Patent Application
20130300070
The present invention relates to a metal gasket that is suitable for being used in environments such as a high-temperature environment, a plasma environment, and an ultra-vacuum environment.
An annular metal gasket that is called a metal C-ring gasket is used as a gasket that is used in environments such as a high-temperature environment, a plasma environment, and an ultra-vacuum environment in which a gasket made of rubber cannot be used for a variety of piping and mechanical equipment for nuclear facilities and semiconductor manufacturing equipment.
A metal gasket that is called a metal C-ring gasket is configured in the manner in which an inner ring made of a metal leaf spring or a coil spring is fitted inside a metal outer ring having a substantially C-shaped cross-section as disclosed in the Patent Literatures 1 and 2 for instance. Consequently, in the case in which the metal gasket is used, a tightening force larger than that for a gasket made of rubber is required, and a load in a tightening work and a fastening means such as a flange and a bolt are enlarged unfortunately.
Under such a background, this applicant has disclosed a metal gasket in which an inner ring is formed in a polygonal shape such as a square as an annular metal gasket in which a high sealing performance can be obtained by using a less tightening force (see Patent Literature 3).
As shown in
As shown in
As described above, the metal gasket 100 of Patent Literature 3 describing a prior art is configured in such a manner that an inner side face of the outer ring 110 is pressed by the upper corner part 122a and the lower corner part 122b with a restoring force of the inner ring 120. Consequently, a high sealing performance can be obtained by a small tightening force as compared with a general metal gasket that is disclosed in Patent Literatures 1 and 2.
A relationship between a tightening force that is applied to a metal gasket and an amount of displacement of the metal gasket is preferably a relationship that is indicated by the line a of a graph in
As shown by the line a of the graph in
This is because a settlement is required between a metal gasket and a flange face in order to obtain a certain level of sealing performance of a metal gasket and is it necessary that a large contact stress is applied to a sealing part of a metal gasket that comes into contact with a flange face in order to obtain the settlement. In order to apply a large contact stress to a sealing part of a metal gasket, it is preferable that an inclination E1 in the early stages of
In the case in which an inclination E1 in the early stages is gradual, it is necessary that a metal gasket is deformed greatly to apply a large contact stress to a sealing part of a metal gasket. In the case in which a tightening of a bolt is insufficient, a sufficient settlement cannot be obtained between a metal gasket and a flange face in some cases. The settlement that is said here is that a metal gasket that comes into contact with a flange face is deformed along minute concavity and convexity of the flange face and a gap between a metal gasket and a flange face is removed by bridging the concavity and convexity.
As shown by the line a of the graph of
This is because a metal gasket is used in the case in which a space between a flange 130 and a flange 132 is sealed as described above for instance in the case in which a space between two members is sealed. A tightening between flanges in this case is carried out until flanges come into contact with each other, that is, a metal touch of a flange face is carried out. That is, a tightening is carried out until the flanges 130 and 132 come into contact with each other in a state shown in
As described above, a metal gasket is tightened until a metal touch of a flange face is carried out In the case of a metal gasket in which an inclination E2 of the line a of the graph indicates a rapid inclination, a tightening force F1 in the case of a metal touch is increased extremely and it is difficult to manage a tightening of a metal gasket.
In the case in which a management of a tightening of a metal gasket is carried out by a so-called displacement control in which a tightening is carried out until a displacement of a metal gasket becomes a predetermined displacement amount δ1, the following problems occur in some cases. In other words, an error occurs by a wave or a dimension tolerance of flange face and a sealing groove for a displacement amount of a metal touch. Therefore, in the case in which an inclination E2 of the line a of the graph indicates a rapid inclination, a tightening force is varied greatly only by a small error that occurs for a displacement amount of a metal touch. In the case in which a tightening force is decreased, a sealing performance may be deteriorated. In the case in which a tightening force is increased, a bolt is damaged or a tightening cannot be carried out until a metal touch unfortunately.
In the graph shown in
As described above, for a relationship between a tightening force F and a displacement amount δ for a metal gasket, it is preferable that an inclination E1 of the line of the graph indicates a rapid inclination in the early stages in such a manner that a tightening force F is increased per unit displacement amount. Moreover, it is preferable that an inclination E2 of the line of the graph indicates a gradual inclination in such a manner that a tightening force F is decreased per unit displacement amount in the state in which a tightening force is larger than F0 and the metal gasket obtains a predetermined sealing performance.
Moreover, to make a metal gasket obtain a higher sealing performance with a small tightening force, it is necessary that a tightening force F1 in the case of a metal touch is decreased while a relationship between a tightening force F and a displacement amount δ as described above is maintained.
