Claims
- 1. A method of microwave assisted chemical analysis comprising,
providing a sample within a vessel, heating said sample by microwave energy to volatilize at least a portion of said sample to establish a gas phase, cooling said gas phase while continuing to heat said sample by said microwave energy, and analyzing the unvolatilized portion of said sample to determine the composition of said unvolatilized portion.
- 2. The method of claim 1 including
employing a said sample containing silicon, and said unvolatilized portion including trace elements contained in said silicon containing sample.
- 3. The method of claim 2 including
determining the identity and quantity of at least some of said trace elements.
- 4. The method of claim 1 including
performing said process in a closed said vessel.
- 5. The method of claim 1 including
withdrawing at least a portion of said gas phase from said vessel.
- 6. The method of claim 1 including
employing as said vessel a vessel which has portions which are transparent to microwave energy.
- 7. The method of claim 2 including
employing polycrystalline silicon as said sample.
- 8. The method of claim 2 including
employing a vessel with at least two compartments in communication with each other, introducing a silicon containing sample and a first acid into a first said compartment, and introducing a second acid into a second said compartment.
- 9. The method of claim 8 including
employing nitric acid as said first acid, and employing hydrofluoric acid as said second acid.
- 10. The method of claim 9 including
distilling said hydrofluoric acid into said first compartment, and distilling SiF4 into said second compartment.
- 11. The method of claim 1 including employing as said microwave energy energy of a frequency of about 27 to 2450 megahertz.
- 12. The method of claim 11 including
employing a said vessel composed of a fluoropolymer.
- 13. The method of claim 1 including
said vessel having a unitary chamber.
- 14. The method of claim 1 including
during said process introducing additional sample into said vessel.
- 15. The method claim 14 including
said process being a continuous process.
- 16. The method of claim 1 including
employing a liquid as said sample.
- 17. The method of claim 1 including
during said process introducing additional said sample into said vessel.
- 18. The method of claim 17 including
during said process withdrawing at least a portion of said gas phase from said vessel.
- 19. The method of claim 2 including
effecting substantially complete retention in said unvolatilized portion of all of said trace elements.
- 20. A method of microwave assisted chemical purification comprising
providing a sample within a vessel, heating said sample by microwave energy to volatilize at least a portion of said sample to establish a gas phase, cooling said gas phase while continuing to heat said sample by said microwave energy, and purifying at least a portion of said gas phase to establish a purified portion of said sample.
- 21. The method of claim 20 including
employing a said sample containing silicon, converting said sample into said gas phase and unvolatilized portions, and said unvolatilized portions being trace elements originally contained in said silicon containing sample.
- 22. The method of claim 21 including
performing said process in a closed said vessel.
- 23. The method of claim 21 including
withdrawing at least a portion of said gas phase from said vessel.
- 24. The method of claim 21 including
employing as said vessel a vessel which has portions which are transparent to microwave energy.
- 25. The method of claim 21 including
employing polycrystalline silicon as said sample.
- 26. The method of claim 21 including
employing a vessel with at least two compartments in communication with each other, introducing a silicon containing sample and a first acid into a first said compartment, and introducing a second acid into a second said compartment.
- 27. The method of claim 26 including
employing nitric acid as said first acid, and employing hydrofluoric acid as said second acid.
- 28. The method of claim 27 including
distilling said hydrofluoric acid into said first compartment, and distilling SiF4 into said second compartment.
- 29. The method of claim 20 including
employing as said microwave energy energy of a frequency of about 27 to 2450 megahertz.
- 30. The method of claim 29 including
employing a said vessel composed of a fluoropolymer.
- 31. The method of claim 20 including
said vessel having a unitary chamber.
- 32. The method of claim 1 including
during said process introducing additional sample into said vessel.
- 33. The method of claim 20 including
employing a liquid as said sample.
- 34. The method of claim 20 including
during said process withdrawing at least a portion of said gas phase from said vessel.
- 35. The method of claim 21 including
employing a said sample containing silicon, and said unvolatilized elements being trace elements contained in said silicon containing sample.
- 36. Apparatus for a microwave assisted chemical analysis comprising
a vessel transparent to microwaves for receiving a sample containing at least one other material, said vessel having a space above the region wherein said sample will be present for receiving a gas phase, cooling means for positively cooling said gas phase to reduce the temperature of said gas phase without effecting substantial cooling of said liquid phase, and means for obtaining access to the portion of said sample which has not been converted into said gas phase.
- 37. The apparatus of claim 36 including
means for withdrawing at least a portion of said gas phase from said vessel.
- 38. The apparatus of claim 37 including
means for introducing additional said sample into said vessel.
- 39. The apparatus of claim 36 including
said vessel being structured to receive said sample in a lower portion thereof, and said cooling means being disposed in an upper portion of said vessel.
- 40. The apparatus of claim 36 including
said vessel having at least two compartments in communication with each other.
- 41. The apparatus of claim 36 including
means for introducing into said vessel at least one material selected from the group consisting of air, nitrogen and carbon dioxide.
- 42. The apparatus of claim 39 including
said cooling means having a portion extending into said vessel.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application is a continuation-in-part of U.S. patent application Ser. No. 08/458,757, filed Jun. 2, 1995, entitled “Method and Apparatus for Microwave Assisted Chemical Reactions,” which was a continuation-in-part of U.S. patent application Ser. No. 08/357,097, filed Dec. 15, 1994, entitled “Method and Apparatus for Microwave Assisted Chemical Reactions” which was a continuation of U.S. patent application Ser. No. 08/127,263, filed Sep. 24, 1993, entitled “Method and Apparatus for Microwave Assisted Chemical Reactions.”
Continuations (1)
|
Number |
Date |
Country |
Parent |
08127263 |
Sep 1993 |
US |
Child |
08357097 |
Dec 1994 |
US |
Continuation in Parts (2)
|
Number |
Date |
Country |
Parent |
08458757 |
Jun 1995 |
US |
Child |
09262597 |
Mar 1999 |
US |
Parent |
08357097 |
Dec 1994 |
US |
Child |
08458757 |
Jun 1995 |
US |