known. Each of the image displaying apparatuses is manufactured by hermetically sealing glass substrates facing each other and has a container in which the internal space is partitioned to an external space. To manufacture such a hermetic container, a spacing distance defining member, a local adhesive and the like are arranged between the facing glass substrates as necessary, a sealant is arranged in a frame shape to the peripheral portions of the glass substrates, and a heat sealing process is then performed. An example of the hermetic container manufactured in this way is illustrated in
United States Patent Application Publication No. US2006/0082298 discloses a manufacturing method of a container of an OLED. In this method, a frame member and a sealant (frit) are arranged in the circumferential edge portions of a first glass substrate and a second glass substrate arranged to face each other. Subsequently, a laser beam is irradiated along an extending direction of the sealant so that a certain temperature is substantially maintained in the sealant, thereby achieving hermetic sealing.
Japanese Patent Application Laid-Open No. 2008-059781 discloses a manufacturing method of a container of an FED or a PDP. In this method, a sealant is arranged on four sides between a first glass substrate and a second glass substrate arranged to face each other. Subsequently, a lease beam is irradiated to the sealant on each of the four sides to melt the sealants on the four sides together, thereby achieving hermetic sealing.
As just described, there have been conventionally known not only a sealing method whereby a laser beam is simply irradiated to the four sides but also a sealing method whereby a laser irradiation condition is changed and a sealing method whereby a laser irradiation route, laser irradiation order and the like are variously improved. However, as illustrated in
The present invention aims to provide a manufacturing method of a highly-reliable hermetic container having both joining strength and airtightness.
The present invention is directed to a manufacturing method of a hermetic container which has a first glass substrate and a second glass substrate which is sealed to the first glass substrate to form at least a part of the hermetic container together with the first glass substrate.
The manufacturing method in the present invention is characterized by comprising steps of: providing, between the first glass substrate and the second glass substrate, a sealant of which a viscosity has a negative temperature coefficient, of which a softening point is lower than that of each of the first glass substrate and the second glass substrate, which has a discontinuous portion, and which extends in a frame shape; and heating and melting the sealant to seal the first glass substrate and the second glass substrate to each other by, in a state of the sealant being pressed in a thickness direction thereof, irradiating local heating light to the sealant while scanning an irradiation region of the local heating light to the sealant along a direction in which the sealant extends in the frame shape, wherein the irradiation of the local heating light to the sealant is performed so as to form a continuous sealed portion between the first glass substrate and the second glass substrate by, after irradiating the local heating light to one region of two regions of the sealant facing each other across the discontinuous portion to heat and melt the one region, irradiating the local heating light to the other region of the sealant to heat and melt the other region and thus closing the discontinuous portion by the melted sealant.
According to the present invention, when the local heating light is irradiated to the sealant, a boundary between a region (sealed portion) to which the local heating light was irradiated and a region (unsealed portion) to which the local heating light is not yet irradiated is formed at the discontinuous portion formed on the sealant. Consequently, it is possible to avoid that a local contraction difference occurs in the sealant when irradiation of the local heating light is started from an arbitrary position on the sealant, whereby it is thus possible to reduce occurrence of a crack. Since the discontinuous portion can be closed up by heating and melting the sealant adjacent to the discontinuous portion, the continuous sealed portion is circumferentially formed between the glass substrates, whereby the highly-reliable hermetic container having both joining strength and airtightness can resultingly be obtained.
Further features of the present invention will become apparent from the following description of exemplary embodiments with reference to the attached drawings.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. A manufacturing method of a hermetic container according to the present invention can be applied to a manufacturing method of a container to be used for an FED, an OLED, a PDP or the like having a device of which the internal space is required to be hermetically cut off from an external atmosphere. Especially, in an image displaying apparatus such as the FED or the like of which the inside is set as an evacuated space, joining strength which can withstand an atmospheric pressure load generated due to a negative pressure of the internal space is required. Here, according to the manufacturing method of the hermetic container in the present invention, both securement of the joining strength and airtightness can highly be achieved. However, the manufacturing method of the hermetic container according to the present invention is not limited to the above-described manufacturing method of the hermetic container but can be widely applied to a manufacturing method of a hermetic container having sealed portions, which are required to have airtightness, on peripheral portions of the glass substrates facing each other.
