Patent Application
20190249891
The present disclosure relates to a measuring system, and to a measuring system including a temperature-variable container, an optical device and an air conditioner.
A semiconductor device package may undergo certain reliability tests. For example, the semiconductor device package may be placed in a temperature-variable environment (e.g. an oven) for subsequent observation. An optical device (e.g. a digital image correlation (DIC) device) may be used to obtain images of the semiconductor device package during thermal cycles. The temperature-variable environment may be equipped with a transparent plate or a window to facilitate taking images of the semiconductor device package. However, convection (e.g. heat convection) between the optical device and the window may adversely affect images obtained by the optical device (e.g. image deviation, distortion, etc.).
In one or more embodiments, a measuring system includes a temperature-variable container, an optical device and an air conditioner. The temperature-variable container includes a transparent plate. The optical device includes a first optical sensor unit and a second optical sensor unit. The air conditioner is disposed between the transparent plate and the optical device.
In one or more embodiments, a temperature-variable container includes a transparent plate and an air conditioner adjacent to the transparent plate.
Common reference numerals are used throughout the drawings and the detailed description to indicate the same or similar elements. Embodiments of the present disclosure will be readily apparent from the following detailed description taken in conjunction with the accompanying drawings.
Spatial descriptions, such as “above,” “below,” “up,” “left,” “right,” “down,” “top,” “bottom,” “vertical,” “horizontal,” “side,” “higher,” “lower,” “upper,” “over,” “under,” and so forth, are indicated with respect to the orientation shown in the figures unless otherwise specified. It should be understood that the spatial descriptions used herein are for purposes of illustration, and that practical implementations of the structures described herein can be spatially arranged in any orientation or manner, provided that the merits of embodiments of this disclosure are not deviated from by such arrangement.
The temperature-variable container 20 includes a transparent plate 22 and defines a space A for accommodating an object 28 to be measured. The optical device 30 includes an optical sensor unit 31 and an optical sensor unit 32. The light source 33 emits the light towards the object 28. In some embodiments, the object 28 may be or may include, for example, a wafer, a chip or a die. In some embodiments, the optical sensor unit 31 is a local camera and the optical sensor unit 32 is a global camera. The optical sensor unit 31 captures a plurality of local images of a plurality of local areas of the object 28. The optical sensor unit 32 captures a global image of the object 28 (e.g. of an entire surface of the object 28). The global image and the local images can be approximately simultaneously captured and transmitted to the computer 100. The global image and the local images can be processed and calculated by the computer 100 to obtain the images of the object 28 (including, for example, image deviation, distortion, and so forth). In some embodiments, the computer 100 may be a control unit including a processor and an associated memory. The computer 100 is connected to the temperature-variable container 20, the optical device 30, and the air conditioner 40 to direct operation of these components. In contrast to a single image detecting device, the local and global images captured simultaneously by two different optical sensor units 31 and 32 can provide an improved stereoscopic view (including in-plane deformation, distortion and warpage of the object 28).
The temperature controlling device 50 and temperature sensor 52 are controlled by the processor 401. The temperature controlling device 50 controls a temperature of the air flow in the pipe 70 based on the temperature sensed by the temperature sensor 52. In some embodiments, the temperature controlling device 50 controls a temperature of an air flow ventilated from the air conditioner 40. The air flow is supplied to the air ventilation unit 60 through the pipe 70. The moving mechanism 80, 82 or 83 is controlled by the processor 401. The moving mechanism 80, 82 or 83 controls the angle or direction of the air flow ventilated from the air ventilation unit 60. In some embodiments, the moving mechanism 80, 82 or 83 controls the angle or direction of the air flow ventilated from the air ventilation unit 60 when the maximum measured error of measured values of the warpage of an object 28 exceeds a threshold value of about 10 μm (e.g. exceeds about 12 exceeds about 14 or exceeds about 16 μm). In some embodiments, the moving mechanism 80, 82 or 83 controls the angle or direction of the air flow ventilated from the air ventilation unit 60 when the maximum measured error of measured values of the warpage of an object 28 exceeds a threshold value of about 50 μm (e.g. exceeds about 55 μm, exceeds about 60 μm, or exceeds about 65 μm). The moving mechanism 80, 82 or 83 controls the position or rotated angle of the air ventilation unit 60, and can be implemented as one or more actuators. The air provided by the air conditioner 40 may neutralize or mitigate convection above the transparent plate 22 shown in
The air ventilation unit 60 of the air conditioner 40 is disposed on the temperature-variable container 20. In some embodiments, the air ventilation unit 60 of the air conditioner 40 is disposed on the transparent plate 22 of the temperature-variable container 20. The optical device 30 is disposed above the temperature-variable container 20 (not shown). In some embodiments, the air conditioner 40 is disposed between the transparent plate 22 and the optical device 30.
