Manufacturing method of recording medium, electric/magnetic field copy master and electric/magnetic field copying device

Abstract

When copying servo information from an electro-magnetic field copy master to a vertical storage medium, the magnetization direction of the vertical storage medium is made to the direction the reverse of an external electro-magnetic field applied to the vertical storage medium and the electro-magnetic field copymaster, the vertical storage medium is closely touched on the electromagnetic field copy master provided with a substrate which has concavity/convexity corresponding to the servo information and at least the convex part of which of the concavity/convexity is made of a softly magnetic material and a conductor installed in the concave part of the substrate and an external electro-magnetic field stronger than the coercive field strength of the vertical storage medium is instantaneously applied to the vertical storage medium and the electromagnetic field copy master.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 shows the conventional magnetic copy master;

FIG. 2 shows magnetic flux generated when recording information on a vertical storage medium by the conventional magnetic copy master and the reproduction waveform of the vertical storage medium;

FIG. 3 shows magnetic flux generated if an external magnetic field is large when recording information on a vertical storage medium by the conventional magnetic copy master;

FIG. 4 shows the magnetic copy master used in the conventional vertical storage medium manufacturing method and the reproduction waveform of the vertical storage medium on which information is recorded by the magnetic copy master;

FIG. 5 shows the reproduction waveform of a magnetic disk on which a magnetic head records information;

FIG. 6 shows magnetic copy by applying an external magnetic field in the horizontal direction;

FIG. 7 shows the electromagnetic field copy master in the preferred embodiment of the present invention;

FIG. 8 is a flowchart showing how to manufacture the storage medium of this preferred embodiment;

FIG. 9 shows the magnetization direction after the initialization of a vertical storage medium;

FIG. 10 shows the electromagnetic field copying device in the preferred embodiment of the present invention;

FIG. 11 shows one example of the circuit configuration of the electromagnetic field generation unit of the electromagnetic copying device;

FIG. 12 shows how to copy by the storage medium manufacturing method of this preferred embodiment;

FIG. 13 shows the magnetization direction of a vertical storage medium after the completion of copy and the reproduction waveform of information recorded on the vertical storage medium;

FIG. 14 shows the electro-magnetic copying device in another preferred embodiment of the present invention;

FIG. 15 shows one example of the circuit configuration of the electromagnetic field generation unit of the electro magnetic copy device in another preferred embodiment;

FIG. 16 is a flowchart how to manufacture the electromagnetic field copy master in the preferred embodiment of the present invention;

FIG. 17 shows one example of the pattern of servo information;

FIG. 18 shows another example of the pattern of servo information;

FIG. 19A shows how to manufacture the electromagnetic field copy master in the preferred embodiment of the present invention (No. 1);

FIG. 19B shows how to manufacture the electromagnetic field copy master in the preferred embodiment of the present invention (No. 2);

FIG. 19C shows how to manufacture the electromagnetic field copy master in the preferred embodiment of the present invention (No. 3);

FIG. 19D shows how to manufacture the electromagnetic field copy master in the preferred embodiment of the present invention (No. 4);

FIG. 19E shows how to manufacture the electromagnetic field copy master in the preferred embodiment of the present invention (No. 5);

FIG. 20 is the flowchart of another manufacturing method of the electromagnetic field copy master in the preferred embodiment of the present invention;

FIG. 21 shows the electromagnetic field copy master in another preferred embodiment of the present invention;

FIG. 22 is a flowchart showing how to manufacture the electro-magnetic field copy master in another preferred embodiment of the present invention;

FIG. 23A shows how to manufacture the electromagnetic field copy master in another preferred embodiment (No. 1);

FIG. 23B shows how to manufacture the electromagnetic field copy master in another preferred embodiment (No. 2);

FIG. 23C shows how to manufacture the electromagnetic field copy master in another preferred embodiment (No. 3);

FIG. 23D shows how to manufacture the electromagnetic field copy master in another preferred embodiment (No. 4); and

FIG. 23E shows how to manufacture the electromagnetic field copy master in another preferred embodiment (No. 5).

DESCRIPTION OF THE PREFERRED EMBODIMENTS

The preferred embodiments of the present invention are described below with reference to the drawings.

FIG. 7 shows the electro-magnetic field copy master in the preferred embodiment of the present invention.

