Claims
- 1. A method of testing a semiconductor integrated circuit chip, comprising the steps of:
- scanning an ultrasonic wave beam across said semiconductor integrated circuit chip while a current is supplied to a semiconductor integrated circuit in said semiconductor integrated circuit chip; and
- detecting a change of a voltage which appears across two ones of terminals of said semiconductor integrated circuit as said semiconductor integrated circuit chip is scanned with said ultrasonic wave beam.
- 2. A device of testing a semiconductor integrated circuit chip, comprising:
- current supplying means for supplying a current to a semiconductor integrated circuit in a semiconductor integrated circuit of a semiconductor integrated circuit chip;
- ultrasonic wave beam projecting means for scanning an ultrasonic wave beam across said semiconductor integrated circuit chip; and
- voltage change detecting means for detecting a change of a voltage which appears across two ones of terminals of said semiconductor integrated circuit.
- 3. A device of testing a semiconductor integrated circuit chip, comprising:
- a current supply, which supplies a current to a semiconductor integrated circuit in a semiconductor integrated circuit chip;
- an ultrasonic wave beam projector, which scans an ultrasonic wave beam across said semiconductor integrated circuit chip; and
- a voltage detector, which detects a change of voltage appearing across two ones of terminals of said semiconductor integrated circuit.
Priority Claims (1)
Number |
Date |
Country |
Kind |
7-128049 |
May 1995 |
JPX |
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Parent Case Info
This is a divisional of application Ser. No. 09/115,998 filed Jul. 15, 1998, which is a divisional of prior application Ser. No. 08/653,834 filed May 28, 1996, now U.S. Pat. No. 5,815,002 the disclosure of which is incorporated herein by reference.
US Referenced Citations (12)
Foreign Referenced Citations (1)
Number |
Date |
Country |
6-300824 |
Oct 1994 |
JPX |
Non-Patent Literature Citations (4)
Entry |
"Novel Method for Detection of . . . Resistance," Jpn. J. Appl. Phys. vol. 34, pp. 2260-2265, May 1995. |
Extended Abstracts (The 55.sup.th Autumn Meeting, 1994), The Japan Society of Applied Physics, No. 2. |
K. Nikawa, et al., "Novel Method for Defect Detection in Al Stripes by Menas of Laser Beam Heating and Detection of Changes in Electrical Resistance," Jpn. J. Appl. Phys., vol. 34 (1995), pp. 2260-2265. |
K. Nikawa, et al., "Internal Current Imaging of Integrated Circuit Using Optical/Electron/Ion Beam Induced Resistance Change Method," TLSI (Dec. 8-9, 1994), pp. 204-208. |
Divisions (2)
|
Number |
Date |
Country |
Parent |
115998 |
Jul 1998 |
|
Parent |
653834 |
May 1996 |
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