Patent Application
20060173646
1. Field of the Invention
The present invention relates to a temperature control method and a temperature control apparatus for controlling a temperature of an object to be heat-treated. The present invention further relates to a heat treatment apparatus in which the temperature control apparatus is adapted for use. Still further, the present invention relates to a program for use with the apparatuses and method of the present invention. More specifically, the present invention relates to a method for controlling the temperature of an object within a multi-input/output interference system.
2. Description of the Related Art
With regards to related art, a continuous furnace comprising a plurality of heat treatment zones which is conventionally used for heating a flat panel display (“FPD”) is shown in Unexamined Japanese Patent Publication No. 2003-279256.
In the heat treatment using the continuous furnace, an object to be heat-treated such as the glass substrate is run in a plurality of furnaces continuously in the horizontal direction to be subjected to the heat treatment therein. It is necessary for the heat treatment to be applied so that a temperature profile showing how the temperature of the heat-treatment object running in the continuous furnaces changes overtime corresponds to a targeted desirable temperature profile. In order to closely match the desired profile, preset temperatures of the plurality of continuous furnaces and the like are adjusted.
Conventionally, In the adjustment of the preset temperatures and the like, first, a temperature profile of a test heat-treatment object provided with a temperature sensor that is run in the continuous furnaces is measured. Then, the preset temperatures of the respective furnaces and the like are adjusted so that the measured temperature profile corresponds to the desired temperature profile. However, this adjustment requires an experienced and skilled technician and the resulting adjustments are often imprecise. As another disadvantage, significant time and a number of steps are required because the object to be heat-treated must be repeatedly run in the continuous furnaces to make the necessary adjustments.
The present invention was implemented in order to solve the foregoing problems, and a main object thereof is to allow accurate and timely adjustments to heating elements in order to apply the proper heat treatment to an object.
A temperature control method according to a first aspect of the present invention includes a method of controlling temperatures of a plurality of heat-treatment zones in a heat treatment applied to an object to be heat-treated while the object is moved in the plurality of continuous heat-treatment zones, wherein a correction value for correcting at least one of a targeted temperature and a detected temperature of each of the heat-treatment zones is calculated based on a difference between a temperature of the heat-treatment object and a temperature of a desired temperature profile.
The heat treatment preferably includes a heating treatment and a cooling treatment. The heat-treatment zone is preferably an interval (range) to which the heat treatment is applied. The heat-treatment zones are preferably respectively provided with at least a heating device and/or a cooling device so that the temperature may be controlled in each of the heat-treatment zones.
In the plurality of continuous heat-treatment zones, the respective heat-treatment zones may be continuous in the horizontal direction or in the vertical direction.
The temperature of the heat-treatment object is preferably measured while the heat-treatment object is moved in the plurality of heat-treatment zones in the same manner as in the heat treatment, or may measure an initial temperature of the object to be heat-treated prior to application of the heat treatment thereto.
The correction value is preferably a value capable of minimizing the difference between the temperature of the heat-treatment object and the temperature of the desired temperature profile.
According to the present invention, the correction value for correcting at least one of the targeted temperature (preset temperature) and the detected temperature (inputted temperature) is calculated based on the difference between the temperature of the heat-treatment object and the temperature of the desired temperature profile. Accordingly, the targeted temperature and the detected temperature can be corrected based on the calculated correction value without the adjustment of the targeted temperature (preset temperature) and the like in a trial-and-error approach as in the conventional technology.
According to a second aspect of the present invention, a temperature control method is provided, wherein the temperature of the object to be heat-treated is preferably obtained from temperatures measured at a plurality of measuring points where the temperature is measured while the heat-treatment object is moved in the plurality of heat-treatment zones.
The measuring point refers to a point at which the temperature of the heat-treatment object is planned to be measured in the plurality of heat-treatment zones. Preferably, a point at which the temperature of the object to be heat-treated most closely corresponds to the temperature of the desired temperature profile is selected as the measuring point.
According to this second aspect of the invention, the correction value is preferably calculated based on the difference between the temperature of the heat-treatment object measured at each of the plurality of measuring points and the temperature of the desired temperature profile. As a result, the targeted temperature and the detected temperature can be accurately corrected in comparison to the correction using the initial temperature of the object to be heat-treated or the like.
According to a third aspect of the present invention, a temperature control method is provided which comprises a first step for applying the heat treatment by moving the object to be heat-treated in the plurality of heat-treatment zones and measuring the temperature of the object to be heat-treated, a second step for obtaining a degree of interference between the heat-treatment zones at each of the plurality of measuring points of the object to be heat-treated when the targeted temperature is changed based on the measured temperature of the object to be heat-treated, and a third step for calculating the correction value based on the obtained degree of interference.
