Number | Date | Country | Kind |
---|---|---|---|
196 30 818 | Jul 1996 | DEX | |
197 02 566 | Jan 1997 | DEX |
Number | Name | Date | Kind |
---|---|---|---|
4598015 | Panush | Jul 1986 | |
5290625 | Eisfeller et al. | Mar 1994 | |
5656335 | Schwing et al. | Aug 1997 |
Number | Date | Country |
---|---|---|
186607 | Jul 1986 | EPX |
0 525 867 | Feb 1993 | EPX |
0 684 083 | Nov 1995 | EPX |
2 154 286 | May 1973 | FRX |
2 634 147 | Jan 1990 | FRX |
1 902 607 | Jul 1969 | DEX |
81 03 758 | Feb 1981 | DEX |
29 52 028 | Jun 1981 | DEX |
332476 | Jan 1985 | DEX |
3814853 | Nov 1988 | DEX |
42 09 406 | Sep 1993 | DEX |
42 09 406 A1 | Sep 1993 | DEX |
43 25 574 A1 | Feb 1995 | DEX |
43 25 574 | Feb 1995 | DEX |
4123901 | Apr 1992 | JPX |
4131232 | May 1992 | JPX |
6227201 | Aug 1994 | JPX |
06-227 201 | Aug 1994 | JPX |
9319219 | Sep 1993 | WOX |
Entry |
---|
S. Schiller et al., "Pulsed Magnetron Sputter Technology," published in Surface and Coatings Technology, 61 (1993) S. 331-337, International Conference on Metallurgical Coatings and Thin Films, San Diego, California, Apr. 19-23, 1993. |