The electro-magnetic field copy master 1 shown in FIG. 7 comprises a substrate 2 with concavity/convexity corresponding to servo information on the surface and at least the convex part of which of the concavity/convexity is made of a softly magnetic material with a high electric resistivity and a conductor 3 provided inside the concave part of the substrate 2. In other words, the electromagnetic field copy master 1 has the array pattern of a softly magnetic material and a conductor which correspond to servo information on the surface. The electric resistivity of the softly magnetic material is set in such a way that no induced current flows even if an external magnetic field is applied when copying the servo information to a vertical storage medium.

FIG. 8 is a flowchart showing how to manufacture the storage medium using the electro-magnetic field copy master 1.

Firstly, the magnetization direction of a vertical storage medium is initialized in the direction the reverse of an external magnetic field used when copying servo information to the vertical storage medium, by applying a magnetic field to the vertical storage medium or so on (step S1). For example, as shown in FIG. 9, the magnetization direction of a vertical storage medium 4 is initialized in the direction indicated by an arrow mark, by an initialization device.

Then, the vertical storage medium is set in a non-magnetic holder of the electromagnetic field copying device provided with the electro-magnetic field copy master 1 (step S2).

FIG. 10 shows the electromagnetic field copying device in the preferred embodiment of the present invention.

The electro-magnetic field copying device 5 shown in FIG. 10 comprises electro-magnets 6 and 7, an electro-magnetic field copy master 1 provided between the electromagnets 6 and 7, and an electro-magnetic field generation unit 8 for instantaneously generating an electromagnetic field between the electromagnets 6 and 7 by flowing current to the electro-magnets 6 and 7. The electromagnets 6 and 7 are installed in the electro-magnetic field copying device 5 in such a way that the electromagnets 6 and 7 can become N-pole and S-pole, respectively.

FIG. 11 shows one example of the circuit configuration of the electromagnetic field generation unit 8. The same reference numerals are attached to the same components as shown in FIG. 10.

The electromagnetic field generation unit 8 shown in FIG. 11 comprises a DC power supply 9 for supplying a power to the electro-magnets 6 and 7 connected in series to each other, switches 10 and 11 provided between the plus terminal of the DC power supply 9 and the electro-magnet 6 which are connected to each other in series, a speed adjustment resistor 12 provided between the minus terminal of the DC power supply 9 and the electro-magnet 7, for adjusting the rise speed of an electromagnetic field generated between the electro-magnets 6 and 7, and a capacitor 13 provided between the minus terminal of the DC power supply 9 and the contact point of switch contacts 10 and 11. Each of the electro-magnets 6 and 7 comprises a coil 14 (for example, coil with the inductance of 10 or less mH) and an internal resistor 15. The impedance of the internal resistor 15 is, for example, 10 ohms. The switches 10 and 11 are composed of devices with high switching speed, such as a thyristor or the like.

Next, the operation of the electro-magnetic field generation unit 8 is described.

Firstly, the switches 10 and 11 are closed and opened, respectively, to charge the capacitor 13 in such a way as to make one terminal of the capacitor 13 plus. Then, the switches 10 and 11 are opened and closed, respectively, to flow current from the capacitor 13 to the electromagnets 6 and 7. When the other terminal of the capacitor 13 becomes plus, the switch 11 opens and the generation of the electromagnetic field between the electro-magnets 6 and 7 terminates. For example, the operation of the switch 11 is controlled and the resistance of the speed adjustment resistor 12 is adjusted, in such a way that the rise speed of the electro-magnetic field generated between the electro-magnets 6 and 7 becomes 1 or more kOe/ms.

Then, in the flowchart shown in FIG. 8, the electromagnetic field copy master 1 and the vertical storage medium 4 are closely touched by the holder in such a way that the conductor 3 of the electromagnetic field copy master 1 and the recording surface of the vertical storage medium 4 are opposed (step S3). For example, the electromagnetic field copy master 1 and the vertical storage medium 4 are closely touched as shown in FIG. 12. In this case, the electro-magnetic field copy master 1 and the vertical storage medium 4 can also be approached.

Then, the vertical storage medium is magnetized by instantaneously applying an external magnetic field to the vertical storage medium 4 and the electromagnetic field copy master 1 in the direction perpendicular to the recording surface of the vertical storage medium (step S4). For example, as shown in FIG. 12, an external electromagnetic field is instantaneously applied to the vertical storage medium 4 and the electromagnetic field copy master 1 in the direction perpendicular to the recording surface of the vertical storage medium (broken line arrow mark). In this case, the external electro-magnetic field is stronger than the coercive field strength of the vertical storage medium 4.

