The field of the invention relates to microelectromechanical systems (MEMS).
Microelectromechanical systems (MEMS) include micro mechanical elements, actuators, and electronics. Micromechanical elements may be created using deposition, etching, and or other micromachining processes that etch away parts of substrates and/or deposited material layers or that add layers to form electrical and electromechanical devices. One type of MEMS device is called an interferometric modulator. An interferometric modulator may comprise a pair of conductive plates, one or both of which may be transparent and/or reflective in whole or part and capable of relative motion upon application of an appropriate electrical signal. One plate may comprise a stationary layer deposited on a substrate, the other plate may comprise a metallic membrane separated from the stationary layer by an air gap. Such devices have a wide range of applications, and it would be beneficial in the art to utilize and/or modify the characteristics of these types of devices so that their features can be exploited in improving existing products and creating new products that have not yet been developed.
The system, method, and devices of the invention each have several aspects, no single one of which is solely responsible for its desirable attributes. Without limiting the scope of this invention, its more prominent features will now be discussed briefly. After considering this discussion, and particularly after reading the section entitled “Detailed Description of Preferred Embodiments” one will understand how the features of this invention provide advantages over other display devices.
One embodiment is a display. The display includes a plurality of interferometric modulators. The plurality of interferometric modulators includes at least one interferometric modulator configured to output red light, at least one interferometric modulator configured to output green light, and at least one interferometric modulator configured to output blue light. The combination of said output red light, said output green light, and said output blue light combine to produce said output white light having a standardized white point.
One embodiment is a display. The display includes at least one interferometric modulator, the modulator comprising a reflective surface configured to be positioned at a distance from a partially reflective surface. The distance of the at least one modulator is selected so as to produce white light characterized by a standardized white point.
Another embodiment is a display. The display includes a plurality of displays elements, each comprising a reflective surface configured to be positioned at a distance from a partially reflective surface. The plurality of display elements configured to output white light characterized by a standardized white point.
Another embodiment is a method of fabricating a display. The method includes forming a plurality of display elements configured to output light. Each of said plurality of display elements is formed comprising a reflective surface configured to be positioned at distance from partially reflective surface. The plurality of display elements is formed having said respective distances selected so that white light produced by the plurality display element is characterized by a standardized white point.
Another embodiment is a method of fabricating a display. The method includes forming a plurality of display elements configured to output light. Each of the plurality of display elements comprises a reflective surface configured to be positioned at distance from partially reflective surface. Each of the display elements are formed with respective areas from which light is reflected. Each of the respective areas is selected so that white light produced by the plurality display element is characterized by a standardized white point.
Another embodiment is a display including first means for outputting white light characterized by a standardized white point, and second means for outputting white light characterized by a standardized white point, the first and second means comprising microelectromechanical systems.
Another embodiment is a display. The display includes at least one interferometric modulator configured to selectively reflect green light incident thereon. The display further includes at least one filter associated with the at least one interferometric modulator and configured to selectively transmit visible wavelengths associated with magenta light and substantially filter other visible wavelengths when illuminated with white light.
Another embodiment is a method of fabricating a display. The method includes forming at least one interferometric modulator configured to selectively reflect green light incident thereon. The method further includes forming a layer of material positioned with respect to the modulator such that light modulated by the at least one interferometric modulator is filtered by the layer of material. The layer of material selectively transmits visible wavelengths associated with magenta light and substantially filters other visible wavelengths when illuminated with white light.
Another embodiment is a display. The display includes first means for outputting light, second means for outputting light, and third means for outputting light. The output light of the first, second, and third means is combined to produce white light characterized by a standardized white point. The first, second, and third means comprising microelectromechanical systems.
Another embodiment is a display. The display includes at least one first display element configured to selectively output cyan light. The display further includes at least one second display element configured to selectively output yellow light and positioned proximately to the at least one first display element. Each of the at least one first display element and the at least one second display element comprises reflective surface and a partially reflective surface.
Another embodiment is a method of fabricating a display. The method includes forming at least one first interferometric modulator configured to selectively reflect cyan light incident thereon. The method also includes forming at least one second interferometric modulator proximately to the at least one first interferometric modulator. The at least one second modulator is configured to selectively reflect yellow light incident thereon.
One embodiment is a display. The display includes means for outputting green light and means for outputting magenta light. One of the means for outputting green light and the means for outputting magenta light comprise a microelectromechanical system.
