Number | Date | Country | Kind |
---|---|---|---|
4123959 | Jul 1991 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4036136 | Takagi | Jul 1977 | |
4292397 | Takeuchi et al. | Sep 1981 | |
4347785 | Chase et al. | Sep 1982 | |
4718340 | Love, III | Jan 1988 | |
4777109 | Gumbinner et al. | Oct 1988 | |
5045697 | Schneider | Sep 1991 | |
5062364 | Lewis et al. | Nov 1991 | |
5129321 | Fadner | Jul 1992 | |
5187046 | Patrick et al. | Feb 1993 |
Number | Date | Country |
---|---|---|
3713801 | Nov 1988 | DEX |
Entry |
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Journal of Vacuum Science and Technology: Part B, vol. 9. No. 2 Mar./Apr. 1991, New York, article by S. Fujimura et al. |