The application relates to the field of display technology.
An Organic Light-Emitting Diode (OELD) is also known as an Organic Electroluminescence Display. An OELD display panel is made of a substrate and a very thin coating of organic materials. When an electric current passes through the organic materials, the organic materials will emit light. The OLED display panel includes a plurality of light-emitting pixel elements arranged in a matrix structure. For a colored OLED, each light-emitting pixel element generally includes sub-pixels of three colors: red R, green G, and blue B.
The application is to provide a mask and a vapor deposition device.
In an aspect, embodiments of the application provide a mask including a first region provided with a first plurality of openings; and second regions located at both sides of the first region along a predetermined direction, wherein at least one of the second regions is provided with a third plurality of openings, and the third plurality of openings are disposed adjacent to the first plurality of openings and have a same structure as the first plurality of openings. At least a part of the first plurality of openings are used to form a first type of sub-pixels when the mask is in a first state. The first plurality of openings and at least a part of the third plurality of openings are used together to form a type of sub-pixels different from the first type of sub-pixels, when the mask moves a predetermined distance along a predetermined direction to be in a second state.
In another aspect, the embodiments of the application further provide a vapor deposition device including the mask as described above.
In yet another aspect, the embodiments of the application further provide a vapor deposition method by use of a mask. The mask includes a first region provided with a first plurality of openings and second regions located at both sides of the first region along a predetermined direction. At least one of the second regions is provided with a third plurality of openings, and the third plurality of openings are disposed adjacent to the first plurality of openings and have a same structure as the first plurality of openings. The vapor deposition method includes forming a first type of sub-pixels by use of at least a part of the first plurality of openings when the mask is in a first state; moving the mask a predetermined distance along the predetermined direction to place the mask in a second state; and forming a type of sub-pixels different from the first type of sub-pixels by use of the first plurality of openings and at least a part of the third plurality of openings together when the mask is in the second state.
With the mask and the vapor deposition device provided in the embodiments of the application, the first plurality of openings for forming sub-pixels of any color are disposed in the first region of the mask, and the third plurality of openings having the same structure as the first plurality of openings are disposed in at least one second region along the predetermined direction, so that the vapor deposition for sub-pixels of at least two colors can be realized by just moving the mask a predetermined distance. As such, an undesirable risk such as color mixing can be avoided and the vapor deposition effect and efficiency of the mask can be improved.
The application can be better understood from the following description of specific embodiments of the application with reference to the accompanying drawings, in which:
Other features, objects, and advantages of the application will become more apparent by reading the following detailed description of non-limiting embodiments with reference to the accompanying drawings, in which the same or similar reference numerals represent the same or similar features.
Generally, a metal material mask is used to control a coating position of the organic materials on the substrate. Since the R/G/B color sub-pixels of the OLED display panel are formed by vapor deposition using organic light-emitting materials of different colors, a mask is needed for each of the R/G/B color sub-pixels to vapor deposit an organic material of a corresponding color respectively. For example, after the vapor deposition for the R color sub-pixels is completed, the mask corresponding to the color R is removed and then the mask corresponding to the color G is installed for the vapor deposition for the G color sub-pixels; after the vapor deposition for the G color sub-pixels is completed, the mask corresponding to the color G is removed and then the mask corresponding to the color B is installed for the vapor deposition for the B color sub-pixels. During this vapor deposition process, the vapor deposition device is opened multiple times, and impurities such as dust and the like may be easily mixed onto the substrate, which seriously affects the coating effect of the organic light-emitting material layer.
Example embodiments will be more fully described with reference to the accompanying drawings.
Referring to
For the OLED display panel, a mask is used to control the coating positions of organic materials of different colors on the substrate. The mask is generally made of INVAR and has a thickness of 20-40 μm. INVAR is a nickel-iron alloy which has a very low thermal expansion coefficient and can maintain a fixed length over a wide temperature range. During the vapor deposition, the mask is placed between the substrate and the vapor deposition device, and organic light-emitting materials of corresponding colors are placed in the vapor deposition device for vapor deposition for sub-pixels 110 of different colors on the substrate.