Initially, a method of sealing the glass substrates to each other in the manufacturing method of the hermetic container according to the present invention will be described with reference to
In the two embodiments respectively illustrated in
(Step 1)
Initially, a first glass substrate 3 is prepared. As the first glass substrate, one glass substrate of a pair of the glass substrates constituting the hermetic container may be used. Further, a frame member which is positioned at the circumferential portion of the hermetic container and sandwiched between the pair of the glass substrates may be used. Furthermore, an integrated object which is constituted by integrating one of the pair of the glass substrates and the frame member to each other may be used.
Next, the sealant is provided between the pair of the glass substrates so as to have slit portions 3a, 3b, 3c and 3d serving as discontinuous portions and have a frame shape respectively at fourth, second, third and first corner portions C4, C2, C3 and C1, as illustrated in
More specifically, as illustrated in
Next, the glass substrate on which the sealant 1 has been formed is temporarily baked. In this case, it should be noted that to temporarily bake the glass substrate corresponds to an operation that the glass substrate is heated at a temperature equal to or higher than a softening point of the sealant and equal to or lower than a temperature at which the sealant is not decomposed and crystallized. Subsequently, the one glass substrate (the first glass substrate 3 here) having the sealant 1 and the other glass substrate (a second glass substrate 2 here) are arranged to face each other, whereby an assembly body as illustrated in
In the present embodiment, the shape of the slit portion serving as the discontinuous portion is a linear shape. However, the shape may be a curved shape as illustrated in
Further, the slit portions may be arranged as illustrated in
(Step 2)
Subsequently, a load is applied to the assembly body by a not-illustrated pressurizing unit so as to compress the sealant 1 to its thickness direction (i.e., the direction in which the first glass substrate 3 and the second glass substrate 2 face each other). The pressure by the pressurizing means is directly applied to the first glass substrate 3 and/or the second glass substrate 2. Therefore, in other words, the step 2 is the step of pressing the first glass substrate 3 toward the second glass substrate 2 or pressing the second glass substrate 2 toward the first glass substrate 3.
The pressure is performed in a later-described step 3 to supplement driving force for absolutely protruding the sealant heated and melted by the irradiation of the local heating light into the slit portion being the discontinuous portion while maintaining the state that the first and second glass substrates are arranged to face each other. Incidentally, when the sealant can be pressed by the own weight of the glass substrate itself, any specific pressurizing unit is not necessary. Here, it should be noted that the pressurizing unit includes a mechanical unit of externally pressing the glass substrate through a weighting pin or the like, and an evacuating unit of pressing the glass substrate by using a pressure difference between the inside of the assembly body and an external space generated by evacuating the inside of the assembly body. Further, the pressurizing unit includes a positive pressure unit of pressing the glass substrate by disposing the assembly body within a pressure container and then setting the inside of the pressure container to positive pressure.
Incidentally, in the process of providing the sealant between the first glass substrate and the second glass substrate in the step 1, the glass substrate to which the sealant is formed does not have to be only either the first glass substrate or the second glass substrate. Namely, in case of providing the sealant between the first glass substrate and the second glass substrate, it is unnecessary to use only a method of, after forming the sealant on the first glass substrate or the second glass substrate, bringing the formed sealant into contact with the second glass substrate or the first glass substrate. For example, it is possible to use a method in which a region A and a region B which are adjacent to each other through a discontinuous portion when the first glass substrate and the second glass substrate are arranged to face each other are previously defined on the first glass substrate and the second glass substrate. More specifically, the region A is previously defined on the first glass substrate, and the region B is previously defined on the second glass substrate. Then, after the sealants were formed respectively on the region A and the region B, the first glass substrate and the second glass substrate are arranged to face each other.
(Step 3)
Subsequently, local heating light 41 is irradiated to each of the linear sealants 1a to 1d along the direction in which the sealant 1 extends in the frame shape, while maintaining the state that the sealant 1 is being pressed. In this case, the present invention can be carried out by performing a sequence of irradiation to the respective linear sealants 1a to 1d as described below.
