Method and apparatus for obtaining high-resolution digital X-ray and gamma ray images

Information

  • Patent Grant
  • 6272207
  • Patent Number
    6,272,207
  • Date Filed
    Thursday, February 18, 1999
    26 years ago
  • Date Issued
    Tuesday, August 7, 2001
    24 years ago
Abstract
An apparatus and method for obtaining a high-resolution digital image of an object or objects irradiated with radiation having a wavelength in the x-ray or gamma ray spectrum generated by a radiation source, or of an object or objects emitting radiation within the x-ray or gamma ray spectrum. The apparatus comprises a detector matrix and a radiation mask. The detector matrix comprises a plurality of detector pixels, each comprising a detection surface having a respective surface area which generates a signal in response to an energy stimulus. The radiation mask has an opaque portion, and a plurality of apertures. The aperture size and position relative to the detector array determines the image resolution not the size of the detector pixels. The mask is positioned between the detector matrix and the radiation source, such that the opaque portion prevents portions of the radiation from passing through the mask, and each of the apertures permits a portion of the radiation which has passed through or has been emitted from a respective portion of the object to propagate onto an area of the detection surface, less than the surface area, of a respective one of the detector pixels. The signal from a large detector pixel or from a group of small detector pixels represent an image of the respective portion of the object. The detector matrix and radiation mask are moved in synchronism in relation to the object to enable the areas of the detection surfaces of the detector pixels to receive portions of the radiation propagating through or emitted from other portions of the object, and to output signals representative of those other portions. These steps of moving the detector pixels and mask and irradiating the object are repeated until digital images of all portions of the object have been obtained. Alternatively, the x-ray source can be moved to image all portions of the object. The images are then arranged into an image representative of the entire object.
Description




BACKGROUND OF THE INVENTION




1. Field of the Invention




The present invention relates to a method and apparatus employing detector pixels for obtaining an image having a resolution which is not directly related to the sizes of the detector pixels. More particularly, the present invention relates to a method and apparatus which obtains a series of spatially filtered high-resolution digital x-ray or gamma ray images of portions of an object or objects while minimizing image degradation due to conversion blurring and radiation scattering, and which arranges the spatially modulated images into a larger complete image of the object or objects.




2. Description of the Related Art




Various techniques currently exist and many are under development for obtaining digital x-ray and gamma ray images of an object for purposes such as x-ray diagnostics, medical radiology, non-destructive testing, and so on. Known devices include line digital detectors, which obtain images along essentially one direction, and therefore must be scanned across an object to obtain sectional images of the object which can be arranged into an image of the entire object. Also known are two-dimensional digital detectors which can obtain an image of the entire object at one time, and thus can operate faster than an apparatus which includes a line detector.




A digital x-ray imager creates a digital image by converting received x-rays, which are used to form the image, into electrical charges, and displaying the charge as a function of position. Digital x-ray detectors typically have the potential of high sensitivity and large dynamic range. Therefore, when used in medical applications, a digital x-ray detector will generally be capable of obtaining a suitable image of the patient without requiring the patient to receive a large dose of x-ray radiation.




Digital image data is also much easier to store, retrieve and transmit over communication networks, and is better suited for computer-aided diagnostics, than conventional film x-rays. Digital x-ray images can also be displayed more easily than conventional film x-rays, and provide greater image enhancement capabilities, a faster data acquisition rate, and simplified data archival over conventional film x-rays. These advantages make digital x-ray imaging apparatus more desirable than film x-ray apparatus for use in many diagnostic radiology applications, such as mammography.




The general construction and operation of digital x-ray detectors will now be described. As discussed briefly above, digital x-ray detectors collect electrical charges produced by x-rays as a function of position, where the amount of charge is directly proportional to the x-ray intensity. Two general approaches for x-ray conversion are currently under investigation for flat-panel digital x-ray detectors. These approaches are generally referred to as the indirect method and the direct method.




In the indirect method, x-rays are converted to low-energy photons by a scintillator, and the low-energy photons are then converted to electrical charges by solid-state detectors. This method is described in a publication by L. E. Antonuk et al., “Signal, Noise, and Readout Considerations in the Development of Amorphous Silicon Photodiode Arrays for Radiotheraphy and Diagnostic Imaging”


Proc. SPIE


1443:108 (1991), the entire contents of which is incorporated by reference herein.




In the direct method, x-rays are converted to electron-hole pairs by photoconductors. An electric field applied to the photoconductor separates the electrons from the holes. This method is described in a publication by J. A. Rowlands et al. entitled “Flat Panel Detector for Digital Radiology Using Active Matrix Readout of Amorphous Selenium,”


Physics of Medical Imaging SPIE


3032: 97-108(1997), and in an article by R. Street, K. Shah, S. Ready, R. Apte, P. Bennett, M. Klugerman and Y. Dmitriyev, entitled “Large Area X-Ray Image Sensing Using a PbI


hd 2


Photoconductor,”


Proc. SPIE


3336: 24-32 (1998). The entire contents of both of these papers are incorporated by reference herein. Many types of photoconductors are under development by medical imaging community.




A type of flat-panel, two-dimensional, digital x-ray, imager comprises a plurality of charge-coupled devices (CCDs) on a silicon substrate. The CCDs can be easily made on the silicon substrate to have a pixel pitch smaller than 10 μm×10 μm. However, because the maximum size of silicon substrates is limited, to achieve the dimensions needed for a large-area flat-panel x-ray detector, multiple wafers have to be patched together. Some of the CCD x-ray detectors are described in the following publications: F. Takasashi, et al., “Development of a High Definition Real-Time Digital Radiography System Using a 4 Million Pixels CCD Camera”,


Physics of Medical Imaging SPIE


3032: 364-375 (1997); J. M. Henry, Martin J. Yaffe and T. O. Tumer, “Noise in Hybrid Photodiode Array—CCD X-ray Image Detectors for Digital Mammography,”


Proc. SPIE


2708: 106 (1996); and M. P. Andre, B. A. Spivey, J. Tran, P. J. Martin and C. M. Kimme-Smith, “Small-Field Image-Stitching Approach to Full-View Digital Mammography,” Radiology 193, Suppl. Nov.-Dec., 253-253 (1994), the entire contents of each being incorporated by reference herein.




Alternatively, a flat-panel imager can include active matrix arrays of thin film transistors (TFTs) on a glass substrate. Because glass substrates can be large, the digital x-ray imager can, in principle, be made of a single substrate. However, it is very difficult to make a digital detector with a pixel pitch much smaller than 100 μm using substrates other than silicon wafers, as described in the following publications: L. E. Antonuk et al., “Development of Thin-Film, Flat-Panel Arrays for Diagnostic and Radiotherapy Imaging”,


Proc. SPIE


1651: 94 (1992); L. E. Antonuk et al., “Large Area, Flat-Panel, Amorphous Silicon Imagers”,


Proc SPIE


2432: 216 (1995); and L. E. Antonuk et al., “A Large-Area, 97 μm Pitch, Indirect-Detection, Active Matrix Flat-Panel Imager (AMFPI)”,


SPIE Medical Imaging


1998


Technical Abstracts,


San Diego, 83 (1998), the entire contents of each being incorporated by reference herein.




As discussed above, digital x-ray imaging techniques represent a vast improvement over conventional film x-ray apparatus. However, digital x-ray imaging systems experience certain drawbacks with regard to image resolution.




It has been a common belief that the resolution of the digital image can be no better than the pixel pitch (pixel periodicity) of the imaging apparatus, and is rather often much worse due to various types of blurring phenomena which occur during image acquisition. However, as can be appreciated from the description of the operation of digital x-ray detectors set forth below, pixel pitch is only one of the many factors that influence the resolution of a digital image obtainable by a digital imaging apparatus.




Detectors for digital radiography are composed of discrete pixels which generally have a uniform size, shape and spacing. The “fill factor” is defined as the active portion of each detector pixel that is used for charge collection relative to pixel pitch or, in other words, the fraction of the pixel area occupied by the sensor for x-ray detection. A flat-panel imager having thin-film transistors (TFTs), for example, has a fill factor which decreases dramatically as the pixel pitch decreases. The TFTs are large compared to transistors on silicon substrates, and the various electrode lines occupy much surface area of the glass substrate. Hence, the fill factor decreases greatly as the pixel pitch decreases.




For example, the fill factor is 57% for a 127 μm pixel pitch array, and is 45% for a 97 μm pixel pitch array which performs indirect x-ray conversion and has been aggressively designed, as described in the article entitled “A Large-Area, 97 μm Pitch, Indirect-Detection, Active Matrix Flat-Panel Imager (AMFPI)” cited above.




The fill factor approaches zero as the pixel pitch decreases toward 50 μm in a detector employing indirect converters. When the fill factor is small, the sensitivity of the detector suffers greatly. Fortunately, however, the fill factor can be improved using direct x-ray converters and a vertical stacking architecture. However, such device becomes increasingly difficult to fabricate as pixel pitch decreases. Thus, development costs for such a device are very high, and it is unclear what the smallest achievable pixel pitch could be with this technique.




In addition, connecting the data and control lines from the detectors to the gate driver chips and readout amplifiers of the pixel array presents severe packaging problems. Currently, bonding of large array of leads from substrate to cable is limited to a device having no less than about an 80-100 μm pixel pitch. By increasing the pixel resolution, multiplexed contacts or new bonding techniques must be developed to create input and output terminals for the device.




The modulation transfer function (MTF), which is a function of spatial frequency f versus location on the detector, is useful for analyzing spatial resolution. Larger MTF values mean better resolution. For existing flat-panel detectors, MTFs are important in analyzing two steps of the image acquisition sequence: the detector pixel pitch, and the blurring produced during the conversion of x-rays to charges. (See, e.g., an article by J. M. Henry, Martin J. Yaffe and T. O. Tumer, “Noise in Hybrid Photodiode Array—CCD X-ray Image Detectors for Digital Mammography,”


Proc. SPIE


2708:106(1996), the entire contents of which is incorporated by reference herein).




The charges generated by x-ray conversion can become blurred spatially. The source of blurring for indirect conversion using phosphor is different from that for direct conversion. For most detectors, the measured MTF is dominated primarily by the blurring of the converter when the pixel pitch is 100 μm or smaller.




In addition, settled phosphor scatters light generated by the x-rays. The lateral spreading of the light is approximately equal to the thickness of the layer. For settled phosphor, spatial resolution becomes finer, but the quantum efficiency decreases as the thickness of the phosphor decreases. Optimized thin photoconductors are expected to produce smaller spread. Although the light spread may be less of a problem for thick collimated CsI phosphor, the boundaries of the CsI grains are not perfect.




Furthermore, spatial resolution can be degraded due to x-rays striking the detector at an oblique angle. This problem exists for both direct and indirect x-ray converters. The extent of the charge spread collected by the detector is a function of the incidence angle. Since the x-ray incidence angle is a function of location on the detector relative to the x-ray point source, the modulation transfer function (MTF) of conversion blurring and oblique x-ray incidence blurring MTF


conversion


is also a function of the location on the detector. The MTF


conversion


of for Lanex Regular is much worse than Lanex Thin. The MTF of for Lanex Thin is 0.2, at 5 cycles/mm, as described in the article entitled “A Large-Area, 97 μm Pitch, Indirect-Detection, Active Matrix Flat-Panel Imager (AMFPI)”, cited above.




The final system MTF is the product of the MTF associated with various components of the system, including the detector array MTF introduced by the detector pixel pitch and the MTF of conversion blurring. For these reasons, the reduction of pixel pitch alone is not as good the combination of reduction of pixel pitch and reduction of conversion blurring. The resolution of the detector is also effected by a variety of other factors that will not be discussed in detail here such as signal statistical noise, charge conversion noise and electronic noise.




