| Number | Date | Country | Kind |
|---|---|---|---|
| 4123959 | Jul 1991 | DEX |
| Number | Name | Date | Kind |
|---|---|---|---|
| 4036136 | Takagi | Jul 1977 | |
| 4292397 | Takeuchi et al. | Sep 1981 | |
| 4347785 | Chase et al. | Sep 1982 | |
| 4718340 | Love, III | Jan 1988 | |
| 4777109 | Gumbinner et al. | Oct 1988 | |
| 5045697 | Schneider | Sep 1991 | |
| 5062364 | Lewis et al. | Nov 1991 | |
| 5129321 | Fadner | Jul 1992 | |
| 5187046 | Patrick et al. | Feb 1993 |
| Number | Date | Country |
|---|---|---|
| 3713801 | Nov 1988 | DEX |
| Entry |
|---|
| Journal of Vacuum Science and Technology: Part B, vol. 9. No. 2 Mar./Apr. 1991, New York, article by S. Fujimura et al. |