This invention was made with U. S. Government support under Contract No. DE-AC03-76SF00098 between the U.S. Department of Energy and the University of California for the operation of Lawrence Berkeley Laboratory. The U. S. Government may have certain rights in this invention.
| Number | Name | Date | Kind |
|---|---|---|---|
| 5110577 | Tamor | May 1992 | |
| 5401975 | Ihara | Mar 1995 | |
| 5626812 | Ebbesen | May 1997 |
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