Gamma rays are radiation generated by nuclear process. The energy of gamma rays are typically higher than that of the x-rays, but low energy range of the gamma rays can overlap the high energy end of the x-rays. These detector concepts can also be applied to the detection of gamma rays and megavolt radiation. A thick scintillator or a metal plate/phosphor screen combination is used. This is described in a publication by L. E. Antonuk, et al., “Demonstration of Megavoltage and Diagnostic X-ray Imaging with Hydrogenated Amorphous Silicon Arrays,”


Med. Phys.


19: 1455 (1992), the entire contents of which is incorporated by reference herein.




In summary, the major problems expected with small pixel detector development are complicated circuit architecture, increased number of leads to be bonded, the small pitch of the leads necessary for bonding, and resolution being increasingly dominated by scintillator blurring and the oblique x-ray incidence effect. These drawbacks result in decreased manufacturing yield, high risk and expensive development.




Accordingly, a continuing need exists for an apparatus capable of obtaining high-resolution digital x-ray or gamma ray images without the drawbacks discussed above.




SUMMARY OF THE INVENTION




An object of the present invention is to provide a method and apparatus for obtaining high-resolution digital x-ray or gamma ray images of an object or objects emitting x-rays or gamma rays, or of an object or objects irradiated with radiation having a wavelength within the x-ray or gamma ray spectrum.




Another object of the present invention is to obtain digital x-ray or gamma ray images at a resolution better than the pixel pitch of the detectors used to obtain the digital images.




Another object of the present invention is to reduce scattered x-rays or gamma rays detected by the digital detector while also improving image resolution.




A further object of the present invention is to minimize blurring of the digital x-ray or gamma ray images which can occur when the x-rays or gamma rays are directly converted into electron-hole pairs in a photoconductor and collected by the active area of the digital detectors.




A still further object of the present invention is to minimize blurring of the digital x-ray or gamma ray image which occurs when the x-rays or gamma rays are indirectly converted into electric charges first by converting x-rays or gamma rays to a longer wavelength radiation, for example, optical radiation, and then collecting and converting these radiation and converting them to electrical charge.




These and other objects of the present invention are substantially achieved by providing an apparatus and method for obtaining a digital image of an object or objects generating x-rays or gamma rays, or of object or objects irradiated with radiation having a wavelength in the x-ray or gamma ray spectrum generated by a radiation source. The apparatus comprises a detector matrix and a radiation mask. The detector matrix comprises a plurality of two-dimensional array of detector pixels, each of which comprises a detection surface having a respective active surface area and being adapted to generate an electrical signal in response to a radiation stimulus applied thereto. The radiation mask has an opaque portion and a plurality of apertures therein. The mask is positioned between the detector matrix and the radiation source. The radiation can pass through the mask to the detector only through the apertures of the mask. The image resolution is related to the aperture size and system configuration. Many modes of operation of this detector system are described below.




In the first mode of operation, the detector images object or objects that give radiation. The mask is placed between the object and the active detector pixels. The mask allows radiation from selected portions of the objects to be imaged by the detector for a single imaging frame.




In the second mode of operation, the object or objects are placed between a radiation source and the mask. Again, the mask allows a selected portion of the object or objects to be imaged by the detector for a single image frame.




In the third mode of operation, the object or objects are placed between the mask and the detector array, such that the opaque portion of the mask prevents portions of the radiation from passing therethrough, and each of the apertures permits a portion of the radiation which has passed through a respective portion of the object or objects to pass therethrough and propagate onto an active area of the detection surface of a respective one of the detector pixels. The detector pixels therefore each output a respective signal of the respective portion of the object.




The imaging apparatus further includes a conveying device which moves the detector matrix and radiation mask in unison in relation to the object to enable the areas of the detection surfaces of the detector pixels to receive portions of the radiation propagating through other portions of the object, and to output signals representative of those other portions. In particular, the detector matrix and radiation mask are moved along a pattern of movement in increments which are a fraction of the pixel pitch of the detector pixels. After each exposure of the detector to the radiation source, the charges collected by the detector array are read out to a computer and the detector array is reinitialized and the detector and mask are moved to the next appropriate position. This process is repeated so those portions of the object or objects which would not normally be imaged by this detector in the stationary mode can be imaged. These steps of moving the detector pixels and mask, and irradiating the object, are repeated until digital images of all portions of the object or objects have been obtained. The digital data are then arranged into an image representative of the entire object or objects.











BRIEF DESCRIPTION OF THE DRAWINGS




The various objects, advantages and novel features of the present invention will be more readily appreciated from the following detailed description when read in conjunction with the accompanying drawings, in which:





FIG. 1

is a schematic side view illustration of a high-resolution x-ray or gamma ray imaging apparatus according to an embodiment of the present invention;





FIG. 2

is a schematic illustration of the high-resolution imaging apparatus shown in

FIG. 1

in relation to an object being imaged and a point x-ray or gamma ray source;





FIGS. 3



a


and


3




b


are schematic illustrations showing the scattering of light generated in phosphor screens by incident x-ray energy in relation to the thickness of the phosphor screens which can be employed to perform x-ray conversion in the imaging apparatus shown in

FIGS. 1 and 2

;





FIG. 4

is a schematic illustration showing charge smear generated in a photoconductor, which can be employed to perform x-ray conversion in the imaging apparatus shown in

FIGS. 1 and 2

, in relation to various angles of incidence of x-ray energy striking the photoconductor;





FIG. 5

is a schematic illustration of a top plan view of a mask which can be employed in the imaging apparatus shown in

FIGS. 1 and 2

;





FIG. 6

is a schematic top plan view of an example of a detector pixel array which can be employed in the imaging apparatus shown in

FIGS. 1 and 2

;





FIG. 7



a


is a schematic illustration showing the pattern of electromagnetic radiation which passes through the mask shown in FIG.


5


and strikes the scintillator adjacent the active area of the detector pixels of the detector pixel array shown in

FIG. 6

;





FIG. 7



b


is a diagram illustrating an exemplary sequence of movements of the detector pixel array shown in FIG.


6


and the mask shown in

FIG. 5

of the imaging apparatus shown in

FIGS. 1 and 2

with respect to the object being imaged according to an embodiment of the present invention;





FIG. 8

is a schematic top plan view of another example of a mask which can be employed in the imaging system shown in

FIGS. 1 and 2

;





FIG. 9



a


is a schematic illustration showing the pattern of electromagnetic radiation which passes through the mask shown in FIG.


8


and strikes the scintillator adjacent the active area of the detector pixels of the detector pixel array shown in

FIG. 6

;





FIG. 9



b


is a diagram illustrating an exemplary sequence of movements of the detector pixel array shown in FIG.


6


and the mask shown in

FIG. 8

of the imaging apparatus shown in

FIGS. 1 and 2

with respect to the object being imaged according to an embodiment of the present invention;





FIG. 10

is another diagram illustrating an exemplary sequence of movements of the detector pixel array shown in FIG.


6


and the mask shown in

FIG. 5

of the imaging apparatus shown in

FIGS. 1 and 2

with respect to the object being imaged according to an embodiment of the present invention;





FIG. 11

is a schematic top plan view illustration of another example of a mask which can be employed in the imaging system shown in

FIGS. 1 and 2

;





FIG. 12



a


is a schematic showing the pattern of electromagnetic radiation which passes through the mask shown in FIG.


11


and strikes the scintillator adjacent the active area of the detector pixels of the detector pixel array shown in

FIG. 6

;





FIG. 12



b


is a diagram illustrating an exemplary sequence of movements of the detector pixel array shown in FIG.


6


and the mask shown in

FIG. 11

of the imaging apparatus shown in

FIGS. 1 and 2

with respect to the object being imaged according to an embodiment of the present invention;





FIG. 13

is a schematic top plan view of another example of a detector pixel array which can be employed in the imaging apparatus shown in

FIGS. 1 and 2

;





FIG. 14

is a schematic top plan view of another example of a mask which can be employed in the imaging system shown in

FIGS. 1 and 2

;





FIG. 15



a


is a schematic illustration showing the pattern of electromagnetic radiation which passes through the mask shown in FIG.


14


and strikes the scintillator adjacent the active area of the detector pixels of the detector pixel array shown in

FIG. 13

;





FIG. 15



b


is a diagram illustrating an exemplary sequence of movements of the detector pixel array shown in FIG.


13


and the mask shown in

FIG. 14

of the imaging apparatus shown in

FIGS. 1 and 2

with respect to the object being imaged according to an embodiment of the present invention;





FIG. 16

is a schematic top plan view of another example of a detector pixel array which can be employed in the imaging apparatus shown in

FIGS. 1 and 2

;





FIG. 17

is a schematic top plan view of another example of a mask which can be employed in the imaging system shown in

FIGS. 1 and 2

;





FIG. 18



a


is a schematic illustration showing the pattern of electromagnetic radiation which passes through the mask shown in FIG.


17


and strikes the scintillator adjacent the active area of the detector pixels of the detector pixel array shown in

FIG. 16

;





FIG. 18



b


is a diagram illustrating an exemplary sequence of movements of the detector pixel array shown in FIG.


16


and the mask shown in

FIG. 17

of the imaging apparatus shown in

FIGS. 1 and 2

with respect to the object being imaged according to an embodiment of the present invention;





FIG. 19

is a schematic top plan view of another example of a detector pixel array which can be employed in the imaging apparatus shown in

FIGS. 1 and 2

;





FIG. 20

is a schematic top plan view of another example of a mask which can be employed in the imaging system shown in

FIGS. 1 and 2

;





FIG. 21



a


is a schematic illustration showing the pattern of electromagnetic radiation which passes through the mask shown in FIG.


20


and strikes the scintillator adjacent the active area of the detector pixels of the detector pixel array shown in

FIG. 19

;





FIG. 21



b


is a diagram illustrating an exemplary sequence of movements of the detector pixel array shown in FIG.


19


and the mask shown in

FIG. 20

of the imaging apparatus shown in

FIGS. 1 and 2

with respect to the object being imaged according to an embodiment of the present invention;





FIG. 22

is a schematic illustration of a high-resolution x-ray or gamma ray imaging apparatus according to another embodiment of the present invention in relation to an object being imaged and a point x-ray or gamma ray source;





FIG. 23



a


is a schematic top plan view of an example of a mask which can be employed in the imaging system shown in

FIG. 22

;





FIG. 23



b


is a diagram illustrating an exemplary sequence of movements of the mask shown in

FIG. 23



a


of the imaging apparatus shown in

FIG. 22

with respect to the object being imaged according to an embodiment of the present invention;





FIG. 24



a


is a schematic illustration of a high-resolution x-ray or gamma ray imaging apparatus according to another embodiment of the present invention in relation to an object being imaged and a point x-ray or gamma ray source;





FIG. 24



b


is a diagram illustrating an exemplary pattern of movement of the x-ray source of the apparatus shown in

FIG. 24



a


with respect to the object being imaged according to an embodiment of the present invention;





FIGS. 25



a,




25




b


and


25




c


are schematic cross-sectional views of examples of masks which can be employed in an imaging apparatus as shown in

FIGS. 1

,


2


,


22


,


24




a,




26


,


27


or


28


, when the imaging apparatus is used with a point x-ray source;





FIGS. 25



d


and


25




e


are schematic cross-sectional views of examples of masks which can be employed in an imaging apparatus as shown in

FIGS. 1

,


22


,


27


or


28


, when the imaging apparatus is used with a parallel beam x-ray source;





FIG. 26

is a schematic illustration of a high-resolution x-ray or gamma ray imaging apparatus according to another embodiment of the present invention in relation to an object being imaged and a point x-ray or gamma ray source;





FIG. 27

is a schematic illustration of a high-resolution x-ray or gamma ray imaging apparatus according to a further embodiment of the present invention in relation to an object being imaged and a point x-ray or gamma ray source;





FIG. 28

is a schematic illustration of a high-resolution x-ray or gamma ray imaging apparatus according to still another embodiment of the present invention in relation to an object being imaged and a point x-ray or gamma ray source;





FIG. 29

is a schematic illustration of a detector array such as a charge coupled device (CCD); and





FIG. 30

is a schematic illustration showing the pattern of electromagnetic radiation which passes through the mask and strikes the scintillator adjacent the active area of the detector pixels of the detector pixel array shown in FIG.


