Number | Date | Country | Kind |
---|---|---|---|
2-188100 | Jul 1990 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
3042815 | Campbell, Jr. | May 1960 | |
3573509 | Crawford | Apr 1971 | |
4057741 | Piguet | Nov 1977 | |
4939384 | Shikata et al. | Jul 1990 |
Number | Date | Country |
---|---|---|
0144654 | Oct 1984 | EPX |
0373893 | Dec 1989 | EPX |
55-140321 | Nov 1980 | JPX |
57-206072 | Dec 1982 | JPX |
60-010810 | Jan 1985 | JPX |
62-071274 | Sep 1987 | JPX |
01050568 | Jun 1989 | JPX |
2-034018 | Feb 1990 | JPX |
Entry |
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M. Tsunotani et al., "Advanced Self-Alignment Process Technique with Very Thick Sidewall for High Speed GaAs LSIs", Dec. 1988, pp. 700-703, IEDM Tech. Digest. |
Malcolm E. Goodge, "Semiconductor Device Technology", 1983, pp. 240-244. |