Number | Name | Date | Kind |
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5066133 | Brienza | Nov 1991 |
Entry |
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D. M. Tennant et al., "Characterization of near field holography grating masks for optoelectronic fabricated by electron beam lithography," J. Vac. Sci. Technol. B 10(6), Nov. 1992, 2530-2535. |