29


.











DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS




An embodiment of a high-resolution x-ray or gamma ray imaging apparatus


100


is exemplified in

FIGS. 1-7



b.


In particular,

FIG. 1

is a schematic diagram illustrating a view of a side of the imaging apparatus


100


lying in the x-z plane. The imaging apparatus


100


includes a substrate


102


, which can be a silicon or glass substrate or any other appropriate material as described in the Background section above, a detector pixel array


103


with detector pixels


104


which are disposed on the substrate


102


, and a scintillator


106


. The active area of the detector pixels


104


can be any type of pixel as described in the Background section above.




In this embodiment, the scintillator


106


converts x-rays or gamma rays to electron-hole pairs or visible photons. The electron hole pairs or visible photons are converted to electrical charge, current or voltage collected on the active radiation detector area of the pixel


104


. In the typical digital x-ray or gamma ray detectors and visible imagers, the active area of the detector pixels


104


each measure the amount of charge collected per pixel. In general, the active area of the detector pixel


104


measures the change of electrical properties, material properties, physical properties, and so on, produced by the variation of the electromagnetic radiation intensity on the active area of the detector pixel


104


.




A mask or mask/antiscatter grid


108


(hereinafter “mask


108


”) having aperture openings


110


therein is disposed on the upper surface of the scintillator


106


. Each aperture opening


110


is aligned with a corresponding active area of the detector pixel


104


as shown. For many applications, the mask


108


can be rigidly attached to the scintillator


106


, or can be directly attached to the active area of the detector pixels


104


. The mask


108


must be opaque enough to substantially block the penetration of the electromagnetic radiation except through the aperture openings


110


.




The active area of each detector pixel


104


is larger than its respective aperture opening


110


, and detects the electromagnetic radiation (x-rays or gamma rays) passing through its respective aperture opening


110


. As discussed below, the size of the aperture openings


110


and the number of images taken, not the detector pixel pitch, determines the image resolution.




The detector shown in

FIG. 1

can be used to image objects that radiate x-rays or gamma rays. For example, the detector can be used for x-ray astronomy.





FIG. 2

is a schematic drawing illustrating a side view of the embodiment of the imaging apparatus


100


shown in

FIG. 1

being used in an x-ray radiography application to image the interior of an object


112


, which can be, for example, a human body (or a portion thereof) or any other object. An x-ray source


114


is also illustrated schematically. Also, the source


114


could be a gamma ray source, or any energy source.




As shown, the object


112


to be imaged is positioned between the x-ray source


114


and the x-ray mask


108


of the imaging apparatus


100


. After the x-ray source


114


emits a pulse of x-rays and the x-rays penetrate the object


112


, the x-rays reach the mask


108


. The mask


108


blocks all the x-rays from hitting the scintillator


106


except at the mask openings


110


.




The scintillator


106


can be a phosphor screen, which converts the x-rays to optical radiation, and the photodiodes on each detector


104


covert the optical radiation to electrical charge. Alternatively, the scintillator


106


can be of the type that converts the x-rays directly to charge, such as a photoconductor, photocathode, or the like. The geometry and dimensions of the active area of the detector pixels


104


and x-ray mask openings


110


are such that the x-rays passing through a single mask or mask/antiscatter grid opening


110


will strike preferably only a single detector pixel


104


. Preferably, the active detector area of one pixel


104


captures the charges created by one x-ray beamlet. The charge collected per pixel is then output via data lines (see FIG.


6


), and processed in a manner known in the art.




The arrangement of the imaging apparatus


100


will improve the detector system MTF and increase the Nyquist frequency of even the existing best known detector pixels arrays to obtain a resolution much higher than that obtained by the same detector without a mask and without motion. The detector system MTF is the product of MTF associated with various component of the detector. Two MTF will be discussed: MTF associated with detector geometry and MTF associated with x-ray conversion.




As will now be explained, the operation of the imaging apparatus


100


will improve MTF associated with the detector system geometry for detectors which perform either direct or indirect conversion of the x-rays or gamma rays as discussed above.





FIGS. 3



a


and


3




b


are schematic diagrams illustrating the manner in which phosphor screens scatter the light generated by the x-rays during indirect x-ray conversion. As shown, the light scatter is proportional to the thickness of the phosphor screen. A thicker phosphor screen will provide a greater light scatter.





FIG. 4

is a schematic diagrams illustrating that for direct conversion of x-rays, charge smear is minimal when the x-ray incidence angle is zero degrees, and increases as the x-ray incidence angle increases. For both of these situations, an active pixel detector area much larger than the x-ray mask aperture will reduce conversion blurring and improve conversion MTF.




The active area of the detector pixels


104


and mask


108


can have a wide range of pattern or layout. For example,

FIG. 5

is a schematic diagram of mask


108


of the imaging apparatus, with apertures


110


viewed in the x-y plane in FIG.


1


. The apertures


110


are square or essentially square, and each have a length and width equal to d


1


. The area of each aperture is d


1


×d


1


, and the pitch of the aperture is equal to the pixel pitch D


1


in both directions. The arrangement of the apertures


110


forms a uniform grid of openings in the mask


108


. As discussed above, the electromagnetic radiation to be detected has to be completely blocked by the mask


108


except at apertures


110


in the mask


108


. The apertures


110


are used to control the area and position at which the electromagnetic radiation hits the detector pixels.




In this embodiment, the pixel pitch D


1


is an integer multiple of d


1


. To enable the object to be


112


imaged without missing any areas and without double-exposing any areas, the imaging apparatus


100


is configured and operated so that the beamlets will each “fit” into a respective active area of the detector pixel


104


an exact number of times. In other words, D


1


=nd


1


, and n is an integer equal to or greater than 2.

FIG. 5

shown an aperture arrangement where D


1


=2d


1


.





FIG. 6

is a generalized schematic illustration of a top view of a possible layout of the detector pixel array


103


and the active area of the detector pixels


104


for the imaging apparatus


100


as shown in

FIGS. 1 and 2

. The active radiation detector areas of the pixels


104


are shown shaded with hatched lines. It is noted that the dimensions of the active area of the detector pixels


104


vary greatly from one manufacturer to another, and that the shapes of the active radiation detector areas of the pixels


104


can vary widely and are represented as squares only for illustration purposes. Row control (selection) lines


116


, which are disposed on the substrate


102


(see FIGS.


1


and


2


), are spaced uniformly from each other at the distance D


1


as shown. Column data lines


118


, which are also disposed on substrate


102


, are also spaced uniformly from each other at the distance D


1


. Typically, data is read out one row at a time (but could be more than one row at a time) through the column data lines


118


to a processing device, such as a computer


119


or the like, as controlled by the row control lines


116


.





FIG. 7



a


is a schematic representation of the radiation beamlets


120


that pass through the apertures


110


of the mask


108


which has been superimposed over the active area of the detector pixels


104


. Specifically, the electromagnetic radiation beamlets


120


are illustrated as white squares on the pixels


104


, with each white square having a dimension d


1


×d


1


, which is equal to or essentially equal to the dimension of the aperture


110


through which the beamlet


120


has passed. In summary, as shown in

FIG. 7



a,


the radiation beamlets


120


hit the scintillator above the active area of the detector pixels


104


with dimension d


1


×d


1


. The distance between the centers of adjacent apertures


110


is equal to D


1


, which is the pitch of the active area of the detector pixels


104


. The relationship between the dimensions of each active area of the detector pixel and the dimensions of the radiation beamlets when they hit the detector pixel is D


1


=nd


1


, where n=2 in this example. Also, the x-rays are only allowed to impact the detector during the x-ray exposure time, but not during the data read out time or while the mask or detector is being moved.




To assure that the entire object


112


(

FIG. 2

) is imaged, a conveying device


124


(see FIG.


1


), such as a stepper motor, servo motor, motorized table, or any other suitable device, is configured to move the imaging apparatus


100


in a controlled manner. The imaging apparatus


100


is moved with respect to the object


112


in increments equal to d


1


along the pattern shown in

FIG. 7



b.


That is, after one exposure of the object


112


to the x-rays, a x-ray image of a respective portion of the object


112


is obtained by each pixel


104


. The data produced by the pixels


104


is output through the column data lines


118


. The imaging apparatus


100


is then moved in the x-y plane by a distance d


1


along an arrow in

FIG. 7



b.






This process is repeated n


2


times with the imaging apparatus


100


(i.e., the detector pixels grid


103


, scintillator


106


and mask


108


) moved systematically in the x-y plane, for example, in the directions along arrows


126


,


128


,


130


and


132


for each exposure and reading, so that every part of the object


112


is imaged. After all four x-ray image patterns (n


2


=4 in this example) have been obtained and stored, they are reconstructed by a processing device, such as the computer


119


or the like into a complete image representative of the entire object


112


. The reconstructed image has higher resolution than any single x-ray image pattern obtained with or without the mask


106


.




The principle of improvement of image resolution is explained first assuming no x-ray conversion blurring and then expanded to include x-ray conversion blurring.




For the fill factor of the active area of the detector is 100%,








MTF




geometry


=sin(π


fD


)/(π


fD


),






 Where MTF


geometry


is the MTF associated with the geometry of the detector system in one direction, D is the dimension of the pixel pitch, and f is the spatial frequency. The Nyquist frequency is 1/2D.




When the linear dimension of the active area of the detector pixel is reduced to d


1


, for D=2d


1


,








MTF




geometry


=sin(π


f


(


d




1


))/(π


f


(


d




1


)),






 and the Nyquist frequency is still 1/2D.




When the linear dimension of the active area of the detector is d


1


and D=2(d


1


), and the detector is moved as shown in

FIG. 7



b


and D=2(d


1


), then








MTF




geometry


=sin(π


f


(


d




1


))/ (π


f


(


d




1


)),






 and the Nyquist frequency is increased to 1/4D. This technique is used to reduce aliasing and improve image resolution for infrared cameras. The technique is called microscanning, dithering and microdithering, as described in the following publications: J. C. Gillette, T. M. Stadtmiller and R. C. Hardie, “Aliasing reduction in staring infrared imagers utilizing subpixel techniques,” Optical Engineering 34, 3130-3137 (1995); R. C. Hardie, K. J. Barnard, J. G. Bognar, E. E. Armstrong and E. A. Watson, “High-resolution image reconstruction from a sequence of rotated and translated frames and its application to an infrared imaging system,” Optical Engineering 37, 247-260 (1998), the entire contents of each being incorporated by reference herein.




For x-ray and gamma ray imaging, there is conversion blurring. Conversion blurring can eliminate the benefits of microscan without mask and significantly reduce the signal. For example, for a TFT digital x-ray detector having an active area of the pixel with a dimension d


1


×d


1


, if If N number of x-rays impinges on this active area of the pixel and M number of electrons are created per x-ray, then the total number of electrons created per pixel would be MN. When there is no conversion blurring, the total number of charge collected by this pixel would be MN. Due to conversion blurring, the percentage of charge collected by this pixel decreases as the pixel dimension decreases, and the remaining charges are spread to the neighboring pixels.




In the detector system of the present invention as shown, for example, in

FIGS. 1-2

, the aperture size of the mask determines the Nyquist frequency and the MTF associated with the pixel, while the active area of the pixel is kept large to increase the percentage of charge collected as the aperture of the mask decreases.




