This application claims the benefit of Taiwan Patent Application Serial No. 111122923, filed Jun. 20, 2022, the subject matter of which is incorporated herein by reference.
The present invention relates to an optical element. More particularly, the present invention relates to a meta-optics element.
A meta-optics element is an artificial structure with dimensions in the sub-wavelength. The meta-optics element has special optical properties that are not found in natural substances, and can exhibit different optical responses with different geometric shapes, sizes and materials.
The anti-reflection layer 120 is used to reduce the effect of light reflection to improve the overall optical transmittance of the meta-optics element 100. However, recent studies have shown that no matter how the thickness and material of the anti-reflection layer 120 are adjusted, the efficiency of optical penetration cannot be significantly improved.
In view of this, the present invention provides a meta-optics element comprising a substrate, a meta-optics structure and an anti-reflection structure. The meta-optics structure comprises multiple meta-optics units disposed on the substrate in a geometric manner. The anti-reflection structure comprises multiple anti-reflection units corresponding to the meta-optics units and disposed on the surface of the corresponding meta-optics units.
According to one embodiment of the present invention, the anti-reflection units can be disposed on the top surface or the side surface of the corresponding meta-optics units, or disposed between the corresponding meta-optics units and the substrate.
According to one embodiment of the present invention, the meta-optics units and the anti-reflection units can be in sub-wavelength dimensions. The shape of the anti-reflection units may be cone.
The present invention also provides a manufacture method of a meta-optics element, comprising: providing a substrate; forming an optical composite layer on the substrate and defining an optical pattern; and forming a meta-optics structure and an anti-reflection structure via etching the optical composite layer with the optical pattern, wherein the meta-optics structure comprises multiple meta-optics units, and the anti-reflection structure comprises multiple anti-reflection units corresponding to the meta-optics units.
According to one embodiment of the present invention, the step of forming the optical composite layer may comprise: forming an optics layer on the substrate; and forming an anti-reflection layer on the optics layer. In another embodiment of the present invention, the step of forming the optical composite layer may comprise: forming a first anti-reflection layer on the substrate; forming an optics layer on the first anti-reflection layer; and forming a second anti-reflection layer on the optics layer.
This Summary is provided to introduce a selection of concepts in a simplified form that are further described below in the Detailed Description. This Summary is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used as an aid in determining the scope of the claimed subject matter.
The meta-optics units 222 and the anti-reflection units 232 are, for example, in sub-wavelength dimensions, and each meta-optics unit 222 or each anti-reflection unit 232 may have different sizes according to different configurations of geometric positions. In this embodiment, the shapes of the meta-optics units 222 and the anti-reflection units 232 are, for example, rectangular parallelepipeds, but the present invention does not limit the shapes of the meta-optics units 222 and the anti-reflection units 232. In addition, the anti-reflection units 232 are, for example, disposed on the top surface of the corresponding meta-optics units 222, but the present invention does not limit the relative disposition relationship between the anti-reflection units 232 and the meta-optics units 222, which will be described with another embodiment below.
Specifically, compared with the prior art anti-reflection layer 120 having a flat structure, when the light source passes through multiple independent anti-reflection units 232, 332 of the present invention, the wavefront has a larger radius of curvature to have more concentrated vertical forward wave lines. The concentrated vertical forward wave lines further reduce the occurrence of reflection and improve the optical transmittance.
Next, as shown in step S54, the optical composite layer 520 is etched with the optical pattern 530 to form a meta-optics structure 540 and an anti-reflection structure 550, wherein the meta-optics structure 540 comprises multiple meta-optics units 542, and the anti-reflection structure 550 comprises multiple anti-reflection units 552 corresponding to the meta-optics units 542.
Next, as shown in step S56, the optical pattern 530 is removed to complete the fabrication of the meta-optics element 500, wherein the overall structure of the meta-optics element 500 is similar to the meta-optics element 200 in
After defining the optical pattern 630 on the optical composite layer 620, the optical composite layer 620 can be etched with the optical pattern 630 to form the meta-optics element 600 after etching and removing the optical pattern 630, as shown in step S64. A meta-optics structure 640 and an anti-reflection structure 650 are formed in the process of etching the optical composite layer 620, wherein the meta-optics structure 640 comprises multiple meta-optics units 642, and the anti-reflection structure 650 comprises multiple anti-reflection units 652 corresponding to these meta-optics units 642.
It is worth noting that although the present embodiment uses a traditional etching process to form the meta-optics elements 500, 600, the present invention does not limit the manufacture method of the meta-optics element. For example, lift-off process, mass transfer process or other suitable process can also be used. In addition, the present invention does not limit the corresponding relationship between the meta-optics units and the anti-reflection units, and another embodiment will be given below for description with the accompanying drawings.
Besides, the present invention does not limit the shapes of anti-reflection units and meta-optics units, such as cylinder, pyramid, cube, cone, 3D trapezoid, ladder, cuboid, rectangular parallelepiped or other suitable shape. For example, the shape of the anti-reflection unit 731 may be cone, which is disposed on the top surface of the meta-optics unit 721 having cylinder shape. In another aspect, the shape of the meta-optics units 723 is, for example, a 3D trapezoid with a wide bottom and a narrow top. On the contrary, the shape of the anti-reflection unit 731 is, for example, a 3D trapezoid with a wide top and a narrow bottom. Regardless of cost, these shaped anti-reflection units and meta-optics units can be fabricated using nanoscale 3D printing technology.
Incidentally, the individual meta-optics units of the meta-optics structure may have different sizes and shapes, and similarly, the individual anti-reflection units of the anti-reflection structure may also have different sizes and shapes. Through different combination designs, the meta-optics element of the present invention can simultaneously have optical properties that meet specific requirements and high optical transmittance.
Although the present invention has been described with reference to the above embodiments, these embodiments are not intended to limit the present invention. It will be apparent to those skilled in the art that various modifications and variations can be made without departing from the scope or spirit of the present invention. Therefore, the scope of the present invention shall be defined by the appended claims.
Number | Date | Country | Kind |
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111122923 | Jun 2022 | TW | national |