Another embodiment is a display. The display includes means for outputting cyan light and means for outputting yellow light. The means for outputting cyan light and the means for outputting yellow light comprise microelectromechanical systems.
Various embodiments include displays comprising interferometric display elements that are formed to produce white light having selected spectral properties. One embodiment includes a display that produces white light using interferometric modulators that are configured to reflect cyan and yellow light. Another embodiment includes a display that produces white light using interferometric modulators that reflect green light through a color filter that selectively transmits magenta light. Embodiments also include displays that reflect white light that is characterized by a standardized white point. The white point of such a display may be different from the white point of light illuminating the display.
The following detailed description is directed to certain specific embodiments of the invention. However, the invention can be embodied in a multitude of different ways. In this description, reference is made to the drawings wherein like parts are designated with like numerals throughout. As will be apparent from the following description, the invention may be implemented in any device that is configured to display an image, whether in motion (e.g., video) or stationary (e.g., still image), and whether textual or pictorial. More particularly, it is contemplated that the invention may be implemented in or associated with a variety of electronic devices such as, but not limited to, mobile telephones, wireless devices, personal data assistants (PDAs), hand-held or portable computers, GPS receivers/navigators, cameras, MP3 players, camcorders, game consoles, wrist watches, clocks, calculators, television monitors, flat panel displays, computer monitors, auto displays (e.g., odometer display, etc.), cockpit controls and/or displays, display of camera views (e.g., display of a rear view camera in a vehicle), electronic photographs, electronic billboards or signs, projectors, architectural structures, packaging, and aesthetic structures (e.g., display of images on a piece of jewelry). MEMS devices of similar structure to those described herein can also be used in non-display applications such as in electronic switching devices.
One interferometric modulator display embodiment comprising an interferometric MEMS display element is illustrated in
The depicted portion of the pixel array in
The fixed layers 16a, 16b are electrically conductive, partially transparent and partially reflective, and may be fabricated, for example, by depositing one or more layers each of chromium and indium-tin-oxide onto a transparent substrate 20. The layers are patterned into parallel strips, and may form row electrodes in a display device as described further below. The movable layers 14a, 14b may be formed as a series of parallel strips of a deposited metal layer or layers (orthogonal to the row electrodes 16a, 16b) deposited on top of posts 18 and an intervening sacrificial material deposited between the posts 18. When the sacrificial material is etched away, the deformable metal layers are separated from the fixed metal layers by a defined air gap 19. A highly conductive and reflective material such as aluminum may be used for the deformable layers, and these strips may form column electrodes in a display device.
With no applied voltage, the cavity 19 remains between the layers 14a, 16a and the deformable layer is in a mechanically relaxed state as illustrated by the pixel 12a in
In one embodiment, the processor 21 is also configured to communicate with an array controller 22. In one embodiment, the array controller 22 includes a row driver circuit 24 and a column driver circuit 26 that provide signals to a pixel array 30. The cross section of the array illustrated in
In typical applications, a display frame may be created by asserting the set of column electrodes in accordance with the desired set of actuated pixels in the first row. A row pulse is then applied to the row 1 electrode, actuating the pixels corresponding to the asserted column lines. The asserted set of column electrodes is then changed to correspond to the desired set of actuated pixels in the second row. A pulse is then applied to the row 2 electrode, actuating the appropriate pixels in row 2 in accordance with the asserted column electrodes. The row 1 pixels are unaffected by the row 2 pulse, and remain in the state they were set to during the row 1 pulse. This may be repeated for the entire series of rows in a sequential fashion to produce the frame. Generally, the frames are refreshed and/or updated with new display data by continually repeating this process at some desired number of frames per second. A wide variety of protocols for driving row and column electrodes of pixel arrays to produce display frames are also well known and may be used in conjunction with the present invention.
In the
The details of the structure of interferometric modulators that operate in accordance with the principles set forth above may vary widely. For example,
As discussed above with reference to
Note that in certain embodiments such as illustrated in
Generally, the color of light reflected by an interferometric modulator 12 shifts when the modulator 12 is viewed from different angles.
