Claims
- 1. A micro-electro-mechanical system (MEMS) device supports on a substrate comprising:
an electrically tunable membrane having an optically transparent portion for transmitting an optical signal through an optical path therethrough wherein said membrane having a reflection rate of at least 50% ; and a plurality of optical path interfaces for said optical signal to transmit from a first material medium to a second material medium of different refraction indexes and an antireflection (AR) layer is disposed on each of said interfaces between said first material medium and second material medium.; and transmission spectrum is employed to fabricate the MEMS device.
- 2. The MEMS device of claim 1 wherein:
said electrically tunable membrane comprising at least two membrane layers wherein each of said membrane layer having alternately a relative high and then a relative low refraction index between adjacent membrane layers. If chosen one layer, the layer should be with high refraction index.
- 3. The MEMS device of claim 1 wherein:
said electrically tunable membrane comprising three membrane layers wherein each of said three membrane layer having alternately a relative high and then a relative low refraction indexes between adjacent membrane layers. The top and bottom layers should be with high refraction index.
- 4. The MEMS device of claim 1 wherein:
said electrically tunable membrane comprising five membrane layers wherein each of said five membrane layers having alternately a relative high and then a relative low refraction indexes between adjacent membrane layers. The top and bottom layers should be with high refraction index.
- 5. The MEMS device of claim 1 further comprising:
a resonator comprising said electric tunable membrane as a first electric tunable membrane and a second electric tunable membrane opposite said first electric tunable membrane wherein said first and second electric tunable membranes having a substantially same reflection rate.
- 6. The MEMS device of claim 1 further comprising:
a resonator comprising said electric tunable membrane as a first electric tunable membrane and a second electric tunable membrane opposite said first electric tunable membrane by bonding a second MEMS device manufactured together with said MEMS device whereby said first and second electric tunable membranes having a substantially same reflection rate.
- 7. The MEMS device of claim 1 further comprising:
conductive layers for functioning as electrodes for electrically tuning said membrane wherein said conductive layers disposed directly facing each other without an intermediate dielectric layer and constituting face-to-face conductive layers.
- 8. The MEMS device of claim 1 further comprising:
conductive layers for functioning as electrodes for electrically tuning said membrane wherein said conductive layers disposed directly facing each other with an intermediate dielectric layer with a thickness less than a charge-buildup thickness is disposed between said conductive layers constituting breakdown preventive face-to-face conductive layers.
- 9. The MEMS device of claim 7 wherein:
at least two of said conductive layers are ring-shaped conductive layers if they are un-transparent conductive material.
- 10. The MEMS device of claim 1 further comprising:
a resonator having a particular transverse width, cavity length, and membrane curvature for providing a basic resonator residual mode to match a specified incident beam.
- 11. The MEMS device of claim 1 further comprising:
a resonator having a resonator residual basic mode represented by a residual parameter ω0 wherein said residual parameter is particularly designed to match the input mode with optical waist a beam diameter ω of an incident beam whereby ω=ω0.
- 12. The MEMS device of claim 1 further comprising:
an optical attenuator device comprising a voltage control means for electrically tuning said membrane.
- 13. The MEMS device of claim 1 further comprising:
an environmental compensation control means for electronically control said attenuator for compensating environmental performance variations.
- 14. The MEMS device of claim 13 wherein:
said environmental compensation control means further comprising a temperature compensation control means for electronically control said attenuator for compensating temperature performance variations.
- 15. The MEMS device of claim 13 wherein:
said environmental compensation control means further comprising a wavelength-shift compensation control means for electronically control said attenuator for compensating wavelength-shift performance variations.
- 17. A micro-electro-mechanical system (MEMS) device supports on a substrate comprising:
a first and a second multi-layer membranes formed as two high reflection-rate membranes functioning as two mirrors of a resonator.; and transmission spectrum is employed to fabricate the MEMS device.
- 18. The MEMS device of claim 17 wherein:
said multi-layer membranes comprising a plurality of layers with a sequence of alternating high-low refraction indexes whereby said membranes are provided with high reflection rates for increasing a tunable attenuation range and reducing a tuning voltage.
- 19. The MEMS device of claim 17 wherein:
said first and second multi-layer membranes are manufactured contemporaneously by employing an identical set of processing steps on a same semiconductor wafer.
- 20. The MEMS device of claim 17 wherein:
said first and second multi-layer membranes having a substantially identical reflection rate.
- 21. A micro-electro-mechanical system (MEMS) device supports on a substrate comprising:
a first membrane and a second multi-layers on substrate formed as two high reflection-rate mirrors functioning as a resonator.; and transmission spectrum is employed to fabricate the MEMS device.
- 22. The MEMS device of claim 21 wherein:
said first multi-layer membrane comprising a plurality of layers with a sequence of alternating high-low refraction indexes whereby said membranes are provided with high reflection rates for increasing a tunable attenuation range and reducing a tuning voltage.
- 23. The MEMS device of claim 21 wherein:
said second multi-layers on substrate are designed to be with the same reflection rate as the first membrane.
- 24. The MEMS device of claim 21 wherein:
said first membrane and said second multi-layer substrate having a substantially identical reflection rate.
Parent Case Info
[0001] This Application claims a priority date of Nov. 3, 2000 and Feb. 14, 2001 benefited from a previously filed Provisional Patent Application 60/245,452 filed on Nov. 3, 2000 and a previously filed Provisional Patent Application 60/268,612 filed on Feb. 14, 2001 by the Applicants of this Formal Patent Application.
Provisional Applications (2)
|
Number |
Date |
Country |
|
60245452 |
Nov 2000 |
US |
|
60268612 |
Feb 2001 |
US |