The small aperature of the mask and large detector pixel size also improves the MTF associated with the conversion blurring, MTF


conversion


. The detector system MTF, MTF


system


, is the product of the MTF associated with the various aspects of the system,








MTF




system




=MTF




geometry




*MTF




conversion




*MTF




others


,






Where MTF


others


is the MTF associated with other component of the detector system.




The detector system described in

FIGS. 1-2

and


5


-


7




b


with a mask and motion has a higher Nyquist frequency, larger values for the MTF within the Nyquist frequency and improve signal as compared to imaging without the mask and motion. As explained above, the detector pixel array


103


and mask


108


arrangement can have a wide variation of patterns and dimensions. For example,

FIG. 8

is a schematic of a top view of a mask


134


which can be used in the imaging apparatus


100


shown in

FIGS. 1 and 2

instead of mask


108


. Mask


134


includes apertures


136


which are square or essentially square and have a dimension d


2


×d


2


, such that the pixel pitch D


1


of detector pixels


104


is equal to 3(d


2


), (D


1


=3(d


2


)) in both directions.





FIG. 9



a


is a schematic view showing the electromagnetic radiation that has passed through the mask


134


and has impacted on the scintillator above detector pixels


104


. That is, the x-ray beamlets


138


pass through respective apertures


136


in the mask


134


and strike the center of the active radiation detection area of the respective pixel


104


.




To obtain an entire x-ray image of the object


112


with an imaging apparatus


100


including mask


134


, the imaging apparatus


100


is moved along a pattern as shown, for example, in

FIG. 9



b.


That is, as discussed above with regard to

FIGS. 7



a


and


7




b,


after each exposure of the object


112


to x-rays and, generation of an x-ray image sub-pattern by the pixels


104


, and read-out of the pixel data through column data lines


118


, the imaging apparatus


100


is moved to a new location. The imaging apparatus


100


is moved sequentially each time an x-ray image is taken, and is moved in a possible pattern shown in

FIG. 9



b


with each arrow representing one successive movement(d


2


=D/3). This process is repeated n


2


=9 times with the detector


103


, scintillator


106


and mask


134


moved in unison so that every part of the object


112


will be imaged. After all of the x-ray image sub-patterns have been obtained and stored, they are combined by a processor such as a computer or the like to provide an x-ray image representative of the entire object


112


.




In addition, aliasing can be further minimized and MTF improved by oversampling and applying appropriate mathematical algorithms. That is, returning to the example discussed with regard to

FIGS. 7



a


and


7




b,


instead of moving the imaging apparatus


100


including detector


108


by a distance d


1


between successive x-ray or gamma ray exposures, the imaging apparatus


100


is moved by a distance of (d


1


)/2=(D


1


)/2n, so the total number of sub-frames required is (2n)


2


. The value (d


1


)/2=(D


1


)/2n. The arrows shown in the diagram of

FIG. 10

suggest a possible sequence of movements for imaging apparatus


100


including detector pixels array


103


, scintillator


106


and mask


108


for a detector motion of (d


1


)/2 between exposures, with the distance d


1


being equal to one-half the pixel pitch D


1


(i.e., D


1


/d


1


=2).




An example of sampling variation by increasing the size of the apertures in the mask without changing the detector size or the distance between exposures is exemplified in

FIGS. 11

,


12




a


and


12




b.



FIG. 11

shows a mask


140


with apertures


142


each having a dimension d


3


×d


3


, where D


1


/(n−1)>d


3


>D


1


/n. In this example, n=2.

FIG. 12



a


shows the spot size of the radiation beamlets


144


formed by mask


140


on the scintillator above the detector pixels


104


. After each x-ray exposure and data readout operation is performed in the manner discussed above, the detector is moved a distance D


1


/n along the arrows shown in

FIG. 12



b.


This process is repeated n


2


times with the detector


103


, scintillator


106


and mask


140


moving in unison so that every part of the object


112


is imaged. The suggested motion is similar to that of the example showing

FIG. 10

to reduce aliasing. The aliasing reduction is dependent on the amount of overlapping image.




It is noted that the periodicity of the detector pixel pitch need not be square. For example, as shown in

FIG. 13

shows a detector pixel array


146


having the active area of the detector pixels


148


within the D


1


×0.75(D


1


) pixel pitch. For some applications, a rectangular area of the detector pixel layout is more effective than a layout of square detector pixels.





FIG. 14

is a schematic illustration of a mask


150


having apertures


152


appropriate for the detector pixels


148


shown in FIG.


13


. In this example, n=D


1


/d


4


=3.





FIG. 15



a


is a schematic diagram illustrating the location of the radiation beamlets


154


passing through the apertures


152


of the mask


150


onto the scintillator above the detector pixels


148


. Preferably, the x-ray beams that pass through each aperture


152


in the mask


150


are centered on the active radiation detection area of a respective pixel


148


. After each x-ray exposure to the object


112


and data readout is performed in the manner discussed above, the imaging apparatus


100


including detector pixel array


146


and mask


150


is moved a distance (D


1


)/4 along the arrows shown in

FIG. 15



b.


This process is repeated 6 times with the detector grid


146


and mask


150


moved systematically so that every part of the object


112


will be imaged.





FIG. 16

is a schematic of a top view of a variation in the layout of the detector pixels for the imaging apparatus


100


shown in

FIGS. 1 and 2

. In the pixel array


156


, the active areas for radiation detection of the pixels


158


are shown shaded with hatched lines. The shape of each pixel


158


is shown as a square for schematic purpose only. In general, the pixel shape can vary from one product to another and from one manufacturer to another.




As shown, the detector pixels


158


are staggered in formation. The periodicity of the pixel is 2D


1


in the horizontal direction and D


1


in the vertical direction. The arrangement further includes column data lines


160


, which are similar to the column data lines


118


discussed above and are spaced uniformly a distance D


1


apart. Each data line will be connected to all the pixels


158


in a respective column of pixels. Control lines


162


run in a staggered zigzag pattern from left to right in this embodiment, and are spaced uniformly a distance D


1


apart.





FIG. 17

is a schematic illustration of the aperture layout of the mask


164


employed in the imaging apparatus


100


shown in

FIGS. 1 and 2

having a detector pixel layout as shown in FIG.


16


. The apertures


166


are arranged in a staggered fashion as shown, and D


1


/(d


5


)=2.





FIG. 18



a


is a schematic illustration showing the locations at which the radiation beamlets


168


pass thought the apertures


166


overlaying the detector pixel array


156


.

FIG. 18



b


is a diagram showing an example of movement of the mask


164


and detector pixel array


156


for four x-ray exposures and returning to its original position and image readings which occur in the manner discussed above. As shown, the mask


164


and detector pixel array


156


move along the arrows by a distance d


5


between each exposure and image reading. The minimum number of exposures is n


2


, and n=2 in this example.




In general, there are many variations in direction and distance in which the detector pixel array


156


and mask


164


can be moved. For instance, D


1


/(d


5


) can be any number greater than or equal to 2, and various image data sampling algorithms can be implemented. Also, the pixel pitch does not have to be square.




For example,

FIG. 19

is another schematic illustration of a top view of a detector pixel array


170


which can be employed in imaging apparatus


100


shown in

FIGS. 1 and 2

in place of detector pixel array


103


. This figure is similar to

FIG. 16

, except the periodicity of the pixel detectors


172


is 3(D


1


) in the x direction.





FIG. 20

is a schematic illustration of a mask


174


which can be employed in an imaging apparatus


100


which includes detector pixel array


170


shown in FIG.


19


. The apertures


176


of the mask


174


are arranged in a staggered fashion along the x direction, and D


1


=3(d


6


).





FIG. 21



a


is a schematic illustration of the positions at which the radiation beamlets


178


which pass through the aperture of the x-ray mask


174


overlaying the detector pixel array


170


strike the detector pixels


172


of the grid


170


.

FIG. 21



b


is a diagram of an example of the manner in which the detector pixel array


170


and mask


174


are moved for nine exposures by a distance d


6


between exposures and returning to its original position. As can be appreciated from

FIG. 21



b,


the staggered formation of the detector pixels grid


170


and mask


174


enable the entire object to be imaged by moving the grid


170


and mask


174


in one direction (i.e., the x direction), as opposed to in the x and y directions as from a non-staggered grid discussed above.




Another mask variation is that the apertures are not squares. For some applications, other x-ray aperature shapes might be more appropriate.




Although only several examples of masks and detector pixel array arrangements are described above, various types of mask having various apertures patterns can be used in the imaging system


100


to provide a wide variety of possible image system configurations. Also, as discussed below, the masks need not be attached to the scintillator, but rather, could be positioned at any appropriate location between the x-ray or gamma ray source and the detector pixel array.




For example,

FIG. 22

is a schematic illustrating an embodiment of an imaging apparatus


180


which includes a substrate


182


, a detector pixel array


184


including detector pixels


186


, a scintillator


188


, and a mask


190


having apertures


191


therein similar to those described above. The imaging apparatus


180


can also include an antiscatter grid


192


which is disposed over the scintillator as shown. An example of an antiscatter grid is disclosed in related copending U.S. patent application Ser. No. 08/879,258, cited above. An x-ray source


194


and object


196


being imaged are also illustrated in relation to the apparatus


180


.




Unlike imaging apparatus


100


, in this embodiment the object to be imaged


196


is positioned between x-ray mask


190


and the detector pixel array


184


. As shown, the x-ray energy propagates out of a point x-ray source in a cone shape.





FIG. 23



a


shows the mask


190


as viewed in the x-y plane. The apertures


191


are shown as having a square shape, but could have any suitable shape as discussed above for the other masks configurations. Primarily, the size and arrangement of the apertures


191


on the mask


190


should be such that they permit uniform sized and equally spaced beamlets to form on the detector pixels


186


.




The periodicity of the square digital detector pixels is defined to be D


1


×D


1


. The dimension of each x-ray beamlet as it hits the detector pixel (the “x-ray spot size”) is equal to d


7


×d


7


, where d


7


<D. Using Euclidean geometry, if the x-ray source


194


is considered to be a vertex of a triangle, the x-ray beamlet on the detector pixels


186


is the base of the triangle, and the distance between the x-ray source


194


and the detector pixel is L (distance measured orthogonally), then if the x-ray mask


190


is placed a distance αL from the x-ray source where α is a fraction less than 1, the dimensions of the apertures


191


in the x-ray mask


190


must be equal to α(d


7


)×α(d


7


). Also, as with the variations discussed above, the apertures of the mask and the detector pixels can vary in size and shape depending on the need.




The operation of the imaging apparatus


180


will now be described. When the x-ray source


194


emits a pulse of x-ray energy which strikes the x-ray mask


190


, the mask blocks all of the x-rays from striking the object except at the mask apertures


191


. The x-ray beamlets which pass through the apertures of the mask penetrate the object


196


and propagate toward the antiscatter grid


192


. The antiscatter grid


192


eliminates the scattered radiation, so that only the primary radiation impacts the scintillator


188


. As in the imaging apparatus


100


shown in

FIGS. 1 and 2

, the scintillator


188


can be a phosphor screen, which converts the x-rays to optical radiation. A photodiode on each detector pixel coverts the optical radiation to electrical charge. Alternatively, the scintillator


188


can be of the type that converts the x-rays directly to electrical charge, such as photoconductor, photocathodes, and so on.




The geometry and dimensions of the detector pixels


186


and x-ray mask openings


191


are such that each x-ray beamlet passing through a respective aperture in the mask and a respective aperture in the antiscatter grid


192


will strike within a single detector pixel


186


. Preferably, the active detector area of one pixel


186


captures the charges created by the impacting x-ray beamlet. After each exposure, the x-ray source is turned off or x-ray shutter is closed. The charges collected by the pixels


186


are then output via data lines in a manner similar to that described above for imaging apparatus


100


.