As described above, when an external electromagnetic field is instantaneously applied to the vertical storage medium 4 and the electromagnetic field copy master 1, the magnetization direction of the part of the vertical storage medium 4, in which it closely touches the softly magnetic material in the convex part of the substrate 2 is inverted by the external electromagnetic field since the external electromagnetic field is stronger than the coercive field strength of the vertical storage medium 4. Since induced current (curve line arrow mark) flow through the conductor 3 according to the law of electromagnetic induction, by the instantaneously generated external electromagnetic field, magnetic field generated by the induced current and the external electro-magnetic field kill each other. Since induced current flows through the conductor 3 according to the intensity of the external electro-magnetic field in this way, the intensity of the external electro-magnetic field applied to the conductor 3 becomes zero even if the intensity and the rise time of the external electro-magnetic field changes. In other words, no external electro-magnetic field is applied to the part of the vertical storage medium 4, in which it closely touches the conductor 3 and the magnetization direction of the part is maintained in the direction at the time of initialization.

Then, the vertical storage medium 4 is taken out of the electromagnetic field copying device and the copy of servo information to the vertical storage medium 4 terminates (step S5).

FIG. 13 shows the magnetization direction of a vertical storage medium after the completion of copy (outline type arrow mark) and the reproduction waveform of information recorded on the vertical storage medium. The reproduction waveform shown in FIG. 13 is obtained by setting the vertical storage medium 4 to which the servo information is copied by the storage medium manufacturing method of this preferred embodiment in a tester and observing its waveform.

As shown in FIG. 13, the magnetization direction of the part of the vertical storage medium 4 in which it closely touches the softly magnetic material in the convex part of the substrate 2 is the same direction as the external electromagnetic field, and the magnetization direction of the part of the vertical storage medium 4 in which it closely touches the conductor 3 is the direction the reverse of the external electromagnetic field. Since magnetic field contrast distributed in the vertical storage medium 4 can be matched with the concavity/convexity (geometrical shape) of the substrate 2 provided for the electromagnetic field copy master 1 in this way, the reproduction waveform of the servo information copied to the vertical storage medium 4 can be made the rectangular wave shown in FIG. 13.

Since in the storage medium manufacturing method of this preferred embodiment, its conductor part leaks no magnetic flux even when a sufficiently strong magnetic field is applied, the magnetization of the part is not inverted to completely saturate the magnetization of the part which the softly magnetic material closely touches. Since the magnetization direction of the part of the vertical storage medium 4, in which it closely touches the softly magnetic material in the convex part of the substrate 2 is inverted by an external electromagnetic field, a diamagnetic field generated inside the softly magnetic material does not affect a magnetic field distributed in the vertical storage medium 4. Since the external electromagnetic field applied to the conductor 3 is killed by a magnetic field in the direction the reverse of the external electromagnetic field generated by the induced current flowing through the conductor 3, the position of the magnetic wall of the vertical storage medium 4 does not deviate from the edge of the convex part of the substrate 2 of the electromagnetic field copy master 1, for example, even when the intensity of the external electromagnetic field increases due to, for example, temperature change. Therefore, as shown in FIG. 13, the reproduction waveform of the vertical storage medium 4 can be made a rectangular wave corresponding to the concavity/convexity of the substrate 2 of the electro-magnetic field copy master 1, thereby improving the quality of the reproduction waveform.

Since the reproduction waveform of the servo information recorded on the vertical storage medium 4 can be made a rectangular wave by the storage medium manufacturing method of this preferred embodiment, the track density of the vertical storage medium 4 can be improved by recording eccentricity information on the vertical storage medium 4 by the magnetic head after recording the servo information on the vertical storage medium 4 by the storage medium manufacturing method of this preferred embodiment. Since the type of the read channel of the magnetic head, used when reading servo the information and the eccentricity information can be made one, the configuration of the magnetic disk device (for example, hard disk device) provided with the vertical storage medium 4 can be prevented from becoming complex.

Since the storage medium manufacturing method of this preferred embodiment applies external electromagnetic field in the direction perpendicular to the recording surface of the vertical storage medium 4 when recording servo information on the vertical storage medium 4, the servo information can be collectively copied from the electro-magnetic field copy master 1 to the vertical storage medium 4, thereby suppressing the copy time and the power consumption. For example, as shown in FIG. 6, when applying an external electro-magnetic field in the horizontal direction using an electro-magnet 190, the external electromagnetic field of approximately 5 kOe must be continuously applied for approximately one minute. However, in the storage medium manufacturing method of this preferred embodiment, since the rise speed of an electromagnetic field is 1 or more kOe, the copy time can be suppressed, and also the power consumption can be reduced to approximately one twentieth.

