Claims
- 1. A method of inspecting a semiconductor device comprising the steps of:acquiring an image of the semiconductor device; detecting defects in the semiconductor device based upon the image acquired; determining if any of information of the defects detected is false, and if so, removing such false information; classifying the defects; displaying the result of the classification on a display screen; and determining if any defects were not classified during the step of classifying the defects and classifying those defects not previously classified.
- 2. A method of inspecting a semiconductor device according to claim 1, further comprising the step of sending the device to a repairing unit depending upon the result of defect classification.
- 3. A method of inspecting a semiconductor device according to claim 1, further comprising the step of repairing any device having a defect.
- 4. A method of inspecting a semiconductor device comprising the steps of:acquiring an image of the semiconductor device; detecting defects in the semiconductor device based upon the image acquired; extracting feature data of the defects detected; classifying the defects; and determining cause of the defects.
- 5. A method of inspecting a semiconductor device according to claim 4, further comprising the step of displaying the result of the classification on a display screen.
- 6. A method of inspecting a semiconductor device according to claim 4, further comprising the step of sending the device to a repairing unit depending upon the result of defect classification.
- 7. A method of inspecting a semiconductor device according to claim 4, further comprising the step of repairing any device having a defect.
Priority Claims (1)
Number |
Date |
Country |
Kind |
5-334606 |
Dec 1993 |
JP |
|
Parent Case Info
This is a continuation application of U.S. Ser. No. 09/002,529, filed Jan. 2, 1998, which is a continuation application of U.S. Ser. No. 08/362,763, filed Dec. 22, 1994 now U.S. Pat. No. 5,801,965.
US Referenced Citations (20)
Foreign Referenced Citations (5)
Number |
Date |
Country |
54-101390 |
Aug 1979 |
JP |
61-151410 |
Oct 1986 |
JP |
62-43505 |
Feb 1987 |
JP |
02-170279 |
Jul 1990 |
JP |
04-72552 |
Mar 1992 |
JP |
Non-Patent Literature Citations (1)
Entry |
Luria et al, “Automatic Defect Classification Using Fuzzy Logic”, ASMC, 1993, Boston, MA (three pages). |
Continuations (2)
|
Number |
Date |
Country |
Parent |
09/002529 |
Jan 1998 |
US |
Child |
09/812822 |
|
US |
Parent |
08/362763 |
Dec 1994 |
US |
Child |
09/002529 |
|
US |