For this example, n=D


1


/d


7


=2. After one exposure and data read out, the detector grid


184


(and hence the substrate


182


, scintillator


188


and antiscatter grid


192


) is moved a distance D


1


/2 for n=2 in a sequence as shown in

FIG. 12



b


and the x-ray mask


190


is moved by a distance αd


7


in the same sequence as shown in

FIG. 23



b


while the object


196


(patient) remains stationary, to expose a different portion of the object


196


. This process is repeated n


2


times with the detector and mask moved in unison so that every part of the object will be imaged. After all the necessary sub-images have been output and stored, the data is processed to produce one image in a manner similar to that described above. Even though n


2


exposures are taken, the tissue is exposed to the same dose of x-ray as in one exposure without the mask, because each exposure is 1/n


2


the area of an exposure without the mask. The data is then reconstructed digitally to produce the high-resolution image.




Variations of the embodiments for the mask and the detector grid layout are the same as those exemplified in

FIGS. 8 through 21

, except that each aperture of the mask is reduced in size by the factor a and the motion of the mask is reduced by the same factor.





FIG. 24



a


is a schematic diagram illustrating that the image filtering concept can be obtained by moving the location of the x-ray source


194


without moving the mask


190


. For the detector shown in FIG.


6


and D


1


/d


7


=n=2, the detector motion is shown in

FIG. 12



b,


the corresponding x-ray source displacement is shown in

FIG. 24



b,


where the distance between displacement is d


8


and d


8


≈(D


1


/n)(α/(1−α)). The direction of motion for the source, shown in

FIG. 24



b,


is opposite to the direction of motion for the detector, shown in

FIG. 12



b.


The range for α is between 0 and 1, and the optimal values for a are near


0


.


5


. The positions for the x-ray source


194


are such that every part of the object will be imaged. Variations of the embodiments for the mask and the detector grid layout are the same as those exemplified in

FIGS. 8 through 21

, except that each aperture is reduced in size by the factor α.




Another variation of

FIG. 24



a


is to move the location of the x-ray source


194


and the x-ray mask


190


, but not move the detector


184


, the scintillator


188


or the antiscatter grid


192


.




As discussed above, the x-ray mask


190


should be made of high atomic number materials


191


on x-ray transparent substrate


192


, so that the x-rays can be substantially completely blocked with even a thin mask. The desirable thickness will dependent on the allowable transmitted x-rays and the x-ray energy. Gold is most commonly used as x-ray lithography masks. The attenuation factor of gold over the density, μ/ρ, varies with x-ray energy. For example, at x-ray energy of 22.16 keV, μ/ρ=59.7 cm


2


/g and at x-ray energy of 30 keV, μ/ρ=25.55 cm


2


/g, where ρ=19.3 g/cm3 is the density of gold. The amount of x-ray that penetrates the mask is equal to exp(−μL), where L is the thickness of the mask. Typically gold masks of can produce apertures with dimensions of 75 μm to 100 μm and vertical walls are routinely used to block x-rays in the 5-20 keV range. The mask needs to be thicker as the x-ray energy increases. The aperture walls of the mask should ideally be slanted along the direction at which the x-rays are received. If the x-ray source is from a point, then the mask should have the configuration shown schematically in

FIGS. 25



a,




25




b


or


25




c,


in which the slant angles increase with distance from the center of the mask. The top layer of the mask in

FIG. 25



c


does not have to have the same thickness as the bottom layer.




On the other hand, if the x-ray source is a parallel beam, the mask should have a configuration like that shown schematically in

FIG. 25



d,


in which the aperture walls are all substantially vertical. The photoresist used in making the x-ray mask


193


does not have to be removed if it is x-ray transparent material, as shown in

FIG. 25



e.


This is also true for a mask focused to a point x-ray source.




In an imaging apparatus


100


as shown in

FIGS. 1 and 2

, x-ray scatter can be reduced if the mask is thick and configured as an antiscatter grid. However, in the imaging apparatus


180


as shown in

FIG. 22

, x-ray scatter can be reduced even without the use of an antiscatter grid.




That is, when the x-ray sensitive area ε of the detector pixels is small compared to the area associated with the detector pitch E, the scatter is reduced by approximately the ratio ε/E. Alternatively, a thin mask


200


with aperture d


9


×d


9


can be used in the imaging apparatus


180


in place of the antiscatter grid


192


, as shown schematically in

FIG. 26

, to reduce x-ray scatter by the ratio of (d


9


/D


1


)


2


.





FIG. 27

is a schematic illustration of another embodiment of an imaging apparatus according to the present invention. Imaging apparatus


202


includes a substrate


204


, a digital detector pixel array


206


comprising detector pixels


208


, a scintillator


210


, and an x-ray mask


212


having apertures d


10


×d


10


. However, in this embodiment, the mask is placed a distance λ


1


above the scintillator, and the object (not shown) to be imaged is placed above the x-ray mask


212


. The mask wall thickness and the distance x can act as an antiscatter grid. Alternatively, a properly aligned double mask


214


, having apertures d


11


×d


11


and individual mask portions separated by an appropriate distance λ


2


, can be used to reduce scatter as shown schematically in FIG.


28


.




The invention as described with regard to

FIGS. 1-28

employs a detector having a detector pixel pitch that is larger than the x-ray mask opening. The following embodiment of the invention employs detectors that have small pixels to obtain high-resolution images. A schematic of a CCD is shown in FIG.


29


. The pixel sizes of the CCD can have dimensions d


12


×d


12


, with d


12


being less than 10 μm. However the resolution of the conventional x-ray image is degraded by the phosphor so that the small pixels of the CCD still cannot produce high-resolution images.




The concept described above is also applicable to the CCD detector. A group of the CCD can be configured together to collect data for one x-ray image pixel, where d


12


is the pixel pitch of the CCD. The CCD arrays can be used in configurations shown in

FIGS. 1

,


2


,


22


,


24


,


26


,


27


and


28


.





FIG. 30

is a schematic illustration showing the pattern of x-rays which passes through the mask overlaying the active area of the detector pixels of the detector pixel array shown in FIG.


29


. The example shown in

FIG. 30

utilizes 3×3 CCD pixels to collect the information relating to x-ray intensity for one x-ray image pixel, i.e., 3(d


12


)=D


2


, and d


13


is the x-ray spot size overlapping the CCD.




The signal collected by each group of CCD pixels with dimension D


2


×D


2


under an x-ray beamlet will be grouped together to form the signal for the x-ray beamlet. Each D


2


×D


2


group of pixels is effectively a macro pixel analogous to a single pixel of D


1


×D


1


as shown, for example, in FIG.


6


. For illustration purposes, nine CCD pixels form a macro pixel in FIG.


30


.




If the CCD pixels are much smaller than D


2


, then slight misalignment of the CCD array with respect to the mask can be tolerated by redistributing the signal of the CCD pixel to different macro pixels using software algorithms. The amount of misalignment may be on the order d


11


over a distance of tens of D


2


.




When CCD detectors are used and d


13


/d


12


is greater than or equal to one, only the mask, and not the detector, needs to move for configurations shown in

FIGS. 1

,


2


,


22


,


27


and


28


. Neither the mask nor the detector are required to move for the configuration shown in

FIG. 24



a.






The high-resolution x-ray imaging apparatus discussed above according to the present invention has many applications. In addition to medical applications (e.g., mammography), such imaging apparatus can be used in scientific research, defense and security environments, biotechnology, x-ray microscopy, x-ray astronomy, three-dimensional x-ray tomography and various industrial applications such as those in which non-destructive testing is required.




For example, radiographic testing is used in industry in process control to detect manufacturing flaws and is increasingly integrated as a crucial component on the manufacturing floor. The trend of non-destructive testing is moving toward the use of real-time, non-film radioscopic systems over traditional film-based systems. Digital non-destructive evaluation offers all the traditional benefits of detecting microscopic flaws and providing permanent inspection records. It enables new capabilities such as computer-based inspection methods and cost reduction. The electronics and automotive industries have moved fastest to adopt radioscopy; many other industries are following this trend.




The spatial filtering which is performed by the present invention to obtain high-resolution digital x-ray or gamma ray images provides several advantages. The imaging apparatus can use either direct or indirect x-ray or gamma ray conversion to generate signals representative of the image. The invention provides an improvement of the MTF beyond the limitation of the pixel pitch of the detector pixel array. Image degradation by conversion blurring caused by phosphor screens can be minimized, and image degradation by oblique x-ray incidence can be minimized, thus providing improved image resolution as well as more spatially uniform image resolution. In medical applications, the method and apparatus of the present invention also allow for x-ray detection efficiency beyond the limitation of the fill factor of the imager, without the need for increasing the x-ray or gamma ray dosage to a patient.




In addition, a wide range of image resolutions can be achieved using the present invention, with digital x-ray or gamma ray images having a resolution as small as 1 μm. This concept of using mask to select the resolution is independent of the dimensions. Typically, the pixel size of gamma cameras are large while the pixel size of the CCDs are typically small. The pixel size depends on the energy of the radiation to be detected, the application and availability of detectors. Similarly, the mask thickness and the aperature size depends on the application's needs, the x-ray energy and the ability to fabricate the aperture size with the appropriate mask thickness.




Although only a limited number of exemplary embodiments of the invention have been described in detail above, those skilled in the art will readily appreciate that many modifications are possible in the exemplary embodiments without materially departing from the novel teachings and advantages of this invention. Accordingly, all such modifications are intended to be included within the scope of the invention as defined in the following claims.



