Claims
- 1. A single package sensor device comprising:
GPS receiver circuitry; and at least one magnetic field sensing device adjacent to the GPS receiver circuitry.
- 2. The sensor device of claim 1 wherein the at least one magnetic field sensing device comprises a sensor selected from one of the group consisting of a compassing sensor, an anisotropic magneto-resistive (AMR) sensor, a giant magneto-resistive (GMR) sensor, a colossal magneto-resistive (CMR) sensor, a hall effect sensor, a fluxgate sensor, and a coil sensor.
- 3. The sensor device of claim 1 wherein the GPS receiver circuitry and the at least one magnetic field sensing device are monolithically formed on a single die.
- 4. The sensor device of claim 3 wherein a dielectric layer is disposed between the GPS receiver circuitry and the at least one magnetic field sensing device.
- 5. The sensor device of claim 4 further comprising at least one connection pathway in the dielectric layer for connecting the GPS receiver circuitry with the at least one magnetic field sensing device.
- 6. The sensor device of claim 5 further comprising conducting portions disposed in the at least one connection pathway.
- 7. The sensor device of claim 4 wherein the dielectric layer comprises contact glass.
- 8. The sensor device of claim 7 wherein the contact glass comprises a material selected from one of the group consisting of silicon-nitride (Si3N4), borophosphosilicate glass (BPSG), silicon-oxide (SiO2), and any other etchable contact glass that can be reflowed into a substantially planar surface.
- 9. The sensor device of claim 3 wherein there is at least one connection pathway for connecting the GPS receiver circuitry with the at least one magnetic field sensing device.
- 10. The sensor device of claim 9 further comprising conducting portions disposed in the at least one connection pathway.
- 11. The sensor device of claim 3 wherein the at least one magnetic field sensing device includes at least one of a set strap, a reset strap, and an offset strap.
- 12. The sensor device of claim 11 wherein the GPS receiver circuitry includes driver circuitry for any of the included set, reset, and offset straps.
- 13. The sensor device of claim 3, wherein the GPS receiver circuitry is formed from any of complementary-metal-oxide-semiconductor (CMOS), gallium-arsenide (GaAs), germanium, bipolarCMOS (BiCMOS), indium phosphide (InP), silicon-on-insulator (SOI), and microwave-on-insulator (MOI) technologies.
- 14. The sensor device of claim 3 wherein the GPS receiver circuitry is formed using MOI-5 0.35 micron technology.
- 15. The sensor device of claim 14 wherein the at least one magnetic field sensing device is formed using standard fabricating processes for forming magneto-resistive sensors.
- 16. The sensor device of claim 3 wherein at least one shield is disposed between the GPS receiver circuitry and the at least one magnetic field sensing device.
- 17. The sensor device of claim 16 wherein the at least one shield comprises a material selected from the group consisting of metal, magnetic material, and other isolating material.
- 18. The sensor device of claim 16, wherein the at least one shield prevents the GPS receiver circuitry from undesirably affecting the operation of the at least one magnetic field sensing device.
- 19. The sensor device of claim 16, wherein the at least one shield prevents the at least one magnetic field sensing device from undesirably affecting the operation of the GPS receiver circuitry.
- 20. The sensor device of claim 3 wherein the at least one magnetic field sensing device is used for electronic compassing.
- 21. The sensor device of claim 1 wherein the GPS receiver circuitry and the at least one magnetic field sensing device are formed in at least two separate die, all die being contained in a single-chip package.
- 22. The sensor device of claim 21 wherein the at least two separate die are electrically connected.
- 23. The sensor device of claim 21 wherein the at least two separate die have no intentional electrical interaction.
- 24. The sensor device of claim 21 wherein the at least one magnetic field sensing device includes at least one of a set strap, a reset strap, and an offset strap.
- 25. The sensor device of claim 24 wherein the GPS receiver circuitry includes driver circuitry for any of the included set, reset, and offset straps.
- 26. The sensor device of claim 21, wherein the GPS receiver circuitry is formed from any of complementary-metal-oxide-semiconductor (CMOS), gallium-arsenide (GaAs), germanium, bipolarCMOS (BiCMOS), indium phosphide (InP), silicon-on-insulator (SOI), and microwave-on-insulator (MOI) technologies.
- 27. The sensor device of claim 21 wherein the GPS receiver circuitry is formed using MOI-5 0.35 micron technology.
