Memory device and method of manufacturing the same

Abstract

Provided is a memory device comprising a substrate, a source region, and a drain region that may be formed in the substrate and spaced apart from each other, a memory cell that may be formed on the surface of the substrate, connecting the source region and the drain region, and including a plurality of nanocrystals, wherein the memory cell comprises a first tunneling oxide layer formed on the substrate, and a control oxide layer including a plurality of nanocrystals formed on the tunneling oxide layer and a control gate formed on the memory cell. The memory device may include a polyelectrolyte film which enables a uniform arrangement of nanocrystals. The device characteristics may be controlled and a memory device with improved device characteristics may be provided.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

Example embodiments will be more clearly understood from the following detailed description taken in conjunction with the accompanying drawings. FIGS. 1-7 represent non-limiting, example embodiments as described herein.

FIG. 1 is a diagram of a memory device according to example embodiments;

FIGS. 2A-2E illustrate a method of manufacturing a memory device according to example embodiments;

FIGS. 3A-3F illustrate a method of manufacturing a memory device according to example embodiments;

FIG. 4 is a scanning electrographic microscope (SEM) photograph showing nanocrystals arranged on a surface of a second tunneling oxide layer in Example 1;

FIG. 5 is an SEM photograph showing nanocrystals arranged on a surface of a second tunneling oxide layer in Example 2;

FIG. 6 is a graph illustrating the variation of a flat band voltage VFB according to programming time and erasing time of the memory device of Example 1; and

FIG. 7 is a graph of the predicted data storing time period of the memory device of Example 1.

Claims

1. A method of manufacturing a memory device, the method comprising: providing a substrate;forming at least one tunneling oxide layer on a surface of the substrate;forming a polyelectrolyte layer on a surface of the tunneling oxide layer;forming a monolayer of nanocrystals on the polyelectrolyte layer; andforming a control oxide layer on the surface of the tunneling oxide layer in which the nanocrystals are arranged.

2. The method of claim 1, further comprising: forming a source and drain region on the surface of the substrate; andforming a control gate on the surface of the control oxide layer.

3. The method of claim 1, wherein the at least one tunneling oxide layer Includes first and second tunneling oxide layers.

4. The method of claim 1, wherein the polyelectrolyte forming the polyelectrolyte layer includes at least one polymer selected from the group consisting of polyallylamine hydrochloride, polydiallyldimethylammonium chloride, polyacrylic acid, poly sodium-4-styrene-sulfonate, polyethyleneimine and polyvinyl pyridine.

5. The method of claim 1, wherein the material forming the at least one tunneling oxide layer is at least one selected from the group consisting of silicon oxide, silicon nitride, lanthanum oxide, lanthanum silicate and lanthanum aluminate.

6. The method of claim 1, wherein the material forming the at least one tunneling oxide layer is at least one selected from the group consisting of SiO2, SiOxNy, ZrO2, HfONx, ZrONx, TiO2, Ta2O5, La2O3, PrO2, HfSiO2, ZrSiO2 and HfSiOxNy.

7. The method of claim 1, wherein the nanocrystals are arrayed on the polyelectrolyte layer using a method selected from the group of methods consisting of spin-coating, dip coating, and drop casting.

8. The method of claim 1, wherein the nanocrystals are capped with polar organic molecules having charges.

9. The method of claim 1, wherein the nanocrystals are at least one kind selected from the group consisting of metal nano particles including Pt, Pd, Co, Cu, Mo, Ni, Fe; Group II-VI compound semiconductor nano particles including CdS, CdSe, CdTe, ZnS, ZnSe, ZnTe, HgS, HgSe, HgTe; Group III-V compound semiconductor nano particles including GaN, GaP, GaAs, InP, InAs; and PbS, PbSe, and PbTe, wherein the nanocrystals are a metal or alloy having a size of about 10 nm or less or are in a Core-Shell structure.

10. The method of claim 1, wherein the nanocrystals are arranged as a monolayer.

11. A memory device comprising: a substrate;a source region and a drain region that are formed in the substrate and are spaced apart from each other;a memory cell that is formed on the surface of the substrate, connecting the source region and the drain region, and including a plurality of nanocrystals, wherein the memory cell includes at least one tunneling oxide layer formed on the substrate and a control oxide layer including a plurality of nanocrystals formed on the at least one tunneling oxide layer; anda control gate formed on the memory cell.

12. The memory device of claim 11, wherein the at least one tunneling oxide layer includes first and second tunneling oxide layers.

13. The memory device of claim 11, wherein the material forming the at least one tunneling oxide layer is at least one selected from the group consisting of silicon oxide, silicon nitride, lanthanum oxide, lanthanum silicate, and lanthanum aluminate.

14. The memory device of claim 11, wherein the material forming the at least one tunneling oxide layer is at least one selected from the group consisting of SiO2, SiOxNy, ZrO2, HfONx, ZrONx, TiO2, Ta2O5, La2O3, PrO2, HfSiO2, ZrSiO2, and HfSiOxNy.

15. The memory device of claim 11, wherein the nanocrystals are at least one kind selected from the group consisting of metal nano particles including one kind of nanocrystals selected from the group consisting of metal nano particles including Pt, Pd, Co, Cu, Mo, Ni, Fe; Group II-VI compound semiconductor nano particles including CdS, CdSe, CdTe, ZnS, ZnSe, ZnTe, HgS, HgSe, HgTe; Group III-V group compound semiconductor nano particles including GaN, GaP, GaAs, InP, InAs; and PbS, PbSe, and PbTe, wherein the nanocrystals are a metal or alloy having a size of about 10 nm or less or are in a Core-Shell structure.

16. The memory device of claim 11, wherein a plurality of nanocrystals included in the control oxide layer are arrayed as a monolayer.

17. A method of operating a memory device, the method comprising: grounding a source region; andapplying a voltage (Vd>0) to a drain region so that electrons move from the source region to the drain region, and wherein when a gate voltage Va is greater than a drain voltage Vd, electrons move to a memory cell.

18. The method of claim 17, wherein the gate voltage is a write voltage (Va=0).

19. The method of claim 17, further comprising: applying a read voltage smaller that the gate voltage Va during writing to the drain region, wherein the gate voltage is about 0.

20. The method of claim 17, further comprising: applying an erase voltage to the source region to allow electrons to move to the source region, wherein the gate voltage is about 0 and the erase voltage is greater than 0.