The degree of interference refers to the amount of change in heating due to the interference between the heat-treatment zones to which the is subjected when the targeted temperature of each of the heat-treatment zones is changed. More specifically, it is the heating change the object undergoes due to the interference between heat-treatment zones when one of the heat-treatment zones is changed.
The degree of influence may be obtained from actual measurements, and is preferably estimated based on a model including the heat-treatment zones and the heat-treatment object.
According to the present embodiment, when the targeted temperature is changed, the degree of influence that the heated object experiences at each measuring point, that is the variation of the temperature of the heated object at the respective measuring points relative to a variation of the targeted temperature, is previously obtained as the degree of interference. Therefore, how the targeted temperature should be changed in order to change the temperature of the heated object at each measuring point to correspond to the desired temperature profile can be obtained in the form of the correction value based on the degree of interference. As a result, when the targeted temperature and the detected temperature are corrected based on the correction value, the targeted temperature and the detected temperature can be more easily adjusted and the desired temperature profile can be more accurately achieved.
According to a fourth aspect of the present invention, a temperature control method may further include a fourth step for correcting at least one of the targeted temperature and the detected temperature based on the calculated correction value.
According to this fourth aspect, at least one of the targeted temperature and the corrected temperature may be automatically adjusted based on the calculated correction value.
According to a fifth aspect of the present invention, a matrix showing a relation between the variation of a targeted temperature and a temperature variation of the heat-treatment object at a plurality of measuring points may be obtained based on the measured temperature of the heat-treatment object, and a correction value may be calculated by means of an inverse matrix of the matrix.
According to this aspect of the present invention, the correction value may be obtained by means of the inverse matrix of the matrix showing the relation between the variation of the targeted temperature and the temperature variation of the heated object at the plurality of measuring points. Accordingly, the targeted temperature and the detected temperature can be corrected based on the correction value without the adjustment of the targeted temperature in the trial-and-error approach as in the conventional technology.
According to a sixth aspect of the present invention, a model including the heat-treatment zones and the heat-treatment object may be generated based on the targeted temperature of each of the heat-treatment zones and the measured temperature of the heated object so that the matrix can be obtained by means of the generated model.
According to this aspect of the present invention, the matrix showing the relation between the variation of the targeted temperature and the temperature variation of the heated object at the plurality of measuring points is obtained by means of the model including the heat-treatment zones and the heated object. As a result, it becomes unnecessary to measure the temperature variation of the heated object at the plurality of measuring points by actually changing the targeted temperatures of the respective heat-treatment zones.
According to a seventh aspect of the present invention, a temperature control apparatus is provided comprising a temperature adjusting device for controlling temperatures of a plurality of continuous heat-treatment zones in a heat treatment applied to an object while the object is moved in the plurality of heat-treatment zones and a correcting device for calculating a correction value based on a difference between a temperature of the heated object and a temperature of a desired temperature profile, wherein the temperature adjusting device controls the temperatures of the respective heat-treatment zones based on a targeted temperature and a detected temperature of each of the heat-treatment zones and corrects at least one of the targeted temperature and the detected temperature based on the correction value.
The correcting device preferably comprises an PLC (programmable logic controller) and a computer.
According to the present invention, the correction value for correcting at least one of the targeted temperature and the detected temperature is calculated based on the difference between the measured temperature of the heated object and the temperature of the desired temperature profile. Therefore, it becomes unnecessary to adjust the targeted temperature and the like in the trial-and-error approach as in the conventional technology, and the targeted temperature and the detected temperature can be corrected based on the calculated correction value.
According to an eighth aspect of the present invention, a temperature control apparatus is provided wherein, the temperature of the heated object is preferably the temperature of the heated object measured at each of the plurality of measuring points while the object is moved in the plurality of heat-treatment zones.
According to this aspect, the correction value is calculated based on the difference between the temperature of the object to be heat-treated measured at each of the plurality of measuring points while the object is moved in the plurality of heat-treatment zones and the temperature of the desired temperature profile. Therefore, the correction in the foregoing manner can be more accurate than in a case where an initial temperature of the heat-treatment object is used.
Further in accordance with this aspect, the correction device may calculate the correction value based on a degree of interference between the heat-treatment zones at each of the plurality of measuring points of the heat-treatment object when the targeted temperature is changed.