In the storage medium manufacturing method of this preferred embodiment, since the external electromagnetic field can be instantaneously generated, the power consumption can be suppressed accordingly.

In the storage medium manufacturing method of this preferred embodiment, since the position of the magnetic wall of the vertical storage medium 4 does not deviate from the edge of the convex part of the substrate 2 of the electro-magnetic field copy master 1 even when the intensity of the external electro-magnetic field changes, the intensity of the external electromagnetic field can have a margin.

In the storage medium manufacturing method of this preferred embodiment, since the position of the magnetic wall of the vertical storage medium 4 does not deviate from the edge of the convex part of the substrate 2 of the electromagnetic field copymaster 1, the mask pattern of the concavity/convexity of the substrate 2 can be designed without considering the position deviation.

FIG. 14 shows the electro-magnetic copying device in another preferred embodiment of the present invention. The same reference numerals are attached to the same components as shown in FIG. 10.

The electromagnetic field copying device 16 shown in FIG. 14 comprises electromagnetic field copy masters 1-1-1-4, electro-magnets 17 and 18, electro-magnets 19 and 20 and an electro-magnetic generation unit 21 for instantaneously generating an electro-magnetic field between the electro-magnets 17 and 18 and also between the electromagnets 19 and 20 by flowing current through them. The electro-magnets 17-20 are installed in the electro-magnetic field copying device 16 in such a way that the electro-magnets 17, 18, 19 and 20 become N-pole, S-pole, S-pole and N-pole, respectively. The magnetic field copy masters 1-1 and 1-2 are inserted between electromagnets 17 and 18 in such a way that their respective conductors 3 may face each other. The magnetic field copy masters 1-3 and 1-4 are inserted between electromagnets 19 and 20 in such a way that their respective conductors 3 may face each other.

Each of the electromagnetic field copy masters 1-1-1-4 is configured the same as the electro-magnetic field copy master 1.

FIG. 15 shows one example of the circuit configuration of the electromagnetic field generation unit 21. The same reference numerals are attached to the same components as shown in FIG. 11 or 14.

The electromagnetic field generation unit 21 shown in FIG. 15 comprises a DC power supply 9, a capacitor 13, a polarity inversion switch 22 provided between the DC power supply 9 and the capacitor 13, switches 23 and 24 provided between the electro-magnets 17 and 19 which are connected to each other in series and a switch 25 provided between the capacitor 13 and the contact point of the switches 23 and 24. Each of the electro-magnets 17-20 comprises a coil 14 and an internal resistor 15. The switches 23 and 24 are connected to the electromagnets 17 and 19, respectively. Each of the switches 23, 24 and 25 is composed of devices with high switching speed, such as a thyristor or the like. A speed adjustment resistor 12 can also be provided between the capacitor 13 and the electro-magnet 18 and between the capacitor 13 and the electro-magnet 20.

Next, the operation of the electromagnetic field generation unit 21 is described.

Firstly, the capacitor 13 is charged so that the terminal of the capacitor 13, connected to the switch 25 may become plus, by operating the polarity inversion switch 22. Then, the polarity inversion switch 22 is opened and the DC power supply 9 is removed from the capacitor 13. Then, the switches 23 and 24 are closed and opened, respectively. Then, the switch 25 is closed to flow current from the capacitor 13 to the electro-magnets 17 and 18. Then, the terminal of the capacitor 13, connected to the electromagnet 18 becomes plus to open the switch 25 before electric charge accumulated in the capacitor 13 flows backward. Thus, the generation of an electromagnetic field between the electro-magnets 17 and 18 terminates. For example, the operation of the switch 25 is controlled so that the rise speed of the electromagnetic field generated between the electromagnets 17 and 18 may become 1 or more kOe/ms. Then, by operating the polarity inversion switch 22, the capacitor 13 is charged by the amount consumed by the respective internal resistors 15 of the electro-magnets 17 and 18 so that the terminal connected to the electro-magnet 18 may become plus.

Then, when the capacitor 13 is sufficiently charged so that the terminal of the capacitor 13, connected to the electromagnet 18 may become plus, the polarity inversion switch 22 is opened and the DC power supply 9 is removed from the capacitor 13. Then, the switches 23 and 24 are opened and closed, respectively. Then, the switch 25 is closed to flow current from the capacitor 13 to the electro-magnets 19 and 20. Then, the terminal of the capacitor 13, connected to the electro-magnet 19 becomes plus to open the switch 25 before the electric charge accumulated in the capacitor 13 flows backward. Thus, the generation of the electromagnetic filed between the electro-magnets 19 and 20 terminates. For example, the operation of the switch 25 is controlled in such a way that the rise speed of the electro-magnetic field generated between the electromagnets 19 and 20 becomes 1 or more kOe/ms. Then, by operating the polarity inversion switch 22, the capacitor 13 is charged by the amount consumed by the respective internal resistors 15 of the electro-magnets 19 and 20 so that the terminal connected to the switch 25 may become plus.