- 28. The sensor device of claim 27 wherein the at least one magnetic field sensing device is formed using standard fabricating processes for forming magneto-resistive sensors.
- 29. The sensor device of claim 21 wherein at least one shield is disposed between the GPS receiver circuitry and the at least one magnetic field sensing device.
- 30. The sensor device of claim 29 wherein the at least one shield comprises a material selected from the group consisting of metal, magnetic material, and other isolating material.
- 31. The sensor device of claim 30, wherein the at least one shield prevents the GPS receiver circuitry from undesirably affecting the operation of the at least one magnetic field sensing device.
- 32. The sensor device of claim 30, wherein the at least one shield prevents the at least one magnetic field sensing device from undesirably affecting the operation of the GPS receiver circuitry.
- 33. The sensor device of claim 21 wherein the at least one magnetic field sensing device is used for electronic compassing.
- 34. A method for making a sensor device, the method comprising the steps of:
forming GPS receiver circuitry; and forming at least one magnetic field sensing device adjacent to the GPS receiver circuitry; wherein the GPS receiver circuitry and the at least one magnetic field sensing device are formed into a single package.
- 35. The method of claim 34 wherein the step of forming the at least one magnetic field sensing device includes forming the at least one magnetic field sensing device from a sensor selected from one of the group consisting of a compassing sensor, an anisotropic magneto-resistive (AMR) sensor, a giant magneto-resistive (GMR) sensor, a colossal magneto-resistive (CMR) sensor, a hall effect sensor, a fluxgate sensor, and a coil sensor.
- 36. The method of claim 34 further comprising forming the GPS receiver circuitry and the at least one magnetic field sensing device on a single die.
- 37. The method of claim 36 further comprising forming the GPS receiver circuitry before forming the at least one magnetic field sensing device.
- 38. The method of claim 36 further comprising forming at least one connection pathway between the GPS receiver circuitry and the at least one magnetic field sensing device.
- 39. The method of claim 38 further comprising forming conducting portions in the at least one connection pathway.
- 40. The method of claim 36 further comprising depositing a dielectric layer between the GPS receiver circuitry and the at least one magnetic field sensing device, wherein the dielectric layer is deposited on the GPS receiver circuitry before the at least one magnetic field sensing device is formed.
- 41. The method of claim 40 further comprising forming at least one connection pathway in the dielectric layer.
- 42. The method of claim 41 further comprising forming conducting portions in the at least one connection pathway.
- 43. The method of claim 40 further comprising forming the dielectric layer from contact glass.
- 44. The method of claim 43 further comprising forming the contact glass from a material selected from one of the group consisting of silicon-nitride (Si3N4), borophosphosilicate glass (BPSG), silicon-oxide (SiO2), and any other etchable contact glass that can be reflowed into a substantially planar surface.
- 45. The method of claim 36 further comprising forming the at least one magnetic field sensing device to include at least one of a set strap, a reset strap, and an offset strap.
- 46. The method of claim 45 further comprising forming, in the GPS receiver circuitry, driver circuitry for any of the included set, reset, and offset straps.
- 47. The method of claim 36 further including forming the GPS receiver circuitry from any of complementary-metal-oxide-semiconductor (CMOS), gallium-arsenide (GaAs), germanium, bipolarCMOS (BiCMOS), indium phosphide (InP), silicon-on-insulator (SOI), and microwave-on-insulator (MOI) technologies.
- 48. The method of claim 36 further comprising forming at least one electromagnetic shield between the GPS receiver circuitry and the at least one magnetic field sensing device.
- 49. The method of claim 48 further comprising forming the at least one electromagnetic shield from a material selected from the group consisting of metal, magnetic material, and other isolating material.
- 50. The method of claim 34 further comprising forming the GPS receiver circuitry and the at least one magnetic field sensing device in at least two separate die, all die being contained in a single-chip package.
- 51. The method of claim 50 further comprising electrically connecting the at least two separate die.
- 52. The method of claim 50 wherein the single-chip package is formed to prevent electrical interaction between the at least two separate die.
- 53. The method of claim 50 further comprising forming the at least one magnetic field sensing device to include at least one of a set strap, a reset strap, and an offset strap.
- 54. The method of claim 53 further comprising forming, in the GPS receiver circuitry, driver circuitry for any of the included set, reset, and offset straps.
- 55. The method of claim 50 further including forming the GPS receiver circuitry from a technology selected from any of complementary-metal-oxide-semiconductor (CMOS), gallium-arsenide (GaAs), germanium, bipolarCMOS (BiCMOS), indium phosphide (InP), silicon-on-insulator (SOI), and microwave-on-insulator (MOI) technologies.
