1. Field of the Invention
The present invention is directed to the field of 3D surface metrology; in particular, scanning microscopes, and more particularly, to an apparatus which collects, analyzes, and displays the multi-dimensional surface characteristic data collected by the scanning microscopes.
2. Description of Related Art
Scanning probe microscopes such as scanning probe microscopes (SPMs), atomic force microscopes (AFMs), interferometric optical profilers, confocal microscopes, and the like are devices which typically collect multi-dimensional surface data to characterize the observed sample's surface down to sub-micrometer and atomic dimensions. Generally, the data is collected in some type of path such as a raster scan or other trajectory which locates the surface in three dimensions and returns information about the surface characteristics. By providing relative scanning movement between the sensor (the device that gathers the surface data, such as an interferometric sensor, contact probe, or confocal instrument) and the sample, surface characteristic data can be acquired over a particular region of the sample, and a corresponding multi-dimensional map of the sample's surface characteristics can be generated.
Scanning probe microscopes can obtain resolution down to the atomic level on a wide variety of insulating or conductive surfaces in air, liquid or vacuum by using piezoelectric scanners, optical lever deflection detectors, optical point illumination, and so forth. Because of their resolution and versatility these microscopes are very important measurement devices in many diverse fields ranging from semiconductor manufacturing to biological research.
Advanced 3D surface metrology systems often present a challenge to user interface design because of the inherent clash between the desire to provide an easy, intuitive interface and the need to make accessible all the available controls and myriad of functions associated with such systems, which are required to maximize the capabilities of these powerful instruments. Of course, with the latter being generally more important than the former. There has been a complimentary need for expert users, otherwise the full power of these tools cannot be utilized. Notably, this has somewhat limited the broad acceptance of some metrology tools.
Managing such complexity must take into account not only the various modes of operation for the instrument but also the different types of operators that use it. Various methods exist to deal with this issue such as wizards, dialogs, custom interfaces, and context sensitive help among others. However, this often results in too many interface windows and dialogs that require cumbersome navigation on the part of the user; or in the case of custom interfaces, reduce functionality or significant engineering effort to customize the interface for various applications and/or users.
What was needed then is an easy to learn and an intuitive interface that allows for quick completion of user tasks while avoiding the problems of user confusion, error, slow user response times, more difficult and timely learning curves, and so forth.
The present invention is an apparatus and method for collection and analysis of microscopic surface data that provides a graphical user interface (GUI) layout designed for advanced metrology instrumentation for 3D surface data where the instrument control functions and data analysis functions coexist and share the same display real estate in an intelligent fashion to make the full system functionality available to the user in a more intuitive fashion and with significantly less work.
The invention here is an intelligent user software interface layout that seeks to expose as much functionality at the top level for easy access with very few clicks and without the clutter of multiple overlapping windows competing for the display real estate. The paradigm for this interface is similar to a cockpit found on other complex instruments that emphasizes usability. The screen is divided into specific areas that are locked in place relative to each other. Moreover, these areas can be reused, depending on the mode the system is in, i.e. measurement, analyses, online help, support, web browsing, etc. With this design, the users can predictably and efficiently find the function or control they are looking for with fewer clicks than in more traditional document-view model type interfaces.
In accordance of one aspect of the invention the user interface provides no overlapping windows and minimal dialog boxes for a substantial number of the invention's operating modes. The surface analyzer may have a sensor (providing a surface measurement data from an object), a display, a user input device, processing elements (for processing the surface measurement data), and a user interface display region having visual regions within. The major visual regions of the display are a data visualization window, a measurement control panel, a data analyzer window, and an active data gallery. Importantly, the visual regions are simultaneously displayed in a persistent location and size relative to the user interface display region.
Thus it is one advantage of the invention to offer a fixed user interface similar to that of hardware displays such as in a cockpit, which are immutable due to their physical hardware, and thus easier to memorize and access.
In accordance with yet another aspect of the invention, the data analyzer window has processing elements for processing the surface measurement data which can be applied to using the user input device (such as a mouse or touch screen) to select and apply the processing element(s) in a single user input device operation. The invention also provides a data visualization window with various display modes for representation of the surface measurement data and characteristics. The display mode may be easily selected by the user input device in a single user input device operation.
Thus, it is another advantage of the invention to offer a quick and easy device for processing the surface data and selecting how to display the results.
In yet another aspect of the invention the surface analyzer may have a control panel providing control elements that allow selection of measurement type, measurement area, a measurement multiplier, measurement magnification, and measurement illumination, wherein each and every control element setting may be selected by the user input device in a single user input device operation.
Thus, it is yet another advantage of the invention to offer a quick and easy device for controlling the measurement of the surface data.
According to one another aspect of the invention, the active data gallery provides one or more selections for previously collected surface measurement data, wherein each and every previously collected surface measurement may be selected by the user input device in a single user input device operation. Thus, it is yet another advantage of the invention to offer a quick and easy device for organizing and recalling the previously collected and/or analyzed surface data.