By the above-described series of operations, after generating an electromagnetic field in the electro-magnets 17 and 18, an electromagnetic field can be generated in the electro-magnets 19 and 20. Then, in order to continue to further generate an electromagnetic field in the electro-magnets 17 and 18 and the electro-magnets 19 and 20, the above-described series of operations is repeated.

Although the electromagnetic field copying device 16 flows current through the electromagnets 17 and 18 and the electromagnets 19 and 20, using one DC power supply 9 to alternatively generate two electromagnetic fields, the same circuit as the circuit comprising the electromagnets 17 and 18 and the switch 23 can be connected to the circuit comprising the electro-magnets 17 and 18 and the switch 23 in parallel and three or more electromagnetic fields can also alternatively generated, using one DC power supply 9.

Since the electromagnetic field copying device 16 configured to generate two or more electro-magnetic fields, using one DC power supply 9 can also use the electric charge accumulated in the capacitor 13 at the time of the previous generation of an electromagnetic field at the time of the subsequent generation of it in this way, power consumption can be reduced, compared with the electromagnetic field copying device 5 shown in FIG. 10.

Next, the storage medium manufacturing method in the case where the electro-magnetic field copying device 16 shown in FIG. 14 collectively records each piece of servo information on both surfaces of the vertical storage medium 4-1 and both surfaces of the vertical storage medium 4-2 is described.

(1) The magnetization direction of each of the surfaces of the vertical storage media 4-1 and 4-2 is initialized in the direction perpendicular to the recording surface of the vertical storage medium 4. In this case, the magnetization direction of each of both surfaces of the vertical storage media 4-1 and 4-2 is initialized in the direction the reverse of an external electromagnetic field.(2) The electro-magnetic field copy masters 1-1 and 1-2 are closely touched to the vertical storage medium 4-1 in such a way that the conductor 3 of each of the electromagnetic field copy masters 1-1 and 1-2 opposes each recording surface of the vertical storage medium 4-1. Simultaneously, the electromagnetic field copy masters 1-3 and 1-4 are closely touched to the vertical storage medium 4-2 in such a way that the conductor 3 of each of the electro-magnetic field copy masters 1-3 and 1-4 opposes each recording surface of the vertical storage medium 4-2. As described above, each of the electro-magnetic field copymasters 1-1-1-4 can also approached to the vertical storage media 4-1 and 4-2, respectively. In the electromagnetic field copying device 16 shown in FIG. 14, since the direction of the electromagnetic field generated in the electro-magnets 17 and 18 and the direction of the electromagnetic field generated in the electromagnets 19 and 20 are opposite to each other, the vertical storage media 4-1 and 4-2 are set in the electromagnetic field copying device 16 in such a way that the magnetization direction of the vertical storage medium 4-1 and the magnetization direction of the vertical storage medium 4-2 are opposite to each other.(3) After applying an external electro-magnetic field to the vertical storage medium 4-1 and the electro-magnetic field copy masters 1-1 and 1-2 in the direction perpendicular to the recording surface of the vertical storage medium 4-1, an external electro-magnetic field is applied to the vertical storage medium 4-2 and the electromagnetic field copy masters 1-3 and 1-4 in the direction perpendicular to the recording surface of the vertical storage medium 4-2. In this case, each external electro-magnetic field is stronger than the coercive field strength of the vertical storage medium 4-1 or 4-2.

Since servo information can be collectively recorded on both surfaces of each of the vertical storage media 4-1 and 4-2 in this way, tact time can be reduced.

Since the capacitor 13 is instantaneously charged, there is hardly any electro-magnetic field copy time.

If servo information is recorded on both faces of each of new vertical storage media 4-1 and 4-2, the above (1)-(3) are repeatedly applied to the new vertical storage media 4-1 and 4-2.

If the same servo information is recorded on each of both surfaces of the vertical storage medium 4-1 (or vertical storage medium 4-2), the concavity/convexity of the substrate 2 of beach of the electromagnetic field copy masters 1-1 and 1-2 (or electro-magnetic field copy masters 1-3 and 1-4) is inverted each other. Thus, each piece of servo information recorded on both surfaces of the vertical storage medium 4-1 (or vertical storage medium 4-2) can be read in the same polarity.

