Number | Name | Date | Kind |
---|---|---|---|
3964482 | Gerstel et al. | Jun 1976 | A |
4538612 | Patrick, Jr. | Sep 1985 | A |
5003987 | Grinwald | Apr 1991 | A |
5091379 | Aungst | Feb 1992 | A |
5120542 | Scher et al. | Jun 1992 | A |
5250023 | Lee et al. | Oct 1993 | A |
5273528 | Skeen et al. | Dec 1993 | A |
5383848 | Hillman et al. | Jan 1995 | A |
5501784 | Lessmollmann et al. | Mar 1996 | A |
5611806 | Jang | Mar 1997 | A |
5660680 | Keller | Aug 1997 | A |
5679647 | Carson et al. | Oct 1997 | A |
5685515 | Lee et al. | Nov 1997 | A |
5848991 | Gross et al. | Dec 1998 | A |
5855801 | Lin et al. | Jan 1999 | A |
5873850 | Flower et al. | Feb 1999 | A |
5879326 | Godshall et al. | Mar 1999 | A |
5882677 | Kupperblatt | Mar 1999 | A |
5885211 | Eppstein et al. | Mar 1999 | A |
5895369 | Flower | Apr 1999 | A |
5899876 | Flower | May 1999 | A |
5910306 | Alving et al. | Jun 1999 | A |
5919364 | Lebouitz et al. | Jul 1999 | A |
5928207 | Pisano et al. | Jul 1999 | A |
5931794 | Pitesky | Aug 1999 | A |
5958589 | Glenn et al. | Sep 1999 | A |
5970998 | Talbot et al. | Oct 1999 | A |
5980898 | Glenn et al. | Nov 1999 | A |
6015599 | Keller et al. | Jan 2000 | A |
6050988 | Zuck | Apr 2000 | A |
6065864 | Evans et al. | May 2000 | A |
6106751 | Talbot et al. | Aug 2000 | A |
6132755 | Eicher et al. | Oct 2000 | A |
6173202 | Eppstein | Jan 2001 | B1 |
6183434 | Eppstein | Feb 2001 | B1 |
6187210 | Lebouitz et al. | Feb 2001 | B1 |
6211243 | Johnson | Apr 2001 | B1 |
6230051 | Cormier et al. | May 2001 | B1 |
6231540 | Smedegaard | May 2001 | B1 |
6256533 | Yuzhakov et al. | Jul 2001 | B1 |
6312612 | Sherman et al. | Nov 2001 | B1 |
6334856 | Allen et al. | Jan 2002 | B1 |
Number | Date | Country |
---|---|---|
0 381 410 | Aug 1990 | EP |
0 509 122 | Oct 1996 | EP |
1 092 444 | Apr 2001 | EP |
172 4181 | Apr 1992 | RU |
WO9703718 | Jul 1995 | WO |
WO 9607369 | Mar 1996 | WO |
WO9637256 | May 1996 | WO |
WO9711650 | Sep 1996 | WO |
WO 9748440 | Dec 1997 | WO |
WO 9748442 | Dec 1997 | WO |
WO 9800193 | Jan 1998 | WO |
WO 9900155 | Jan 1999 | WO |
WO 9943350 | Sep 1999 | WO |
Entry |
---|
Dizon, et al., An Ion Milling Pattern Transfer Technique for Fabrication of Three-Dimensional Micromechanical Structures, Journal of Microelectro Mechanical Systems, vol. 2, No. 4, pp. 151-159 Dec. 1993. |