The invention relates to the design of an interferometric laser and a method for analyzing gas with this, preferably methane, ethane, propane, butane, pentane, hexane, heptane, ethylene, dichloromethane, isooctane, benzene, xylenes, hydrazine, formaldehyde, N2O, NO2, CO2, CO, HF, O3, HI, NH3, SO, HBr, H2S, HCN, preferably a tunable interferometric laser which can sweep (scan) a spectrum, according to the preamble of claim 1.
The laser includes a new type optical ridge waveguide with sloping sides, and is formed by wet etching of the upper cladding. This new type ridge waveguide provides a single mode light guiding with a broader ridge width than conventional ridge guides.
A ψ-junction semiconductor laser consists of one or more ψ-junctions that are etched into the upper cladding of the device. The ψ-junction is a new junction design that makes it possible to make optical junctions made by wet etching. The ψ-junction(s) are connected to two or more optical ridge waveguides in the device. The optical waveguides are embedded in an optical cavity, in which light is reflected back and forth to achieve lasing.
The end surfaces of the optical waveguides and/or junctions can be coated to reduce or increase the reflection.
With two or more optical waveguides, the device can be tuned to different wavelengths by individually changing the injection current into the different optical waveguides. The region which the wavelength can be tuned within is dependent on the layer thickness, material composition and strain in the layers.
An optical junction modulator consists of two optical waveguides that are connected at two junctions with the new ψ-junction design. Before splitting and after coupling of the light in the junction, a single waveguide will start and end the device. The waveguide or junction ends can be coated to achieve lower or higher reflection, in or out of the device.
Other devices can be optical waveguide(s), an optical coupler/decoupler, and an Arrayed Waveguide Grating or similar. These devices can be passive or active devices, with or without an active region. For both active and passive devices, metal contacts can be used to heat parts of or entire devices to trim parameters as refraction index, mechanical stress and alike, that affects the optical performance of the device. For active devices, the device will have optical gain in parts of or the entire device by electrical injection into the area and/or layers.
Measuring of gas with light is performed by using wavelengths having absorption of a given gas. This is presently usually done with an Infrared lamp (ref) or DFB/DBR lasers (ref), where the first technique is based on filtering of the light to achieve the desired wavelength, while the second is based on a laser with a grating to achieve the desired wavelength. These are methods which have been used in different products (ref) and which preferably are suitable for cheaper and more expensive gas measurement systems, respectively. An Infrared lamp has large power consumption, while a DFB/DBR laser needs more accuracy and more expensive temperature control to work. Temperature control also increases the power consumption, as one usually uses thermoelectric cooling to set the temperature.
In an attempt to combine the low costs of IR lamps with the accuracy of a laser based measurement, and at the same time have a power consumption which will make it possible to have a handheld/portable device, it is in this invention presented a novel method for measuring gas with an interferometric laser.
To be able to make integrated optical devices, as semiconductor micro-lasers, one must guide the light through the device. This can be done by making optical waveguides in the device, such as ridge waveguides or similar. For a junction laser can such a ridge guide be straight, curved and/or with junctions. For a junction laser, such as a Y-junction, the performance of the device is dependent on which resolution that can be achieved by etching of the junction. Better resolution means a more V-like shape for the inner part and has a better effect transmission, as the junction looks more like a real Y (P. Sewell et al. (1997)). This has traditionally been performed by the use of dry etching, as reactive ion etching (RIE) (K. Al Hemyari et al. (1993)). The RIE process can result in an isotropic etch, where the etching surface is positioned normal to the surface plane, and side walls and ridge design are positioned perpendicularly.
A general method for making materials on a substrate with the composition AlaGabIncPdAseSbf (which effectively refers to all the III-V materials), has been theoretically referred to in prior art (GB 1,097,551 (1965)). The present invention has a design where the device must have at least four layers of different compositions. In addition, the present device needs doped layers, an outlay with insulation, contacts and must be etched to shape electro-optical structures. Other prior art (JP 100 12918A, U.S. Pat. No. 6,236,772 B, Werner et al. (2000), EP 0 651 268 A1) describe other aspects of known techniques for electro-optical and optical devices. In U.S. Pat. No. 6,236,772 B one has demonstrated a device containing a traditional optical splitter/coupler with a Y-junction. The present invention is different from this in that it does not include a V-shaped detail in the junction point (
A wet etching process has earlier been developed (patent NO 20026261) which can etch AlGaInAsSb materials with good control and anisotropic shapes. This etch solution was used to provide patterns and new structures in the present invention.
The object of the invention is to provide a method for and the design of a laser for analyzing gas by means of an interferometric laser. It is also an object that this method should be reliable, and that it could be used for different types of lasers.
It is also an object of the invention to provide a laser for gas analysis which is less expensive than prior art solutions.