Claims
  • 1. An apparatus for obtaining a digital image of an object or objects being irradiated with radiation having a wavelength in the x-ray or gamma ray spectrum generated by a radiation source, comprising:a detector matrix, comprising a plurality of detector pixels, arranged such that the centers of each adjacent detector pixels are spaced at a first pixel pitch distance from each other in a direction along the width of said detector matrix, and at a second pixel pitch distance from each other in a direction along the length of said detector matrix, with each detector pixel comprising a detection surface having a respective surface area and being adapted to generate a signal in response to an energy stimulus applied thereto; and at least one radiation mask having an opaque portion and a plurality of apertures therein, arranged such that the centers of each adjacent apertures are spaced at a first aperture pitch distance from each other in a direction along the width of said radiation mask, and at a second aperture pitch distance from each other in a direction along the length of said radiation mask, said first and second aperture pitch distances being smaller than said first and second pixel pitch distances, respectively, said radiation mask being positioned between the radiation source and the object or objects, such that said opaque portion substantially prevents portions of said radiation from passing therethrough, and each of said apertures permits a portion of said radiation that has passed through to strike at least a portion of said detection surface of a respective one of said detector pixels, so that said detector pixels each output a respective signal representative of an image of said respective portion of said object.
  • 2. An apparatus as claimed in claim 1, wherein:each of said apertures permits a respective said portion of said radiation that has passed therethrough to strike an area of said detection surface, less than said surface area, of a respective one of said detector pixels.
  • 3. An apparatus as claimed in claim 1, wherein:each of said apertures permits a respective said portion of said radiation that has passed therethrough to strike portions of a plurality of said detection surfaces of a respective plurality of said detector pixels.
  • 4. An apparatus as claimed in claim 1, further comprising:an image creating device which arranges said images of said respective portions of said object to form the digital image of said object.
  • 5. An apparatus as claimed in claim 1, further comprising:a conveying device which moves said detector matrix and radiation mask in relation to said object to enable said areas of said detection surfaces of said detector pixels to receive portions of said radiation propagating through or emitted from other portions of said object and to output signals representative of said other portions.
  • 6. An apparatus as claimed in claim 1, wherein:said detector pixels are arranged in said detector matrix in a plurality of detector rows, each row comprising a first number of said detector pixels, and a plurality of detector columns, each column comprising a second number of said detector pixels, said detector pixels in each of said detector rows being separated by said first pixel pitch distance, and said detector pixels in each of said detector columns being separated by said second pixel pitch distance; and said apertures in said radiation mask are arranged in a plurality of aperture rows, each comprising a first number of apertures, and a plurality of aperture columns, each comprising a second number of said apertures.
  • 7. An apparatus as claimed in claim 6, further comprising:a conveying device which is adapted to move said detector matrix and said detector mask in relation to said object by a first distance equal to a fraction of said first pixel pitch distance in a first direction substantially parallel to said detector rows, and which is adapted to move said detector matrix and said detector mask in relation to said object by a second distance equal to a fraction of said second pixel pitch distance in a second direction substantially parallel to said detector columns.
  • 8. An apparatus as claimed in claim 7, wherein:said conveying device moves said detector matrix and said detector mask incrementally in said first direction until said detector matrix and said detector mask have moved said first distance; and said conveying device moves said detector matrix and said detector mask incrementally in said second direction until said detector matrix and said detector mask have moved said second distance.
  • 9. An apparatus as claimed in claim 7, wherein:said conveying device moves said detector matrix and said detector mask incrementally in said first direction until said detector matrix and said detector mask have moved said first distance.
  • 10. An apparatus as claimed in claim 7, wherein:said conveying device moves said detector matrix and said detector mask incrementally in said second direction until said detector matrix and said detector mask have moved said second distance.
  • 11. An apparatus as claimed in claim 6, wherein:said first number of detector pixels equals said first number of apertures; and said second number of detector pixels equals said second number of apertures.
  • 12. An apparatus as claimed in claim 6, wherein:said first and second pixel pitch distances are equal.
  • 13. An apparatus as claimed in claim 6, wherein:said first and second pixel pitch distances are different from each other.
  • 14. An apparatus as claimed in claim 1, wherein:said detection surfaces of said detector pixels are each substantially square in shape; and said apertures are each substantially square in shape.
  • 15. An apparatus as claimed in claim 1, wherein:each of said apertures occupies an area less than said surface area of a respective one of said detector pixels.
  • 16. An apparatus as claimed in claim 1, further comprising:a plurality of said radiation masks.
  • 17. An apparatus as claimed in claim 1, wherein:said radiation mask comprises a focused radiation mask.
  • 18. An apparatus as claimed in claim 1, wherein:said radiation mask is an unfocused radiation mask.
  • 19. An apparatus as claimed in claim 1, wherein:said detection surfaces of said detector pixels are each substantially rectangular in shape; and said apertures are each substantially square in shape.
  • 20. An apparatus as claimed in claim 1, wherein:said detection surfaces of said detector pixels are each substantially square in shape; and said apertures are each substantially rectangular in shape.
  • 21. An apparatus as claimed in claim 1, wherein:said opaque portion of said radiation mask is configured to form first walls of said radiation mask extending substantially parallel to each other along a first direction and second walls of said radiation mask extending substantially parallel to each other along a second direction.
  • 22. An apparatus as claimed in claim 1, wherein:said opaque portion of said radiation mask is configured to form first walls and second walls of said radiation mask extending along first and second directions, respectively, such that at least one of said first and second walls are angled to focus to a point at a distance from said radiation mask.
  • 23. An apparatus as claimed in claim l, further comprising:an imager which arranges said images of said respective portions of said object to form the digital image of said object.
  • 24. A method for using a detector matrix comprising a plurality of detector pixels to obtain a digital image of an object or objects the detector pixels being arranged such that the centers of each adjacent detector pixels are spaced at a first pixel pitch distance from each other in a direction along the width of said detector matrix, and at a second pixel pitch distance from each other in a direction along the length of said detector matrix, the method comprising the steps of:emitting from a radiation source radiation having a wavelength in the x-ray or gamma ray spectrum generated in a direction toward said object or objects; and positioning at least one radiation mask having an opaque portion and a plurality of apertures therein between said radiation source and said object or objects, said radiation mask being configured such that the centers of each adjacent apertures are spaced at a first aperture pitch distance from each other in a direction along the width of said radiation mask, and at a second aperture pitch distance from each other in a direction along the length of said radiation mask, said first and second aperture pitch distances being smaller than said first and second pixel pitch distances, said opaque portion substantially preventing first portions of said radiation from passing therethrough, and each of said apertures permitting a respective second portion of said radiation that has passed through to strike at least a portion of said detection surface of a respective one of said detector pixels, so that said detector pixels each output a respective signal representative of an image of said respective portion of said object.
  • 25. A method as claimed in claim 24, wherein:said apertures permit said second portions of said radiation to each propagate onto an area of said detection surface, less than said surface area, of a respective one of said detector pixels.
  • 26. A method as claimed in claim 24, wherein:said apertures permit said second portions of said radiation to strike portions of a plurality of said detection surfaces of a respective plurality of said detector pixels.
  • 27. A method as claimed in claim 24, further comprising the step of:arranging said images of said respective portions of said object to form the digital image of said object.
  • 28. A method as claimed in claim 24, further comprising the steps of:after performing said emitting and positioning steps, moving said detector matrix and radiation mask in relation to said object; and after performing said moving step, repeating said emitting and positioning steps to enable said areas of said detection surfaces of said detector pixels to receive portions of said radiation propagating through other portions of said object and to output signals representative of said other portions.
  • 29. A method as claimed in claim 24, wherein:said detector pixels are arranged in said detector matrix in a plurality of detector rows, each comprising a first number of said detector pixels, and a plurality of detector columns, each comprising a second number of said detector pixels, said detector pixels in each of said detector rows being separated by said first pixel pitch distance, and said detector pixels in each of said detector columns being separated by said second pixel pitch distance; and said apertures in said radiation mask are arranged in a plurality of aperture rows, each comprising a first number of apertures, and a plurality of aperture columns, each comprising a second number of said apertures; and wherein said method further comprises at least one of the following steps: after performing said emitting and positioning steps, performing a first step of moving said detector matrix and said detector mask in relation to said object by a first distance equal to a fraction of said first pixel pitch distance in a first direction substantially parallel to said detector rows, and repeating said emitting step to enable said areas of said detection surfaces of said detector pixels to receive portions of said radiation propagating through other portions of said object and to output signals representative of said other portions; and after repeating said emitting step, performing a second step of moving said detector matrix and said detector mask in relation to said object by a second distance equal to a fraction of said second pixel pitch distance in a second direction substantially parallel to said detector rows, and repeating said emitting step to enable said areas of said detection surfaces of said detector pixels to receive portions of said radiation propagating through from further other portions of said object and to output signals representative of said further other portions.
  • 30. A method as claimed in claim 29, wherein:said second step is performed after said first step has been performed.
  • 31. A method as claimed in claim 29, wherein:said second step is performed before said first step has been performed.
  • 32. A method as claimed in claim 29, wherein:during said first step, said detector matrix and said radiation mask are moved incrementally in said first direction, and said emitting step is repeated after each incremental movement, until said detector matrix and said radiation mask have moved said first distance; and during said second step, said detector matrix and said radiation mask are moved in synchronism incrementally in said second direction, and said emitting step is repeated after each incremental movement, until said detector matrix and said radiation mask have moved said second distance.
  • 33. A method as claimed in claim 32, wherein:said first and second steps are repeated until said detector pixels have output signals representative of an entirety of said object.
  • 34. A method as claimed in claim 24, further comprising the steps of:after performing said emitting and positioning steps, moving said radiation source in relation to said object; and after performing said moving step, repeating said emitting step to enable said areas of said detection surfaces of said detector pixels to receive portions of said radiation propagating through other portions of said object and to output signals representative of said other portions.
  • 35. A method as claimed in claim 24, wherein:said radiation mask focuses said second portions of said radiation toward said detector pixels.
  • 36. A method as claimed in claim 24, wherein:said radiation mask permits said second portions of said radiation to propagate unfocused toward said detector pixels.
  • 37. An apparatus for obtaining a digital image of an object or objects being irradiated with radiation having a wavelength in the x-ray or gamma ray spectrum generated by a radiation source, or of an object or objects emitting radiation within the x-ray or gamma ray spectrum, comprising:a detector matrix, comprising a plurality of detector pixels, each detector pixel comprising a detection surface having a respective surface area and being adapted to generate a signal in response to an energy stimulus applied thereto; and at least one radiation mask having an opaque portion and a plurality of apertures therein, said radiation mask being positioned between the detector matrix and the object or objects, such that said opaque portion substantially prevents portions of said radiation from passing therethrough, and each of said apertures permits a portion of said radiation that has passed through or has been emitted from a respective portion of said object to pass therethrough and strike a portion of said detection surface of a respective one of said detector pixels, said portion being less than the entire said detection surface of said respective one said detector pixel, so that said detector pixels each output a respective signal representative of an image of said respective portion of said object having a resolution based on a size of a respective one of said apertures.
  • 38. An apparatus as claimed in claim 37, wherein:each of said apertures permits a respective said portion of said radiation that has passed therethrough to strike an area of said detection surface, less than said surface area, of a respective one of said detector pixels.
  • 39. An apparatus as claimed in claim 37, wherein:each of said apertures permits a respective said portion of said radiation that has passed therethrough to strike portions of a plurality of said detection surfaces of a respective plurality of said detector pixels.
  • 40. An apparatus as claimed in claim 37, further comprising:an imager which arranges said images of said respective portions of said object to form the digital image of said object.
  • 41. An apparatus as claimed in claim 37, further comprising:a conveying device which moves said detector matrix and radiation mask in relation to said object to enable said areas of said detection surfaces of said detector pixels to receive portions of said radiation propagating through or emitted from other portions of said object and to output signals representative of said other portions.
  • 42. An apparatus as claimed in claim 37, wherein:said detector pixels are arranged in said detector matrix in a plurality of detector rows, each row comprising a first number of said detector pixels, and a plurality of detector columns, each column comprising a second number of said detector pixels, said detector pixels in each of said detector rows being separated by a first pixel pitch distance, and said detector pixels in each of said detector columns being separated by a second pixel pitch distance; and said apertures in said radiation mask are arranged in a plurality of aperture rows, each comprising a first number of apertures, and a plurality of aperture columns, each comprising a second number of said apertures.
