Number | Date | Country | Kind |
---|---|---|---|
59-117930 | Jun 1984 | JPX |
Number | Name | Date | Kind |
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3327712 | Kaufman et al. | Jun 1967 | |
4253447 | Moore et al. | Mar 1981 | |
4331132 | Mukasa | May 1982 | |
4480636 | Karaki et al. | Nov 1984 | |
4558691 | Okada | Dec 1985 | |
4562831 | Murakoshi et al. | Jan 1986 |
Number | Date | Country |
---|---|---|
2818760 | Nov 1979 | DEX |
59-70908 | Apr 1984 | JPX |
Entry |
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Interactive Fringe Analysis System: Applications to Moire Contourogram and Interferogram, by T. Yatagai et al, Optical Engineering, Sep./Oct. 1982, vol. 21, No. 5, pp. 901-906. |
Automatic Fringe Analysis Using Digital Image Processing Techniques, by T. Yatagai et al, Optical Engineering, May/Jun. 1982, vol. 21, No. 3, pp. 432-435. |
Automatic Flatness Tester for Very Large Scale Integrated Circuit Wafers, by T. Yatagai et al, Optical Engineering, Jul./Aug. 1984, vol. 23, No. 4, pp. 401-405. |