| Number | Name | Date | Kind |
|---|---|---|---|
| 3437785 | Sciaky | Apr 1969 | |
| 3623129 | Miles | Nov 1971 | |
| 4263496 | Medlar | Apr 1981 | |
| 4461947 | Ward | Jul 1984 |
| Number | Date | Country |
|---|---|---|
| 0053384 | Mar 1983 | JPX |
| 0047086 | Mar 1984 | JPX |
| Entry |
|---|
| H. R. Heidary, et al, Optics and Laser Technology, "Microprocessor-Controlled Laser Scanning System for Annealing of Semiconductors", vol. 13, No. 5, pp. 265-269, Oct. 1981. |