Claims
- 1. A method of burn-in testing semiconductor wafers with a plurality of dies wherein each die has a plurality of devices comprising:
a) selecting a subset of die to be tested; b) conducting tests to weed out the highest number of failures; and c) determining a reliability fail rate to meet a predetermined criteria.
- 2. The method of claim 1 which includes using empirical correlations in determining the reliability fail rate.
- 3. The method of claim 2 which includes separating the dies formed to be good into categories with different probabilities of possessing reliability defects.
- 4. The method of claim 1 wherein the tests include parametric measurements.
- 5. The method of claim 4 wherein the parametric measurement are based on Idd testing at one or more power supply settings.
- 6. The method of claim 4 wherein the results of the parametric measurements are used to create a characteristic distribution in determining the fail rate.
- 7. The method of claim 4 wherein the parametric measurements are based on power supply range of operation in different functional modes.
- 8. The method of claim 4 wherein the parametric measurements are based on frequency range of operation in different functional modes.
- 9. The method of claim 4 wherein the parametric measurements are based on temperature range of operation in different functional modes.
- 10. A method for burn-in testing semiconductor wafers having a plurality of devices on a die comprising:
a) determining an overall population reliability fail rate; b) separating die into groups of different reliability; c) selecting a group which meets a predetermined reliability criteria.
- 11. The method of claim 10 which uses a skip plan.
- 12. The method of claim 10 which uses a picking for high reliability.
- 13. The method of claim 10 which uses maverick screen criteria.
Parent Case Info
[0001] This invention claims priority based on Provisional Patent Application No. 60/344,209, filed on Dec. 26, 2001.
Provisional Applications (1)
|
Number |
Date |
Country |
|
60344209 |
Dec 2001 |
US |