According to the present embodiment, the correction value for correcting the targeted temperature and the detected temperature can be obtained based on the degree of interference, which facilitates the adjustment operation for correcting the targeted temperature and the detected temperature in the application of the heat treatment based on the desired temperature profile.
In accordance with a ninth aspect of the present invention, a correction device may obtain a matrix showing a relation between a variation of the targeted temperature and a temperature variation of the heat-treatment object at the plurality of measuring points based on the measured temperatures of the heat-treatment object while the heated object is moved in the plurality of heat-treatment zones and calculates the correction value using an inverse matrix of the matrix.
According to this aspect, the correction value is obtained by means of the inverse matrix of the matrix showing the relation between the variation of the targeted temperature and the temperature variation of the heat-treatment object at the plurality of measuring points. Therefore, when the targeted temperature and the detected temperature are corrected based on the correction value, it becomes unnecessary for an operator to make adjustments in the trial-and-error approach.
In accordance with a tenth aspect of the present invention, the correction device may comprise a model including the heat-treatment zones and the object to be heat-treated obtained based on the targeted temperature of each of the heat-treatment zones and the measured temperature of the object to be heat-treated, wherein the matrix is obtained by means of the model.
According to this aspect of the invention, the model including the heat-treatment zones and the object to be heat-treated is used to obtain the matrix. Therefore, it becomes unnecessary to measure the temperature variation of the heat-treatment object at the plurality of measuring points by actually changing the targeted temperature of each of the heat-treatment zones.
According to a further aspect of the present invention, a heat treatment apparatus according to the present invention may comprise a temperature control apparatus as described above, and a continuous processing device comprising a plurality of continuous heat-treatment zones and subjected to a temperature control by the temperature control apparatus.
In accordance with this aspect of the invention, the continuous processing device may comprise a plurality of continuous heat-treatment zones, examples of which are a reflow furnace and a continuous baking furnace.
The present invention facilitates the adjustment operation for correcting the targeted temperature and the detected temperature for heat-treating the heat-treatment object at a desired temperature.
In accordance with a further aspect of the present invention, a program may be used for controlling temperatures of a plurality of continuous heat-treatment zones in a heat treatment applied while an object is moved in the heat-treatment zones. In accordance with this aspect, such a computer program may include the following steps: a first step for inputting a temperature data of the object to be heat-treated measured in the heat treatment applied while the heated object is moved in the plurality of heat-treatment zones; a second step for obtaining a degree of interference between the heat-treatment zones at a plurality of measuring points of the heat-treatment object when a targeted temperature of each of the heat-treatment zones is changed based on the inputted temperature data of the heated object, and a third step for calculating a correction value for correcting at least one of the targeted temperature and a detected temperature of each of the heat-treatment zones based on the degree of interference and a difference between a temperature of the heated object and a temperature of a desired temperature profile.
According to the present invention, the program is executed by the computer so that the correction value for correcting the targeted temperature and the detected temperature can be obtained based on the previously measured degree of interference. Therefore, the adjustment operation for correcting the targeted temperature and the detected temperature for heat-treating the object to be heat-treated at a desired temperature is facilitated.
The program according to the present invention may be recorded on a computer-readable recording medium such as a flexible disk, a hard disk, an optical disk, a magnetic optical disk, CD-ROM, a magnetic tape, a non-volatile memory card and ROM.
As described so far, according to the present invention, the correction value, for correcting at least one of the targeted temperature and the detected temperature, is calculated based on the difference between the measured temperature of the heat-treatment object and the temperature of the desired temperature profile. Thereafter, the targeted temperature and the detected temperature can be corrected based on the calculated correction value without the adjustment of the targeted temperature and the like in the trial-and-error approach as in the conventional technology. As a result, the adjustment operation can be facilitated.
Hereinafter, preferred embodiments of the present invention are described in detail referring to the drawings.
A heat treatment apparatus 1 according to the embodiment applies a heat treatment to a glass substrate 2 as an object to be heat-treated in a continuous furnace 3. The continuous furnace 3 comprises first through third furnaces 31-33 constituting a plurality of heat-treatment zones continuous in the horizontal direction. The first through third furnaces 31-33 are respectively provided with a temperature sensor and a heater not shown. Outputs of the temperature sensors are applied to temperature adjusting devices 41-43 respectively corresponding to the furnaces 31-33. The temperature adjusting devices 41-43 control the conduction of the heaters of the furnaces 31-33.
