Claims
- 1. An apparatus for forming a film of ultra-fine particles comprising:(A) an aerosol generating apparatus in which ultra-fine particles of smaller than 0.1 μm in diameter are made from evaporated material, and are dispersed and floating in gas; (B) a holding mechanism for holding a base body having a hole with a bottom or through hole, said hole or said through hole formed therein with a diameter smaller than 2 μm and an aspect ratio of larger than one, or a groove formed therein with a width smaller than 2 μm and a ratio of depth/width larger than one, a film of ultra-fine particles being formed on said base body; (C) a heating mechanism for heating said base body; (D) a pressure-adjusting mechanism for maintaining said aerosol at a predetermined pressure; (E) a film forming container containing at least said holding mechanism; and (F) a vacuum system connected to said film forming container.
- 2. An apparatus for forming a film of ultra-fine particles according to claim 1, in which said heating mechanism is at least one of a first heating source for imparting a temperature distribution or temperature gradient near said hold with a bottom, said through hole or said groove in said base body, and a second heating source for activating said ultra-fine particles to be adsorbed onto the inner wall surface of said hole with a bottom, said through hole or said groove.
- 3. An apparatus for forming a film of ultra-fine particles according to claim 1, in which a introducing mechanism for introducing gas hydrogen, nitrogen, halogen and hydrocarbon to modify the surface of ultra-fine particles or said inner wall surface.
- 4. An apparatus for forming a film of ultra-fine particles according to claim 1 in which a measurement control apparatus is arranged for measuring continuously the thickness of formed film of ultra-fine particles, control the start and stop of aerosol introduction, on the basis of the measurement result and control said pressure-adjusting mechanism.
- 5. An apparatus for forming a film of ultra-fine particles according to claim 1 in which a second introducing mechanism is arranged for introducing a protecting gas or protecting liquid to protect said film of ultra-fine particles.
- 6. An apparatus for forming a film of ultra-fine particles according to claim 1 in which said holding mechanism holds a plurality of said base bodies.
- 7. An apparatus for forming a film of ultra-fine particles according to claim 1 in which a plurality of said film forming containers are arranged in a straight line (in-line type) or in a circle (rotary type) or in a cluster, or they are arranged radially around a distributing center of said base bodies.
- 8. An apparatus for forming a film of ultra-fine particles according to claim 2, in which a introducing mechanism for introducing gas hydrogen, nitrogen, halogen and hydrocarbon to modify the surface of ultra-fine particles or said inner wall surface.
Priority Claims (1)
Number |
Date |
Country |
Kind |
7-352655 |
Dec 1995 |
JP |
|
Parent Case Info
This application is a division of application Ser. No. 08/771,872 filed Dec. 23, 1996 now U.S. Pat. No. 6,106,890.
US Referenced Citations (5)