  • 43. An apparatus as claimed in claim 42, further comprising:a conveying device which is adapted to move said detector matrix and said detector mask in relation to said object by a first distance equal to a fraction of said first pixel pitch distance in a first direction substantially parallel to said detector rows, and which is adapted to move said detector matrix and said detector mask in relation to said object by a second distance equal to a fraction of said second pixel pitch distance in a second direction substantially parallel to said detector columns.
  • 44. An apparatus as claimed in claim 43, wherein:said conveying device moves said detector matrix and said detector mask incrementally in said first direction until said detector matrix and said detector mask have moved said first distance; and said conveying device moves said detector matrix and said detector mask incrementally in said second direction until said detector matrix and said detector mask have moved said second distance.
  • 45. An apparatus as claimed in claim 43, wherein:said conveying device moves said detector matrix and said detector mask incrementally in said first direction until said detector matrix and said detector mask have moved said first distance.
  • 46. An apparatus as claimed in claim 43, wherein:said conveying device moves said detector matrix and said detector mask incrementally in said second direction until said detector matrix and said detector mask have moved said second distance.
  • 47. An apparatus as claimed in claim 42, wherein:said first number of detector pixels equals said first number of apertures; and said second number of detector pixels equals said second number of apertures.
  • 48. An apparatus as claimed in claim 42, wherein:said first and second pixel pitch distances are equal.
  • 49. An apparatus as claimed in claim 42, wherein:said first and second pixel pitch distances are different from each other.
  • 50. An apparatus as claimed in claim 37, wherein:said detection surfaces of said detector pixels are each substantially square in shape; and said apertures are each substantially square in shape.
  • 51. An apparatus as claimed in claim 37, wherein:each of said apertures occupies an area less than said surface area of a respective one of said detector pixels.
  • 52. An apparatus as claimed in claim 37, further comprising:a plurality of said radiation masks.
  • 53. An apparatus as claimed in claim 37, wherein:said opaque portion of said radiation mask is configured to form first walls of said radiation mask extending substantially parallel to each other along a first direction and second walls of said radiation mask extending substantially parallel to each other along a second direction.
  • 54. An apparatus as claimed in claim 37, wherein:said opaque portion of said radiation mask is configured to form first walls and second walls of said radiation mask extending along first and second directions, respectively, such that at least one of said first and second walls are angled to focus to a point at a distance from said radiation mask.
  • 55. An apparatus as claimed in claim 37, wherein:said object or objects are being irradiated with radiation having a wavelength in the x-ray or gamma ray spectrum generated by a radiation source.
  • 56. An apparatus as claimed in claim 37, wherein:said object or objects are emitting radiation within the x-ray or gamma ray spectrum.
  • 57. An apparatus as claimed in claim 37, wherein:said radiation mask is disposed on top of said detector matrix.
  • 58. An apparatus as claimed in claim 37, wherein:said detection surfaces of said detector pixels are each substantially rectangular in shape; and said apertures are each substantially square in shape.
  • 59. An apparatus as claimed in claim 37, wherein:said detection surfaces of said detector pixels are each substantially square in shape; and said apertures are each substantially rectangular in shape.
  • 60. An apparatus as claimed in claim 37, wherein:at least one of said apertures includes a material therein.
  • 61. An apparatus as claimed in claim 60, wherein:said material includes one of photoresist, scintillator material or a material having a low atomic number.
  • 62. An apparatus for obtaining a digital image of an object or objects being irradiated with radiation having a wavelength in the x-ray or gamma ray spectrum generated by a radiation source, or of an object or objects emitting radiation within the x-ray or gamma ray spectrum, comprising:a detector matrix, comprising a plurality of detector pixels, each detector pixel comprising a detection surface having a respective surface area and being adapted to generate a signal in response to an energy stimulus applied thereto; and at least one radiation mask having an opaque portion and a plurality of apertures therein, said radiation mask being positioned between the detector matrix and the object or objects, or between the radiation source and the object or objects, such that said opaque portion substantially prevents portions of said radiation from passing therethrough, and each of said apertures permits a portion of said radiation that has passed through or has been emitted from a respective portion of said object to pass therethrough and strike portions of a plurality of said detection surface of a respective plurality of said detector pixels, so that said detector pixels each output a respective signal representative of an image of said respective portion of said object.
  • 63. A method for using a detector matrix comprising a plurality of detector pixels to obtain a digital image of an object or objects being irradiated with radiation having a wavelength in the x-ray or gamma ray spectrum generated by a radiation source, or of an object or objects emitting radiation within the x-ray or gamma ray spectrum, the method comprising the steps of:preventing first portions of said radiation which have passed through said object or have been emitted from said object from propagating onto any of said detector pixels; and permitting second portions of said radiation which have passed through or have been emitted from respective portions of said object to each propagate onto portions of plurality of detection surfaces of a respective plurality of said detector pixels, so that said detector pixels each output a respective signal representative of an image of said respective portion of said object.
  • 64. A method for using a detector matrix comprising a plurality of detector pixels to obtain a digital image of an object or objects being irradiated with radiation having a wavelength in the x-ray or gamma ray spectrum generated by a radiation source, or of an object or objects emitting radiation within the x-ray or gamma ray spectrum, the method comprising the steps of:preventing first portions of said radiation which have passed through said object or have been emitted from said object from propagating onto any of said detector pixels; and permitting second portions of said radiation which have passed through or have been emitted from respective portions of said object to each propagate onto at least a portion of a detection surface of at least a respective one of said detector pixels, so that said detector pixels each output a respective signal representative of an image of said respective portion of said object; wherein: said detector pixels are arranged in said detector matrix in a plurality of detector rows, each comprising a first number of said detector pixels, and a plurality of detector columns, each comprising a second number of said detector pixels, said detector pixels in each of said detector rows being separated by a first pixel pitch distance, and said detector pixels in each of said detector columns being separated by a second pixel pitch distance; and a radiation mask is disposed between said radiation source and said object, or between said object and said detector matrix, and includes apertures that are arranged in a plurality of aperture rows, each comprising a first number of apertures, and a plurality of aperture columns, each comprising a second number of said apertures; and wherein said method further comprises at least one of the following steps: after performing said preventing and permitting steps, performing a first step of moving said detector matrix and said radiation mask in synchronism in relation to said object by a first distance equal to a fraction of said first pixel pitch distance in a first direction substantially parallel to said detector rows, and repeating said preventing and permitting steps to enable said areas of said detection surfaces of said detector pixels to receive portions of said radiation propagating through or emitted from other portions of said object and to output signals representative of said other portions; and after performing said preventing and permitting steps, performing a second step of moving said detector matrix and said radiation mask in synchronism in relation to said object by a second distance equal to a fraction of said second pixel pitch distance in a second direction substantially parallel to said detector rows, and repeating said preventing and permitting steps to enable said areas of said detection surfaces of said detector pixels to receive portions of said radiation propagating through or emitted from other portions of said object and to output signals representative of said other portions.
  • 65. A method as claimed in claim 64, wherein:said second step is performed after said first step has been performed.
  • 66. A method as claimed in claim 64, wherein:said second step is performed before said first step has been performed.
  • 67. A method as claimed in claim 64, wherein:during said first step, said detector matrix and said radiation mask are moved in synchronism incrementally in said first direction, and said preventing and permitting steps are repeated after each incremental movement, until said detector matrix and said radiation mask have moved said first distance; and during said second step, said detector matrix and said radiation mask are moved in synchronism incrementally in said second direction, and said preventing and permitting steps are repeated after each incremental movement, until said detector matrix and said radiation mask have moved said second distance.
  • 68. A method as claimed in claim 67, wherein:said first and second steps are repeated until said detector pixels have output signals representative of an entirety of said object.
  • 69. A method for using a detector matrix comprising a plurality of detector pixels to obtain a digital image of an object or objects being irradiated with radiation having a wavelength in the x-ray or gamma ray spectrum generated by a radiation source, or of an object or objects emitting radiation within the x-ray or gamma ray spectrum, the method comprising:positioning at least one radiation mask having an opaque portion and a plurality of apertures therein between said object or objects and said detector matrix, so that said opaque portion of said radiation mask prevents first portions of said radiation which have passed through said object or have been emitted from said object from propagating onto any of said detector pixels, and said apertures of said radiation mask permit second portions of said radiation which have passed through or have been emitted from respective portions of said object to each propagate onto a portion of a detection surface of a respective one of said detector pixels, said portion being less than the entire said detection surface of said respective one said detector pixel, so that said detector pixels each output a respective signal representative of an image of said respective portion of said object having a resolution based on a size of a respective one of said apertures.
  • 70. A method as claimed in claim 69, wherein:said apertures permit said second portions of said radiation to each propagate onto an area of said detection surface, less than said surface area, of a respective one of said detector pixels.
  • 71. A method as claimed in claim 69, wherein:said apertures permit said second portions of said radiation to strike portions of a plurality of said detection surfaces of a respective plurality of said detector pixels.
  • 72. A method as claimed in claim 69, further comprising the step of:arranging said images of said respective portions of said object to form the digital image of said object.
  • 73. A method as claimed in claim 69, further comprising the steps of:after performing said positioning steps, moving said detector matrix and radiation mask in relation to said object; and after performing said moving step, allowing said areas of said detection surfaces of said detector pixels to receive portions of said radiation propagating through or emitted from other portions of said object and to output signals representative of said other portions.
  • 74. A method as claimed in claim 69, wherein:said detector pixels are arranged in said detector matrix in a plurality of detector rows, each comprising a first number of said detector pixels, and a plurality of detector columns, each comprising a second number of said detector pixels, said detector pixels in each of said detector rows being separated by said first pixel pitch distance, and said detector pixels in each of said detector columns being separated by said second pixel pitch distance; and said apertures in said radiation mask are arranged in a plurality of aperture rows, each comprising a first number of apertures, and a plurality of aperture columns, each comprising a second number of said apertures; and wherein said method further comprises at least one of the following steps: after performing said positioning step, performing a first step of moving said detector matrix and said detector mask in relation to said object by a first distance equal to a fraction of said first pixel pitch distance in a first direction substantially parallel to said detector rows, and allowing said areas of said detection surfaces of said detector pixels to receive portions of said radiation propagating through or emitted from other portions of said object and to output signals representative of said other portions; and performing a second step of moving said detector matrix and said detector mask in relation to said object by a second distance equal to a fraction of said second pixel pitch distance in a second direction substantially parallel to said detector rows, and repeating said positioning to enable said areas of said detection surfaces of said detector pixels to receive portions of said radiation propagating through or emitted from further other portions of said object and to output signals representative of said further other portions.
  • 75. A method as claimed in claim 74, wherein:said second step is performed after said first step has been performed.
  • 76. A method as claimed in claim 74, wherein:said second step is performed before said first step has been performed.
  • 77. A method as claimed in claim 74, wherein:during said first step, said detector matrix and said radiation mask are moved incrementally in said first direction, until said detector matrix and said radiation mask have moved said first distance; and during said second step, said detector matrix and said radiation mask are moved incrementally in said second direction, until said detector matrix and said radiation mask have moved said second distance.
  • 78. A method as claimed in claim 74, wherein:said first and second steps are repeated until said detector pixels have output signals representative of an entirety of said object.
  • 79. A method as claimed in claim 69, further comprising the steps of:after performing said positioning step, moving said radiation source in relation to said object; and after performing said moving step, allowing said areas of said detection surfaces of said detector pixels to receive portions of said radiation propagating through or emitted from other portions of said object and to output signals representative of said other portions.
  • 80. A method as claimed in claim 69, wherein:said radiation mask focuses said second portions of said radiation toward said detector pixels.
  • 81. A method as claimed in claim 69, wherein:said radiation mask permits said second portions of said radiation to propagate unfocused toward said detector pixels.
  • 82. A method as claimed in claim 69, wherein:said object or objects are being irradiated with radiation having a wavelength in the x-ray or gamma ray spectrum generated by a radiation source.
  • 83. A method as claimed in claim 69, wherein:said object or objects are emitting radiation within the x-ray or gamma ray spectrum.
  • 84. A method as claimed in claim 69, wherein:said positioning step includes placing said radiation mask on top of said detector matrix.
CROSS-REFERENCE TO RELATED APPLICATIONS