Next, the manufacturing method of the electromagnetic field copy master 1 is described.

FIG. 16 is a flowchart how to manufacture the electromagnetic field copy master 1. The manufacturing method of this electro-magnetic field copy master 1 is the same as, for example, that of the sputter of an optical disk.

Firstly, electron beam resist is spread on a Si wafer (step ST1). This Si forms the substrate 2 of the electromagnetic field copy master 1.

Then, a pattern corresponding to servo information is painted on the electro beam resist by an electron beam painting device or the like (step ST2). For example, the pattern corresponding to the servo information 26 shown in FIG. 17 or 18 is painted.

Then, in order to form a pattern corresponding to servo information, electron beam resist other than the pattern is removed (step ST3). Then, as shown in FIG. 19A, the electron beam resist 28 of the pattern corresponding to servo information is formed on the wafer 27.

Then, the wafer is etched (step ST4). For example, the wafer 27 is etched up to the depth of 100 nm by applying reactive etching (RIE) to it for 60 seconds in the environment of SF6 (sulfur gas 6-fluoride) of 1 Pa and 15 cc/min. Then, as shown in FIG. 19B, concavity/convexity corresponding to servo information is formed on the wafer 27.

Then, the electron beam resist on the wafer is removed by ashing (step ST5). For example, ashing is applied to the wafer for three minutes in the environment of oxygen of 10 Pa and 100 cc/min.

Then, a softly magnetic film with high electric resistivity is formed on the concavity/convexity of the wafer by non-electrolytic plating (step ST6). For example, the softly magnetic film is FeCoNi. Then, as shown in FIG. 19C, a softly magnetic film 29 is plated on the concavity/convexity of the wafer 27. This softly magnetic film 29 forms the convex part of the concavity/convexity of the substrate 2 of the electro-magnetic field copy master 1. Since grain boundary is deposited in the softly magnetic film 29 formed by non-electrolytic plating, the electric resistivity increases. For example, the softly magnetic film 29 is formed in such a way that its electric resistivity becomes 1×10⁻⁶ Ωm.

Then, the respective size of the wafer and the softly magnetic film is processed to a prescribed size by an outline processing device (step ST7). For example, the respective diameters of the wafer and the softly magnetic film are processed from 3 inches to 2.5 inches.

Then, a conductor film is formed on the concavity/convexity of the softly magnetic film by sputtering (step ST8). For example, the conductor film is made of copper and its electric resistivity is 5×10⁻⁸ Ωm. The conductor film can also be made of silver or gold. Then, as shown in FIG. 19D, the conductor film-30 is formed on the concavity/convexity of the softly magnetic film 29. This conductor film 30 on the concavity/convexity of the softly magnetic film 29 forms the conductor 3 of the electromagnetic field copy master 1.

Then, the conductor film is polished and planarized up to the surface of its adjacent softly magnetic film (step ST9). For example, the conductor film is polished by chemical mechanical planarization (CMP). Then, as shown in FIG. 19E, the softly magnetic film 29 and the conductor film 30 are planarized.

Then, a protective coat is formed on the planarized softly magnetic film and conductor film by sputtering (step ST10). For example, a 2 nm-thick diamond-like carbon (DLC) protective coat is formed.

FIG. 20 is the flowchart of another manufacturing method of the electromagnetic field copy master 1.

The flowchart shown in FIG. 20 differs from that shown in FIG. 16 in that the process of reducing the electric resistivity of the softly magnetic film by annealing it (step STE7) between the plating process of the softly magnetic film (step STE6) and the outline processing process (step STE7) is added.

The following Table 1 shows the respective degree of the deviation between the edge of the reproduction waveform and the edge of the convex part of the substrate 2, of the vertical storage medium in the case where the plated softly magnetic film (FeCoNi) is annealed and where the plated softly magnetic film (FeCoNi) is not annealed or where the softly magnetic film (FeCo) is formed by sputtering and the conductor film is made of Cu (copper), Cr (chrome) or Ti (titanium). In this case, the electric resistivity of the softly magnetic film in the case where the plated softly magnetic film is annealed, the electric resistivity of the softly magnetic film in the case where the plated softly magnetic film is not annealed, the electric resistivity of the softly magnetic film formed by sputtering, the electric resistivity of Cu, the electric resistivity of Cr and the electric resistivity of Ti are 8×10⁻⁷ Ωm, 1×10⁻⁶ Ωm, 5×10 ⁻⁶ Ωm, 5×10⁻⁸ Ωm, 3×10⁻⁷ Ωm and 8×10⁻⁷ Ωm, respectively. If there is no deviation between the edge of the reproduction waveform and the edge of the convex part of the substrate 2, it is expressed by ◯. If there is small deviation, it is expressed by Δ. If there is large deviation, it is expressed by X.