However, it is not easy to develop a metal gasket in which a tightening force F1 in the case of a metal touch is decreased while a relationship between a tightening force F and a displacement amount 5 as described above is maintained. For instance, a line b and a line c of a graph of
Under such a technical background, the present inventors have thought that a metal gasket can be made obtain a sealing performance almost equal to that of a metal gasket that is disclosed in Patent Literature 3 with a tightening force smaller than that of a metal gasket 100 that is disclosed in Patent Literature 3 by modifying a cross sectional shape of an inner ring 120 of the metal gasket 100 that is disclosed in Patent Literature 3.
Moreover, the present inventors have examined a relationship between inner angles θ1 and θ2 and a tightening force and a displacement amount for a metal gasket 100 that is disclosed in Patent Literature 3 shown in
1. A metal gasket in accordance with the present invention is characterized by an annular metal gasket for sealing a space between members by being pressed in the vertical direction in a state of being mounted between the members, the metal gasket comprising an annular outer ring having a substantially C-shaped cross-section and having a circumferential-direction opening formed therein; and an annular inner ring fitted inside the outer ring,
wherein the inner ring is formed so as to have a polygonal cross-section comprising:
an upper corner part that makes contact with an upper side of an inside surface of the outer ring;
a lower corner part that makes contact with a lower side of the inside surface of the outer ring;
an inner-circumference-side corner part formed on an inner-circumference side of the inner ring so as to be positioned between the upper corner part and the lower corner part; and
an outer-circumference-side corner formed on an outer-circumference side of the inner ring so as to be positioned between the upper corner part and the lower corner part, and
bend parts having an inside angle larger than 180° are formed between the upper corner part and the inner- and outer-circumference-side corner parts; and between the lower corner part and the inner- and outer-circumference-side corner parts.
By this configuration, a metal gasket can be provided in which it obtains a sealing performance almost equal to that of a metal gasket that is disclosed in Patent Literature 3 with a tightening force smaller than that of a metal gasket that is disclosed in Patent Literature 3 shown in
Moreover, a metal gasket can be provided in which a tightening management of the metal gasket can be easily carried out since a tightening force until a metal touch can be decreased as compared with a metal gasket that is disclosed in Patent Literature 3 shown in
In the above invention, it is preferable that a cross section of the inner ring is formed in a line symmetric shape in a vertical direction.
By this configuration, in the case in which a metal gasket is pressed in a vertical direction, the inner ring is deformed in a generally line symmetric shape in a vertical direction and in a horizontal direction of the cross section. Consequently, the inner ring can be prevented from being shifted or inclined at an angle, whereby the inner ring can be held on the inside of the outer ring in a stable state.
In the above invention, the metal gasket in accordance with the present invention is characterized by further comprising a second bend part having an inside angle smaller than 180° between the upper corner part and the bend part formed between the upper corner part and the inner-circumference-side corner part, between the upper corner part and the bend part formed between the upper corner part and the outer-circumference-side corner part, between the lower corner part and the bend part formed between the upper corner part and the inner-circumference-side corner part, and between the lower corner part and the bend part formed between the upper corner part and the outer-circumference-side corner part.
By this configuration, a metal gasket can be provided in which it obtains a sealing performance almost equal to that of a metal gasket that is disclosed in Patent Literature 3 shown in
In accordance with the present invention, a metal gasket can be provided in which it obtains a sealing performance almost equal to that of a metal gasket that is disclosed in Patent Literature 3 describing a prior art with a tightening force smaller than that of a metal gasket that is disclosed in Patent Literature 3 describing a prior art shown in
Moreover, a metal gasket can be provided in which a tightening management of the metal gasket can be easily carried out since a tightening force until a metal touch can be decreased as compared with a metal gasket that is disclosed in Patent Literature 3 describing a prior art shown in
An embodiment of the present invention will be described below in detail with reference to the drawings.
A metal gasket 1 in accordance with the present invention is used for a joint part of a variety of piping of semiconductor manufacturing equipment. As shown in
As shown in
For the outer ring 10, an opening 12 is formed in a circumferential direction on the circumferential side of an outside surface 10a and having a substantially C-shaped cross-section as shown in
As shown in
Here, an upper side of an inside surface 10b of the outer ring 10 indicates a part on the upper side of the opening 12. In other words, the upper side of an inside surface 10b of the outer ring 10 indicates an inside surface 10b that is located on the upper side of an upper end part 12a of the opening 12 for the inside surface 10b of the outer ring 10 in
It is preferable that a top part of each bend part of the upper corner part 22a, the lower corner part 22b, the inner-circumference-side corner part 22c, and the outer-circumference-side corner part 22d is formed in a circular arc shape. In particular, it is preferable that a top part of the bend part of the upper corner part 22a and the lower corner part 22b that comes into contact with the inside surface 10b of the outer ring 10 is formed in a circular arc shape in order to prevent the inside surface 10b of the outer ring 10 from being damaged.
