MANUFACTURING METHOD OF LIQUID CRYSTAL PANEL AND SURFACE TREATMENT METHOD OF ALIGNMENT FILM

Abstract

In order to improve the state of image irregularities of a liquid crystal panel, a plasma treatment is performed for an alignment film using a treatment gas such as hydrogen and/or deuterium, or a surface treatment is performed in which an alignment film is immersed in deuterium oxide. As a result, moisture contained in the alignment film is removed, and re-adsorption of moisture is also suppressed, thereby reducing image irregularities.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic cross-sectional view of an example of a treatment apparatus performing a first treatment method according to the present invention.

FIG. 2 is a schematic cross-sectional view of an example of a treatment apparatus performing a second treatment method according to the present invention.

FIG. 3 is a graph showing dehydration effects of various treatment methods.

FIG. 4 is a schematic cross-sectional view of an example of a liquid crystal panel using an inorganic alignment film according to the present invention.

FIG. 5 is a schematic cross-sectional view of an oblique deposition apparatus.

FIG. 6 is a flowchart illustrating a manufacturing process of a liquid crystal panel.

Claims

1. A method for manufacturing a liquid crystal panel, comprising the steps of: preparing two substrates having an alignment film on at least one surface thereof; anddisposing a liquid crystal between the two substrates,wherein before said disposing step a surface treatment step is performed in which the alignment film is exposed to an atmosphere containing at least one component selected from the group consisting of deuterium, hydrogen deuteride, and tritium, andafter the surface treatment, the liquid crystal is brought into contact with the alignment film.

2. The method for manufacturing a liquid crystal panel, according to claim 1, wherein the surface treatment step is performed at a pressure in the range of 50 to 400 Pa.

3. The method for manufacturing a liquid crystal panel, according to claim 1, wherein the alignment film is an inorganic alignment film formed by oblique deposition.

4. A method for manufacturing a liquid crystal panel, comprising the steps of: preparing two substrates having an alignment film on at least one surface thereof; anddisposing a liquid crystal between the two substrates,wherein before said disposing step a surface treatment step is performed in which the alignment film is exposed to deuterium oxide, andafter the surface treatment, the liquid crystal is brought into contact with the alignment film.

5. The method for manufacturing a liquid crystal panel, according to claim 1, further comprising a step of forming transistors on at least one of the substrates.

6. The method for manufacturing a liquid crystal panel, according to claim 4, further comprising a step of forming transistors on at least one of the substrates.

7. A method for performing a surface treatment of an alignment film, comprising the step of: exposing the alignment film to an atmosphere containing at least one component selected from the group consisting of deuterium, hydrogen deuteride, and tritium.

8. A method for performing a surface treatment of an alignment film, comprising the step of: exposing the alignment film to deuterium oxide.

9. A liquid crystal panel comprising two substrates having an alignment film on at least one surface thereof and a liquid crystal between the two substrates, said liquid crystal panel being formed by a method comprising the steps of: preparing the two substrates having an alignment film on at least one surface thereof;performing a surface treatment in which an alignment film is exposed to (i) deuterium oxide or (ii) an atmosphere containing at least one component selected from the group consisting of deuterium, hydrogen deuterium, and tritium, whereby moisture adsorbed by the alignment film is removed and further adsorption of moisture is inhibited; andbringing the liquid crystal into contact with the alignment film.