Number | Date | Country | Kind |
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4058676 | Wilkes et al. | Nov 1977 | |
5060269 | Zinser | Oct 1991 | |
5138661 | Zinser et al. | Aug 1992 | |
5233660 | Chen | Aug 1993 | |
5488704 | Fujimoto | Jan 1996 | |
5630012 | Nishiguchi et al. | May 1997 | |
5749065 | Nishiguchi et al. | May 1998 | |
5752222 | Nishiguchi et al. | May 1998 | |
5828996 | Iijima et al. | Oct 1998 | |
5848387 | Nishiguchi et al. | Dec 1998 |
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