Nicolet, et al. "Diffusion Barriers In Layered Contact Structures", J. Vac. Sci. Technol., 19(3), Sep./Oct. 1981; pp. 786-793. |
Ting "Summary Abstract: TIN Formed By Evaporation As Diffusion Barrier Between A1 and Si.sup.a) "; J. Vac. Sci. Technol., 20(3), Mar. 1982; pp. 692-693. |
Korhonen, et al. "Plasma Nitriding and Ion Plating With An Intensified Glow Discharge" Thin Solid Films, 107(1983); pp. 387-394. No month. |
"Gas-Scattering and Ion-Plating Deposition Methods" by Kurt D. Kennedy, et al.; AIRCO Temescal Div., Air Reduction Company, Inc.; Sep. 15, 1971. |
"Physical Vapor Deposition" by Kurt Kennedy; AIRCO Temescal; Apr. 19, 1972. |
"Electron Beam Techniques For Ion Plating" by D.L. Chambers, et al.; AIRCO Temescal; May 1971. |
"New Developments In Ion Plating" ViewPort, Issue No. 1, AIRCO Temescal; 1972. Hugh Smith No month for Pub. |
"Current Developments In Ion Plating" by Hugh R. Smith, Jr., AIRCO Temescal; Mar. 23, 1972. |
"Evaporation", Deposition Technologies For Films and Coatings; pp.84-89, pp. 126-129; Noyes, Publications, 1982. No month. |
"Ion Plating Technology" by Donald M. Mattox; Deposition Technologies For Films And Coatings; pp. 244-287; Noyes Publications, 1982. No month. |
"Microstructural Control of Plasma-Sputtered Refractory Coatings" by David W. Hoffman and Robert C. McCune; Handbook of Plasma Processing Technology; pp. 483-517; Noyes Publications, 1990. No month. |
Matthews et al, "Deposition of Ti-N compounds by Thermonically assisted Triode Reactive Ion Plating", Thin Solid films, 72(Oct. 1980) pp. 541-549. |
Buhl et al, "TiN coating on Steel", Thin Solid Films, 80(Jun. 1981) pp. 265-270. |