The sequence of irradiation of the local heating light to the sealant 1 having the frame shape includes following sub-steps 3-1 to 3-5.
(Sub-step 3-1)
First, four light sources for generating the local heating light are prepared. Here, it should be noted that the irradiation start position of the local heating light to the linear sealant is set to, from the two ends of each of the linear sealants 1a to 1d, the one end which does not face the slit portion.
(Sub-step 3-2)
Hereinafter, the sequence of the irradiation of the local heating light will be described in detail by taking the sequence of scanning the linear sealant 1a, the slit portion 3a and a part of the linear sealant 1c as an example. The irradiation of the local heating light by the not-illustrated light source is started from the left 1D side illustrated in
(Sub-step 3-3)
In the sequence of scanning the linear sealant 1b, the slit portion 3b and a part of the linear sealant 1d, as well as the sub-step 3-2, the irradiation start position of the local heating light is set to, from the two ends of the linear sealant 1b, the one end which does not face the slit portion. Then, the irradiation of the local heating light advances toward the slit portion 3b formed by the linear sealants 1b and 1d. On this occasion, at a time when the irradiation of the local heating light to the linear sealant 1b is started, the linear sealant 1d positioned on the irradiation end side of the local heating light may not be irradiated yet by the local heating light. However, at least when the irradiation of the local heating light to the linear sealant 1b comes to the adjacent linear sealant 1d across the slit portion 3b, it is necessary to reach a stage that the linear sealant 1d was already irradiated by another heating unit (local heating light). In other words, it is necessary to reach a stage that the pair of the glass substrates were already sealed locally.
(Sub-step 3-4)
In this sub-step, the local heating light is irradiated to the linear sealant 1d, the slit portion 3d and a part of the linear sealant 1a, as well as the above sub-steps.
(Sub-step 3-5)
In this sub-step, the local heating light is irradiated to the linear sealant 1c, the slit portion 3c and a part of the linear sealant 1b, as well as the above sub-steps.
Although the irradiations of the local heating light to the respective linear sealants can be started at the same time, the present invention is not limited to such timing. For example, when the hermetic container in which the length of each of the linear sealants 1a and 1b is set to 800 mm and the length of each of the linear sealants 1c and 1d is set to 450 mm is manufactured, irradiation speed (scanning speed) of the local heating light to all of the linear sealants 1a to 1d is set to 400 mm/sec. In this case, a time necessary for scanning the region of each of the relatively longer linear sealants 1a and 1b is 2 seconds, and a time necessary for scanning the region of each of the relatively shorter linear sealants 1c and 1d is 1.125 seconds. Therefore, in the embodiment of the present invention, in the sub-step 3-4, delay of the irradiation start time less than 2 seconds can be permitted in regard to the irradiation start time in the sub-step 3-3. Likewise, in the sub-step 3-5, delay of the irradiation start time less than 2 seconds can be permitted in regard to the irradiation start time in the sub-step 3-2. To the contrary, when the irradiation start time in the sub-step 3-4 precedes the irradiation start time in the sub-step 3-2, in the sub-step 3-2, delay of the irradiation start time less than 1.25 seconds can be likewise permitted in regard to the irradiation start time in the sub-step 3-4.
When focusing on the linear sealants 1a and 1d which together form the slit portion 3d, the above-described sub-steps 3-1 to 3-5 result in the following scanning. The relevant scanning will be described in detail with reference to
Namely, the irradiation of the local heating light is started from the one end, in the two ends of the linear sealant 1a, which does not face the slit portion, and then the irradiation of the local heating light is scanned toward the other end of the linear sealant 1a. On another front, the irradiation of the local heating light is started from the not-illustrated one end, in the two ends of the linear sealant 1d, which does not face the slit portion, and then the irradiation of the local heating light is scanned toward the other end of the linear sealant 1d, that is, toward the end which faces the side surface of the linear sealant 1a across the slit portion. Thus, as illustrated in
As described above, in consideration of the scanning speed of the local heating light and the length necessary for the scanning of the sealant, a temporal gap (or difference) between the irradiation start time of the local heating light to the linear sealant 1d and the irradiation start time of the local heating light to the linear sealant 1a is set to be within a predetermined range. Thus, it is possible to complete the sealing of all the sealants without the process that the sealed portion to which the local heating light was already irradiated and the unsealed portion to which the local heating light is not yet irradiated are directly adjacent to each other in the continuous sealants.
