The invention relates to MEMS airborne ultrasonic transducer system to detect thermoacoustic generation of ultrasound wave caused by the RF-induced volumetric expansion of blood in the brain.
Developing diseases related to brain haemorrhage today negatively affect the peace and prosperity of the society. Detection within the first 1.5 hours after the onset of cerebral haemorrhage has enabled treatment and prevention of permanent brain damage effectively reducing the healing time. However, detection using magnetic resonance imaging (MRI) or computed tomography (CT) can hardly be completed in this time frame due to high cost and complexity of the equipment limiting their readiness and availability.
Stroke is the third most significant disease in the world after heart disease and lower respiratory tract infection, and stroke is the first neurological disease among the world in terms of all the negative burden caused by a disease in society calculated in terms of early death and disability years [1, 2]. It has been observed that the diagnosis of this disease in the first 90 minutes after the onset of the disease and the initiation of treatment provides benefit for healing [3]. However, the diagnosis is made after imaging by MRI (magnetic resonance imaging) or CT (computed tomography) [4] and given that these devices are non-portable and costly devices, it is difficult to start treatment within the specified time frame, and a clear need for a portable, low cost diagnostic device is observed.
The methods used in biomedical field and their properties are presented in Table I. The dielectric properties of the tissues were examined using microwave (RF), and the importance of these tumors in the differentiation of tissues and the detection of tumor tissues were demonstrated [5,6]. In addition to diagnostic technologies, the thermal effect of the high density microwave was also used for surgery and for the destruction of unhealthy tissues [7]. Similar to microwaves, ultrasonic waves were also used for imaging at low powers, and for thermal treatment at high powers [8,9]. However, it was observed that the resolution was low due to scattering in the microwave imaging studies, whereas the contrast between the different tissues required for the identification of the tissues was low despite the good resolution in the imaging studies performed with ultrasound waves [10]. In recent years, various studies have been carried out on the thermoacoustic imaging method, which combines the superior properties of these two methods and uses pressure waves generated by the application of microwaves at regular intervals on the tissue [10-13].
The potential of thermoacoustic imaging method for microwave (RF) transmitter-ultrasound receiver systems can be understood when the physical material properties of the tissues given in Table II are examined. The energy transmitted at the RF carrier frequency causes approximately the same amount of heat energy to be absorbed in both the brain and the blood bank. Since the heat capacity is close to each other, the corresponding temperature increase is approximately the same (Tbrain/Tblood=0.8). However, the volumetric heat expansion (β) is 2.5-fold for blood compared to the brain (Table II [15, 16]). This allows thermoacoustic method to differentiate blood clumps accumulated in the brain from brain tissues via brain hemorrhage [14] (εR: Relative dielectric constant, a: Electrical conductivity (S/m), p: density (kg/m3), C: Heat capacity (J/kg/° C.), k: Thermal conductivity (W/m/° C.), β: Volumetric thermal expansion (K−1×10−4)). Setup and safe operation of the RF transmitter system should comply with specific absorption rate (SAR) requirements not exceeding the 8 W/kg limit in accordance with current regulations [17-20].
It is thought that the ultrasonic wave due to the volume expansion of the blood bank might suffer from frequency shifts due to the scattering and losses experienced in different environments (brain-skull-air) [14]. Despite these frequency shifts, the airborne ultrasound receiver, capacitive micromachined ultrasonic transducer (CMUT), must have a sufficiently high bandwidth to detect the wave. In order to increase the bandwidth, the squeeze film damping effect was utilized by opening air holes on the membrane [21]. In the CMUT designs examined in the literature, the effects of the presence of air ventilation holes on the membrane or substrate for the vibrating membrane in the conventional mode (no collapse) on bandwidth and CMUT sensitivity (nm/Pa) were examined by theoretical [22] or finite element analysis [23]. The rate of change of the CMUT capacitance and electromechanical coupling efficiency are much higher in the collapse mode than in the conventional mode [24]. It is anticipated that collapse mode operation of airborne CMUT as a receiver has the potential to improve both bandwidth and sensitivity. Collapse mode of the CMUT suffers from charging of insulation layer when the membrane contacts the substrate during operation. To reduce charging of the insulation layer, patterning of electrodes, patterning of insulation layers to reduce the contact area to suppress the effect of charging were proposed in literature [25]. Pre-collapsed membrane configurations at zero DC bias voltage were also proposed to acquire the benefits of the collapse operation [26]. But the fundamental problem is not addressed so far: presence of insulation layer under an electric field at collapse operation causes potentially time-varying charging problems, which changes sensitivity and limits the reliability of the transducer for highly sensitive receiver applications. For CMUTs, which are usually operated in the air, large bandwidth is not generally required. This is due to the fact that the ultrasound waves transmitted at the transmitter frequency of the CMUT are again detected by CMUT at the same frequency [27]. However, to detect blood accumulation in the brain, the ultrasound waves will be generated by RF power delivered to human head at a carrier frequency of 1.8-2.4 GHz and a pulse modulation frequency of 50-300 kHz. Considering the frequency shifts due to absorption, attenuation and scattering of RF-induced ultrasound wave in an environment of greatly varying acoustic impedance of blood, brain, skull and air, the bandwidth and the sensitivity of the airborne ultrasound receiver should be sufficiently large to capture ultrasound waves.
