Claims
- 1. A method for converting gaseous NF.sub.3 into CF.sub.4 and N.sub.2 gases, comprising passing a NF.sub.3 containing gas through a multiplicity of openings in a honeycomb structure of carbon at a temperature of about 300.degree. C. to about 600.degree. C., whereby said NF.sub.3 containing gas reacts with walls of carbon defining said openings.
- 2. The method for treating NF.sub.3 gas as claimed in claim 1 wherein said openings have a diameter of 0.1 to 15 mm.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2-182183 |
Jul 1990 |
JPX |
|
Parent Case Info
This application is a continuation of application Ser. No. 07/593,721 filed Oct. 4, 1990, now abandoned.
US Referenced Citations (9)
Foreign Referenced Citations (4)
Number |
Date |
Country |
2573324 |
May 1986 |
FRX |
61-287424 |
Dec 1986 |
JPX |
62-237929 |
Oct 1987 |
JPX |
63-151608 |
Jun 1988 |
JPX |
Continuations (1)
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Number |
Date |
Country |
Parent |
593721 |
Oct 1990 |
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