The temperature adjusting devices 41-43 control the conduction of the heaters respectively provided in the furnaces 31-33 based on a difference between preset temperatures (targeted temperatures) of the respective furnaces 31-33 set by an upper device or a setting device, not shown, and detected temperatures of the respective furnaces 31-33 by the temperature sensors.
The glass substrate 2 subjected to the heat treatment in the continuous furnace 3 is conveyed in the continuous furnace 3 by a belt conveyer 5 at a constant speed in a direction shown by an arrow A to be heat-treated.
In the foregoing heat treatment of the glass substrate 2, it is necessary to control the temperatures of the furnaces 31-33 so that a temperature profile representing how a temperature of the glass substrate 2 conveyed and moved in the continuous furnace 3 changes over time corresponds to a desired temperature profile. Accordingly, it becomes necessary to adjust the preset temperatures of the temperature adjusting devices 41-43 respectively corresponding to the furnaces 31-33.
According to the present embodiment, the following process is adopted so that the adjustment of the preset temperatures can be facilitated instead of a conventional trial-and-error approach which depends on an experience and a technical intuition of an operator.
In a temperature control method according to the present embodiment, first, a degree of interference on how the temperature of the glass substrate 2 is changed at a plurality of measuring points in the continuous furnace 3 when the glass substrate 2 is conveyed and moved in the continuous furnace 3 at the constant speed to be heat-treated in a state where the preset temperatures of the respective furnaces 31-33 are changed and reset is obtained in advance.
The measuring point refers to a position of the glass substrate 2 at which the temperature in the continuous furnace 3 is planned to be measured, which consequently corresponds to a time point when the temperature is planned to be measured in the temperature profile representing the temperature variation of the glass substrate 2 over time.
A time point when it is highly necessary for the temperature of the glass substrate 2 to correspond to the temperature of the desired temperature profile is preferably selected as the measuring point. For example, as described later, a measuring point during a period when the glass substrate 2 passes through the first furnace 31, a measuring point during a period when the glass substrates passes through the second furnace 32, and a measuring point during a period when the glass substrate 2 passes through the third 33, which are three measuring points in total, may be selected.
The degree of interference refers to a degree of influence that the temperature of the glass substrate at each of the plurality of measuring points in the furnace 3 undergoes due to a thermal interference among the furnaces 31-33 when the preset temperatures of the furnaces 31-33 are changed.
Next, correction values for the preset temperatures of the furnaces 31-33 are calculated so that the temperatures of the glass substrate 2 at the plurality of measuring points correspond to the temperatures at the corresponding measuring points in the desired temperature profile based on the degree of interference obtained in advance.
More specifically, how the preset temperatures of the furnaces 31-33 should be changed so that the temperatures of the glass substrate 2 at the plurality of measuring points correspond to the temperatures of the desired temperature profile is calculated in the form of the correction value based on the degree of interference showing the temperature variation of the glass substrate 2 at the plurality of measuring points relative to the variation of the preset temperatures of the furnaces 31 33.
More specifically, in order to obtain the degree of interference, the temperature profile may be obtained in such manner that, first, the glass substrate 2 is run in the continuous furnace 3 so as to measure the temperature profile in a state where the preset temperature of the first furnace 31 is actually changed and reset, next, the glass substrate 2 is run in the continuous furnace 3 so as to measure the temperature profile in a state where the preset temperature of the second furnace 32 is actually changed and reset, and then, the glass substrate 2 is run in the continuous furnace 3 so as to measure the temperature profile in a state where the preset temperature of the third furnace 33 is actually changed and reset.
However, if the continuous furnace 3 has a long dimension and comprises a large number of furnaces constituting the continuous furnace 3, a large number of processing steps is required, which is not practical.
Therefore, in the present embodiment, a system including the continuous furnace 3 and the glass substrate 2 as the object to be heat-treated is subjected to a modeling process, and a model of the system thereby obtained is used to as to obtain the degree of interference.
More specifically, according to the present embodiment, as shown in
Next, based on the obtained degree of interference, a correction value for correcting at least one of the preset temperature and the detected temperature is calculated so that the temperature of the glass substrate 2 corresponds to the temperature of the desired temperature profile at each of the plurality of measuring points (step n3). Then, at least one of the preset temperature and the detected temperature is corrected based on the calculated correction value in the actual operation (step n4).
According to the present embodiment, the upper device 7 comprises a microcomputer, and executes a program according to the present invention stored in a ROM of the microcomputer to thereby model the system including the continuous furnace 3 and the glass substrate 2. The upper device 7 then obtains the degree of interference using the model, calculates the correction values based on the degree of interference as described later, and sets and stores the calculated correction values respectively in the temperature adjusting devices 41-43.