Multi-frequency and multi-band (hyperspectral) imaging techniques are an evolving method for capturing features or traces that conventional single methods cannot. In light-based applications, imaging at wider intervals than the visible spectrum is known to be successful in many areas, such as the detection of qualified agricultural products [28], colorless chemicals [29], oil spills [30] and surface mines [31]. High resolution imaging is also performed by intravascular methods in ultrasound [32].
A new method of detecting brain haemorrhage is presented in this document. Our invention is a MEMS airborne ultrasonic transducer system to detect thermoacoustic generation of ultrasound wave caused by the RF-induced volumetric expansion of blood in the brain. At the heart of ultrasonic transducer having higher sensitivity and higher bandwidth is the innovative collapse mode having electrical contact resistance (ECR) feature. Electrical contact resistance force sensing is available in literature [33], however, our invention introduces ECR feature for collapse mode of CMUTs for the first time.
In this invention, detection of blood accumulation in the brain is detected using the thermoacoustic principle. A microwave (RF) carrier frequency (1.8-2.4 GHz) carries energy to the brain within the human safety levels (<8 W/kg) by 50% duty cycle and a pulse modulation frequency of 50-300 kHz. This energy is roughly at the same level as the RF energy emitted by mobile phones. This energy periodically changes the temperature in the tissues in the order of MicroKelvin (10−6 K) at the modulation frequency. Volumetric thermal expansion (β) of blood is 2.5-fold compared to brain. This difference enables ultrasound waves originating from blood, which is distinguished from the surrounding brain tissue.
In this invention, a novel design of an airborne receiver capacitive micromachined ultrasonic transducer (CMUT) to be operated in collapse mode with electrical contact resistance (ECR) at high sensitivity is also presented to detect very low ultrasound signals. This is achieved by not using any insulation layer and instead using highly resistive dimples to keep reliable collapse operation in our CMUT design. Highly resistive dimples featuring electrical contact resistance are realized by Hertzian contact between poly silicon surfaces (covered with a very thin native oxide of 10 Å enabling tunneling resistance [34]) at collapse operation. Lack of insulation layer solves the common charging problem associated with insulators in high electric field. To obtain this sensitivity, advantages of this novel insulator-free, high-resistance (>10 kΩ) ECR version of collapse mode operation of CMUT is utilized in MEMS ultrasonic receiver. In addition to being ultra-sensitive for detecting cerebral haemorrhage, the detector supports hyperspectral imaging and enhanced bandwidth modes by changing the DC voltage during operational use. Collapse mode of our CMUT offers a wide adjustment range of the central frequency by changing the resistance of the contacting surface via DC bias voltage. Therefore, DC bias-controllable, frequency dependent high sensitivity for the receiver airborne CMUT operating in collapse mode is achieved. Our invention of fast and affordable method for detecting brain haemorrhage based on thermoacoustic principle and airborne resistive-collapse mode CMUT design featuring electrical contact resistance (ECR) serves the ultimate goal of protection of the health and welfare of society.
One aspect of the invention, wherein an RF transmitter and ultrasound receiver systems are combined to transmit RF energy and receive ultrasound wave.
Another aspect of the invention, wherein RF transmitter system includes an RF signal generator, RF amplifier and horn antenna.
Another aspect of the invention, wherein ultrasound receiver system includes a lock-in amplifier, a DC supply, two ultrasonic transducer arrays wirebonded to low noise amplifier (LNA) chips.