The air ventilation unit 60 defines at least one hole 44w. In some embodiments, the air ventilation unit 60 may be a wind knife. The air flow is ventilated from the hole 44w of the air ventilation unit 60. In some embodiments, the air ventilation unit 60 may include a baffle unit 44 defining a plurality of holes 44h (e.g. as shown in
The moving mechanism 80 is operated to rotate the air conditioner 40. In some embodiments, the moving mechanism 80 is operated to rotate the air ventilation unit 60 of the air conditioner 40. In some embodiments, the moving mechanism 80 is operated to rotate the baffle unit 44. In some embodiments, a distance between the hole 44w of the wind knife and the transparent plate 22 is in a range from approximately 1 centimeter (cm) to approximately 5 cm.
In some embodiments, the air conditioner 40 is disposed adjacent to the transparent plate 22. In some embodiments, the transparent plate 22 may be, for example, a glass plate. A sensor 58 is disposed external to the temperature-variable container 20 and adjacent to the transparent plate 22. The sensor 58 senses a temperature T1 above the transparent plate 22. In some embodiments, sensor 58 senses a temperature T2 of the transparent plate 22. A sensor 59 is disposed within the temperature-variable container 20. The sensor 59 senses a temperature T3 in the space A of the temperature-variable container 20. In some embodiments, the temperature, volume, speed or angle of an air flow ventilated from the air conditioner 40 is controlled by the computer 100 based on one or more signals detected by the sensor 58 or the sensor 59. The volume and speed can be increased when the temperature of the temperature-variable container 20 is increasing. The volume and speed can be decreased when the temperature of the temperature-variable container 20 is decreasing. In some embodiments, the temperature, volume, speed or angle of an air flow ventilated from the air conditioner 40 is controlled by the computer 100 based on image quality captured by the optical device 30 or a signal associated with optical information. In some embodiments, if the maximum measured errors (such as measured errors for warpage, deformation or strain) of an object 28 exceeds a threshold value of about 10 μm (e.g. exceeds about 12 μm, exceeds about 14 μm, or exceeds about 16 μm), the volume, speed or angle of an air flow ventilated from the air conditioner 40 will be controlled by the computer 100 to neutralize or mitigate the heat convection above the transparent plate 22.
In some embodiments, the air flow is controlled to have a temperature in a range from approximately 40° C. to approximately 60° C. In some embodiments, the air flow is controlled to have a temperature in a range from approximately −10° C. to approximately 20° C. The temperature/speed/volume/angle of the air flow ventilated from the hole 44w is adjustable (e.g. based on temperature of the transparent plate 22 or temperature in the temperature-variable container 20 or image quality).
As used herein, the terms “approximately,” “substantially,” “substantial” and “about” are used to describe and account for small variations. When used in conjunction with an event or circumstance, the terms can refer to instances in which the event or circumstance occurs precisely as well as instances in which the event or circumstance occurs to a close approximation. For example, when used in conjunction with a numerical value, the terms can refer to a variation of less than or equal to ±10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, or less than or equal to ±0.05%. Thus, the term “approximately equal” in reference to two values can refer to a ratio of the two values being within a range between and inclusive of 0.9 and 1.1.
Additionally, amounts, ratios, and other numerical values are sometimes presented herein in a range format. It is to be understood that such range format is used for convenience and brevity and should be understood flexibly to include numerical values explicitly specified as limits of a range, but also to include all individual numerical values or sub-ranges encompassed within that range as if each numerical value and sub-range is explicitly specified.
As used herein, the singular terms “a,” “an,” and “the” may include plural referents unless the context clearly dictates otherwise. In the description of some embodiments, a component provided “on” or “over” another component can encompass cases where the former component is directly on (e.g., in physical contact with) the latter component, as well as cases where one or more intervening components are located between the former component and the latter component.
While the present disclosure has been described and illustrated with reference to specific embodiments thereof, these descriptions and illustrations do not limit the present disclosure. It should be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the true spirit and scope of the present disclosure as defined by the appended claims. The illustrations may not necessarily be drawn to scale. There may be distinctions between the artistic renditions in the present disclosure and the actual apparatus due to manufacturing processes and tolerances. There may be other embodiments of the present disclosure which are not specifically illustrated. The specification and drawings are to be regarded as illustrative rather than restrictive. Modifications may be made to adapt a particular situation, material, composition of matter, method, or process to the objective, spirit and scope of the present disclosure. All such modifications are intended to be within the scope of the claims appended hereto. While the methods disclosed herein have been described with reference to particular operations performed in a particular order, it will be understood that these operations may be combined, sub-divided, or re-ordered to form an equivalent method without departing from the teachings of the present disclosure. Accordingly, unless specifically indicated herein, the order and grouping of the operations are not limitations of the present disclosure.