According to the following Table 1, it is found that if the electric resistivity ratio of the softly magnetic film to the conductor film is one digit or more, the edge of the reproduction waveform of information copied to the vertical storage medium by the electro-magnetic field copy master 1 does not largely deviate from the edge of the convex part of the concavity/convexity of the substrate 2 of the electro -magnetic field copy master 1.

TABLE 1
Softly	Conductor film
magnetic	Cu	Cr	Ti
film	(5 × 10−8 Ωm)	(3 × 10−7 Ωm)	(8 × 10−7 Ωm)
FeCoNi	◯	Δ	X
With plate annealing
(8 × 10−7 Ωm)
FeCoNi	◯	Δ	Δ
Without plate
annealing
(1 × 10−6 Ωm)
FeCo	◯	◯	◯
Sputtering
(5 × 10−6 Ωm)

Next, the electromagnetic field copy master in another preferred embodiment of the present invention is described. FIG. 21 shows the electromagnetic field copy master in another preferred embodiment of the present invention. The same reference numerals are attached to the same components as shown in FIG. 7 or 19E.

The electro-magnetic field copy master 31 as shown in FIG. 21 comprises a substrate 32 which has concavity/convexity corresponding to servo information on the surface and is made of polycarbonate (PC), a softly magnetic film 29 formed on the concavity/convexity of the substrate 32 and a conductor 3 provided in the concave part of the softly magnetic film 29, specifically provided in the concave part of the concavity/convexity of a substrate composed if the softly magnetic film 29 and the substrate 32. The storage medium manufacturing method using this electromagnetic field copy master 31 is the same as that of the above-described storage medium manufacturing method. In this storage medium manufacturing method, the track density of the vertical storage medium can be improved while improving the quality of the reproduction waveform of information recorded on the vertical storage medium, and also copy time and power consumption can be suppressed.

In the storage medium manufacturing method using this electromagnetic field copy master 31, since the substrate 32 is made of polycarbonate, the vertical storage medium and the electromagnetic field copy master 31 can be closely touched when copying servo information on the vertical storage medium. Therefore, the contrast of a magnetic field distributed in the vertical storage medium can be improved to further improve the quality of the reproduction waveform.

FIG. 22 is a flowchart showing how to manufacture the electro-magnetic field copy master 31. Since the processes up to the process of removing the electro beam resist (step STEP5) of this flowchart are the same as the process of removing the electro beam resist (step ST5) of the flowchart shown in FIG. 16, its description is omitted here.

Then, after a Ni electrode layer is formed on the concavity/convexity of the wafer by sputtering, Ni is plated on the electrode layer by electric plating (step STEP6). For example, 300 μm of Ni is electrically plated on the electrode layer. Then, as shown in FIG. 23A, Ni 33 is plated on the concavity/convexity of the wafer 27.

Then, after the wafer is removed from the Ni, the size of the Ni is processed to a prescribed size by an outline processing device (step STEP7). For example, the diameter of Ni plated on the Si wafer is processed from 8 inches to 2.5 inches.

Then, concavity/convexity corresponding to the servo information is formed on the polycarbonate surface, using the Ni as a metal mold (step STEP8). For example, concavity /convexity corresponding to the servo information is formed on the polycarbonate surface, using a 100-ton optical disk substrate molding machine at the polycarbonate temperature of 300 degrees and at the Ni temperature of 130 degrees for the molding time of 90 seconds. This polycarbonate forms the substrate 32 of the electro-magnetic field copymaster 31. Then, as shown in FIG. 23B, the concavity/convexity corresponding to that of the Ni 33 is formed on the surface of the polycarbonate 34.

Then, a softly magnetic film is formed on the concavity /convexity of the polycarbonate by sputtering (step STEP9). For example, the softly magnetic film is FeCo. Then, as shown in FIG. 23C, a softly magnetic film 29 is formed on the concavity/convexity of the polycarbonate 34.