According to one aspect of the invention, a method of operating a surface analyzer is used to measure the surface of a sample by 1) setting up the surface analyzer to measure the sample; 2) operating the surface analyzer to collect the surface data; 3) applying one or more processing elements (i.e. processing sequence) to the surface data so as to produce processed surface data; 4) viewing representations of the surface data or the processed surface data on a display; and 5) saving the processing sequence, the surface data, and/or the processed surface data. The processed surface data may provide surface information such as surface location, indentations, adhesion, hardness, and elasticity. In addition, the processing sequence may be previously defined in a user saved processing sequence or a default processing sequence.
Thus, it is one advantage of the invention to provide a simple method for collecting, analyzing, and saving surface data as well as saving the processing sequence(s) for ease of use.
According to another aspect of the invention, more than one representation of the surface data that has been processed by a plurality of processing sequences may be displayed. A selector may be used for displaying the representations of the surface data or the processed surface data on the display simultaneously.
It is, thus, another advantage of the invention to provide for side-by-side or simultaneous viewing and analysis of processed surface data sets using differing processing sequences and the same or differing surface data as inputs.
In another aspect of the invention the representation of the processed surface data may be a measurement, a parameter, a plot, and a surface rendering of the sample. Thus, providing the advantage of multiple forms to view the analyzed data.
In yet another aspect of the invention, one or more processing elements may be used to transform one or more sets of the surface data or processed surface data using, for example, a real-time filter, a post-processing filter, a data combining operation, a data masking operation, a frequency transform, an inversion, a subtraction, an estimator, and so forth. In addition, more sophisticated processing elements which analyze the data may be used which transform one or more sets of the surface data or processed surface data to produce an analysis of said data (for example: height histograms, filtered height histograms, multiple-regions statistical analysis, power spectral density, cross hatch analysis, mean surface roughness, root mean square surface roughness, root mean square surface slope, mean summit curvature, summit density, surface texture aspect ratio, feature statistics analysis, surface texture skewness, surface texture kurtosis, average distance between highest and lowest points, step height, digitally filtered stylus analysis, hypothetical Zernike wavefront analysis, material volume estimate, void volume estimate, and so forth).
Thus, it is one advantage to provide a toolbox of various processing elements to yield sophisticated and powerful results with minimal user interaction.
In yet another aspect of the invention the surface analyzer has a sensor (providing a surface measurement data from a sample), processing elements for processing the surface measurement data, and a user interface with a display screen and a user input device such as a mouse. The processing elements may be selected individually or as a group, ordered by the user into a processing sequence, and applied to the surface measurement data to produce processed surface data wherein a representation of the processed surface data may be is displayed. The sensor may be an interferometric sensor, a contact probe, a confocal instrument, and the like. The surface analyzer may also include a controller for positioning the sensor, measurement setup, real-time measurement interaction, and a surface data collection.
Thus, it is another advantage of the present invention to provide an entire sensor to analysis and display solution wherein the user may control, analyze and view the surface data within a single device/application.
These and other features and advantages of the invention will become apparent to those skilled in the art from the following detailed description and the accompanying drawings. It should be understood, however, that the detailed description and specific examples, while indicating preferred embodiments of the present invention, are given by way of illustration and not of limitation. Many changes and modifications may be made within the scope of the present invention without departing from the spirit thereof, and the invention includes all such modifications.
Preferred exemplary embodiments of the invention are illustrated in the accompanying drawings in which like reference numerals represent like parts throughout, and in which:
In describing the preferred embodiment of the invention which is illustrated in the drawings, specific terminology will be resorted to for the sake of clarity. However, it is not intended that the invention be limited to the specific terms so selected and it is to be understood that each specific term includes all technical equivalents which operate in a similar manner to accomplish a similar purpose. For example, the word connected, attached, or terms similar thereto are often used. They are not limited to direct connection but include connection through other elements where such connection is recognized as being equivalent by those skilled in the art.
The preferred embodiments are directed to surface analyzers, such as a scanning microscope, an apparatus which collects, analyzes, and displays the multi-dimensional surface characteristic data from the scanning microscope sensor while providing an efficient full-featured user interface for defining and implementing data collection from a sample, as well as post-collection analyses that may have multiple analysis processes applied for side-by-side comparisons. Moreover, because all user interface control and display areas are simultaneously displayed, the control of the device and the display of data, contrary to prior art systems, is intuitive, fast to learn, and easy to use.
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In alternative embodiments the sensor may be a probe for an atomic force microscope (AFM), one or more light emitters/optical sensors such as for an interferometric optical profiler, a confocal microscope, and the like.
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The data collected by the probe 6 is transmitted to the main workstation 12 along some communications channel such as a wired connection 14 (in alternative embodiments the sensor data may be transmitted wirelessly). The user (not shown) interacts with the present invention with main workstation 12 by utilizing monitor 16 for controlling the collection of surface data and viewing a variety of information about sample 2 in display area 18 as will be explained below. In addition, the workstation 12 may have a main processing unit shown as stand-alone enclosure 23 or it may be integrated into the display (not shown). The user also utilizes input devices such as mouse 20 and keyboard 22 for various operations. Other preferred embodiments, however, may utilize one or more of a variety of input devices such as track pad, track ball, touch screen, and the like.