Related subject matter is disclosed in a U.S. patent application of Cha-Mei Tang entitled “A Method and Apparatus for Making Large Area Two-Dimensional Grids”, Ser. No. 08/879,258, filed on Jun. 19, 1997, issued as U.S. Pat. No. 5,949,850 on Sep. 7, 1999, the entire contents of which is expressly incorporated herein by reference.

US Referenced Citations (16)
Number Name Date Kind
4433427 Barnes Feb 1984
4688242 Ema Aug 1987
5190637 Guckel Mar 1993
5206983 Guckel et al. May 1993
5231654 Kwasnick et al. Jul 1993
5378583 Guckel et al. Jan 1995
5379336 Kramer et al. Jan 1995
5418833 Logan May 1995
5496668 Guckel et al. Mar 1996
5524041 Grenier Jun 1996
5576147 Guckel et al. Nov 1996
5606589 Pellegrino et al. Feb 1997
5625192 Oda et al. Apr 1997
5847398 Shahar et al. Dec 1998
5949850 Tang Sep 1999
5966424 Liu Oct 1999
Non-Patent Literature Citations (65)
Entry
C.M. Tang, Small Business Information Research Solicitation No. DOE/ER-0686, 21 pages (Mar. 1, 1997).*
C.M. Tang et al., “Anti-Scattering X-Ray Grid”, Microsystem Technologies, pp. 187-192 (1998).*
Larry E. Antonuk et al., “A Large-Area, 97 μm Pitch, Indirect-Detection, Active Matrix, Flat-Panel Imager (AMFPI)”, Part of the SPIE Conference of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 2-13, (Feb. 1998).*
Radiological Society of North America, 80th Scientific Assembly and Annual Meeting, Nov. 27-Dec. 2, 1994, p. 253.*
Denny L. Lee et al., “Improved Imaging Performance of a 14x17-inch Direct Radiography™ System Using Se/TFT Detector”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 14-23 (Feb. 1998).*
Robert Street et al., “Large Area X-Ray Image Sensing Using a PbI2 Photoconductor”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 24-32 (Feb. 1998).*
Tom J.C. Bruijns et al., “Technical and Clinical Results of an Experimental Flat Dynamic (Digital) X-ray Image Detector (FDXD) System with Real-Time Corrections”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 33-44, (Feb. 1998).
Christophe Chaussat et al., “New CsI/a-Si 17Δx17Δ X-Ray Flat Panel Detector Provides Superior Detectivity and Immediate Direct Digital Output for General Radiography Systems”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 45-56 (Feb. 1998).
Hans Roehrig et al., “Flat-Panel Detector, CCD Cameras and Electron Beam Tube Based Video Camera for Use in Portal Imaging”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 163-174 (Feb. 1998).
Herbert D. Zeman et al., “Portal Imaging with a CsI(TI) Transparent Scintillator X-Ray Detector”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 175-186 (Feb. 1998).
Jean-Pierre Moy, “Image Quality of Scintillator Based X-ray Electronic Imagers”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 187-194 (Feb. 1998).
G. Pang et al., “Electronic Portal Imaging Device (EPID) Based on a Novel Camera with Avalanche Multiplication”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 195-203 (Feb. 1998).
Michael P. André et al., “An Integrated CMOS-Selenium X-Ray Detector for Digital Mammography”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 204-209 (Feb. 1998).
Nicholas Petrick et al., “A Technique to Improve the Effective Fill Factor of Digital Mammographic Imagers”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 210-217 (Feb. 1998).
Richard E. Colbeth et al., “Flat Panel Imaging System for Fluoroscopy Applications”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 376-387 (Feb. 1998).
Akira Tsukamoto et al., “Development of a Selenium-Based Flat-Panel Detector for Real-Time Radiography and Fluorscopy”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 388-395 (Feb. 1998).
N. Jung et al., “Dynamic X-Ray Imaging System Based on an Amorphous Silicon Thin-Film Array”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 396-407 (Feb. 1998).
Dylan C. Hunt et al., “Detective Quantum Efficiency of Direct, Flat Panel X-ray Imaging Detectors for Fluoroscopy”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 408-417 (Feb. 1998).
Cornelis H. Slump et al., “Real-Time Diagnostic Imaging with a Novel X-ray Detector with Multiple Screen—CCD Sensors”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 418-429 (Feb. 1998).
Edmund L. Baker et al., “A physical Image Quality Evaluation of a CCD-Based X-ray Image Intensifier Digital Fluorography System for Cardiac Applications”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 430-441 (Feb. 1998).
Richard L. Weisfield et al., “New Amorphous-Silicon Image Sensor for X-Ray Diagnostic Medical Imaging Applications”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 444-452 (Feb. 1998).
Toshio Kameshima et al., “Novel Large Area MIS-Type X-Ray Image Sensor for Digital Radiography”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 453-462 (Feb. 1998).
Gary S. Shaber et al., “Clinical Evaluation of a Full Field Digital Projection Radiography Detector”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 463-469 (Feb. 1998).
Donald R. Ouimette et al., “A New Large Area X-Ray Image Sensor”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, SPIE vol. 3336, pp. 470-476 (Feb. 1998).
David P. Trauernicht and John Yorkston, “Screen Design for Flat-Panel Imagers in Diagnostic Radiology”, Part of the SPIE Conference on Physics of Medical Imaging, San Diego, CA, pp. 477-485 (Feb. 1998).
John Rowlands and Safa Kasap, “Amorphous Semiconductors Usher in Digital X-Ray Imaging”, Physics Today, pp. 24-30 (Nov. 1997).
N.M. Allinson, “Development of Non-Intensified Charge-Coupled Device Area X-Ray Detectors”, Journal of Synchrotron Radiation, pp. 54-62 (1994).
I.M. Blevis et al., “Digital Radiology Using Amorphous Selenium and Active Matrix Flat Panel Readout: Photoconductive Gain and Gain Fluctuations”, Medical Imaging Research, Sunnybrook Science Center, University of Toronto, 8 pages.
Justin M. Henry et al., “Noise in Hybrid Photodiode Array—CCD X-Ray Image Detectors for Digital Mammography”, SPIE vol. 2708, pp. 106-115 (Feb. 1998).
“DpiX Digital X-Rays for Diagnosis and Treatment”, The Clock, pp. 3, 5 and 19-21 (Dec. '97/Jan '98).
Russell C. Hardie et al., “Joint MAP Registration and High-Resolution Image Estimation Using a Sequence of Undersampled Images”, IFEE Transactions on Image Processing, vol. 6 No. 12, pp. 1621-1632 (Dec. 1997).
Joseph C. Gillette et al., “Aliasing Reduction in Staring Infrared Imagers Utilizing Subpixel Techniques”, Optical Engineering, vol. 34, No. 11, pp. 3130-3137 (Nov. 1995).
Russell C. Hardie et al., “High-Resolution Image Reconstruction from a Sequence of Rotated and Translated Frames and its Application to an Infrared Imaging System”, Optical Engineering, vol. 37, No. 1, pp. 247-260, (Jan. 1998).
Kai M. Hock, “Effect of Oversampling in Pixel Arrays”, Optical Engineering, vol. 34, No. 5, pp. 1281-1288 (May 1995).
Kenneth J. Barnard et al. “Effects of Image Noise on Submicroscan Interpolation”, Optical Engineering, vol. 34, No. 11, pp. 3165-3173 (Nov. 1995).
Kenneth J. Barnard et al., “Nonmechanical Microscanning Using Optical Space-Fed Phased Arrays”, Optical Engineering, vol. 33, No. 9, pp. 3063-3071 (Sep. 1994).
Gerald C. Holst, Sampling, Aliasing, and Data Fidelity, pp. 98-130 (published prior to Feb. 18, 1999).
Larry E. Antonuk et al., “Demonstration of Megavoltage and Diagnostic X-Ray Imaging with Hydrogenated Amorphous Silicon Arrays”, Am. Assoc. Phys. Med., vol. 19, No. 6, pp. 1455-1466 (Nov./Dec. 1992).
E.W. Becker et al., “Fabrication of Microstructures with high aspect ratios and great structural heights by syncrotron Radiation Lithography, Galvanoforming, and Plastic Molding (LIGA Process),” Microelectronics Engineering, vol. 4 pp. 35-56 (1986).
Dr. P. Bley, “The Liga Process for Fabrication of Three-Dimensional Microscale Structures,” Interdisciplinary Sci. Rev., vol. 18, pp. 267-272 (1993).
“DARPA Awards Contract for X-Ray Lithography System”, Micromachine Devices, vol. 2, No. 3, p. 2 (1997).
R.L. Egan, “Intramammary Calcifications Without an Associated Mass in Benign and Malignant Diseases”, Radiology, vol. 137, pp. 1-7 (1980).
H. Guckel, program and notes describing his “Invited talk at the American Vacuum Society Symposium”, Philadelphia, PA, Oct. 1996.
“IBM Team Develops Ultrathick Negative Resist for MEMs Users”, Micromachine Devices, vol. 2, No. 3, p. 1 (1997).
“X-Ray Lithography Scanners for LIGA”, Micromachine Devices, vol. 1, No. 2, p. 8 (1996).
E.P. Muntz et al., “On the Significance of Very Small Angle Scattered Radiation to Radiographic Imaging at Low Energies”, Med. Phys. vol. 10, pp. 819-823 (1983).
M.J. Yaffe et al., “X-Ray Detectors for Digital Radiography”, Phys. Med. Biol., vol. 42, pp. 1-39 (1997).
D.P. Siddons et al., “Precision Machining using Hard X-Rays”, Syncrotron Radiation News, vol. 7, No. 2, pp. 16-18 (1994).
Computer printout of University of Wisconsin Web Site “http://mems.engr.wisc.edu/liga.html”, entitled “UW-MEMS-Research-Deep X-ray Lithograpy and Electroplating” (web site information available to public prior to Jun. 19, 1987 filing date of present application).
Computer printout of University of Wisconsin Web Site “http://mems.engr.wisc.edu/pc.html” entitled “UW-MEMS-Research-Precision Engineering” (web site information available to public prior to Jun. 19, 1987 filing date of present application).
Computer printout of University of Wisconsin Web Site “http://mems.engr.wisc.edu/ ˜guckel/homepage.html” (web site information available to public prior to Jun. 19, 1987 filing date of present application).
H. Guckel, “NATO Advanced Research Workshop on the Ultimate Limits of Fabrication and Measurement”, Proceedings of the Royal Society (Invited Talk/Paper), pp. 1-15 (Apr. 1994).
H. Guckel et al., “Micromechanics via x-ray assisted processing”, Journal of Vacuum Science Technology, pp. 2559-2564 (Jul./Aug. 1994).
W. Ehrfeld, “Coming to Terms with the Past and the Future”, LIGA News, pp. 1-3 (Jan. 1995).
H. Guckel et al., “Micro Electromagnetic Actuators Based on Deep X-Ray Lithography”, MIMR '95, Sendai, Japan, (Sep. 27-29, 1995).
H. Guckel et al., “Micromechanics for actuators via deep x-ray lithography”, Proceedings of SPIE, Orlando, Florida, pp. 39-47 (Apr. 1994).
Z. Jing et al., “Imaging characteristics of plastic scintillating fiber screens for mammography”, SPIE, vol. 2708, pp. 633-644 (Feb. 1996).
N. Nakamori et al., “Computer simulation on scatter removing characteristics by grid”, SPIE vol. 2708, pp. 617-625 (Feb. 1996).
P. A. Tompkins et al., “Use of capillary optics as a beam intensifier for a Compton x-ray source”, Medical Physics, vol. 21, No. 11, pp. 1777-1784 (Nov. 1994).
R. Fahrig et al., “Performance of Glass Fiber Antiscatter Devices at Mammographic Energies”, Am. Assoc. Phys. Med., vol. 21, No. 8, pp. 1277-1282 (Aug. 1994).
L.E. Antonuk et al., “Large Area, Flat-Panel, Amorphous Silicon Imagers”, SPIE vol. 2432, pp. 216-227 (Jul. 1995).
H.E. Johns, OC, Ph.D., F.R.S.C., LL.D., D.Sc., F.C.C.P.M., The Physics of Radiology, Fourth Edition (Charles C. Thomas: Springfield, Illinois, 1983), p. 734.
Collimated Holes, Inc. Products Manual, pages entitled “Rectangular and Square Fibers/Fiber Arrays” (Apr. 1995) and “Scintillating Fiberoptic Faceplate Price List Type LKH-6” (Dec. 1995).
H. Guckel et al., “LIGA and LIGA-Like Processing with High Energy Photons”, Microsystems Technologies, vol. 2, No. 3, pp. 153-156 (Aug. 1996).
H. Guckel et al., “Deep X-Ray Lithography for Micromechanics and Precision Engineering”, Synchrotron Radiation Instrumentation (Invited), Advanced Photon Source Argonne, pp. 1-8 (Oct. 1995).