Patent Application
20050152648
This invention relates to a method and apparatus for compactly and efficiently coupling light from an optical fiber into a planar waveguide and vice versa.
Planar waveguide devices are important components of optical fiber communication systems. Such systems typically comprise long lengths of fiber for transmission and often use planar waveguide devices to perform a variety of processes such as filtering, multiplexing signal channels, demultiplexing, compensating chromatic dispersion and compensating polarization dispersion.
An optical fiber is typically in the form of a thin strand of glass having a central core of circular cross section peripherally surrounded by concentric cladding glass. The core has a higher refractive index than the cladding so that the light is retained in the core by total internal reflection and propagates in a fiber mode. For long distance transmission the core dimensions are typically chosen so that the light propagates in a single circular mode.
A planar waveguide device, in contrast, is typically formed by thin layers of silica supported by a silicon substrate. The core is typically of rectangular cross section. The core region is formed, as by etching of a masked surface, into a patterned configuration that performs a desired function. In order to permit small radius curves, and thus compact functionality, the difference in refractive index of the planar waveguide core and the index of the cladding is typically substantially greater than the corresponding difference for optical fiber. The planar waveguide is said to be high delta where delta (A) is given by the core index less the cladding index, all divided by the core index.
Unfortunately there is a problem in coupling light from the transmission fiber into a planar waveguide. In addition to a mismatch in refractive indices, there is also a mismatch in core size. The core size for a typical optical fiber is significantly larger than the optimal core size for a single mode planar waveguide; therefore, their optical modes don't match because the field is more confined in the waveguide than in the fiber. As a consequence of these mismatches, direct coupling of a fiber to the planar waveguide would incur prohibitive insertion loss of the optical beam.
The conventional approach to this problem is to provide the planar waveguide with an enlarged end for receiving the fiber and to gradually (adiabatically) taper the waveguide core in the lateral direction to optimal size. The lateral taper is on the same plane as the waveguide optical circuit. This approach reduces insertion loss but unfortunately adiabatic lateral tapering is not efficient for high delta waveguides, and it requires substantial length.
A more process-demanding approach is to start with an expanded height waveguide at the fiber end, that is then vertically tapered down to the waveguide circuit level. This technique was proposed by Koch et al. (T. L. Koch, et. al., “Tapered Waveguide InGaAa/InGaAsP Multiple-Quantum-Well Lasers,” IEEE Photonics Letters Vol2. No2 Feb. 1990; See also A. Mahapatra and J. M. Connors, “Thermal tapering of ion-exchanged channel guides in glass,” Opt. Letters, vol.13, pp.169-171,1988, and Shani, et. al., “Efficient coupling of semiconductor laser to an optical fiber by means of a tapered waveguide on silicon” Applied physics Letters 55(23), Dec. 1989). However, it requires a substantially large waveguide starting core height which takes a very long time to grow.
A 2-D tapered segrmented waveguide was demonstrated by Z. Weissman and A. Hardy. This technique implements two-dimensional mode tapering by introducing gaps between the segments of the waveguides. (Weissman and A. Hardy, “Modes if Periodically Segmented Waveguide” IEEE Journal of Lightwave Technology 11:1831-1838(1993)). In effect, the total effective index of the guiding area is reduced. This approach is very effective in reducing the coupling loss. However, for high index waveguides, the core thickness is small compared to the fiber, therefore, mode matching via segmented tapes is hard to achieve, and a better matching with the fiber mode can still be achieved.
Accordingly there is a need for an improved arrangement to compactly and efficiently couple light propagating in an optical fiber into a planar waveguide.
In accordance with the invention, an optical fiber is coupled to a planar waveguide through 1) a series of planar waveguide segments of enlarged cross section and 2) a segment of tapered cross section. The combination of spaced segments and tapered segments provide efficient coupling over a much shorter length than required for conventional adiabatic coupling.
The advantages, nature and various additional features of the invention will appear more fully upon consideration of the illustrative embodiments now to be described in detail in connection with the accompanying drawings. In the drawings:
It is to be understood that these drawings are for purposes of illustrating the concepts of the invention and, except for the graphs, are not to scale.