Another aspect of the invention, wherein the ultrasonic transducer array is composed of independent four transducers in 2×2 CMUT configuration.
Another aspect of the invention, wherein four transducers in the array differ in membrane size to have incremental difference in resonance frequency from one another.
Another aspect of the invention, wherein the transducer is airborne capacitive micromachined ultrasonic transducer (CMUT).
Another aspect of the invention, wherein the transducer is not touching or making contact, i.e., operating freely in air.
Another aspect of the invention, wherein the transducer has poly silicon membrane having poly silicon dimples facing the bottom electrode.
Another aspect of the invention, wherein the diameter of dimples is set to 8 μm.
Another aspect of the invention, wherein the transducer has poly silicon bottom electrode.
Another aspect of the invention, wherein the top and bottom poly silicon electrodes are covered by very thin native oxide (10 Å) enabling tunneling resistance.
Another aspect of the invention, wherein there is no insulation layer keeping top and bottom electrodes from passing current in-between at membrane collapse.
Another aspect of the invention, wherein the dimples are spatially distributed on the contacting surface of the membrane.
Another aspect of the invention, wherein dimples form Hertzian contact with the substrate at membrane collapse.
Another aspect of the invention, wherein electrical contact resistance (ECR) is observed at Hertzian contact of the dimples.
Another aspect of the invention, wherein the control range of the membrane against ultrasound stimulation and the sensitivity of the measuring system are adjusted by controlling the DC bias voltage after membrane collapse.
Another aspect of the invention, wherein the DC bias voltage can be changed down to snapback voltage or changed up beyond the collapse voltage.
Another aspect of the invention, wherein the transducer operated in resistive-collapse (R-collapse) mode, i.e., collapse mode with electrical contact resistance (ECR).
Another aspect of the invention, wherein specifications of ultrasonic transducer are, Collapse voltage is 1.4 V.
Snapback voltage is 1.25 V.
Impedance model parameters RS, CS and RP are 150 Ω, 36.7 pF and 15.2 kΩ, respectively.
Another aspect of the invention, wherein the transducer operates reliably at resistive-collapse mode.
Another aspect of the invention, wherein the transducer is wirebonded to LNA chip.
Another aspect of the invention, wherein RF signal generator generates a pulse modulated RF carrier signal.
Another aspect of the invention, wherein the RF signal generator is connected to lock-in amplifier.
Another aspect of the invention, wherein the RF signal generator sweeps the pulse modulation frequency from 50 kHz up to 300 kHz.
Another aspect of the invention, wherein the DC bias of transducer array is adjusted for maximum sensitivity for the present pulse modulation frequency.
Another aspect of the invention, wherein the lock-in amplifier tracks the pulse modulation frequency.
Another aspect of the invention, wherein the lock-in amplifier measures the signal coming from LNA to calculate the spectral ultrasound power at a certain frequency for a specific blood size to benefit from constructive and destructive interference of RF-induced blood-originating ultrasound waves.
Another aspect of the invention, wherein the lock-in amplifier uses time-gated mode to process only a certain time waveform interval between tSTART and tSTOP (referenced to trigger signal from the RF signal generator) determined from ultrasound time-of-flight calculation for a certain region within the brain.
Another aspect of the invention, wherein lock-in amplifier data collected from #1 MEMS ultrasonic transducer and #2 MEMS ultrasonic transducer, each having 4 units (CMUT #1 to CMUT #4), are processed with multi-frequency and multi-band (hyperspectral) imaging techniques.
Another aspect of the invention, wherein all instruments are controlled by a personal computer and a software.
The figures used to better explain MEMS airborne ultrasonic transducer system developed with this invention and their descriptions are as follows:
The present invention has been described in detail in the following. This invention offers a new method of detecting brain haemorrhage.
In this section, a novelty is going to be demonstrated.