Another consideration in the design of displays incorporating interferometric modulators 12 is the generation of white light. “White” light generally refers to light that is perceived by the human eye to include no particular color, i.e., white light is not associated with a hue. While black refers to an absence of color (or light), white refers to light that includes such a broad spectral range that no particular color is perceived. White light may refer to light having a broad spectral range of visible light at approximately uniform intensity. However, because the human eye is sensitive to certain wavelengths of red, green, and blue light, white can be created by mixing intensities of colored light to produce light that has one or more spectral peaks which is perceived by the eye as “white.” Moreover, the color gamut of a display is the range of colors that the device is able to reproduce, e.g., by mixing red, green, and blue light.
White point is the hue that is considered to be generally neutral (gray or achromatic) of a display. The white point of a display device may be characterized based on a comparison of white light produced by the device with the spectral content of light emitted by a black body at a particular temperature (“black body radiation”). A black body radiator is an idealized object that absorbs all light incident upon the object and which reemits the light with a spectrum dependent on the temperature of the black body. For example, the black body spectrum at 6,500° K. may be referred to as white light having a color temperature of 6,500° K. Such color temperatures, or white points of approximately 5,000°-10,000° K are generally identified with daylight.
The International Commission on Illumination (CIE) promulgates standardized white points of light sources. For example, light source designations of “d” refer to daylight. In particular, standard white points D55, D65, and D75, which correlate with color temperatures of 5,500° K., 6,500° K., and 7,500° K., are standard daylight white points.
A display device may be characterized by the white point of the white light produced by a display. As with light from other light sources, human perception of a display is at least partially determined by the perception of white light from the display. For example, a display or light source having a lower white point, e.g., D55, may be perceived as having a yellow tone by a viewer. A display having a higher temperature white point, e.g., D75 may be perceived as having a “cooler” or bluer tone to a user. Users generally respond more favorably to displays having higher temperature white points. Thus, controlling the white point of a display desirably provides some control over a viewer's response to a display. Embodiments of the interferometric modulator array 30 may be configured to produce white light in which the white point is selected to conform to a standardized white point under one or more anticipated lighting conditions.
White light can be produced by the pixel array 30 by including one or more interferometric modulators 12 for each pixel. For example, in one embodiment, the pixel array 30 includes pixels of groups of red, green, and blue interferometric modulators 12. As discussed above, the colors of the interferometric modulators 12 may be selected by selecting the optical path length d using the relation of d=½ N λ. In addition, the balance, or relative proportions, of the colors produced by each pixel in the pixel array 30 may be further affected by the relative reflective areas of each of the interferometric modulators 12, e.g., of the red, green, and blue interferometric modulators 12. Further, because the modulators 12 selectively reflect incident light, the white point of reflected light from the pixel array 30 of interferometric modulators 12 is generally dependent on the spectral characteristics of incident light. In one embodiment, the white point of reflected light may be configured to be different than the white point of incident light. For example, in one embodiment, the pixel array 30 may be configured to reflect D75 light when used in D65 sunlight.
In one embodiment, the distances d and areas of the interferometric modulators 12 in the pixel array 30 are selected so that white light produced by the pixel array 30 corresponds to a particular standardized white point in an anticipated lighting condition, e.g., in sunlight, under fluorescent light, or from a front light positioned to illuminate the pixel array 30. For example, the white point of the pixel array 30 may be selected to be D55, D65, or D75 in particular lighting conditions. Moreover, the light reflected by the pixel array 30 may have a different white point than the light of an anticipated or configured light source. For example, a particular pixel array 30 may be configured to reflect D75 light when viewed under D65 sunlight. More generally, the white point of a display may be selected with reference to a source of illumination configured with the display, e.g., a front light, or with reference to a particular viewing condition. For example, a display may be configured to have a selected white point, e.g., D55, D65, or D75, when viewed under anticipated or typical sources of illumination such as incandescent, fluorescent, or natural light sources. More particularly, a display for use in a handheld device, for example, may be configured to have a selected white point when viewed under sunlight conditions. Alternatively, a display for use in an office environment may be configured to have a selected white point, e.g., D75, when illuminated by typical office fluorescent lights.
Table 1 illustrates optical path lengths of one embodiment. In particular, Table 1 illustrates the air gap of red, green, and blue interferometric modulators in two exemplary embodiments of the pixel array 30 that produce D65, and D75 white light using modulators 12 of substantially equal reflective areas. Table 1 assumes a dielectric layer comprising two layers, 100 nm of Al2O3 and SiO2 of 400 nm. Table 1 also assumes substantially identical reflective areas for each of the red, green and blue interferometric modulators 12. One of skill in the art will recognize that a range of equivalent air gap distances can be obtained by varying the thickness or index of refraction of the dielectric layer.