The method according to the invention is described in claim 1. Preferable features of the method are described in claims 2-21.
A device for gas analysis is described in claim 22. Preferable features of the device are described in claims 23-47.
The invention will in the following be described in further detail with reference to the attached drawings, where:
a shows a schematic outlay of a traditional Y-junction design,
b shows a schematic outlay of a novel ψ-junction design,
a and 10b show plots of optical field,
To be able to make junction lasers and other optical junction devices by wet etching, the design of the device must be changed from the traditional junction design. In wet etching, the V-detail in a Y-junction will end up as a U-like detail after the processing due to the anisotropic of the etch (
To make a ridge on a wafer, one must use a masking material on the wafer surface. After processing/applying, the masking material will define the outlay of the ridge structure. By further processing of the wafer, a chemical wet etching will etch the material which is not masked by the masking material. Due to the anisotropy of the wet etching (used here), the etch may result in some etch under the edge of the masking material (under etch). The under etch had to be considered as we designed the ridge structure, as it provides a U-like detail at the inner part of the junction, as shown in
The idea of the present invention was to incorporate curves in the opposite direction of the junction curve, to extend the waveguides in the junction region and to collect light being lost in the U-detail in the ψ-junction (
During the design phase, the optical waveguide properties of the ψ-junction-based device had to be simulated to test the junction before it was made. By use of the waveguide propagation method (BMP) we simulated the waveguide junctions.
Optical connection of the devices in the present invention is provided by connecting the waveguides to other waveguide devices through optical fibers, incorporating waveguides, planar waveguides, ridge waveguides, reader and similar. By using coating with higher or lower reflection, or a design which adjusts the optical field at the end of the waveguides of the device, one can reduce the connection loss.
The laser and the manufacturing of the structure of a ψ-junction laser is made by etching down in a material with the composition AlaGabIncPdAseSbf (which effectively refers to all the III-V materials), where an inexpensive wet etch method is used to make an interferometric laser structure. To be able to measure a gas at the highest possible degree of accuracy, one must have a single mode laser with one frequency, i.e. a laser which does not emit several wavelengths. This consists in choosing the length of two waveguides in such a way that the suppression of side modes is sufficiently high, so that these do not emit light. To improve the emission from the ψ-junction laser we have chosen to change the manufacturing to include a soft plastic layer between the dielectric layer and the metal top layer, and have over 200 nm Gold as the top contact at the plastic layer, as shown in
To perform the method of measuring gas, an interferometric laser is preferably used, preferably a tunable laser which can scan a spectrum. The laser is preferably arranged in a device for detecting gas, which device preferably includes power supply connected to an auxiliary current or a battery, a control unit connected to an external communication, a laser module with an interferometric laser (on a holder), a beam splitter, reference cell, a reference detector and electrical wires.
In addition the device includes a channel/perforated holes for the introduction of gas for analysis, which channel preferably has a one-way valve at the end before the channel runs out in a sense chamber, and next out into an outlet channel for gas.
The method for analyzing gases, preferably methane, ethane, propane, butane, pentane, hexane, heptane, ethylene, dichloromethane, isooctane, benzene, xylenes, hydrazine, formaldehyde, N2O, NO2, CO2, CO, HF, O3, HI, NH3, SO, HBr, H2S, HCN, is based, as mentioned, on the use of an interferometric laser which preferably has an interferometric mode “step” of about 5-6 nm. The easiest way to tune a laser through digital controlling, in this case, will be to change the duty cycle for a pulse, but keeping the current constant. In this way, several single mode lines can be achieved for the collection of data within a wavelength region.
The light emitted from the laser and which runs through the light splitter will next be divided and run through the sense chamber and a reference, respectively. The light will be dampened of the gases in the sense chamber before it hits a measuring detector. The light runs through the reference, e.g. methane gas in a cell can be used to calibrate the measurement, explained in further detail below.
The signal will be analyzed in the device for gas analysis by means of an internal microcontroller arranged in the control device, which next will be able to reveal the gas concentrations. To do this, the reference detector is used to determine the actual wavelength position of the laser light as it is swept. The reference detector consists of a detector with a cell of a known gas in front (possibly with an etalon cell or similar instead of gas if it is preferable).
How the laser reacts to changes in duty cycles will now be described.
The laser changes wavelengths of the light it emits with consideration to duty cycles, as shown in
To reduce costs and system energy consumption, an advance calibration can be made and the laser temperature control be omitted.
This means that for a given duty cycle, either one or two wavelengths will be emitted. Changes over long time in the laser will also affect which wavelengths being emitted, so that there is a need for a method for calibration of this to obtain accurate measurements.
From
How to compute and calibrate the laser wavelength will now be described.