Incidentally, in the process that the local heating light is irradiated and scanned, the unsealed portion and the sealed portion exist respectively before and after the irradiation region moving in the scanning direction. However, since the sealant has been softened and melted in the irradiation region of the local heating light, a tensile stress caused by cooled contraction of the sealed portion is not generated between the sealed portion and the unsealed portion. Therefore, it should be noted that the sealed portion and the unsealed portion which are adjacent to each other across the irradiation region do not become an occurrence factor of a crack being the problem to be solved by the present invention. Consequently, in the present invention, the above state “the sealed portion to which the local heating light was already irradiated and the unsealed portion to which the local heating light is not yet irradiated are directly adjacent to each other in the continuous sealants” includes the state that the sealed portion and the unsealed portion are adjacent to each other without the irradiation region.
The local heating light only has to be able to locally heat the vicinity of the sealing region, and a semiconductor laser is preferably used. More specifically, a processing semiconductor laser having a wavelength in an infrared region is preferable in terms of performance of locally heating the frame-shape sealant 1, permeability of each of the glass substrates 2 and 3, and the like. As a condition of irradiating the local heating light 41, it is preferable to select the local heating light so that a softening volume of the sealant per unit time increases, in the point of obtaining a protruding amount of the sealant enabling to absolutely close up the discontinuous portion. For this reason, when it is assumed that the beam diameter of the laser in the scanning direction is φS, the scanning speed is v, and the density of the laser beam intensity is I, then it is possible, by defining a value of I·φS/v, to secure the sufficient protruding amount of the sealant.
As described above, since the viscosity of the sealant has the negative temperature coefficient, the viscosity is once lowered and thus the sealant is fluidized when the sealant is heated and melted. However, when the irradiation of the local heating light ends, the viscosity again increases, and the state of the sealant returns to that in the room temperature. Therefore, in the sealant which is formed in the continuous frame shape as illustrated in
However, in the present embodiment, the irradiation of the local heating light is performed so that the boundary, between the sealed portion and the unsealed portion, at which the contraction difference can occur does not exist within the range of the continuous sealant, as described above. Further, in the slit portion which is provided within the range of the scanning path of the frame-shape sealant, the irradiation of the local heating light is performed so that the protruding portion of the softened sealant closes up the slit portion. For example, as illustrated in
Incidentally, it is possible to increase the protruding amount of the sealant in the scanning direction of the local heating light, by increasing the inner pressure of the sealant when the local heating light is irradiated.
Before the local heating light is irradiated, the first and second glass substrates 2 and 3 are temporarily adhered to each other to suppress an expansion of the space therebetween caused by respective warps of the glass substrates 2 and 3, thereby minimizing a pressure loss. It should be note that such an operation is included in the present invention from the viewpoint of maintaining pressure of the melted and softened sealant.
For example, although the sealant made of the glass frit is thermally expanded by heat, there is a case where it is difficult to close up the slit portion only by an effect of such thermal expansion. Consequently, in order to effectively increase the protruding amount of the sealant in the heating, it is necessary to irradiate the local heating light to the sealant in the state that pressing force is being added to the sealant. The sealant includes the three regions, that is, the hardened region to which the sealing has already been completed, the hardened region to which the sealing is not performed, and the softened region to which the local heating light is being irradiated. Here, in the pressure to the sealant, it is specifically preferable to selectively press the softened region to which the irradiation is being performed. This is because, when the sealant is pressed through the substrate to be sealed, the pressure to the two hardened regions is dispersed, whereby it is possible to control an influence of suppressing the pressure to the irradiation region.
The width and the shape of the slit portion to be formed in the sealant can properly be changed according to the substance and the film thickness of the sealant, and the irradiation range and the scanning speed of the local heating light, so that the slit portion can more absolutely be closed up.