Referring to the drawings,
The coupling device of
Similarly, light from a planar waveguide device can be efficiently and compactly coupled out into an optical fiber by passing from the planar waveguide to the fiber. The light would pass in the opposite direction through the tapered section 15 to the enlarged end 16. Then it couples through the segmented section 14 to the lower effective end where it is matched with the end of an optical fiber.
The segmented part of the vertical taper can be fabricated using a standard technique used in silicon optical bench technology. First a lower cladding layer is formed, as by low-pressure steam oxidation followed by an anneal. Then a higher index core layer is deposited, as by Plasma Enhanced vapor deposition (PECVD) or low pressure Chemical vapor deposition (LPCVD), and then it is annealed to flow the glass. Then the segmented waveguide is pattern by photolithography with 1:1 projection using a chrome mask contact. The mask information is then patterned using reactive ion etching through the core. Poly Silicon composition or a hard baked photoresist are used for this process. Gap sizes in the range of 0.7 to 32.5 μm can be achieved. Next, the cladding layer is deposited in several steps with anneals to flow the glass.
Shadow or dither masks can be used to pattern the vertically tapered portion of the structure. These masks allow for variable transmission of light intensities. Areas where the photoresist is exposed to higher light intensities will be developed faster. The etching speed of the core material is related to the how far the resist is developed, therefore, areas with different heights can be fabricated.
In an alternative embodiment, the tapered section 15 can be step-tapered, as shown in
In another alternative embodiment, as shown in
In yet another alternative embodiment, as shown in
In the following examples, the dimensions of the segments, and in particular segment thicknesses, were determined by use of Prometheus. Prometheus is a 3D finite difference beam propagation computer program that uses standard techniques for waveguide simulation and device optimization. The Prometheus package (formerly BBV Software, The Netherlands) is now part of “OlympIOs”. OlympIOs, a commercially available optics software package, comprises Prometheus, as well as a 2D effective index beam propagation method. (C2V, P.O. Box 318, 7500 AH, Enschede, The Netherlands). The invention can now be more clearly understood by consideration of the following specific examples:
For coupling an optical fiber to 4% delta planar waveguide, a similar arrangement shown in
It can now be seen that the invention includes a device for optically coupling an optical fiber to a planar waveguide. The device comprises a waveguiding structure comprising a segmented guiding position and a tapered guiding portion, both guiding portions disposed in a lower refractive index cladding region between the fiber and the planar waveguide.
The segmented guiding portion comprises a series of spaced apart segments of higher refractive index material. The segments have longitudinal cross sections substantially equal to the cross section of the fiber core, and successive segments having increasing axial thicknesses in order to present an effective refractive index that varies from approximating that of the fiber core to approximating that of the planar waveguide.
The tapered guiding portion has a longitudinal cross section that varies from approximating that of the segmented guiding section to approximating that of the planar waveguide core. The taper can be continuous or stepped.
It is understood that he above-described embodiments are illustrative of only a few of the many possible specific embodiments which can represent applications of the invention. Numerous and varied other arrangements can be made by those skilled in the art without departing from the spirit and scope of the invention.
The Applicants submit these comments in response to the Examiner's stated reasons for allowance included in the Notice of Allowance mailed Jan. 26, 2005.
According to MPEP 1304.14, the statement of allowance should include at least (1) the major difference in the claims not found in the prior art of record, and (2) the reasons why that difference is considered to define patentability over the prior art if either of these reasons is not clear in the record. The Examiner's statement of allowance merely restates a portion of claim 1 and does not provide major differences or state the reasons why the differences define patentability over the prior art as advised in MPEP 1304.14. Accordingly, the Examiner's statement of reason for allowance does not comply with the MPEP format. The Applicants, therefore, deny acquiescence to the statement and further deny being bound by any negative inferences that may flow therefrom in any future proceedings regarding this application or any patents indirectly or directly issuing therefrom.