Moreover, two bend parts of a bend part 24 and a second bend part 26 are formed from a part closer to the inner-circumference-side corner part 22c or the outer-circumference-side corner part 22d between the upper corner part 22a and the inner-circumference-side corner part 22c and the outer-circumference-side corner part 22d. Furthermore, two bend parts of a bend part 24 and a second bend part 26 are also formed from a part closer to the inner-circumference-side corner part 22c or the outer-circumference-side corner part 22d between the lower corner part 22b and the inner-circumference-side corner part 22c and the outer-circumference-side corner part 22d.
As shown in
For the inner ring 20 shown in
For the metal gasket 1 in accordance with the present invention, a contact part of the upper corner part 22a, the lower corner part 22b, and the inside surface 10b of the outer ring 10 is not restricted to the part described above. However, it is preferable that the upper corner part 22a comes into contact with the highest side part of the inside surface 10b of the outer ring 10 and the lower corner part 22b comes into contact with the lowest side part of the inside surface 10b of the outer ring 10 as described above since a pressing force is also applied to the inner ring 20 on the instant via the outer ring 10 in the case in which the metal gasket 1 is pressed in a vertical direction.
A cross section of the inner ring 20 is formed in a line symmetric shape in a vertical direction and in a horizontal direction. In other words, the cross section of the inner ring 20 is formed in a symmetric shape in a vertical direction to the center line HCL in a horizontal direction and is formed in a symmetric shape in a horizontal direction to the center line VCL in a vertical direction as shown in
For the metal gasket 1 in accordance with the present invention, a cross section of the inner ring 20 is not restricted to be in a line symmetric shape in a vertical direction and in a horizontal direction. However, it is preferable that a cross section of the inner ring 20 is formed in a line symmetric shape at least in a vertical direction as described above since the inner ring 20 can be prevented from being shifted or inclined at an angle whereby the inner ring 20 can be held on the inside of the outer ring 10 in a stable state in the case in which the metal gasket 1 is pressed in a vertical direction as described later.
For the metal gasket 1 in accordance with the present invention, a reason that the bend part 24 and the second bend part 26 as described above are formed is in the following.
As described above, the present inventors have examined and found that a tightening force F1 in the case of a metal touch tends to be decreased in the case in which an inner angle θ2 of the inner-circumference-side corner part 122c and the outer-circumference-side corner 122d is decreased. Consequently, for the metal gasket 1 in accordance with the present invention, a bend part 24 having an inside angle larger than 180° is formed between the upper corner part 22a and the inner-circumference-side corner part 22c and the outer-circumference-side corner part 22d and between the lower corner part 22b and inner-circumference-side corner part 22c and the outer-circumference-side corner part 22d, whereby an inner angle θ2 of the inner-circumference-side corner part 22c and the outer-circumference-side corner 22d is decreased.
In addition, the present inventors have examined and found that a tightening force F1 in the case of a metal touch tends to be increased extremely in the case in which an inner angle θ1 of the upper corner part 22a and the lower corner part 22b is decreased. In the case in which the bend part 24 as described above is formed, an inner angle θ2 of the inner-circumference-side corner part 22c and the outer-circumference-side corner 22d is decreased and an inner angle θ1 of the upper corner part 22a and the lower corner part 22b is also decreased. Consequently, for the metal gasket 1 in accordance with the present invention, a second bend part 26 having an inside angle smaller than 180° is formed between the upper corner part 22a and the lower corner part 22b and the bend part 24, whereby the inner angle θ1 of the upper corner part 22a and the lower corner part 22b is not too decreased.
It is preferable that a bending degree of the second bend part 26 is smaller than that of the bend part 24. In other words, it is preferable that an outer angle of the second bend part 26 is smaller than the inner angle of the bend part 24. In the case in which the second bend part 26 is bent greatly, the upper corner part 22a and the lower corner part 22b are concaved inside and deformed in the state shown in
The inner angle θ1 of the upper corner part 22a and the lower corner part 22b is preferably in the range of 50° to 120°, more preferably in the range of 60° to 90°, depending on a shape and material of the metal gasket 1 and a displacement amount until a metal touch. Moreover, the inner angle θ2 of the inner-circumference-side corner part 22c and the outer-circumference-side corner 22d is preferably 90° or less, more preferably in the range of 35° to 80°. In the present embodiment, the inner angle θ1 is about 75° and the inner angle θ2 is about 60°.
