Number | Date | Country | Kind |
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56/48258 | Mar 1981 | JPX |
Number | Name | Date | Kind |
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3738926 | Westwood et al. | Jun 1973 | |
4036167 | Lu | Jul 1977 | |
4289188 | Mizutani | Sep 1981 |
Entry |
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Harshbarger et al., J. Electronic Mat. 7(1978), pp. 429-440. |
Westwood, J. Appl. Phys. 44(1973), p. 2619-2626. |
Westwood et al., J. Appl. Phys. 44(1973), pp. 2610-2618. |
Ratinen, J. Applied Phys. 44(1973), pp. 2730-2734. |
Greene et al., J. Applied Phys. 44(1973), pp. 2509-2513. |
Greene et al., J. Vac. Sci. Technol. 10(1973), pp. 1144-1150. |