It is to be recognized that in other embodiments, different distances d and areas of modulators 12 may be selected to produce other standardized white point settings for different viewing environments. Further, the red, green, and blue modulators 12 may also be controlled so as to be in reflective or non-reflective states for different amounts of time so as to further vary the relative balance of reflected red, green, and blue light, and thus the white point of reflected light. In one embodiment, the ratio of reflective areas of each of the color modulators 12 may be selected so as to control the white point in different viewing environments. In one embodiment, the optical path length d may be selected so as to correspond to a common multiple of more than one visible resonant wavelength, e.g., first, second, or third order peaks of red, green, and blue, so that the interferometric modulator 12 reflects white light characterized by three visible peaks in its spectral response. In such an embodiment, the optical path length d is selected so that the white light produced corresponds to a standardized white point.
In addition to groups of red, green, and blue interferometric modulators 12 in the pixel array 30, other embodiments include other ways of generating white light. For example, one embodiment of the pixel array 30 includes cyan and yellow interferometric modulators 12, i.e., interferometric modulators 12 that have respective separation distances d so as to produce cyan and yellow light. The combined spectral response of the cyan and yellow interferometric modulators 12 produces light with a broad spectral response that is perceived as “white.” The cyan and yellow modulators are positioned proximately so that a viewer perceives such a combined response. For example, in one embodiment, the cyan modulators and yellow modulators are arranged in adjacent rows of the pixel array 30. In another embodiment, the cyan modulators and yellow modulators are arranged in adjacent columns of the pixel array 30.
In one embodiment, the pixel array 30 includes a first order yellow interferometric modulator and a second order cyan interferometric modulator. When such a pixel array 30 is viewed from increasingly larger off-axis angles, light reflected by the first order yellow modulator is shifted toward the blue end of the spectrum, e.g., the modulator at a certain angle has an effective d equal to that of a first order cyan. Concurrently, light reflected by the second order cyan modulator shifts to correspond to light from the first order yellow modulator. Thus, the overall combined spectral response is broad and relatively uniform across the visible spectrum even as the relative peaks of the spectrum shift. Such pixel array 30 thus produces white light over a relatively large range of viewing angles.
In one embodiment, a display having a cyan and yellow modulators may be configured to produce white light having a selected standardized white point under one or more viewing conditions. For example, the spectral response of the cyan modulator and of the yellow modulator may be selected so that reflected light has a white point of D55, D65, D75, or any other suitable white point under selected illumination conditions that include D55, D65, or D75 light such as sunlight for a display suited for outdoor use. In one embodiment, the modulators may be configured to reflect light that has a different white point than incident light from an expected or selected viewing condition.
In one embodiment, a display having a green modulator 12 with the magenta filter layer 102 may be configured to produce white light having a selected standardized white point under one or more viewing conditions. For example, the spectral response of the green modulator 12 and of the magenta filter layer 102 may be selected so that reflected light has a white point of D55, D65, D75, or any other suitable white point under selected illumination conditions that include D55, D65, or D75 light such as sunlight for a display suited for outdoor use. In one embodiment, the modulator 12 and filter layer 102 may be configured to reflect light that has a different white point than incident light from an expected or selected viewing condition.
While the above detailed description has shown, described, and pointed out novel features of the invention as applied to various embodiments, it will be understood that various omissions, substitutions, and changes in the form and details of the device or process illustrated may be made by those skilled in the art without departing from the spirit of the invention. As will be recognized, the present invention may be embodied within a form that does not provide all of the features and benefits set forth herein, as some features may be used or practiced separately from others. The scope of the invention is indicated by the appended claims rather than by the foregoing description. All changes which come within the meaning and range of equivalency of the claims are to be embraced within their scope.
This application claims the benefit of U.S. Provisional Application No. 60/613,491 filed Sep. 27, 2004; U.S. Provisional Application No. 60/623,072 filed Oct. 28, 2004; and U.S. Provisional Application No. 60/613,535 filed Sep. 27, 2004. Each of the foregoing applications is incorporated by reference in its entirety.
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