Referring to
As shown by the dashed box in
In order to ensure a dimensional machining accuracy of the first openings 11, the second regions 20 are generally provided as a buffer at both sides of the first region 10 of the mask along the predetermined direction. A plurality of third openings 21 are disposed in one of the second regions 20. The third openings 21 are disposed adjacent to the first openings 11 and have the same structure as the first openings 11. That is, the shapes, sizes, and machining accuracies of the third openings 21 are all the same as those of the first openings 11.
In a first state, at least a part of the plurality of first openings 11 may be used to form a first type of sub-pixels. In a second state, the mask is moved a predetermined distance along the predetermined direction, and the plurality of the first openings 11 and at least a part of the plurality of third openings 21 are used together to form a type of sub-pixels different from the first type of sub-pixels. The type of sub-pixels different from the first type of sub-pixels are another type of sub-pixels having a color different from the color of the first type of sub-pixels. Thus, the vapor deposition for the sub-pixels of at least two colors can be completed by moving the mask the predetermined distance along the predetermined direction.
In the mask provided in the embodiment of the application, the plurality of first openings 11 for forming sub-pixels of any color are disposed in the first region 10 of the mask, and the plurality of third openings 21 having the same structure as the first openings 11 are disposed in at least one second region 20 along the predetermined direction, so that the vapor deposition for the sub-pixels of at least two colors can be realized by just moving the mask the predetermined distance without necessity of removing the mask during the vapor deposition process. As such, impurities such as dust and the like can be prevented from being mixed onto the substrate, the effect and efficiency of the vapor deposition can be improved, and the structure is simple and the cost is low.
The specific structure of the mask provided in the embodiment of the application will be described in detail below with reference to the drawings.
Referring again to
Further, the plurality of first openings 11 and the plurality of third openings 21 are arranged in lines along a direction perpendicular to the predetermined direction. In the first region 10 and the second regions 20, a first distance d1 along the predetermined direction between two adjacent first openings 11, a first distance d1 between two adjacent third openings 21 and a first distance d1 between a first opening 11 and a third opening 21 adjacent to the first opening 11 all satisfy Equation (1):
d1=N×L (1)
Here, L is the predetermined distance the mask moves along the predetermined direction. When the predetermined direction is the second direction Y, L is the distance D1 along the second direction Y between two adjacent sub-pixels 110; when the predetermined direction is the first direction X, L is the distance D2 along the first direction X between two adjacent sub-pixels 110.
As mentioned above, the second regions 20 serve as a process buffer for the first region 10, and each second region 20 is further provided with second openings 22 aligned in rows and columns along the first direction X and the second direction Y. A plurality of second openings 22 in at least one second region 20 are disposed at a side of the plurality of corresponding third openings 21 along the predetermined direction. There are at least two lines of second openings 22 in each second region 20, and the machining accuracy of the second openings 22 is lower than the machining accuracy of the first openings 11. The shapes and sizes of the second openings 22 may be the same as or different from the shapes and sizes of the first openings 11.
Since the dimensional machining accuracy of the second opening 22 is lower than the dimensional machining accuracy of the first opening 11, an inner edge of the second opening 22 is rough, and organic materials of different colors may remain on the rough edge of the second opening 22 during vapor deposition. As a result, there may be an undesirable risk such as color mixing, and thus the second openings 22 cannot be used for vapor deposition.
In addition, when the plurality of third openings 21 are arranged in a line, an overall size of the mask is minimal. In order to complete the vapor deposition for multi-color sub-pixels, in the second region 20, a second distance d2 along the predetermined direction between a third opening 21 and a second opening 22 adjacent to the third opening 21 satisfies d2≥d1.
In order to reduce the manufacturing cost of the mask, during pixel typesetting, pattern sizes of the openings corresponding to two colors R and G on the mask are generally designed to be a same size, and then the vapor deposition for the sub-pixels of the two colors can be completed by moving the mask the predetermined distance along the predetermined direction. In some cases, pattern sizes of the openings corresponding to multiple colors such as R, G, B and the like may be also designed to be a same size, and then the vapor deposition for the sub-pixels of the multiple colors can be completed by successively moving the mask the predetermined distance along the predetermined direction.