- 56. The method of claim 50 further comprising forming at least one electromagnetic shield between the GPS receiver circuitry and the at least one magnetic field sensing device.
- 57. The method of claim 56 further comprising forming the at least one electromagnetic shield from a material selected from the group consisting of metal, magnetic material, and other isolating material.
- 58. A single package sensor device comprising:
GPS receiver circuitry formed from any of complementary-metal-oxide-semiconductor (CMOS), gallium-arsenide (GaAs), germanium, bipolarCMOS (BiCMOS), indium phosphide (InP), silicon-on-insulator (SOI), and microwave-on-insulator (MOI) technologies; and at least one magnetic field sensing device adjacent to the GPS receiver circuitry, the at least one magnetic field sensing device comprising a sensor selected from the group consisting of a compassing sensor, an anisotropic magneto-resistive (AMR) sensor, a giant magneto-resistive (GMR) sensor, a colossal magneto-resistive (CMR) sensor, a hall effect sensor, a fluxgate sensor, and a coil sensor; wherein the GPS receiver circuitry and the at least one magnetic field sensing device are monolithically formed on a single die with contact glass disposed between the GPS receiver circuitry and the at least one magnetic field sensing device and with at least one conductive connection pathway in the contact glass for connecting the GPS receiver circuitry with the at least one magnetic field sensing device; wherein at least one shield comprising a material selected from the group consisting of metal, magnetic material, and other isolating material is disposed between the GPS receiver circuitry and the at least one magnetic field sensing device; and wherein the at least one magnetic field sensing device is used for electronic compassing.
- 59. A single package sensor device comprising:
GPS receiver circuitry formed from any of complementary-metal-oxide-semiconductor (CMOS), gallium-arsenide (GaAs), germanium, bipolarCMOS (BiCMOS), indium phosphide (InP), silicon-on-insulator (SOI), and microwave-on-insulator (MOI) technologies; and at least one magnetic field sensing device adjacent to the GPS receiver circuitry, the at least one magnetic field sensing device comprising a sensor selected from the group consisting of a compassing sensor, an anisotropic magneto-resistive (AMR) sensor, a giant magneto-resistive (GMR) sensor, a colossal magneto-resistive (CMR) sensor, a hall effect sensor, a fluxgate sensor, and a coil sensor; wherein the GPS receiver circuitry and the at least one magnetic field sensing device are formed in at least two separate die, all die being contained in a single-chip package; wherein at least one shield comprising a material selected from the group consisting of metal, magnetic material, and other isolating material is disposed between the GPS receiver circuitry and the at least one magnetic field sensing device; and wherein the at least one magnetic field sensing device is used for electronic compassing.
RELATED APPLICATIONS
[0001] This application claims the benefit of U.S. Provisional Application Nos. (1) 60/475,191, filed Jun. 2, 2003, entitled “Semiconductor Device Integration with a Magneto-Resistive Sensor,” naming as inventors Lonny L. Berg and William F. Witcraft; (2) 60/475,175, filed Jun. 2, 2003, entitled “On-Die Set/Reset Driver for a Magneto-Resistive Sensor,” naming as inventors Mark D. Amundson and William F. Witcraft; and (3) 60/462,872, filed Apr. 15, 2003, entitled “Integrated GPS Receiver and Magneto-Resistive Sensor Device,” naming as inventors William F. Witcraft, Hong Wan, Cheisan J. Yue, and Tamara K. Bratland. The present application also incorporates each of these Provisional Applications in their entirety by reference herein.
[0002] This application is also related to and incorporates by reference U.S. Nonprovisional Application Nos. (1) ______, Honeywell Docket No. H0004948US, filed concurrently, entitled “Semiconductor Device and Magneto-Resistive Sensor Integration,” naming as inventors Lonny L. Berg, William F. Witcraft, and Mark D. Amundson; and (2) ______, Honeywell Docket No. H0004956US, filed concurrently, entitled “Integrated Set/Reset Driver and Magneto-Resistive Sensor,” naming as inventors Lonny L. Berg and William F. Witcraft.
Provisional Applications (3)
|
Number |
Date |
Country |
|
60475191 |
Jun 2003 |
US |
|
60475175 |
Jun 2003 |
US |
|
60462872 |
Apr 2003 |
US |