According to the present embodiment, the system is modeled in such manner that the degree of influence to which the temperature of the glass substrate 2 is subjected at each of the plurality of measuring points in the continuous furnace 3 due to the interference among the furnaces 31-33 generated when the preset temperatures of the respective furnaces 31-33 are changed can be estimated by means of the model of the system including the continuous furnace 3 and the glass substrate 2.
In order to perform the modeling described above, the test glass substrate 2 provided with the temperature sensor is moved in the continuous furnace 3 at a constant speed to be heat-treated in the same manner as in the actual operation so that the temperature profile is measured. More specifically, the test glass substrate 2 is moved in the continuous furnace 3 at the constant speed to be heat-treated in a state where the temperatures of the respective furnaces 31-33 are controlled to set to a certain temperature so that the temperature profile is measured, for example, as shown in
In
Next, data of the temperature profile and data of the preset temperatures of the respective furnaces 31-33 are used so as to generate a model 8 of the system including the continuous furnace 3 and the glass substrate 2 as shown in
As the model 8 is used an ARX model expressed by the following expression, and parameters α and β are obtained by means of the least squares method.
α (q) y(k)=β (q) u(k)
provided that α, β: model parameters
A sampling period is, for example, 0.5 seconds.
The chronological data u(k) of the preset temperatures of the furnaces constantly stays at the preset temperatures of the respective furnaces 31-33 during the periods when the glass substrate 2 passes through the respective furnaces 31-33. For example, the chronological data u(k) of the preset temperatures of the furnaces during the period when the glass substrate 2 passes through the first furnace 31 stays at the preset temperature r1 of the first furnace 31.
Thus, the parameters α and β are estimated from the chronological data u(k) of the preset temperatures of the furnaces as the input data and the chronological data y(k) of the temperatures of the glass substrate as the output data by means of the least squares method, and the model 8 is thereby generated.
When the model 8 of the system is used, the temperature of the glass substrate 2 at each of the plurality of measuring points in the continuous furnace 3 can be estimated based on the preset temperatures of the respective furnaces 31-33.
According to the present embodiment, the degree of influence that the temperature of the glass substrate 2 at each of the plurality of measuring points in the continuous furnace 3 undergoes when the preset temperatures of the respective furnaces 31-33 are changed, that is the degree of interference, is obtained as follows.
The temperatures of the glass substrate 2 at the plurality of measuring points given that the preset temperatures r1-r3 of the respective furnaces 31-33 are reset to T° C. and the glass substrate 2 is moved in the continuous furnace 3 at a constant speed, for example, the temperatures of the glass substrate 2 at first through third measuring points P1-P3 shown in
Next, as shown in
In the same manner, as shown in
Further, as shown in
When the preset temperatures r1-r3 of the respective furnaces 31-33 are thus changed, the following matrix showing the temperature variation of the glass substrate 2 at the first through third measuring points P1-P3 in the continuous furnace 3, that is the degree of interference, due to the interference generated among the respective furnaces 31-33 can be obtained.
Then, when the variations of the preset temperatures r1-r3 of the respective furnaces 31-33 in the continuous furnace 3 are denoted by Δa1-Δa3, and the variations of the temperatures of the glass substrate 2 at the first through third measuring points P1-P3 are denoted by Δb1-Δb3, the following relational expression is realized.
Next is described the correction of the preset temperatures r1-r3 of the respective furnaces 31-33 in order to heat-treat the glass substrate 2 so that the temperature thereof corresponds to the temperature of the desired temperature profile using the matrix showing the degree of interference thus obtained.
First, the preset temperatures r1-r3 of the respective furnaces 31-33 are set, and the test glass substrate 2 is moved in the continuous furnace 3 to be heat-treated so that a temperature profile L1 is measured as shown in
Then, provided that respective differences between the measured temperatures of the obtained temperature profile L1 at the first through third measuring points P1-P3 and corresponding temperatures of a desired temperature profile L2 are Δb1-Δb3, the correction values Δa1-Δa3 for the preset temperatures r1-r3 of the respective furnaces 31-33 or the detected temperatures (inputted temperatures) of the respective furnaces 31-33 inputted to the temperature adjusting devices 41-43 should be obtained in such manner that the temperature differences Δb1-Δb3 can be reduced.