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In addition to independently displayed tab-selected views, the invention allows for split view of these displays when needed. So, for example, it is possible to display the Live Video and Data Visualization windows simultaneously as tiled (side-by-side) non-overlapping windows (not shown).
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As well, the Main Display window 25 may be divided by the user into selected regions to create a custom plot layout. For example, when the user is in custom plot layout mode she may select to divide the Main display window 24 into two regions (an upper and a lower region) by selecting to add a horizontal division. The user may select one of these regions, for example the upper region, and further divide it into two subregions (a left region and a right region) by selecting the addition of a vertical division. This custom plot layout tool allows successive horizontal or vertical splitting of the display window 25 into a custom plot layout. Each region or subregion can be assigned unique characteristics, such as a plot type, parameters, tables, metadata, and the like that can be saved to create the custom plot layout template which may be recalled later and populated with surface data and other information, including analysis of the same.
In another embodiment according to the present invention, the user may draw a path in the 2-D plot 46 between two points to select one or more unique profile plots such as 56, 58, however, with the profile shown according to the user selected path rather than in, for example, the X or Y direction (not shown). This allows for any path selected by the user in the 2-D plot 46 to show an accompanying cross-section plot that may be updated in real-time as the user draws the path.
The user may also display at least two plots within the Main Display window 24, which may show different representations derived from the same surface data. The two plots may be linked such that as the user selects a region for viewing in the first plot, the second plot is accordingly shifted to show the same selected portion in the second plot as in the first plot in real-time.
In another embodiment the user may select a template (i.e., a region of a plot) for matching in a template matching mode. The region selected by the user is then matched over some set of surface data (such as the current plot from which the user has defined or selected her template). This matching or correlation process finds and indicates one or more regions similar to the user selected template. The template region may also be reselected for tuning. As well, the user can select any matched region for inspection in a larger plot with a single input operation allowing her to quickly inspect all of the similar matched regions located.
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The processing sequence extracts key information such as various parameters of interest from the processed surface data, for example mems-3.opd 96. The Data Analyzer 30 is a major region and is, therefore, persistently displayed. The right pane known as the Analysis toolbox 98 consists of a list of selectable filters 100 and analyses 102 and displays a comprehensive list of filters and analyses. For example, the user selects a processing element such as Gaussian Regression filter 104. The filter may be applied to the active surface data set in the left pane 106 such as to the surface height raw data 108. Alternatively, the filter could be applied in real-time as the surface data is collected. The results of the application of the processing elements (i.e. the filters and analyses in the Data Analyzer 30) yields a representation of the surface data or processed surface data shown in the Main Display window 25 (see
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Thus the user can easily process surface data with all the required elements simultaneously available on the “top level” of the GUI. In other words, the GUI elements for the selection and ordering of processing elements (used to create user-defined processing sequences) are persistently visible with none of the major functional elements hidden. This type of “direct access” to the functions including processing elements provides a significant advantage over prior analysis tools. Rather than multiple stacked windows, each window/function/tree has a piece of real estate on the primary screen which can be characterized as having intelligent sectioning allowing the user to access functions and see results all at the same time. Furthermore, the user-defined processing sequences can be applied in parallel with two processing elements getting their inputs either from the same surface data, processed surface data, or output of a preceding processing element, as discussed elsewhere herein. In doing so, the processing or functional elements can be executed substantially simultaneously to efficiently output results, including plots, that a user may want to see side-by-side.
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In addition, there are many other combinations of processing steps such as masking the sample before collection or the data after collection using a pre-defined or user-defined mask in the Analysis Toolbox 98, selecting any of a variety of plots for displaying the processed data using the Data Visualization Taskbar 26, and so forth.
It should be clear that there are virtually innumerable uses for the present invention, all of which need not be detailed here. All the disclosed embodiments can be practiced without undue experimentation.
Although the best mode contemplated by the inventors of carrying out the present invention is disclosed above, practice of the present invention is not limited thereto. For example, it will be manifest that various additions, modifications and rearrangements of the features of the present invention may be made without deviating from the spirit and scope of the underlying inventive concept. In addition, the individual components need not be fabricated from the disclosed materials, but could be fabricated from virtually any suitable materials. Moreover, the individual components need not be formed in the disclosed shapes, or assembled in the disclosed configuration, but could be provided in virtually any shape, and assembled in virtually any configuration. Further, although many elements and components are described herein as physically separate modules, it will be manifest that they may be integrated into the apparatus with which it is associated. Furthermore, all the disclosed features of each disclosed embodiment can be combined with, or substituted for, the disclosed features of every other disclosed embodiment except where such features are mutually exclusive.
Various alternatives are contemplated as being within the scope of the following claims particularly pointing out and distinctly claiming the subject matter regarded as the invention.
Number | Date | Country | |
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61476176 | Apr 2011 | US |