For the convenience of description, the embodiment of the application is illustrated with reference to an example in which the pattern sizes of the openings corresponding to three colors R, G, and B are designed to be a same size.
In
The plurality of first openings 11 in the first region 10 and the plurality of third openings 21 in one of the second regions 20 are aligned in rows and columns along the first direction X and the second direction Y, and the plurality of third openings 21 are distributed in a line in the second direction Y. In the first region 10 and the second regions 20, a first distance d1 along the second direction Y between two adjacent first openings 11, a first distance d1 along the second direction Y between two adjacent third openings 21 and a first distance d1 along the second direction Y between a first opening 11 and a third opening 21 adjacent to the first opening 11 all satisfy d1=3×D1, and a second distance d2 along the second direction Y between a third opening 21 and a second opening 22 adjacent to the third opening 21 in one of the second regions 20 satisfies d2≥d1, so that the vapor deposition for the sub-pixels of at least two colors can be realized.
Further, the shape of the first opening 11 corresponds to the shape of the organic light emitting material layer 120 of the sub-pixel 110, and the size of the first opening 11 is larger than the size of the organic light emitting material layer 120. In addition, the shape of the first opening 11 may be any of a square hole, a circular hole, and a polygonal hole, which is not limited to the rectangular hole shown in the drawings.
Thus, by providing the plurality of first openings 11 in the first region 10 of the mask and providing the plurality of third openings 21 having the same structure as the first openings 11 along the predetermined direction in the second region 20, the vapor deposition for sub-pixels of at least two colors can be realized by successively moving the mask the predetermined distance L. As such, an undesirable risk such as color mixing can be avoided and the vapor deposition effect of the mask can be improved.
Referring to
During the vapor deposition process, it is not necessary to repeatedly disassemble the mask, so that impurities such as dust and the like can be prevented from being mixed onto the mask, the effect and efficiency of the vapor deposition can be improved, and the structure is simple and the cost is low.
It can be understood that the vapor deposition process for the sub-pixels of two or more colors is similar to the above-described vapor deposition process for the sub-pixels of three colors, and the order of vapor deposition for multiple colors is also not limited to the examples shown in the drawings, which will not be described again.
Referring to
Referring to
The plurality of first openings 11 in the first region 10 and the plurality of third openings 21 in one of the second regions 20 are aligned in rows and columns along the first direction X and the second direction Y, and the plurality of third openings 21 are distributed in a line in the first direction X. In the first region 10 and the second regions 20, a first distance d1 along the first direction X between two adjacent first openings 11, a first distance d1 along the first direction X between two adjacent third openings 21 and a first distance d1 along the first direction X between a first opening 11 and a third opening 21 adjacent to the first opening 11 all satisfy d1=3×D2, and a second distance d2 along the first direction X between a third opening 21 and an adjacent second opening 22 in one of the second regions 20 satisfies d2≥d1, so that the vapor deposition for the sub-pixels of at least two colors can be realized.
For the OLED display panels of the same size shown in
Referring to
It can be understood that the vapor deposition process for the sub-pixels of two or more colors is similar to the above-described vapor deposition process for the sub-pixels of three colors, and the order of vapor deposition for multiple colors is also not limited to the examples shown in the drawings, which will not be described again.
Referring to
Referring to
The second regions 20 are located at both sides of the first region 10 along the predetermined direction. At least one of the second regions 20 is provided with the plurality of third openings 21. The first openings 11 and the third openings 21 are adjacent to each other and have a same structure, so that the vapor deposition for the sub-pixels of at least two colors can be completed by moving the mask the predetermined distance along the predetermined direction.
Further, in the first region 10 and the second regions 20, a first distance d1 along the predetermined direction between two adjacent first openings 11, a first distance d1 along the predetermined direction between two adjacent third openings 21 and a first distance d1 along the predetermined direction between a first opening 11 and an third opening 21 adjacent to the first opening 11 all satisfy Equation (2):
d1=L (2)
Here, L is the predetermined distance the mask moves along the predetermined direction. When the predetermined direction is the second direction Y, L is the distance D1 along the second direction Y between two adjacent sub-pixels 110; when the predetermined direction is the first direction X, L is the distance D2 along the first direction X between two adjacent sub-pixels 110.