Then, a conductor film is formed on the concavity/convexity of the softly magnetic film by sputtering (step STEP10). For example, Al (aluminum) with the thickness of 100 m and the electric resistivity of 7×10⁻⁸ Ωm is formed on the concavity/convexity of the softly magnetic film by RF magnetron sputter in the environment of Ar gas of 2 Pa. Then, as shown in FIG. 23D, a conductor film 30 is formed on the concavity/convexity of the softly magnetic film 29.

Then, the conductor film is polished and planarized up to the surface of an adjacent softly magnetic film (step STEP11) For example, the conductor film is polished by CMP. Then, as shown in FIG. 23E, the softly magnetic film 29 and the conductor film 30 are planarized.

Then, a protective coat is formed on the planarized softly magnetic film and conductor film (step STEP12). For example, a 2 nm-thick SiN protective coat is formed.

Although in the above-described preferred embodiments, servo information is copied to the vertical storage medium, prescribed information other than servo information (such as, audio information, video information or the like) can also be copied to the vertical storage medium.

Although in the above-described preferred embodiments, concavity/convexity corresponding to prescribed information is formed on the substrate, using electron beam resist, the concavity/convexity corresponding to prescribed information can also be formed, using laser, an electron beam, an ion beam, mechanical processing or the like.

The forming method of the softly magnetic film and the conductor film is not limited to sputtering of a vacuum deposition method, an ion plating method, a chemical vapor deposition (CVD) method or the like.

The material of the substrate 2 of the electromagnetic field copy master 1 is not limited to Si and glass can also be used.

The substrate 32 of the electromagnetic field copy master 31 can also be made of resin other than polycarbonate.

A magnetic disk device provided with a vertical storage medium to which servo information is copied by the storage medium manufacturing method of the above-described preferred embodiment (for example, hard disk device) can also be configured.

Claims

1. A method with a process of copying prescribed information from an electro-magnetic field copy master, for manufacturing a vertical storage medium, the copying process comprising: initializing a magnetization direction of the vertical storage medium in a direction the reverse of a direction of an external electro-magnetic field;closely touching or approaching the vertical storage medium on or to the electro-magnetic field copy master provided with a substrate which has concavity/convexity corresponding to the prescribed information on the surface and at least the convex part of which of the concavity/convexity is made of a softly magnetic material, and a conductor provided in a concave part of the substrate; andinstantaneously applying an external electro-magnetic field stronger than coercive field strength of the vertical storage medium to the vertical storage medium and the electromagnetic field copy master.

2. The manufacturing method of a storage medium according to claim 1, wherein rise speed of the external electromagnetic field is 1 or more kOe/ms.

3. An electro-magnetic field copy master used to copy prescribed information to a recording surface of a vertical storage medium, comprising: a substrate which has concavity/convexity corresponding to the prescribed information on a surface and at least the convex part of which of the concavity/convexity is made of a softly magnetic material; anda conductor provided in the concave part of the substrate.

4. The electro-magnetic field copy master according to claim 3, wherein the electric resistivity ration of the softly magnetic field to the conductor is one digit or more.

5. The electro-magnetic field copy master according to claim 3, wherein the conductor is made of copper, silver, aluminum or gold.

6. The electro-magnetic field copy master according to claim 3, wherein the softly magnetic material is made of FeCoNi in which grain is deposited.

7. An electro-magnetic field copying device for copying prescribed information from an electromagnetic field copy master to a vertical storage medium by applying an external electromagnetic field to the vertical storage medium and the electro-magnetic field copy master in a direction perpendicular to a recording surface of the vertical storage medium while the electro-magnetic field copy master is closely touched on or approached to the vertical storage medium, comprising: an electromagnetic field copy master provided with a substrate which has concavity/convexity corresponding to the prescribed information on the surface and at least a convex part of which of the concavity/convexity is made of a softly magnetic material, a conductor installed in a concave part of the substrate;an electro-magnet for generating the external electromagnetic field; andan electro-magnetic generation unit for flowing current through the electro magnet to instantaneously generate the external electro-magnetic field stronger than coercive field strength of the vertical storage medium in the electro-magnet.

8. The electro-magnetic field copying device according to claim 7, wherein inductance of a coil constituting the electro-magnet is 10 mH or less.

9. The electro-magnetic field copying device according to claim 7, wherein the electromagnetic field generation unit generates two or more of the external electromagnetic fields, using one DC power supply.

10. A vertical storage medium to which prescribed information is copied by the manufacturing method of a storage medium according to claim 1.

11. A magnetic disk device provided with the vertical storage medium to which prescribed information is copied by the manufacturing method of a storage medium according to claim 1.