Our invention is a MEMS airborne ultrasonic transducer system to detect thermoacoustic generation of ultrasound wave caused by the RF-induced volumetric expansion of blood in the brain (
Our axisymmetric 2D finite element model shown in
The finite element analysis was performed using double precision solver of a commercially available software package (PZFlex). On-axis pressure point shown in
Initially, 100 kHz single pulse triangular wave with a temperature of 1 C increasing (0 μs-5 μs) and decreasing (5 μs-10 μs) of the blood bank (no thermal expansion of brain) was applied and ultrasonic wave caused by thermal expansion at the time of t=15 μs was observed in
For an RF signal with an on/off modulation frequency of 100 kHz, time domain finite element simulations were performed under the assumption of brain, blood and skull bone being simultaneously heated with a 10 cycle triangular waveform. The pressure waveforms are shown in
Fast Fourier Transforms (FFT) of pressure waveforms in
Pressure waveform in
Specific absorption rate (SAR) is defined in equation (2). Based on theoretical calculations described in equations (2) and (3), RF heat delivered to the tissue can be related to accompanying increase in its temperature (ΔT). Uniform electric field, E(r), is assumed within the head, and using the material properties in Table IV, normalized temperature increase ratios for brain and skull bone with respect to blood are calculated to be 0.83 and 0.24, respectively.
The
finite element simulation results are summarized in Table V. Using the maximum allowed average heat power of 8 W/kg at a duty cycle of 50% in equation (3), temperature increase in the blood over a cycle was calculated to be in the range of μK as given in Table V. Considering the minimum detectable pressure level of approximately 0.9 mPa for a CMUT receiver in air [38, 39], signal-to-noise ratio (SNR) should be increased by averaging techniques [40]. This technique for collecting data will improve the SNR with the square root of the number of samples [40, 41].
MEMS airborne ultrasonic transducer system setup proposed to detect thermoacoustic generation of ultrasound wave caused by the RF-induced volumetric expansion of blood in the brain is given in
MEMS ultrasonic transducer array (2×2 CMUT) placed on a low noise amplifier (LNA) chip is schematically shown in
Mask design and actual realization of MEMS ultrasonic transducer array are given in
Cross-sectional view of the MEMS ultrasonic transducer design is schematically given in
This process is based on polysilicon layers. The ability to design membranes and the ability to etch sacrificial oxide layers under the polysilicon layers makes this process valuable for our design. Obtain perfect etching of sacrificial oxide layers requires placement of holes in the polysilicon layers. The distance between any etching holes cannot be larger than 30 μm. CO2 dry etch in addition to the standard HF wet etch for oxide removal was used. CO2 dry was used to prevent the stiction of the adhesion between the membrane and the substrate for the large aspect ratio used in the membrane (1:200). Very low compressive stress (<7 MPa) of POLY2 membrane material with a thickness of 1.5 μm made our large aspect-ratio membrane having negligible curvature due to residual stress.
Important things to note in this design are
Input impedance representation for CMUTs in conventional (no contact between the membrane and the substrate) and collapse (having an insulation layer between the membrane and the substrate preventing DC current flow) mode is given in
Input impedance representation for our novel CMUT design featuring highly resistive dimples to form current flow in collapse mode is given in
R-collapse mode enables important features (dependency on frequency (w: angular frequency in rad/s, f=w/2π in Hz) and dimple resistance (RP)) as a novelty to be explored in our invention.
In general, an insulation layer is needed to prevent top and bottom electrodes to short circuit when membrane collapses onto the substrate. Membrane and substrate surfaces will touch and form a flat mechanical contact region having an electrical conductive path. In our design, first we selected both contacting surfaces made of polysilicon having high resistivity compared to metals roughly differing by 5 orders of magnitude. Second, right underneath the membrane, our design had dimples of small diameter and curved structure to form small-sized hertzian contact at membrane collapse. Third, placement of dimples at every other geocentric center of hole triangles (
MEMS ultrasonic transducer, CMUT #3 having a membrane diameter of 440 μm (Table VI), was characterized via laser vibrometer. Other CMUTs (#1, #2, #4) will be similar to CMUT #3 with varying resonance frequency (also, collapse and snapback voltages) due to changes in membrane diameter. Laser vibrometer displacement measurements of MEMS ultrasonic transducer showing collapse and snapback behavior is shown in
R-collapse mode enables important features. Dimple resistance (
Frequency dependency of the input impedance provides additional advantage for detecting signals at a certain frequency, which is suitable to capture pulse modulation frequencies between 50 kHz and 300 kHz in the detection of brain haemorrhage. As previously mentioned and shown in
Antennas and Propagation Society International Symposium.
This application is the national phase entry of International Application No. PCT/TR2019/051050, filed on Dec. 9, 2019, the entire contents of which are incorporated herein by reference.
Filing Document | Filing Date | Country | Kind |
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PCT/TR2019/051050 | 12/9/2019 | WO |