In
The second regions 20 serve as a process buffer for the first region 10, and each second region 20 is further provided with second openings 22 aligned in rows and columns along the first direction X and the second direction Y. The second openings 22 in at least one second region 20 are disposed at a side of the plurality of corresponding third openings 21 along the predetermined direction. There are at least two lines of second openings 22 in each second region 20, and the machining accuracy of the second openings 22 is lower than the machining accuracy of the first openings 11. The shapes and sizes of the second openings 22 may be the same as or different from the shapes and sizes of the first openings 11.
In addition, when the plurality of third openings 21 are arranged in two lines, an overall size of the mask is minimal. In order to complete the vapor deposition for multi-color sub-pixels, in the second region 20, a second distance d2 along the predetermined direction between a third opening 21 and a second opening 22 adjacent to the third opening 21 satisfies d2≥d1.
Further, the shape of the first opening 11 corresponds to the shape of the organic light emitting material layer 120 of the sub-pixel 110, and the size of the first opening 11 is larger than the size of the organic light emitting material layer 120. In addition, the shape of the first opening 11 may be any of a square hole, a circular hole, and a polygonal hole, which is not limited to the rectangular hole shown in the drawings.
Referring to
It can be understood that the vapor deposition process for the sub-pixels of two or more colors is similar to the above-described vapor deposition process for the sub-pixels of three colors, and the order of vapor deposition for multiple colors is also not limited to the examples shown in the drawings, which will not be described again.
Referring to
For the same OLED display panel as shown in
Referring to
It can be understood that the vapor deposition process for the sub-pixels of two or more colors is similar to the above-described vapor deposition process for the sub-pixels of three colors, and the order of vapor deposition for multiple colors is also not limited to the examples shown in the drawings, which will not be described again.
Therefore, by use of the mask provided in the embodiments of the application, for both an OLED display panel in which sub-pixels 110 of a same color are distributed in a same line and an OLED display panel in which color sub-pixels 110 of a same color among adjacent N lines of color sub-pixels 110 are sequentially staggered, third openings 21 can be disposed at both sides of the first region 10 of the mask along the first direction X or the second direction Y, so that the vapor deposition for sub-pixels of at least two colors can be realized by moving the mask a predetermined distance.
In addition, since a distance along the second direction Y between two adjacent color sub-pixels is smaller than a distance along the first direction X between two adjacent color sub-pixels in the OLED display panel, the area of the mask in which the third openings 21 are disposed at both sides of the first region 10 along the second direction Y is smaller compared to the area of the mask in which the third openings 21 are disposed at both sides of the first region 10 along the first direction X, and the size of the corresponding evaporation device is also smaller. The mask may be selected according to specific pixel arrangements in different OLED display panels.
In addition, an embodiment of the application further provides a vapor deposition device including any mask described above.
Those skilled in the art should understand that the above-described embodiments are all exemplary and not restrictive. Different technical features appearing in different embodiments can be combined to obtain beneficial effects. Those skilled in the art should be able to understand and implement other modified embodiments of the disclosed embodiments on the basis of studying the drawings, the description, and the claims. In the claims, the term “comprising” does not exclude other devices or steps; the indefinite article “a” does not exclude a plurality; the terms “first”, “second”, “third”, “fourth” and the like are used to illustrate names rather than to indicate any particular order. Any reference numerals in the claims should not be construed as limiting the scope of protection. The functions of the various parts in the claims may be implemented by a single hardware or software module. The presence of certain features in different dependent claims does not indicate that these technical features cannot be combined to achieve beneficial effects.
Number | Date | Country | Kind |
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201810843949.6 | Jul 2018 | CN | national |
The application is a continuation of International Application No. PCT/CN2019/074099, filed on Jan. 31, 2019, which claims the benefit of priority to Chinese Patent Application No. 201810843949.6, filed on Jul. 27, 2018, both of which are incorporated herein by reference in their entireties.
Number | Date | Country | |
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Parent | PCT/CN2019/074099 | Jan 2019 | US |
Child | 16742933 | US |