Number | Date | Country | Kind |
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7-128049 | May 1995 | JPX |
This is a divisional of application No. 09/115,998 filed Jul. 15, 1998, which is a divisional of prior application Ser. No. 08/653,834 filed May 28, 1996 (U.S. Pat. No. 5,815,002), the disclosure of which is incorporated herein by reference.
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5815002 | Nikawa | Sep 1998 |
Number | Date | Country |
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6-300824 | Oct 1994 | JPX |
Entry |
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Nikawa et al., "novel Method for Defect Detection in Al Stripes by Means . . . and Detection of Changes in electrical Resistance", Jpn. J. Appl. Phys., vol.34, Part 1, No. 5A, pp. 2260-2265, May 1995. |
Extended Abstracts (The 55.sup.th Autumn Meeting, 1994), The Japan Society of Applied Physics, No. 2 (month unavailable). |
K. Nikawa, et al., "Novel Method for Defect Detection in Al Stripes by Menas of Laser Beam Heating and Detection of Changes in Electrical Resistance," JPN. J. Appl. Phys., vol. 34 (1995), pp. 2260-2265 (May 1995). |
K. Nikawa, et al., "Internal Current Imaging of Integrated Circuit Using Optical/Electron/Ion Beam Induced Resistance Change Method," TLSI (Dec. 8-9, 1994), pp. 204-208. |
Number | Date | Country | |
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Parent | 115998 | Jul 1998 | |
Parent | 653834 | May 1996 |