Method for forming pattern, droplet ejection apparatus, electro-optic device, method for forming alignment film, apparatus for forming alignment film, and liquid crystal display

Abstract

A method for forming a pattern on a substrate by ejecting droplets containing a pattern forming material from an ejection head onto the substrate is disclosed. The ejection head has ejection ports that are aligned along a surface of the substrate. While the substrate is being moved relative to the ejection head, droplets containing the pattern forming material are ejected from the ejection ports along a direction of ejection that is inclined with respect to a normal line of the substrate. The ejection of the droplet is performed in a state where the alignment direction of the ejection ports is inclined with respect to the movement direction of the substrate.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The invention, together with objects and advantages thereof, may best be understood by reference to the following description of the presently preferred embodiments together with the accompanying drawings in which:

FIG. 1 is a perspective view showing a liquid crystal display;

FIG. 2 is a cross-sectional view taken along line 2-2 of FIG. 1;

FIG. 3 is a perspective view showing the droplet ejection apparatus;

FIG. 4 is a perspective view showing a droplet ejection head of the droplet ejection apparatus of FIG. 3;

FIG. 5 is a plan view showing the droplet ejection head of FIG. 4;

FIG. 6 is a side view showing the droplet ejection head of FIG. 4;

FIG. 7 is a partially cross-sectional view showing the droplet ejection head of FIG. 4;

FIG. 8 is a view illustrating operation of the droplet ejection head of FIG. 4;

FIG. 9 is a view illustrating droplet ejection by the droplet ejection apparatus of FIG. 3;

FIG. 10 is a block diagram representing the electric configuration of the droplet ejection apparatus of FIG. 3; and

FIG. 11 is a side view schematically showing a conventional droplet ejection apparatus.

Claims

1. A method for forming a pattern on a substrate by ejecting droplets containing a pattern forming material from an ejection head onto the substrate, the method comprising: moving at least one of the ejection head and the substrate relative to the other, wherein the ejection head has a plurality of ejection ports that are aligned along a surface of the substrate;inclining the direction of alignment of the ejection ports with respect to the direction of the relative movement; andejecting droplets containing the pattern forming material from the ejection ports along a direction of ejection that is inclined with respect to a normal line of the substrate while executing the relative movement.

2. The method for forming a pattern on a substrate according to claim 1, further comprising setting the direction of the relative movement in such a manner that the direction of the relative movement has a direction component along the ejection direction as viewed in a normal direction of the substrate.

3. The method for forming a pattern on a substrate according to claim 1, further comprising pivoting the ejection head about a pivotal axis that is parallel with a normal line of the substrate, thereby inclining the alignment direction of the ejection ports with respect to the direction of the relative movement.

4. The method for forming a pattern on a substrate according to claim 1, further comprising tilting the ejection head about a tilt axis that is parallel with a surface of the substrate, thereby setting the ejection direction.

5. A droplet ejection apparatus that ejects droplets containing a pattern forming material onto a substrate, thereby forming a pattern on the substrate, comprising: an ejection head having a plurality of ejection ports that are aligned along one direction, the droplets being ejected from the ejection ports onto the substrate;a movement mechanism that moves at least one of the ejection head and the substrate relative to the other;a tilt mechanism that tilts the ejection head about a tilt axis that is parallel with the alignment direction of the ejection ports, in such a manner that a direction of ejection of the droplets from the ejection ports is inclined with respect to a normal line of the substrate; anda pivot mechanism that pivots the ejection head about a pivotal axis that is parallel with a normal line of the substrate, in such a manner that the alignment direction of the ejection ports is inclined with respect to the direction of the relative movement.

6. The droplet ejection apparatus according to claim 5, wherein the tilt mechanism tilts the ejection head in such manner that the ejection direction has a direction component along the direction of the relative movement as viewed in a normal direction of the substrate.

7. The droplet ejection apparatus according to claim 5, wherein the movement mechanism includes a substrate stage, and wherein, with the substrate mounted thereon, the substrate stage moves the substrate along the direction of the relative movement.

8. The droplet ejection apparatus according to claim 5, further comprising: a tilt information generating section that generates tilt information, the tilt information being used for tilting the ejection head in such manner that the ejection direction is inclined with respect to a normal line of the substrate;a pivot information generating section that generates pivot information, the pivot information being used for pivoting the ejection head in such manner that an alignment direction of the ejection port as viewed in a normal direction of the substrate is inclined with respect to the direction of the relative movement; anda control section that controls the pivot mechanism and the tilt mechanism based on the pivot information and the tilt information.

9. The droplet ejection apparatus according to claim 8, wherein the pivot information generating section and the tilt information generating section generate the pivot information and the tilt information, respectively, based on an interval between target droplet receiving positions on the substrate.

10. An electro-optic device comprising a substrate on which a pattern has been formed by the droplet ejection apparatus according to claim 5.

11. A method for forming an alignment film on a substrate by ejecting droplets containing an alignment film forming material from an ejection head onto the substrate, the method comprising: moving at least one of the ejection head and the substrate relative to the other, wherein the ejection head has a plurality of ejection ports that are aligned along a surface of the substrate;inclining the direction of alignment of the ejection ports with respect to the direction of the relative movement; andejecting droplets containing the alignment film forming material from the ejection ports along a direction of ejection that is inclined with respect to a normal line of a substrate while executing the relative movement.

12. An alignment film forming apparatus that forms an alignment film on a substrate by ejecting droplets containing an alignment film forming material onto the substrate, comprising: an ejection head having a plurality of ejection ports that are aligned along one direction, the droplets being ejected from the ejection ports onto the substrate;a movement mechanism that moves at least one of the ejection head and the substrate relative to the other;a tilt mechanism that tilts the ejection head about a tilt axis that is parallel with the alignment direction of the ejection ports, in such a manner that a direction of ejection of the droplets from the ejection ports is inclined with respect to a normal line of the substrate; anda pivot mechanism that pivots the ejection head about a pivotal axis that is parallel with a normal line of the substrate, in such a manner that the alignment direction of the ejection ports is inclined with respect to the direction of the relative movement.

13. A liquid crystal display comprising a substrate on which an alignment film has been formed by the alignment film forming apparatus according to claim 12.