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5956598 | Huang et al. | Sep 1999 | A |
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6180490 | Vassiliev et al. | Jan 2001 | B1 |
6225187 | Huang et al. | May 2001 | B1 |
6348396 | Ishitsuka et al. | Feb 2002 | B1 |
Entry |
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“Roles of Sidewall Oxidation in the Devices with Shallow Trench Isolation”, Pyi, S.H. et al; IEEE ELectron Device Letters, vol. 20, Issue 8, Aug. 1999, pp. 384-386. |