| Number | Date | Country | Kind |
|---|---|---|---|
| 196 50 115 | Dec 1996 | DEX |
| Filing Document | Filing Date | Country | Kind | 102e Date | 371c Date |
|---|---|---|---|---|---|
| PCT/EP97/06574 | 11/25/1997 | 6/6/1999 | 6/6/1999 |
| Publishing Document | Publishing Date | Country | Kind |
|---|---|---|---|
| WO98/24496 | 6/11/1998 |
| Number | Name | Date | Kind |
|---|---|---|---|
| 5377524 | Wise et al. | Jan 1995 | |
| 5515735 | Sarihan | May 1996 |
| Number | Date | Country |
|---|---|---|
| 0435237 | Jul 1991 | EPX |
| 3814150 | Apr 1988 | DEX |
| 382744A1 | Aug 1988 | DEX |
| 285188 | Jun 1989 | DEX |
| 19501691 | Jan 1995 | DEX |
| 05157599 | Jun 1993 | JPX |
| 8605993 | Oct 1986 | WOX |
| 9632975 | Oct 1996 | WOX |
| Entry |
|---|
| R. Werthschutzky, "Application of Silicon Sensors in Process Measuring Dees for Pressure Measurements--Current Status and Coming Opportunities", Sep. 1992, No. 9, Munchen, DE. |
| Oosterbroek et al., "Designing, Realization and Characterization of a Novel Capacitive Pressure/Flow Sensor", Jun. 16-19, 1997, 1997 International conference of Solid-State Sensors and Actuators. |
| Boillat, et al., "A Differential Pressure Liquid Flow Sensor for Flow Regulation and Dosing Systems", 1995, IEEE. |