As the temperature profile L1 may be used the temperature profile shown in
The correction values Δa1-Δa3 can be calculated in the following expression by means of an inverse matrix of the matrix representing the degree of interference.
When the foregoing expression 3 is worked out, the correction value, which was conventionally adjusted in the trial-and-error approach, can be easily calculated.
Alternatively, the calculated correction values are added to the preset temperatures r1-r3 of the respective furnaces 31-33 or the detected temperatures of the respective furnaces 31-33 inputted to the temperature adjusting devices 41-43 for the correction. As a result, the values of the temperature differences in comparison to the temperatures of the desired temperature profile can be inversely calculated by means of the matrix.
The number of the measuring points is three in the foregoing description, however, is not limited to the number and may be arbitrarily determined.
The correction values thus calculated in the upper device 7 are respectively transmitted to the corresponding temperature adjusting devices 41-43 and set therein.
Therefore, the adjustment operation for correcting the preset temperatures or the detected temperatures no longer depends on the experience of the operator and demands the trial-and-error approach and can be automated.
The operator may correct the preset temperatures or the detected temperatures (inputted temperatures) of the temperature adjusting devices 41-43 based on the correction values calculated in the upper device 7.
The temperature adjusting devices 41-43 respectively comprise a preset temperature correcting section 9 for correcting the preset temperature. The preset temperature correcting sections 9 store therein the respective correction values calculated in the upper device 7 as described, and add the correction values to the preset temperatures r1-r3 and output a result of the addition.
Therefore, a PID operation is executed in each PID control section 10 so as to output a manipulated variable MV based on the respective differences between the detected temperatures and the preset temperatures to which the correction values are added. Then, the conduction of the heaters provided in the respective furnaces 31-33 is controlled so that the glass substrate 2 is heat-treated at the temperatures of the temperature profile.
The preset temperature correcting section 9 and the PID control section 10 comprises, for example a microcomputer.
In the foregoing embodiment, as shown in
In the foregoing embodiment, the glass substrate is provided with one temperature sensor in order to measure the temperature at only one point of the glass substrate, however, temperatures at a plurality of points in a surface of the glass substrate may be measured. For example, when the temperatures at three points in the surface of the glass substrate are measured, the number of the temperature profiles and the models are three in response to the number of the measuring points. In that case, when the measurement at each of the three points in the surface of the glass substrate is implemented, for example, at the respective measuring points P1-P3, the temperature is consequently measured at 3 (3=9 measuring points. Thus, the number of the measuring points is increased in comparison to the three points at which the temperature of the continuous furnace comprising three furnaces can be set. As a result, the matrix of 3 (3 representing the degree of interference is increased to the matrix of 9 (3, which makes it difficult to obtain an inverse matrix thereof. In order to deal with the problem, a pseudo inverse matrix can be obtained in place of the inverse matrix.
In the foregoing embodiment, the glass substrate is moved in the continuous furnace at the constant speed to be heat-treated, however, the speed at which the glass substrate is moved in the continuous furnace may be changed for the heat treatment. In such a case, the speed of the movement of the glass substrate is changed or the measurement in the same manner as in the heat treatment when the chronological data relating to the temperature of the glass substrate for the modeling is measured.
The number of the heat-treatment zones is three in the description of the foregoing embodiment, however, it is needless to say that it is not limited to three.
The glass substrate is subjected to the heat treatment in the description of the foregoing embodiment, however, the heat treatment may be applied to a semiconductor substrate or some other object.
The heater is used in the heat treatment in the description of the foregoing embodiment, however, a cooling treatment, in which a Peltier element or a cooling device is used, is applicable. Further, a temperature control operation, in which the heating and cooling treatments are combined, is also applicable.
The heat-treatment zone may be controlled in its airflow and the like in addition to its temperature.
The present invention is effectively applied to a temperature control apparatus and a heat treatment apparatus. Although the invention is described herein with reference to preferred aspects and embodiments, one skilled in the art will readily appreciate that other applications may be substituted for those set forth herein without departing from the spirit and scope of the present invention. For example, the invention is discussed primarily with respect to heating glass substrates. However, alternative substrates and heated objects may also be used with the present invention. Likewise, a horizontal and continuous method of heating an object is provided according to selected preferred embodiments. Alternatively, non-horizontal and non-continuous methods of heating an object may also benefit from use with the controls of the present invention. Accordingly, the invention should only be limited by the claims included below.
| Number | Date | Country | Kind |
|---|---|---|---|
| P2005-343477 | Jan 2005 | JP | national |
| P2005-008926 | Jan 2005 | JP | national |
