Number | Date | Country | Kind |
---|---|---|---|
61-278163 | Nov 1986 | JPX | |
61-247428 | Oct 1988 | JPX |
Filing Document | Filing Date | Country | Kind |
---|---|---|---|
PCT/JP87/00789 | 10/16/1987 |
Publishing Document | Publishing Date | Country | Kind |
---|---|---|---|
WO88/02857 |
Number | Name | Date | Kind |
---|---|---|---|
4656595 | Hognestad | Apr 1987 | |
4683419 | Neuelman | Jul 1987 | |
4764970 | Hayashi et al. | Aug 1988 | |
4789829 | Stribling | Dec 1988 |
Number | Date | Country |
---|---|---|
0024804 | Feb 1982 | JPX |
Entry |
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IBM Technical Disclosure, H. Hova, Measuring Thickness and Resistance of Semiconductor Layers, vol. 6, No. 2, Jul. 1963. |