Claims
- 1. A memory cell configuration, comprising:a semiconductor layer structure having a plurality of substantially parallel word lines, a plurality of substantially parallel bit lines running transversely to said word lines, and an insulating layer between said word lines and said bit lines; said insulating layer being formed with contact holes at crossover points between said bit lines and said word lines; resistors having a resistance higher than a resistance of said word lines and a resistance of said bit lines, said resistors connected between said word lines and said bit lines, said resistors each disposed in a respective said contact hole between a respective said bit line and a respective said word line, said resistors including first resistors and second resistors with mutually different resistances, said first resistors representing a first logic value and said second resistors representing a second logic value; and a sense amplifier connected to each said bit line for regulating a potential on the respective said bit line to a reference potential and for outputting an output signal, said sense amplifier having a feedback operational amplifier.
- 2. The memory cell configuration according to claim 1, wherein a number of said word lines is greater than a number of said bit lines.
- 3. A method of fabricating a memory cell configuration, which comprises the following steps:forming a plurality of substantially parallel word lines, a plurality of substantially parallel bit lines, and an insulating layer on a surface of a substrate, whereby the word lines run transversely to the bit lines and the insulating layer is disposed between the word lines and the bit lines; forming the word lines by: first producing an auxiliary structure having strip-type elements; producing a conductive layer with substantially conformal edge coverage; and forming the word lines in the form of conductive spacers from the conductive layer by anisotropic etching selective with respect to the auxiliary structure; opening contact holes each disposed between one of the bit lines and one of the word lines at predetermined crossover points between the bit lines and the word lines in the insulating layer; forming a resistor in each of the contact holes and connecting the resistor between the respective bit line and the respective word line, the resistor having a higher resistance than the bit lines and the word lines; and producing sense amplifiers each connected to a respective bit line, and enabling the sense amplifiers to regulate a potential on the respective bit line to a reference potential and to output an output signal.
- 4. The method according to claim 3, wherein the resistors are formed with at least one material selected from the group consisting of Al2O3, SiO2, polysilicon, and amorphous silicon.
- 5. A memory cell configuration, comprising:a semiconductor layer structure having a plurality of substantially parallel word lines, a plurality of substantially parallel bit lines running transversely to said word lines, and an insulating layer between said word lines and said bit lines, a number of said word lines being greater than a number of said bit lines; said insulating layer being formed with contact holes at crossover points between said bit lines and said word lines; resistors having a resistance higher than a resistance of said word lines and a resistance of said bit lines, said resistors connected between said word lines and said bit lines, said resistors each being disposed in a respective said contact hole between a respective said bit line and a respective said word line; and a sense amplifier connected to each said bit line for regulating a potential on the respective said bit line to a reference potential and for outputting an output signal.
Priority Claims (1)
Number |
Date |
Country |
Kind |
197 40 945 |
Sep 1997 |
DE |
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CROSS-REFERENCE TO RELATED APPLICATION
This is a continuation of copending international application PCT/DE98/02618, filed Sep. 4, 1998, which designated the United States.
US Referenced Citations (17)
Foreign Referenced Citations (4)
Number |
Date |
Country |
44 34 725 |
May 1996 |
DE |
2.071.501 |
Sep 1971 |
FR |
08255843 |
Jan 1996 |
JP |
307 048 |
Jun 1997 |
TW |
Non-Patent Literature Citations (3)
Entry |
C. de Graaf et al.: “A Novel High-Density Low-Cost Diode Programmable Read Only Memory”, 1996 IEEE, IEDM, pp. 189-192. |
“High Speed Fixed Memories Using Large-Scale Integrated Resistor Matrices” (David et al.), dated Aug. 1968, IEEE Transactions on Computers, vol. C-17, No. 8, pp. 721-728. |
“7. The Operations Amplifier, 7.7 Frequency Response Correction, 7.8 Measuring Operations Amplifier Data”, pp. 152-1571. |
Continuations (1)
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Number |
Date |
Country |
Parent |
PCT/DE98/02618 |
Sep 1998 |
US |
Child |
09/528268 |
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US |