MEMS mass flow controller

Abstract

Description

FIG. 1 is a front right perspective view of a MEMS mass flow controller in accordance with the present design.

FIG. 2 is a front view for the MEMS mass flow controller.

FIG. 3 is a rear view thereof.

FIG. 4 is a left side plan view thereof.

FIG. 5 is a right side plan view thereof.

FIG. 6 is a top view thereof; and,

FIG. 7 is a bottom view thereof.

Broken lines are used to show environment and boundaries that form no part of the claimed design.

Claims

I claim the ornamental design for a MEMS mass flow controller, substantially as shown and described.