Further, it is preferable to set the width of the slit portion (the distance between the sealants adjacent to each other across the discontinuous portion) to be several times or less the film thickness of the sealant. Thus, it is possible to obtain a continuous film thickness distribution between the regions in which the slit portion and the sealants are previously arranged.
On the other hand, when the width of the slit portion is too narrow, there is a case where the sealant on the opposite side across the slit portion is heated together with the sealant to be originally heated, and thus a melted history occurs in the sealant on the opposite side because of heat conduction and alignment of the irradiation range of the local heating light. Thus, it is preferable to secure, as the width of the slit portion, the width of 0.5 times or more the film thickness of the sealant.
Further, the slit portion does not necessarily have the linear shape as illustrated in
In the example illustrated in
In the present embodiment, the whole sealant, which consists of the four linear sealants, has the rectangular shape in which the four slit portions each formed between the adjacent linear sealants are provided. However, the present invention is not limited to this shape. For example, the sealant has such a shape as illustrated in each of
In the example illustrated in
In the constitutions as illustrated in
In the example illustrated in
In the example illustrated in
Subsequently, an image displaying apparatus which is manufactured by the above-described manufacturing method of the hermetic container will be described.
A large number of electron-emitting devices 27 for emitting electrons in response to an image signal are provided on the rear plate 13, and matrix wirings for driving (X-directional wirings 28 and Y-directional wirings 29) for operating each of the electron-emitting devices 27 in response to the image signal are formed. A phosphor film 34 composed of phosphor for emitting light and displaying an image upon receiving the irradiation of electrons emitted from the electron-emitting devices 27 is provided on the face plate 12 positioned to face the rear plate 13. A black stripe 35 is further provided on the face plate 12. The phosphor films 34 and the black stripes are provided with a state that those are alternately arranged. A metal back 36 composed of a thin Al film is formed on the phosphor film 34. The metal back 36, which has a function of serving as an electrode for attracting electrons, receives potential supplied from a high-voltage terminal Hv provided on the container 10. A non-evaporable getter 37 composed of a thin Ti film is formed on the metal back 36.
Since it is sufficient that the face plate 12, the rear plate 13 and the frame member 14 are transparent and have translucency, soda lime glass, high strain point glass, non-alkaline glass or the like can be used for them. It is desirable that these glass members have excellent wavelength translucency in a used wavelength of local heating light and an absorption wavelength region of a sealant to be described later.
Incidentally, the container 10 of the image displaying apparatus 11 is manufactured as indicated below. Initially, the frame member (first glass substrate) 14 and the rear plate (second glass substrate) 13 are sealed with each other according to the above-described steps 1 to 3. Further, the face plate (first glass substrate) 12 and the frame member (second glass substrate) 14 are likewise sealed with each other according to the above-described steps 1 to 3. Thus, the container 10 in which the frame member 14 is inserted between the face plate 12 and the rear plate 13 is manufactured. Here, in the present invention, it should be noted that the first glass substrate means the substrate to which the sealant is formed and the second glass substrate means the substrate which is disposed to face the first glass substrate, whereby the concrete material that the first or second glass substrate means is different from others, depending on a situation.
In more general, the present invention is to provide the manufacturing method of the hermetic container at least a part of which consists of the rear plate 13 and the face plate 12. Therefore, the container 10 can also be manufactured in such a manner that the glass substrate to which the protruding portion having the shape of the frame member 14 is integrally formed in advance is used as one of the rear plate 13 and the face plate 12 and the relevant glass substrate is sealed to the other of the rear plate 13 and the face plate 12. Moreover, the container can also be manufactured in such a manner that the face plate 12 and the frame member 14 are precedently sealed to each other and the read plate 13 and the frame member 14 are then sealed to each other.
Further, although the present embodiment is directed to the image displaying apparatus, the present invention can more generally be applied to the sealing between the first glass substrate and the second glass substrate. In this case, the local heating light may be irradiated from either the first glass substrate side or the second glass substrate side.
Hereinafter, concrete examples of the above-described embodiment will be described in detail.