As can be seen in
There are five possible states:
1. The middle wavelength absorption is higher than the two others,
2. The middle wavelength absorption is lower than the two others,
3. The middle wavelength absorption is between the two other frequencies,
4. Two of the wavelength absorptions are equal,
5. Three of the wavelength absorptions are equal.
In cases 1 and 2 there will be a maximum and minimum in the transmission spectrum, which will be the point where a single wavelength is produced.
Another way to describe this is mathematically. As a laser produces two wavelengths, the transmission signal will be a result of the absorption from each of these wavelengths. Thus, if wavelengths 1 and 2 have absorbance A1 and A2, the total transmitted intensity will be:
I=I
0,1*exp(−A1*L*ε)+I0,2*exp(−A2*L*ε)
L will be constant and E will be proportional with the molar concentration of the gas, so for simplification we can write:
I−I
0,1*exp(−A1)+I0,2*exp(−A2)
If for example 40% and 45% produces a single wavelength, the values (41%, 42%, etc.) will be a weighted sum of the two wavelengths which depends of the duty cycle:
X=[40% . . . 45%]
I=I*(20*(45%-X))*exp(−A1)+I*(20*(X−40%))*exp(−A2)
Even without knowing the actual wavelength, X can be extracted by using the methane reference and a spectral library to find A1 and A2. The program must know the modal interval for the laser (this can be pre-calibrated), so that it can compute the simulated transmission spectrum for different wavelength positions and compare it with the measured spectrum to acquire the absolute value for the single wavelength points.
How the gas concentrations are computed will now be described.
After the wavelength is calibrated by the methane reference signal, the transmission signal from the measuring detector is used to find the individual gas concentrations. In the case used for this description there were three gases, the absorption from each gas is collected from a library and then related to the measured transmission. The transmission for each wavelength is then related to the measured transmission. The transmission for each wavelength is so dependent of the absorption for each gas at a wavelength according to:
T=I
0
/I=1/(exp(−amethane)+exp(−aethane)+exp(−apropane))
Where amethane, aethane and −apropane is the absorption of methane, ethane and propane, respectively. For each wavelength, a is related to an absorption by:
a=A*L*ε
Where L is constant and E is the concentration which is desired to find. Thus, by having three single wavelength lines one gets three equations and three unknowns, which easily can be solved. For more lines, a weighted method can be used to increase the accuracy of the measurement.
Further details of the invention will appear from the following example description.
To make tunable lasers, a new laser type, named ψ-junction laser, was designed so that wet etching could be used for the junction structure of the device.
This is accordingly much broader than what the effective index method gives for a quadratic ridge structure (without graded sides).
The new ψ-junction was incorporated in the laser structure to achieve two optical paths with different lengths. This enables suppression of the longitudinal mode, so that a longitudinal single mode operation of the device can be achieved. By applying ohmic Ti/Pt/Au metal contacts to the GaSb contact layer, which lies at the top of the ridge structure, one can achieve electro-injection. For aperture injection, a Pd/Pt/Au metal contact was connected with the n-type GaSb substrate. Optical emission was so achieved by electrical injection in the active layer under the ridge structure. In other words, optical amplifying was achieved in the waveguides so that a stimulated emission could be achieved. By splitting the end surfaces of the device, one achieved reflections (of the light) at the end of the two optical cavities. The metal contacts where connected to metal surfaces by metal connections at the top of an electrical insulating layer of spin-on glass. Four different contact surfaces for connecting the device to a power supply, where connected to different parts of the ridge structure of the device, as shown in
In addition the device 1 includes a channel 13 for introducing gas for analysis, which channel 13 preferably has a one-way valve 14 at the end, before the channel runs out into a sense chamber 15, which chamber 15 tapers into an outlet channel 16 for gas. In the case where one measures the surrounding atmosphere, the valve 14 can either be removed or exchanged with a pump for effective supply to the chamber 15, possibly the chamber 15 can be perforated and moved out of 1.
The electrical wiring 12 is preferably both for energy supply to the laser and energy supply to the electronics.
External communication can be a system panel, data logging or a PC for storing or further analysis of data.
In use this will work in that:
The laser module 6, which includes the interferometric laser, sends a light beam to a beam splitter 8 which divides the light signal in two. The one part of the light signal runs via a reference gas cell 9 and is measured by a reference detector 10. The other part of the signal runs into the sense chamber 15 via transparent apertures 17 arranged in the wall, where the signal is dampened by the gases in the chamber 15, and then measured by the detector 11.
The measurements from the reference detector 10 and detector 11, respectively, are the results which are used further in the method, as explained above. The results from the measurements are transferred to the control unit 4, where they are stored in an internal memory and/or transferred to external communication means for further analysis.
Alternative embodiments of the invention may be:
Filing Document | Filing Date | Country | Kind | 371c Date |
---|---|---|---|---|
PCT/NO2008/000123 | 3/4/2008 | WO | 00 | 12/16/2010 |