Claims
- 1. An apparatus for treatment of NF.sub.3 gas comprising:
- a pipeline for introducing a NF.sub.3 -containing waste gas,
- a reactor unit having an axis and communicating with one end of said pipeline,
- carbon means for reacting with gaseous NF.sub.3 at a temperature of 300.degree. to 600.degree. C. to form CF.sub.4 and N.sub.2 gases, said carbon means for reacting comprising a honeycomb structure of carbon having a multiplicity of through openings as displaceably installed in said reactor unit with said through openings respectively oriented in the axial direction of said reactor unit, and
- a processed gas exhaust pipeline, said reactor unit being constructed so as to be opened and closed for mounting and dismounting of said honeycomb structure,
- wherein said honeycomb structure is tapered such that said through openings have decreasing diameters in the direction of flow of the NF.sub.3 gas.
- 2. An apparatus for treatment of NF.sub.3 gas according to claim 1, further comprising means for heating said reactor unit to 300.degree.-600.degree. Celsius.
- 3. An apparatus for treatment of NF.sub.3 gas according to claim 1, wherein said honeycomb structure of carbon comprises openings having diameters of 0.1-15 mm.
- 4. An apparatus for treatment of NF.sub.3 gas comprising:
- a pipeline for introducing a NF.sub.3 -containing waste gas;
- a reactor unit having an axis and communicating with one end of said pipeline;
- a honeycomb structure of carbon having a multiplicity of through openings as displaceably installed in said reactor unit with said through openings respectively oriented in the axial direction of said reactor unit; and
- a processed gas exhaust pipeline, said reactor unit having a circumferential side wall defining said axis and a door in the circumferential side wall of the reactor for opening and closing so as to allow the replacement of said honeycomb structure;
- wherein said honeycomb structure is tapered such that said through openings have decreasing diameters in the direction of flow of the NF.sub.3 gas.
- 5. An apparatus for treatment of NF.sub.3 gas comprising:
- a pipeline for introducing a NF.sub.3 -containing waste gas,
- a reactor unit having an axis and communicating with one end of said pipeline,
- carbon means for reacting with gaseous NF.sub.3 at a temperature of 300.degree. to 600.degree. C. to form CF.sub.4 and N.sub.2 gases, said carbon means for reacting comprising a honeycomb structure of carbon having a multiplicity of through openings as displaceably installed in said reactor unit with said through openings respectively oriented in the axial direction of said reactor unit, and
- a processed gas exhaust pipeline, said reactor unit being constructed so as to be opened and closed for mounting and dismounting of said honeycomb structure,
- wherein said honeycomb structure is constructed such that said through openings each have first and second portions, wherein each said first portion has a diameter which is greater than and is disposed upstream from a respective said second portion, and a restricted portion is disposed between each said first and second portions.
- 6. An apparatus for treatment of NF.sub.3 -gas according to claim 5, further comprising means for heating said reactor unit to 300.degree.-600.degree. Celsius.
- 7. An apparatus for treatment of NF.sub.3 gas according to claim 5, wherein said honeycomb structure of carbon comprises openings having diameters of 0.1-15 mm.
- 8. An apparatus for treatment of NF.sub.3 gas comprising:
- a pipeline for introducing a NF.sub.3 -containing waste gas;
- a reactor unit having an axis and communicating with one end of said pipeline;
- a honeycomb structure of carbon having a multiplicity of through openings as displaceably installed in said reactor unit with said through openings respectively oriented in the axial direction of said reactor unit; and
- a processed gas exhaust pipeline, said reactor unit having a circumferential side wall defining said axis and a door in the circumferential side wall of the reactor for opening and closing so as to allow the replacement of said honeycomb structure;
- wherein said honeycomb structure is constructed such that said through openings each have first and second portions, wherein each said first portion has a diameter which is greater than and is disposed upstream from a respective said second portion, and a restricted portion is disposed between each said first and second portions.
- 9. An apparatus for treatment of NF.sub.3 gas according to claim 8, further comprising means for heating said reactor unit to 300.degree.-600.degree. Celsius.
- 10. An apparatus for treatment of NF.sub.3 gas according to claim 8, wherein said honeycomb structure of carbon comprises openings having diameters of 0.1-15 mm.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2-182183 |
Jul 1990 |
JPX |
|
Parent Case Info
This application is a Rule 62 continuation of application Ser. No. 07/939,733, filed Sep. 2, 1992, now abandoned, which is a division of Ser. No. 07/827,538, filed Jan. 30, 1992, now U.S. Pat. No. 5,176,889, which is a continuation of application Ser. No. 07/593,721, filed Oct. 4, 1990, now abandoned.
US Referenced Citations (16)
Foreign Referenced Citations (4)
Number |
Date |
Country |
2573324 |
May 1986 |
FRX |
61-287424 |
Dec 1986 |
JPX |
62-237929 |
Oct 1987 |
JPX |
63-151608 |
Jun 1988 |
JPX |
Divisions (1)
|
Number |
Date |
Country |
Parent |
827538 |
Jan 1992 |
|
Continuations (2)
|
Number |
Date |
Country |
Parent |
939733 |
Sep 1992 |
|
Parent |
593721 |
Oct 1990 |
|