The above-described manufacturing method of the heretic container is applied to this example. Namely, the rear plate (first glass substrate) having the frame member and the electron-emitting devices is sealed to the face plate (second glass substrate), and the evacuation hole is sealed by the cover member while evacuating the internal space through the evacuation hole. Thus, the vacuum hermetic container which is applicable as the container for the FED is manufactured.
(Step 1)
Initially, the first glass substrate 3 made by the high strain point glass substrate having the thickness 1.8 mm (PD200: made by Asahi Glass Co., Ltd.) was prepared. In this case, the matrix driving wirings were previously formed on the first glass substrate 3. Next, the not-illustrated frame member having the cross sectional height 1.5 mm and the cross sectional width 4 mm made by the PD 200 was sealed to the peripheral portion of the first glass substrate 3. Here, the frame member and the first glass substrate 3 were sealed to each other by temporarily baking and then really baking the screen-printed glass frit in the atmospheric firing furnace. Subsequently, the electron-emitting devices were formed at the respective matrix crossings of the matrix driving wirings. Thus, the first glass substrate 3 having the electron-emitting devices, the matrix driving wirings and the frame member was prepared.
Next, as illustrated in
Further, the length of each of the relatively longer linear sealants 1a and 1b was set to 800 mm, and the length of each of the relatively shorter linear sealants 1c and 1d was set to 450 mm.
(Step 2)
Subsequently, the first glass substrate 3 having the not-illustrated frame member and the second glass substrate 2 made of the high strain point glass substrate (PD200) having the thickness 1.8 mm were arranged to face each other while aligning them so that the glass substrates were in contact with each other through the sealant 1 (see
(Step 3)
Subsequently, the laser was irradiated to the assembly body including the first glass substrate 3 having the not-illustrated frame member, the sealant 1 and the second glass substrate 2. The method of irradiating the laser will be described hereinafter.
As the laser source, the not-illustrated two semiconductor laser heads provided on the not-illustrated breadboard to have the mural irradiation position interval 50 mm were used. The breadboard and the assembly body were arranged so as to perform the irradiation to the sealant while causing the one local heating light to follow the other local heating light by relatively moving the breadboard in regard to the sealant in the direction being in parallel with the arrangement direction of the two beam irradiation spots. The irradiation conditions of the two laser heads arranged on the breadboard were as follows. That is, the laser (first local heating light) from the laser precedently performing the irradiation to the sealant was the laser having the wavelength 980 nm, the laser power 212 W and the effective diameter 2 mm, and was scanned at speed 1000 mm/s. On the other hand, the laser head subsequently performing the irradiation to the sealant was disposed after the laser head precedently performing the irradiation by 0.05 seconds, that is, by the distance 50 mm as the irradiation spot in the scanning direction, and such an interval was maintained during the scanning. At that time, the laser (second local heating light) from the laser head subsequently performing the irradiation was set to the laser having the wavelength 980 nm, the laser power 212 W and the effective diameter 2 mm. Further, as the laser power of the local heating light 41, the laser power previously adjusted to set the temperature of the sealant 1 heated by the irradiation of the local heating light 41 to 700° C. was used.
The four sets of the laser sources arranged on the breadboard were prepared. Then, the end of each of the linear sealants 1a to 1d illustrated in
Here, the effective diameter of the laser was set to the beam irradiation range indicating the intensity of e−2 (e is a natural logarithm) times the peak intensity.
As just described, the respective slit portions 3a to 3d were closed up by the sealant, and the continuous sealed portion was formed between the frame member on the first glass substrate 3 and the second glass substrate 2, whereby the hermetic container was manufactured. Next, the obtained hermetic container was evacuated, and the container of the FED was manufactured. When the obtained FED was operated, it was confirmed that the FED could stably emit electrons and display images for a long time, and it was thus confirmed that the obtained container had the airtightness and the intensity of which the levels were suitable for the FED.
In the example 2, the sealants 1a to 1d were formed in the shape illustrated in
While the present invention has been described with reference to the exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the following claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.
This application claims the benefit of Japanese Patent Application No. 2010-144893, filed Jun. 25, 2010, which is hereby incorporated by reference herein in its entirety.
Number | Date | Country | Kind |
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2010-144893 | Jun 2010 | JP | national |