Method for forming pattern, method for forming alignment film, droplet ejection apparatus, apparatus for forming alignment film, electro-optic device, and liquid crystal display

Abstract

A method for forming a pattern on a substrate by ejecting droplets containing pattern forming material onto the substrate is disclosed. First droplets containing the pattern forming material are ejected in a first ejecting direction inclined with respect to a normal line of the substrate from a plurality of first ejection ports, which are aligned along a certain direction with respect to a surface of the substrate. Second droplets containing the pattern forming material are ejected in a second ejecting direction and onto areas between adjacent pairs of the first droplets on the substrate from a plurality of second ejection ports, which are aligned along the certain direction.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The invention, together with objects and advantages thereof, may best be understood by reference to the following description of the presently preferred embodiments together with the accompanying drawings in which:

FIG. 1 is a perspective view showing a liquid crystal display;

FIG. 2 is a cross-sectional view taken along line 2-2 of FIG. 1;

FIG. 3 is a perspective view showing a droplet ejection apparatus of FIG. 2;

FIG. 4 is a perspective view showing a droplet ejection head of the droplet ejection apparatus of FIG. 2;

FIG. 5 is a plan view showing the droplet ejection head of FIG. 4;

FIG. 6 is a side view showing the droplet ejection head of FIG. 4;

FIG. 7 is a view for explaining droplet ejection by the droplet ejection apparatus of FIG. 2;

FIG. 8 is a block diagram representing the electric configuration of the droplet ejection apparatus of FIG. 2; and

FIG. 9 is a side view schematically showing a conventional droplet ejection apparatus.

Claims

1. A method for forming a pattern on a substrate by ejecting droplets containing a pattern forming material onto the substrate, the method comprising: ejecting, in a first ejecting direction inclined with respect to a normal line of the substrate, first droplets containing the pattern forming material from a plurality of first ejection ports that are aligned along a certain direction on a surface of the substrate; andejecting, in a second ejecting direction and onto areas between adjacent pairs of the first droplets on the substrate, second droplets containing the pattern forming material from a plurality of second ejection ports that are aligned along the certain direction.

2. The method according to claim 1, wherein the second ejecting direction intersects the first ejecting direction.

3. The method according to claim 1, further comprising setting the second ejecting direction in correspondence with the first ejecting direction in such a manner that the second droplets are each received by the corresponding one of the areas between the adjacent pairs of the first droplets.

4. The method according to claim 1, further comprising moving a second ejection port forming surface in which the second ejection ports are formed along the certain direction with respect to a first ejection port forming surface in which the first ejection ports are formed in such a manner that the second droplets are each received by the corresponding one of the areas between the adjacent pairs of the first droplets.

5. The method according to claim 1, further comprising moving the substrate in a direction opposite to the first ejecting direction, as viewed in a normal direction of the substrate, with respect to the first ejection ports.

6. The method according to claim 1, further comprising setting the first ejecting direction by tilting a first ejection port forming surface in which the first ejection ports are formed about a first tilt axis extending along the certain direction.

7. The method according to claim 1, wherein the second ejecting direction is inclined with respect to the normal line of the substrate, and wherein the method further comprises moving the substrate in a direction opposite to the second ejecting direction, as viewed in a normal direction of the substrate, with respect to the second ejection ports.

8. The method according to claim 1, further comprising setting the second ejecting direction by tilting a second ejection port forming surface in which the second ejection ports are formed about a second tilt axis extending along the certain direction.

9. A method for forming an alignment film on a substrate by ejecting droplets containing an alignment film forming material onto the substrate, the method comprising: ejecting, in a first ejecting direction inclined with respect to a normal line of the substrate, first droplets containing the alignment film forming material from a plurality of first ejection ports that are aligned along a certain direction on a surface of the substrate; andejecting, in a second ejecting direction and onto areas between adjacent pairs of the first droplets on the substrate, second droplets containing the alignment film forming material from a plurality of second ejection ports that are aligned along the certain direction.

10. A droplet ejection apparatus that forms a pattern on a substrate by ejecting droplets containing a pattern forming material onto the substrate, the apparatus comprising: a first ejection port forming surface opposed to the substrate, wherein the first ejection port forming surface includes a plurality of first ejection ports that are aligned in a certain direction on a surface of the substrate, each of the first ejection ports ejecting a first droplet containing the pattern forming material in a first ejecting direction inclined with respect to a normal line of the substrate; anda second ejection port forming surface opposed to the substrate, wherein the second ejection port forming surface includes a plurality of second ejection ports that are aligned in the certain direction, each of the second ejection ports ejecting a second droplet containing the pattern forming material in a second ejecting direction and onto a corresponding one of areas between adjacent pairs of the first droplets on the substrate.

11. The apparatus according to claim 10, wherein the second ejecting direction intersects the first ejecting direction.

12. The apparatus according to claim 10, further comprising: a first tilt mechanism that tilts the first ejection port forming surface about a first tilt axis extending along the certain direction;a first tilt information generating section that generates first tilt information for tilting the first ejection port forming surface in such a manner that the first ejecting direction becomes inclined with respect to a normal line of the substrate; anda control section that controls operation of the first tilt mechanism in accordance with the first tilt information.

13. The apparatus according to claim 10, further comprising: a second tilt mechanism that tilts the second ejection port forming surface about a second tilt axis extending along the certain direction;a second tilt information generating section that generates second tilt information for tilting the second ejection port forming surface in such a manner that the second ejecting direction intersects the first ejecting direction; anda control section that controls operation of the second tilt mechanism in accordance with the second tilt information.

14. The apparatus according to claim 13, wherein the second tilt information generating section generates the second tilt information in correspondence with the first ejecting direction in such a manner that the second droplets are each received by the corresponding one of the areas between the adjacent pairs of the first droplets.

15. An electro-optic device comprising a substrate having a pattern formed by the droplet ejection apparatus according to claim 10.

16. An alignment film forming apparatus that forms an alignment film on a substrate by ejecting droplets containing an alignment film forming material onto the substrate, the apparatus comprising: a first ejection port forming surface opposed to the substrate, wherein the first ejection port forming surface includes a plurality of first ejection ports that are aligned in a certain direction on a surface of the substrate, each of the first ejection ports ejecting a first droplet containing the alignment film forming material in a first ejecting direction inclined with respect to a normal line of the substrate; anda second ejection port forming surface opposed to the substrate, wherein the second ejection port forming surface includes a plurality of second ejection ports that are aligned in a certain direction on a surface of the substrate, each of the second ejection ports ejecting a second droplet containing the alignment film forming material in a second ejecting direction and onto a corresponding one of areas between adjacent pairs of the first droplets on the substrate.

17. A liquid crystal display having a substrate including an alignment film formed by the alignment film forming apparatus according to claim 16.