A constitutional material of the outer ring 10 and the inner ring 20 is metal. In this case, it is preferable that metal that constitutes the inner ring 20 is a harder metal than metal that constitutes the outer ring 10. For instance, it is preferable that the outer ring 10 is made of aluminum that is called light metal and the inner ring 20 is made of metal harder than aluminum, such as stainless steel.
In the case in which the inner ring 20 is made of metal having a hardness degree higher than that of the outer ring 10 as described above and a metal gasket 1 in accordance with the present invention is disposed between the flanges 30 and 32 and pressed in a vertical direction as shown in
Moreover, in the case in which a soft layer (not shown) that is formed by coating polytetrafluoroethylene (PTFE) or polyimide or plating silver, nickel, or copper is formed on the outside surface 10a of the outer ring 10, the settlement to the flange 30 of the outer ring 10 is more excellent, and the outer ring 10 obtains a higher sealing performance,
As shown in
In the case in which the metal gasket 1 is still pressed while a tightening force F is increased, the upper corner part 22a and the lower corner part 22b of the inner ring 20 are opened and deformed by slow degrees, and the inner angle θ1 is increased by slow degrees. Moreover, the inner-circumference-side corner part 22c and the outer-circumference-side corner part 22d of the inner ring 20 are closed and deformed by slow degrees, and the inner angle θ2 is decreased by slow degrees. In a definitive fashion as shown in
In this case, until the metal gasket 1 is deformed by a predetermined displacement amount δ2 from the initial state, a large tightening force F is required to a displacement amount per unit. In other words, as shown in
The linear pressure of a vertical axis of the graph is a tightening force per unit length that is applied to a metal gasket in the case in which the metal gasket is tightened and is defined as the following expression (1):
Linear pressure=tightening force length of a central circumference of a metal gasket (1)
In the finite element analysis, for the metal gasket 1 in accordance with the embodiment and the metal gasket 100 in accordance with the comparison example, while the inner ring 120 of the comparison example is formed in a square shape, the condition of the metal gasket 1 of the embodiment is equivalent to that of the inner ring 120 of the comparison example except that the bend part 24 and the second bend part 26 described above are formed in the inner ring 20 of the embodiment. In other words, a material, a length of a central circumference, and a shape size of a cross section of the outer ring 10 of the embodiment and the outer ring 110 of the comparison example are specified as the same conditions, and a material, a length of a central circumference, and a thickness, height, and width of a cross section of the inner ring 20 of the embodiment and the inner ring 120 of the comparison example are specified as the same conditions.
As shown in
As shown in
As described above, the metal gasket 1 in accordance with the present invention can obtain a sealing performance almost equal to that of a metal gasket that is disclosed in Patent Literature 3 with a tightening force smaller than that of the metal gasket 100 that is disclosed in Patent Literature 3. As described above, for the metal gasket 1 in accordance with the present invention, since a tightening force can be made smaller than that of the metal gasket 100 that is disclosed in Patent Literature 3, a flange can be thinned, an apparatus can be made compact and light, and a cost can be reduced. Moreover, a material (such as ceramics) that may be easily damaged as compared with a metal can also be used as a material of a flange.
Moreover, for the metal gasket 1 in accordance with the present invention, a tightening management of the metal gasket 1 can be easily carried out since a tightening force F1 until a metal touch can be decreased as compared with the metal gasket 100 that is disclosed in Patent Literature 3.
While the preferred embodiments in accordance with the present invention have been described above, the present invention is not restricted to the embodiments, and various changes, modifications, and functional additions can be thus made without departing from the scope of the present invention.
For instance, although two bend parts of the bend part 24 and the second bend part 26 are formed in the embodiment described above, the present invention is not restricted to this configuration. As shown in
Moreover, in the embodiment described above, the opening 12 of the outer ring 10 is formed in a circumferential direction on the outer circumference side of the outside surface 10a. However, the metal gasket 1 in accordance with the present invention is not restricted to this configuration, the opening 12 of the outer ring 10 can also be formed in a circumferential direction on the inner circumference side of the outside surface 10a.
| Number | Date | Country | Kind |
|---|---|---|---|
| 2011011984 | Jan 2011 | JP | national |
| Filing Document | Filing Date | Country | Kind | 371c Date |
|---|---|---|---|---|
| PCT/JP2012/050429 | 1/12/2012 | WO | 00 | 7/23/2013 |
