METHOD AND DEVICE FOR PROCESSING OBJECT

Abstract

Provided is a processing method for an object, including the steps of: arranging an object in a first portion that is a portion having a space and configured to process the object; and decomposing an organic substance in the object by covering the object with catalysts formed of granules made of a metal oxide containing titanium and bringing the catalysts into contact with the organic substance, and simultaneously maintaining the catalysts in the first portion at a temperature of 480° C. or more and 550° C. or less. The step of decomposing the organic substance in the object includes causing gas containing oxygen to flow into the first portion so that a decomposition reaction of the organic substance occurs, and the catalysts are slightly moved in at least a part of a surface of the object.

Description

Claims

1. A processing method for an object containing an organic substance, comprising the steps of: arranging the object in a first portion that is a portion having a space and configured to process the object; anddecomposing an organic substance in the object by covering the object with catalysts formed of granules made of a metal oxide containing titanium and bringing the catalysts into contact with the organic substance, and simultaneously maintaining the catalysts in the first portion at a temperature of 480° C. or more and 550° C. or less,wherein the step of decomposing the organic substance in the object includes causing gas containing oxygen to flow into the first portion so that a decomposition reaction of the organic substance occurs, and the catalysts are slightly moved in at least a part of a surface of the object.

2. The processing method for an object according to claim 1, wherein the step of decomposing the organic substance in the object is prevented from including the step of stirring the catalysts for all the catalysts in the first portion.

3. The processing method for an object according to claim 1, wherein the step of decomposing the organic substance in the object further includes the step of moving the object while maintaining a state in which the object is covered with the catalysts.

4. The processing method for an object according to claim 3, wherein the step of arranging an object includes arranging the object accommodated in a container having a mesh-like shape that enables the catalysts to pass therethrough in the first portion, andwherein the step of moving the object in the first portion includes moving the container under a state in which the object is accommodated in the container.

5. The processing method for an object according to claim 1, wherein a flow velocity of the gas containing oxygen when the gas containing oxygen is caused to flow into the first portion is 0.5 m/min or more and 200 m/min or less.

6. The processing method for an object according to claim 1, wherein the step of decomposing the organic substance in the object includes burying the object by 5 cm or more from a surface of a plurality of catalysts accommodated in the space of the first portion.

7. The processing method for an object according to claim 1, wherein the gas containing oxygen is air.

8. The processing method for an object according to claim 1, wherein the granules each have a particle diameter of 0.2 mm or more and less than 2 mm, andwherein an angle at which the granules start sliding is 0.5 degree or more and 15 degrees or less, and an angle at which all the granules finish sliding is 2 degrees or more and 30 degrees or less.

9. The processing method for an object according to any one of claim 1 wherein the object is a waste substrate.

10. The processing method for an object according to claim 9, wherein the waste substrate has an area of 4 cm2 or more in plan view from a thickness direction.

11. A processing apparatus for decomposing an organic substance in an object, comprising: a first portion that is a portion having a first recess and configured to process the object;catalysts formed of granules made of a metal oxide containing titanium, which are maintained in a state of being accommodated in the first recess;a supply unit connected to the first portion and configured to supply gas containing oxygen into the first recess;a heating unit configured to heat at least any one of the catalysts or the gas;a container configured to accommodate the object and having a shape that enables the catalysts to pass therethrough; anda support unit configured to support the container,wherein the container is enabled to be displaced along a vertical direction so as to selectively take a state in which at least a part of the container is in contact with the catalysts in the first recess and a state in which the container is prevented from being in contact with the catalysts, andwherein the processing apparatus is prevented from comprising a stirring unit configured to stir the catalysts for all the catalysts accommodated in the first recess.

12. The processing apparatus according to claim 11, wherein, when at least a part of the container is in contact with the catalysts, the container is movable.

13. The processing apparatus according to claim 11, wherein the support unit includes: a rail including an inclined portion inclined with respect to a vertical direction; anda first component which is mounted on the container and which is travelable on the rail.

14. The processing apparatus according to claim 13, further comprising a brim portion which is mounted on the container and which protrudes to any one of sides in a traveling direction of the rail.

15. The processing apparatus according to claim 11, wherein the support unit includes a second component which is mounted on the container and which is enabled to be displaced along the vertical direction.

16. The processing apparatus according to claim 15, wherein the container includes a bottom wall portion and a peripheral wall portion extending along the vertical direction from an outer edge of the bottom wall portion, andwherein the container further includes a blade portion which protrudes to a side of the bottom wall portion opposite to the peripheral wall portion and which is turnable along an imaginary plane perpendicular to the vertical direction.

17. The processing apparatus according to claim 11, wherein the gas containing oxygen is air.